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Formation of Ohmic contact for diamond semiconductor with nanocrystalline diamond interlayers

Research Project

Project/Area Number 16K18238
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Inorganic materials/Physical properties
Research InstitutionKyushu Institute of Technology

Principal Investigator

Katamune Yuki  九州工業大学, 若手研究者フロンティア研究アカデミー, 特任助教 (50772662)

Project Period (FY) 2016-04-01 – 2019-03-31
Project Status Completed (Fiscal Year 2018)
Budget Amount *help
¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2018: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2017: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2016: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Keywordsダイヤモンド / リンドーピング / オーミック接触 / 熱フィラメントCVD / ナノ微結晶ダイヤモンド / 結晶成長 / 接触抵抗 / ナノダイヤモンド / リンドープ / ヘテロ界面
Outline of Final Research Achievements

Diamond is attracted as a next-generation semiconductor material because of its excellent physical properties. In this research, we fabricated electrode structures with conductive nanocrystalline diamond films interlayer to reduce the contact resistance between the metal electrodes and n-type diamond. As for n-type diamond, phosphorus-doped diamond films were grown by hot-filament chemical vapor deposition. Selecting dopant gas sources and controlling growth parameters enabled n-type conduction with phosphorus doping. Electrode structures comprising the nanocrystalline diamond films and metal were able to be formed by adjusting film composition.

Academic Significance and Societal Importance of the Research Achievements

導電性ナノ微結晶ダイヤモンドによるダイヤモンドの接触抵抗の低減が実現できれば,デバイス性能の向上および電極形成プロセスの簡略化が期待できる.本成果はその基盤技術となるものであり,ダイヤモンド半導体の産業化の点で社会的に意義深いといえる.また,大面積プロセスが可能な熱フィラメントCVD法によりn型ダイヤモンド成長の可能性を示したことは,気相反応,結晶成長や物性制御に関連しており,学術的にも意義深い.

Report

(4 results)
  • 2018 Annual Research Report   Final Research Report ( PDF )
  • 2017 Research-status Report
  • 2016 Research-status Report
  • Research Products

    (20 results)

All 2019 2018 2017 2016

All Journal Article (4 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 4 results,  Acknowledgement Compliant: 2 results) Presentation (15 results) (of which Int'l Joint Research: 5 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Formation of phosphorus-incorporated diamond films by hot-filament chemical vapor deposition using organic phosphorus solutions2019

    • Author(s)
      Katamune Yuki、Arikawa Daisuke、Mori Daichi、Izumi Akira
    • Journal Title

      Thin Solid Films

      Volume: 677 Pages: 28-32

    • DOI

      10.1016/j.tsf.2019.03.006

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Low-temperature silicon oxidation using oxidizing radicals produced by catalytic decomposition of H2O/H2 on heated tungsten wire2018

    • Author(s)
      Katamune Yuki、Negi Takanobu、Tahara Shinichi、Fukushima Kazuya、Izumi Akira
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 57 Issue: 12 Pages: 120301-120301

    • DOI

      10.7567/jjap.57.120301

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Growth of diamond thin films on SiCN underlayers by hot filament chemical vapor deposition2017

    • Author(s)
      Yuki Katamune, Hiroto Mori, Akira Izumi
    • Journal Title

      Thin Solid Films

      Volume: 印刷中 Pages: 1-5

    • DOI

      10.1016/j.tsf.2016.12.010

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Study on Defects in Ultrananocrystalline Diamond/Amorphous Carbon Composite Films Prepared by Physical Vapor Deposition2017

    • Author(s)
      Y. Katamune, S. Al-Riyami, S. Takeichi, and T. Yoshitake
    • Journal Title

      ECS Transactions

      Volume: 75 Issue: 25 Pages: 45-52

    • DOI

      10.1149/07525.0045ecst

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Presentation] Organic phosphorus solutions as precursors for diamond growth by hot filament CVD2018

    • Author(s)
      Yuki Katamune, Daisuke Arikawa, Daichi Mori, and Akira Izumi
    • Organizer
      JSAP Kyushu Chapter Annual Meeting 2018 /The 3rd Asian Applied Physics Conference (Asian-APC)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 熱フィラメントCVD 法による単結晶ダイヤモンドの成長に及ぼすトリメチルホスフィン添加の影響2018

    • Author(s)
      有川 大輔,森 大地,片宗 優貴,和泉 亮
    • Organizer
      2018 年(平成30 年度)応用物理学会九州支部学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Micro-sized diamond growth using organic phosphorus solution by hot filament chemicalvapor deposition2018

    • Author(s)
      D. Arikawa, D. Mori, Y. Katamune, and A. Izumi
    • Organizer
      10th Hot Wire (Cat) Chemical Vapor Deposition Conference (HWCVD10)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Structural evaluation of polycrystalline diamond films grown by hot filament CVD using organic phosphorus solutions2018

