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Directed self-assembly for fabrication of organic devices with sub-20 nm resolution

Research Project

Project/Area Number 16K20912
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Electron device/Electronic equipment
Electronic materials/Electric materials
Research InstitutionTohoku University

Principal Investigator

Hiroshiba Nobuya  東北大学, 多元物質科学研究所, 助教 (40635190)

Project Period (FY) 2016-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2017: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2016: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Keywords有機半導体 / ナノリソグラフィ / グラフォエピタキシ / ナノインプリント / ナノワイヤ / ナノ構造化 / 誘導自己組織化 / 有機デバイス
Outline of Final Research Achievements

The purpose of this study is to explore the possibility of device application greatly exceeding conventional performance by controlling nano-structuring and orientation of functional organic materials by using nano-lithography. We optimized etching and residual film removal process for fabrication of nanopattern of SiO 2 which is important for nanostructuring. We tried to fabricate nanostructures by graphoepitaxy for fabricationg organic nanostructures.
As a result, we succeeded in fabricating anomalous one-dimensional nanowires (NWs) in thienoacene derivatives (C8 - BTBT). A typical NW had a high aspect ratio of 15 nm in thickness, 100 nm in width, 100 μm in length. We also succeeded in forming an array structure of NWs along the nanostructure of the substrate. It has width controllability from 500 nm to 100 nm, suggesting high device application possibility.

Report

(3 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Research-status Report
  • Research Products

    (18 results)

All 2018 2017 2016 Other

All Journal Article (5 results) (of which Peer Reviewed: 5 results,  Open Access: 1 results,  Acknowledgement Compliant: 2 results) Presentation (9 results) (of which Int'l Joint Research: 5 results,  Invited: 1 results) Remarks (4 results)

  • [Journal Article] Elemental depth profiles and plasma etching rates of positive-tone electron beam resists after sequential infiltration synthesis of alumina2018

    • Author(s)
      Y. Ozaki, S. Ito, N. Hiroshiba, T. Nakamura, M. Nakagawa
    • Journal Title

      Jpn. J. Appl. Phys

      Volume: 印刷中

    • NAID

      210000149169

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Crystallographic Polarity Effect of ZnO on Thin Film Growth of Pentacene2017

    • Author(s)
      Tatsuru Nakamura, Takahiro Nagata, Ryoma Hayakawa, Takeshi Yoshimura, Seungjun Oh, Nobuya Hiroshiba, Toyohiro Chikyow, Norifumi Fujimura, Yutaka Wakayama
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 56 Issue: 4S Pages: 04CJ03-04CJ03

    • DOI

      10.7567/jjap.56.04cj03

    • NAID

      210000147626

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Monitoring Thermally Induced Cylindrical Microphase Separation of Polystyrene-<i>block</i>-poly(methyl methacrylate) by Atomic Force Microscopy2016

    • Author(s)
      N. Hiroshiba, R. Okubo, A. N. Hattori, H. Tanaka, M. Nakagawa,
    • Journal Title

      Journal of Photopolymer Science and Technology

      Volume: 29 Issue: 5 Pages: 659-665

    • DOI

      10.2494/photopolymer.29.659

    • NAID

      130005261832

    • ISSN
      0914-9244, 1349-6336
    • Related Report
      2016 Research-status Report
    • Peer Reviewed
  • [Journal Article] Condition Determination of Ultraviolet Light Exposure for High-Throughput Nanoimprinting2016

    • Author(s)
      Y. Ishito, H. Yano, N. Hiroshiba, S. Kubo, M. Nakagawa
    • Journal Title

      Chem. Lett.

