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Formation mechanism of homologous In2O3(ZnO)m superlattice thin films and their thermal/electrical properties

Research Project

Project/Area Number 16K21338
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Thin film/Surface and interfacial physical properties
General applied physics
Research InstitutionAoyama Gakuin University

Principal Investigator

Jia Junjun  青山学院大学, 理工学部, 助教 (80646737)

Research Collaborator Shigesato Yuzo  青山学院大学, 教授
Yagi Takashi  産業技術総合研究所, 物質計測標準研究部門
Yamashita Yuichiro  産業技術総合研究所, 物質計測標準研究部門
Klein Andreas  Technische Universität Darmstadt, Prof.
Project Period (FY) 2016-04-01 – 2019-03-31
Project Status Completed (Fiscal Year 2018)
Budget Amount *help
¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2018: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2017: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2016: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Keywords熱・電気特性 / 超格子構造 / アモルファス / In2O3 / ZnO / In-situ XRD / XAFS / 局所構造 / 高温酸化物熱電材料 / 層状構造 / 結晶化 / 熱電特性 / 熱伝導機構 / 固相成長 / フォノンバンド / 状態密度 / In2O3(ZnO)n Thin Film / Brouwer Diagram / Crystallization / Thermoelectric property / Superlattice
Outline of Final Research Achievements

We developed a new method to fabricate the In2O3(ZnO)m thin film with superlattice structure on the glass substrate as thin-film thermoelectric materials. Our results suggested that the majority carriers originate from oxygen vacancies in the InO2 layer and Freckle-type Zn interstitials at the temperature range of 400 to 600 ℃. The superlattice structure also leads a rather low thermal conductivity (2 W/mK), which is due to the phonon scattering from the inner interface of superlattice structure and those modulated In atoms in In2O3(ZnO)m structure.

Academic Significance and Societal Importance of the Research Achievements

本研究では汎用性があるガラス基板上に超格子構造薄膜の形成方法を確立でき、高分解能TEM観察とin-situ XRD測定の統合により、後焼成によるアモルファスIZO薄膜からホモロガス構造In2O3(ZnO)n薄膜への固相反応に関する新しい評価手法を提案した。加えて、In2O3(ZnO)m超格子薄膜の熱伝導機構を理解し、高温で薄膜中の欠陥生成・消滅機構を解明した。高温超格子熱電素子の実用化に向けて、これまで利用が困難であった高温領域の未利用熱エネルギーを効率的に回収することに役立つと考えられる。

Report

(4 results)
  • 2018 Annual Research Report   Final Research Report ( PDF )
  • 2017 Research-status Report
  • 2016 Research-status Report
  • Research Products

    (17 results)

All 2019 2018 2017 2016 Other

All Int'l Joint Research (2 results) Journal Article (3 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 2 results,  Acknowledgement Compliant: 1 results) Presentation (12 results) (of which Int'l Joint Research: 5 results,  Invited: 1 results)

  • [Int'l Joint Research] Technische Universität Darmstadt(Germany)

    • Related Report
      2017 Research-status Report
  • [Int'l Joint Research] Technische Universität Darmstadt(Germany)

    • Related Report
      2016 Research-status Report
  • [Journal Article] 放射光を用いたアモルファスIn2O3系薄膜の結晶化に関する評価2019

    • Author(s)
      賈軍軍, 岡島敏浩, 重里有三
    • Journal Title

      九州シンクロトロン光研究センター2017年報

      Volume: 2017年報 Pages: 10-12

    • Related Report
      2018 Annual Research Report
  • [Journal Article] Evolution of Defect Structures and Deep Subgap States during Annealing of Amorphous In-Ga-Zn Oxide for Thin-Film Transistors2018

    • Author(s)
      Jia Junjun、Suko Ayaka、Shigesato Yuzo、Okajima Toshihiro、Inoue Keiko、Hosomi Hiroyuki
    • Journal Title

      Physical Review Applied

      Volume: 9 Issue: 1

    • DOI

      10.1103/physrevapplied.9.014018

    • Related Report
      2017 Research-status Report
    • Peer Reviewed
  • [Journal Article] Formation of homologous In2O3(ZnO)m thin films and its thermoelectric properties2016

