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Fabrication of HfO2-based multiferroelctric ultrathin films by controlling crystalline phase

Research Project

Project/Area Number 16K18231
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Inorganic materials/Physical properties
Research InstitutionTohoku University

Principal Investigator

Takahisa Shiraishi  東北大学, 金属材料研究所, 助教 (50758399)

Project Period (FY) 2016-04-01 – 2019-03-31
Project Status Completed (Fiscal Year 2018)
Budget Amount *help
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2018: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2017: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2016: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
KeywordsHfO2基材料 / 超薄膜 / 準安定相 / 強誘電性 / エピタキシャル成長 / 蛍石型酸化物 / 斜方晶相 / ドーパント添加 / ドメイン構造 / 相転移温度 / フェロイック特性
Outline of Final Research Achievements

The purpose of this research is the fabrication of multiferroic HfO2-based ultrathin films. By adding the magnetic elements to HfO2 ultrathin films, its ucceeded in forming a metastable orthorhombic phase, and ferroelectricty arising from that phase was elarly observed. In additon, the films had a high Curie temperature above 400 ℃.In the case of Ce which is a non-magnetic element, it has been found that the formation of an orthorhombic phase is dramatically promoted, and the multidomain structures composed of orthorhombic phase was observed. Therefore, it was demonstrated that Ce doped HfO2 ultrathin films are a strong candidate for fluorite-type ferroelectrics.
From the detailed investigation of the relationship between the dopant and the crystalline phase, we obtained an one of the material design guidelines for the fabrication of ferroelectric HfO2-based ultrathin films.

Academic Significance and Societal Importance of the Research Achievements

IoT社会の実現において不可欠となる、高性能な省エネルギー小型デバイスの開発に向けて、機能性材料のナノスケール化が盛んに行われている。強誘電体材料もその一つであり、種々の元素を添加したHfO2基超薄膜は、ナノスケールで実用可能な強誘電体として注目されている。しかし、材料設計指針は確立されておらず、強誘電性の制御には至っていない。本研究は、構造解析により、添加元素と結晶相の関係を解明することで、結晶相の制御だけでなく、ドメインといった組織制御の必要性を提案した。また、有力な添加元素を見出したことで、強誘電性の向上が期待される。
得られた知見は、次世代の強誘電体デバイス開発の一助になると考えている。

Report

(4 results)
  • 2018 Annual Research Report   Final Research Report ( PDF )
  • 2017 Research-status Report
  • 2016 Research-status Report
  • Research Products

    (11 results)

All 2019 2018 2017 2016

All Journal Article (2 results) (of which Peer Reviewed: 2 results,  Acknowledgement Compliant: 1 results) Presentation (9 results) (of which Int'l Joint Research: 2 results)

  • [Journal Article] Fabrication of ferroelectric Fe doped HfO2 epitaxial thin films by ion-beam sputtering method and their characterization2018

    • Author(s)
      Takahisa Shiraishi, Sujin Choi, Takanori Kiguchi, Takao Shimizu, Hiroshi Uchida4, Hiroshi Funakubo, and Toyohiko J. Konno
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 57 Issue: 11S Pages: 11UF02-11UF02

    • DOI

      10.7567/jjap.57.11uf02

    • NAID

      210000149811

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of the film thickness on the crystal structure and ferroelectric properties of (Hf0.5Zr0.5)O2 thin films deposited on various substrates2017

    • Author(s)
      T. Shiraishi, K. Katayama, T. Yokouchi, T. Shimizu, T. Oikawa, O. Sakata, H. Uchida, Y. Imai, T. Kiguchi, T. J. Konno, and H. Funakubo
    • Journal Title

      Mater. Sci. Semicond. Process

      Volume: 印刷中

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] 強誘電体(Hf,Ce)O2薄膜の作製とその結晶構造評価2019

    • Author(s)
      白石貴久,Sujin Choi,清水荘雄,木口賢紀,舟窪浩,今野豊彦
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Fabrication of CeO2-ZrO2 solid solution ultrathin films with polar phase2018

    • Author(s)
      T. Shiraishi, S. Choi, T. Shimizu, T. Kiguchi, H. Funakubo, and T. J. Konno
    • Organizer
      IFAAP2018
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of ferroelectric CeO2-HfO2 solid solution thin films and their characterization2018

    • Author(s)
      T. Shiraishi, S. Choi, T. Shimizu, T. Kiguchi, H. Funakubo, and T. J. Konno
    • Organizer
      Materials Reserch Society Fall Meeting
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] エピタキシャルCeO2-ZrO2薄膜の作製とその結晶構造評価2018

    • Author(s)
      白石貴久,Sujin Choi,清水荘雄,木口賢紀,舟窪浩,今野豊彦
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Research-status Report
  • [Presentation] エピタキシャルFe:HfO2薄膜の作製と特性評価2017

    • Author(s)
      白石貴久,Sujin Choi,清水荘雄,舟窪浩,木口賢紀,今野豊彦
    • Organizer
      第64回 応用物理学会春季学術講演会
    • Related Report
      2017 Research-status Report 2016 Research-status Report
  • [Presentation] 強誘電体HfO2基超薄膜のドメイン構造評価2017

    • Author(s)
      白石貴久、Sujin Choi、木口賢紀、今野豊彦
    • Organizer
      第73回日本顕微鏡学会学術講演会
    • Related Report
      2017 Research-status Report 2016 Research-status Report
  • [Presentation] 固相エピタキシー法による強誘電体HfO2基薄膜の作製2017

    • Author(s)
      白石貴久,Sujin Choi,清水荘雄,舟窪浩,木口賢紀,今野豊彦
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Research-status Report
  • [Presentation] エピタキシャル成長法によるFe添加HfO2超薄膜の作製と結晶構造評価2016

    • Author(s)
      白石貴久, Sujin Choi, 清水荘雄, 舟窪浩, 木口賢紀, 今野豊彦
    • Organizer
      第29回秋季シンポジウム
    • Place of Presentation
      広島大学東広島キャンパス
    • Year and Date
      2016-09-07
    • Related Report
      2016 Research-status Report
  • [Presentation] Fe添加したHfO2超薄膜の結晶構造調査2016

    • Author(s)
      白石貴久, Sujin Choi, 木口賢紀, 今野豊彦
    • Organizer
      日本顕微鏡学会第72回学術講演会
    • Place of Presentation
      仙台国際センター
    • Year and Date
      2016-06-14
    • Related Report
      2016 Research-status Report

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Published: 2016-04-21   Modified: 2020-03-30  

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