    • Author(s)
      D. Mori, D. Arikawa, Y. Katamune, and A. Izumi
    • Organizer
      10th Hot Wire (Cat) Chemical Vapor Deposition Conference (HWCVD10)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Surface morphology of homoepitaxial diamond grown by hot-filament CVD using organic phosphorus solutions2018

    • Author(s)
      Y. Katamune, D. Arikawa, D. Mori, and A. Izumi
    • Organizer
      10th Hot Wire (Cat) Chemical Vapor Deposition Conference (HWCVD10)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 森 大地,有川 大輔 ,片宗 優貴,和泉 亮2018

    • Author(s)
      熱フィラメントCVD法により有機リン溶液を用いて作製した多結晶ダイヤモド膜の構造評価
    • Organizer
      平成30年度日本表面真空学会 九州支部学術講演
    • Related Report
      2018 Annual Research Report
  • [Presentation] 熱フィラメントCVD法による有機リン溶液を用いた ダイヤモンドの成長速度異方性の調査2017

    • Author(s)
      森大地,有川大輔,片宗優貴,和泉亮
    • Organizer
      平成29年度応用物理学会九州支部学術講演会
    • Related Report
      2017 Research-status Report
  • [Presentation] H2O/H2を導入したHWCVD法によるSiOCN膜の形成2017

    • Author(s)
      筒井 逸仁、松本 真、大戸 崇伸、片宗 優貴、和泉 亮
    • Organizer
      平成29年度応用物理学会九州支部学術講演会
    • Related Report
      2017 Research-status Report
  • [Presentation] Formation of diamond films using organic phosphorus solutions by hot filament chemical vapor deposition2017

    • Author(s)
      Y. Katamune, D. Arikawa, A. Izumi
    • Organizer
      OIST Diamond Workshop 2017
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research
  • [Presentation] HWCVD法により堆積したSiCN膜のCu拡散バリア膜としての性能評価2017

    • Author(s)
      筒井 逸仁、林田 祥吾、片宗 優貴、和泉 亮
    • Organizer
      Cat-CVD研究会
    • Related Report
      2017 Research-status Report
  • [Presentation] 高温プロセスにおける有機シリコン化合物原料を用いたSiCN膜の合成と組成制御2017

    • Author(s)
      片宗優貴,森寛人,和泉亮
    • Organizer
      Cat-CVD研究会
    • Related Report
      2017 Research-status Report
  • [Presentation] Diamond growth on SiCN by hot filament chemical vapor deposition2016

    • Author(s)
      Yuki Katamune, Hiroto Mori, Akira Izumi
    • Organizer
      JSAP Kyushu Chapter Annual Meeting 2016
    • Place of Presentation
      対馬市交流センター(長崎市対馬市)
    • Year and Date
      2016-12-03
    • Related Report
      2016 Research-status Report
  • [Presentation] Defect structures of ultrananocrystalline diamond/hydrogenated amorphous carbon composite films prepared by physical vapor deposition2016

    • Author(s)
      Yuki Katamune, Satoshi Takeichi, Al-Ryami Sausan, Tsuyoshi Yoshitake
    • Organizer
      Pacific rim meeting on electrochemical and solid-state science
    • Place of Presentation
      Hawaii Convention Center & Hilton Hawaiian Village, Honolulu, HI, USA
    • Year and Date
      2016-10-02
    • Related Report
      2016 Research-status Report
  • [Presentation] Diamond growth with SiCN interlayer by hot Filament chemical vapor deposition2016

    • Author(s)
      Yuki Katamune, Hiroto Mori, Akira Izumi
    • Organizer
      9th international conference on hot wire (CAT) and initiated chemical vapor seposition
    • Place of Presentation
      Chemical Heritage Foundation, Philadelphia, PA, USA
    • Year and Date
      2016-09-06
    • Related Report
      2016 Research-status Report
  • [Presentation] HF-CVD法によるダイヤモンド膜の形成におけるSiCN中間層の検討2016

    • Author(s)
      片宗優貴,森寛人,和泉亮
    • Organizer
      Cat-CVD研究会
    • Place of Presentation
      北見工業大学(北海道北見市)
    • Year and Date
      2016-07-08
    • Related Report
      2016 Research-status Report
  • [Patent(Industrial Property Rights)] 半導体膜形成方法2017

    • Inventor(s)
      片宗優貴,和泉亮
    • Industrial Property Rights Holder
      片宗優貴,和泉亮
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2017-039028
    • Filing Date
      2017-03-02
    • Related Report
      2016 Research-status Report

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Published: 2016-04-21   Modified: 2020-03-30  

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