    • Author(s)
      Junjun Jia, Cleva Ow-Yang, Guliz Inan Akmehmet, Shin-ichi Nakamura, Kunihisa Kato, Yuzo Shigesato
    • Journal Title

      Journal of Vacuum Science & Technology A

      Volume: 34 Issue: 4

    • DOI

      10.1116/1.4953032

    • Related Report
      2016 Research-status Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Presentation] アモルファスIGZOトランジスタにおける欠陥構造と電子構造の関係性の解明2018

    • Author(s)
      賈軍軍、重里有三
    • Organizer
      第28回日本MRS年次大会(MRS-J)
    • Related Report
      2018 Annual Research Report
  • [Presentation] Phonon Engineering on In2O3-and ZnO-based Thin Films2018

    • Author(s)
      Junjun Jia, and Yuzo Shigesato
    • Organizer
      CIMTEC 2018
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] アモルファスIn2O3系薄膜の結晶化に関する研究2018

    • Author(s)
      岩﨑慎平、賈軍軍、岡島敏浩、重里有三
    • Organizer
      第28回日本MRS年次大会(MRS-J)
    • Related Report
      2018 Annual Research Report
  • [Presentation] Fabrication of p-type SnOx Thin Films and its Defect Structur2018

    • Author(s)
      Junjun Jia, Takumi Sugane, Yuzo Shigesato
    • Organizer
      2018 Materials Research Society (MRS) Spring Meeting
    • Related Report
      2018 Annual Research Report
  • [Presentation] スパッタ法を用いた酸化物半導体薄膜の作製およびTFT特性2018

    • Author(s)
      賈軍軍、重里有三
    • Organizer
      第2回酸化物半導体討論会 (東京工業大学)
    • Related Report
      2018 Annual Research Report
  • [Presentation] 層状構造を持つIn2O3(ZnO)m薄膜の熱伝導特性2017

    • Author(s)
      賈軍軍、山下雄一郎、八木貴志、竹歳尚之、重里 有三
    • Organizer
      第64回応用物理学会 春季学術講演会
    • Place of Presentation
      パシフィコ横浜
    • Year and Date
      2017-03-14
    • Related Report
      2016 Research-status Report
  • [Presentation] Thermal conduction in homologous In2O3(ZnO)m films2017

    • Author(s)
      J. Jia, Y. Yamashita, T. Yagi, Y. Shigesato
    • Organizer
      2017 MRS Spring Meeting
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research
  • [Presentation] Characterization of Layered In2O3(ZnO)m Films2017

    • Author(s)
      J. Jia, H. Wardenga, A. Klein, Y. Shigesato
    • Organizer
      IUMRS-ICAM 2017 Symposium B-1 (3rd Bilateral MRS-J / E-MRS symposium)
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research
  • [Presentation] Experimental Investigation on Structural Evolution of Amorphous Indium-Based Oxide Films During Annealing by In Situ XRD and EXAFS Measurements2017

    • Author(s)
      J. Jia, S. Yamamoto, T. Okajima, Y. Shigesato
    • Organizer
      2017 MRS Fall Meeting
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research
  • [Presentation] ホモロガスIn2O3(ZnO)m薄膜中の熱伝導現象2016

    • Author(s)
      賈軍軍、八木貴志、山下雄一郎、重里有三
    • Organizer
      第37回日本熱物性シンポジウム(日本熱物性学会)
    • Place of Presentation
      岡山国際交流センター(岡山県)
    • Year and Date
      2016-11-28
    • Related Report
      2016 Research-status Report
  • [Presentation] ホモロガス構造をもつIn2O3(ZnO)m薄膜の熱物性2016

    • Author(s)
      賈軍軍、Hans Wardenga、Andreas klein、重里有三
    • Organizer
      第77回応用物理学会 秋季学術講演会
    • Place of Presentation
      朱鷺メッセ(新潟県)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Research-status Report
  • [Presentation] In-situ Brouwer analysis on defects in homologous In O (ZnO) films2016

    • Author(s)
      Junjun Jia, Hans Wardenga, Andreas Klein, Yuzo Shigesato
    • Organizer
      European Materials Research Society(E-MRS) 2016 Spring Meeting
    • Place of Presentation
      Lille Grand Palais(France)
    • Year and Date
      2016-05-02
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research

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Published: 2016-04-21   Modified: 2020-07-01  

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