High functional telecommunication devices using MEMS technology

• Project/Area Number: 17068002
• Research Category: Grant-in-Aid for Scientific Research on Priority Areas
• Allocation Type: Single-year Grants
• Review Section: Science and Engineering
• Research Institution: Tohoku University
• Principal Investigator: HANE Kazuhiro Tohoku University, 大学院工学研究科, 教授 (50164893)
• Co-Investigator(Kenkyū-buntansha): SASAKI Minoru 豊田工業大学, 教授 (70282100) ; KANAMORI, 東北大学, 大学院工学研究科, 准教授 (10333858)
• Project Period (FY): 2005 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥67,900,000 (Direct Cost: ¥67,900,000); Fiscal Year 2008: ¥12,100,000 (Direct Cost: ¥12,100,000); Fiscal Year 2007: ¥17,100,000 (Direct Cost: ¥17,100,000); Fiscal Year 2006: ¥20,700,000 (Direct Cost: ¥20,700,000); Fiscal Year 2005: ¥18,000,000 (Direct Cost: ¥18,000,000)
• Keywords: 光通信 / 波長選択フィルタ / MEMS / マイクロアクチュエータ / シリコンMEMS / サブ波長格子 / くし型アクチュエータ / 可変フィルタ / フォトニック結晶 / フォトニック構造 / シリコン

Research Abstract

MEMS技術により微細な立体構造とマイクロアクチュエータを集積した機能性の高い光通信デバイスを研究した.具体的にはSi自立格子を用いた光フィルタを製作し,格子周期を変調できることを示した.また周期可変のブレーズ格子を実現した.さらにSi細線導波路波長選択スイッチを試作した.光路切り替えマイクロミラースイッチの高機能化のため角度センサの搭載や低電駆動法などを研究した.