      Volume: 45 Issue: 12 Pages: 1373-1375

    • DOI

      10.1246/cl.160663

    • NAID

      130005475739

    • Related Report
      2016 Research-status Report
    • Peer Reviewed
  • [Journal Article] Anisotropic Oxygen Reactive Ion Etching for Removing Residual Layers from 45 nm-width Imprint Patterns2016

    • Author(s)
      Takuya Uehara, Shoichi Kubo, Nobuya Hiroshiba, and Masaru Nakagawa
    • Journal Title

      Journal of Photopolymer Science and Technology

      Volume: 29 Issue: 2 Pages: 201-208

    • DOI

      10.2494/photopolymer.29.201

    • NAID

      130005256561

    • ISSN
      0914-9244, 1349-6336
    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] 反応性無機前駆体の曝露方法の違いによる光硬化樹脂薄膜の有機-無機ハイブリッド化の比較2018

    • Author(s)
      上原 卓也, 尾﨑 優貴, 廣芝 伸哉, 中村 貴宏, 中川 勝
    • Organizer
      2018年第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 領域選択的原子層堆積に基づく光ナノインプリントリソグラフィ2018

    • Author(s)
      上原 卓也, 尾﨑 優貴, 廣芝 伸哉, 中村 貴宏, 中川 勝
    • Organizer
      2018年第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 分子自己組織化を使った超微細パターン形成2017

    • Author(s)
      廣芝伸哉
    • Organizer
      日本学術振興会「先端ナノデバイス・材料テクノロジー第 151 委員会」 平成 29 年度 第 1 回研究会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] Infiltration behaviors of AlOx into positive-tone electron beam resists by sequential infiltration synthesis2017

    • Author(s)
      Y. Ozaki, S. Ito, N. Hiroshiba, T. Nakamura, M. Nakagawa
    • Organizer
      第30回マイクロプロセス・ナノテクノロジー国際会議(MNC 2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 逐次浸透合成によるポジ型電子線レジストの有機‐無機ハイブリッド化2017

    • Author(s)
      尾崎優貴, 伊東駿也, 廣芝伸哉, 中村貴宏, 中川勝
    • Organizer
      2017年度 高分子学会講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] PMMA-selective organic-inorganic hybridization using cylindrically micro-phase separated PS-block-PMMA2016

    • Author(s)
      Nobuya Hiroshiba, Masaru Nakagawa
    • Organizer
      29th International Microprocesses and Nanotechnology Conference(MNC 2016),
    • Place of Presentation
      ANAクラウンプラザホテル(京都府京都市)
    • Year and Date
      2016-11-08
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Growth of aluminum oxide on, in imprinted resin patterns by an atomic layer deposition technique2016

    • Author(s)
      Nobuya Hiroshiba, Shiho Kuroyanagi, Masaru Nakagawa
    • Organizer
      29th International Microprocesses and Nanotechnology Conference(MNC 2016),
    • Place of Presentation
      ANAクラウンプラザホテル(京都府京都市)
    • Year and Date
      2016-11-08
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Monitoring thermally induced cylindrical microphase separation of polystyrene-block-poly(methyl methacrylate) by atomic force microscopy2016

    • Author(s)
      Nobuya Hiroshiba, Ryo Okubo, Azusa N. Hattori, Hidekazu Tanaka, Masaru Nakagawa
    • Organizer
      The 33rd International Conference of Photopolymer Science and Technology
    • Place of Presentation
      幕張メッセ(千葉県千葉市)
    • Year and Date
      2016-06-22
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Anisotropic oxygen reactive ion etching for removing a residual layer of 45-nm-linewidth imprint patterns2016

    • Author(s)
      Takuya Uehara, Shoichi Kubo, Nobuya Hiroshiba, Masaru Nakagawa
    • Organizer
      The 33rd International Conference of Photopolymer Science and Technology
    • Place of Presentation
      幕張メッセ(千葉県千葉市)
    • Year and Date
      2016-06-22
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Remarks]

    • URL

      http://www.tagen.tohoku.ac.jp/labo/nakagawa/members/hiroshiba/results.html

    • Related Report
      2017 Annual Research Report
  • [Remarks]

    • URL

      http://www.eb.waseda.ac.jp/yanagitani/hiroshiba.html

    • Related Report
      2017 Annual Research Report
  • [Remarks] 研究室 個人HP

    • URL

      http://www.tagen.tohoku.ac.jp/labo/nakagawa/members/hiroshiba/results.html

    • Related Report
      2016 Research-status Report
  • [Remarks] Researchmap 個人ページ

    • URL

      http://researchmap.jp/nhiroshiba

    • Related Report
      2016 Research-status Report

URL: 

Published: 2016-04-21   Modified: 2019-03-29  

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