Research Products

• [Journal Article] Driving of micromirror and simultaneous detection of rotation angle using integrated piezoresistive sentsor (2009)
  • Author(s): M.Sasaki, M. Tabata, K.Hane
  • Journal Title: J. Opt. A: Pure Appl. Opt vol. 11,(in press)
  • Peer Reviewed
• [Journal Article] Pitch-variable blazed grating consisting of freestanding silicon beams (2009)
  • Author(s): Y.Wang, Y.Kanamori, K.Kane
  • Journal Title: Opt. Exp vol. 17 Pages: 4419-4426
  • NAID: 120003728477
  • Peer Reviewed
• [Journal Article] Fabrication and characterization of nanoscale resonant gratings on thin silicon membrane (2009)
  • Author(s): Y.Wang, Y.Kanamori, J.Ye, H.Sameshima, K.Hane
  • Journal Title: Opt. Exp vol.17 Pages: 4938-4943
  • NAID: 120003728409
  • Peer Reviewed
• [Journal Article] Design and fabrication of freestanding pitch-variable blazed grating on silicon-on-insulator wafer (2009)
  • Author(s): Y.Wang, Y.Kanamori, T.Sasaki, K.Hane
  • Journal Title: J. Micromech. Microeng vol. 19
  • Peer Reviewed
• [Journal Article] Submicron comb-drive actuators fabricated on thin single crystalline silicon layer (2009)
  • Author(s): K.Takanashi, E.Bulgan, Y.Kanamori, K.Hane
  • Journal Title: IEEE Trans. Industrial Electron vol. 56 Pages: 991-995
  • Peer Reviewed
• [Journal Article] Design and fabrication of freestanding pitch-variable blazed grating on silicon-on-insulator wafer (2009)
  • Author(s): Y. Wang
  • Journal Title: Journal of Micromechanics and Microengneering 19
  • Peer Reviewed
• [Journal Article] Driving of micromirror and simultaneous detection of rotation angle using integrated piezoresistive sentsor (2009)
  • Author(s): M. Sasaki
  • Journal Title: Journal of Optics A : Pure Applied Optics 11(in press)
  • Peer Reviewed
• [Journal Article] A wavelength-selective add-drop switch using silicon microring resonator with a submicron-comb electrostatic actuator (2008)
  • Author(s): K.Takahashi, Y.Kanamori, Y.Kokubun K.Hane
  • Journal Title: Opt. Exp vol. 16 Pages: 14421-14428
  • NAID: 120003911398
  • Peer Reviewed
• [Journal Article] Fabrication of analog and desital-modulated pitch-variable gratings using silicon-insulator substrate (2008)
  • Author(s): Y.Kanamori, T.Kobayashi, K.Hane
  • Journal Title: Jpn. J. Appl. Phys vol. 47 Pages: 5274-5277
  • Peer Reviewed
• [Journal Article] Parameter optimization of narrow bandstop optical filters using the self-suspended subwavelength grating for TE polarization (2008)
  • Author(s): J.-S.Ye, Y.Kanamori, F-R.Hu, K.Hane
  • Journal Title: J. Mod. Opt vol. 55 Pages: 1519-1528
  • Peer Reviewed
• [Journal Article] Development of a compact hydrogen- annealing machine for surface transformation of silicon and its applications to micro-optical devices (2008)
  • Author(s): Y.Kanamori, K.Douzono, S.Fujihira, K.Hane
  • Journal Title: J. Vac. Sci. Technol. A vol. 26 Pages: 365-369
  • Peer Reviewed
• [Journal Article] Submicron silicon waveguide optical switch driven by microelectromechanical actuator (2008)
  • Author(s): E.Bulgan, Y.Kanamori, K.Hane
  • Journal Title: Appl. Phys. Lett vol. 92
  • NAID: 120002070063
  • Peer Reviewed
• [Journal Article] Theoretical analysis of mechanical contact based submicron Si waveguide optical microswitch at telecommunication wavelength (2008)
  • Author(s): E.Bulgan, Y.Kanamori, K.Hane
  • Journal Title: IEEJ Trans. SM vol. 127 Pages: 80-84
  • NAID: 10021135026
  • Peer Reviewed
• [Journal Article] A wavelength-selective add-drop switch using silicon microring resonator with a submicron-comb electrostatic actuator (2008)
  • Author(s): K. Takahashi
  • Journal Title: Optics Express 16 Pages: 14421-14428
  • Peer Reviewed
• [Journal Article] Submicron silicon waveguide optical switch driven by microelectromechanical actuator (2008)
  • Author(s): E. Bulgan
  • Journal Title: Applied Physics Letters 92
  • Peer Reviewed
• [Journal Article] Parameter optimization of narrow bandstop optical filters using the self-suspended subwavelength grating for TE polarization (2008)
  • Author(s): J.-S. Ye
  • Journal Title: Journal of Modern Optics 55(In press)
  • Peer Reviewed
• [Journal Article] Fabrication of analog and digital-modulated pitch-variable gratings using silicon-in sulator substrate (2008)
  • Author(s): Y. Kanamori
  • Journal Title: Japanese Journal of Applied Physics 47(In press)
  • Peer Reviewed
• [Journal Article] Micromachined surface emitting dye laser with a serf-suspended guided mode resonant grating (2007)
  • Author(s): N.Matsuyama, Y.Kanamori, J-S.Ye, K.Hane
  • Journal Title: J. Opt. A: Pure Appl. Opt Vol. 9 Pages: 940-944
  • Peer Reviewed
• [Journal Article] Angled exposure method for patterning on three-dimensional structures (2007)
  • Author(s): V.K.Singh, M.Sasaki, K.Hane
  • Journal Title: Jpn. J. Appl. Phys vol. 46 Pages: 6449-6453
  • Peer Reviewed
• [Journal Article] Geometrical characteristics of silicon cavities etiched in EDP (2007)
  • Author(s): H.Ju, T.Ohta, M.Ito, M.Sasaki, K.Hane, M.Hori
  • Journal Title: J. Micromech. Microeng vol. 17 Pages: 1012-1016
  • Peer Reviewed
• [Journal Article] Out-of-plane motion of 260-nm thick guided-mode resonant grating filter controlled by four micro-thermal actuators (2007)
  • Author(s): Y.Kanamori, T.Kitani, K.Hane
  • Journal Title: Microsyst. Technol vol. 13 Pages: 867-872
  • Peer Reviewed
• [Journal Article] Performance of tense thin-film torsion bar for large rotation and low-voltage driving of micromirror (2007)
  • Author(s): M.Sasaki, S.Yuki, K.Hane
  • Journal Title: IEEE J. Selected Topics Quant. Electron vol. 13 Pages: 290-296
  • NAID: 10022548226
  • Peer Reviewed
• [Journal Article] Narrow-band tunable optical filters using the self-suspended subwavelength grating (2007)
  • Author(s): J.S.Ye, Y.Kanemori, F.-R.Hu, K.Hane
  • Journal Title: J. Mod. Opt vol. 54 Pages: 827-832
  • Peer Reviewed
• [Journal Article] Rigorous reflectance performance analysis of Si3N4 self-suspended subwavelength gratings (2007)
  • Author(s): J.S.Ye, Y.Kanamori, F.-R.Hu, K.Hane
  • Journal Title: Opt. Commun vol. 270 Pages: 233-237
  • Peer Reviewed
• [Journal Article] Control of guided resonance in a photonic crystal slab using microelectromechanical actuators (2007)
  • Author(s): Y.Kanamori, T.Kitani, K.Hane
  • Journal Title: Appl. Phys. Lett vol. 90
  • Peer Reviewed
• [Journal Article] Micromirror with two parallel rotation axes for external cavity diode laser (2007)
  • Author(s): M.Ishimori, M.Sasaki, K.Hane
  • Journal Title: IEICE Trans. Electron vol. E90-C Pages: 72-77
  • NAID: 110007519559
  • Peer Reviewed
• [Journal Article] Tunable vertical comb for driving micromirror realized by bending drive wafer (2007)
  • Author(s): M.Sasaki, M.Ishimori, J.-H.Song, K.Hane
  • Journal Title: IEICE Trans. Electron vol. E90-C Pages: 147-148
  • Peer Reviewed
• [Journal Article] Rigorous reflectance performance analysis of Si3N4 self-suspended subwavelength gratings (2007)
  • Author(s): J.S.Ye
  • Journal Title: Optics Communications 270・2 Pages: 233-237
• [Journal Article] Control of guided resonance in a photonic crystal slab using microelectromechanical actuators (2007)
  • Author(s): Y.Kanamori
  • Journal Title: Applied Physics Letters 90・3
• [Journal Article] Narrow-band tunable optical filters using the self-suspended subwavelength grating (2007)
  • Author(s): J.S.Ye
  • Journal Title: Journal Modern Optics 54(in press)
• [Journal Article] Fabrication of transmission color filters using silicon subwavelength gratings on quartz substrates (2006)
  • Author(s): Y.Kanamori, M.Shimono, K.Hane
  • Journal Title: IEEE Photonics Technol. Lett vol. 18 Pages: 2126-2128
  • NAID: 120000775232
  • Peer Reviewed
• [Journal Article] Self-supported subwavelength gratings with a broad band of high reflectance analyzed by the rigorous coupled-wave method (2006)
  • Author(s): J.S.Ye, Y.Kanamori, F.-R.Hu, K.Hane
  • Journal Title: J. Mod. Opt vol. 53 Pages: 1995-2004
  • Peer Reviewed
• [Journal Article] Large-rotation and low-voltage driving of micromirror realized by tense thin-film torsion bar (2006)
  • Author(s): M.Sasaki, S.Yuki, K.Hane
  • Journal Title: IEEE Photonics Technol. Lett vol. 18 Pages: 1573-1575
  • Peer Reviewed
• [Journal Article] Exposure method for three-dimensional samples using phase shift mask (2006)
  • Author(s): M.Sasaki, T.Edwin, K.Hane
  • Journal Title: IEEJ Trans. SM vol. 126 Pages: 241-242
  • NAID: 10017586211
  • Peer Reviewed
• [Journal Article] Electrostatic actuator with segmented comb electrodes (2006)
  • Author(s): M.Sasaki, F.Bono, K.Hane
  • Journal Title: IEEJ Trans. SM vol. 126 Pages: 168-169
  • NAID: 10017538804
  • Peer Reviewed
• [Journal Article] Piezoresistive rotation angle sensor integrated in micromirror (2006)
  • Author(s): M.Sasaki, M.Tabata, T.Haga, and K.Hane
  • Journal Title: Jpn. J. Appl. Phys vol. 45 Pages: 3789-3793
  • NAID: 10022541010
  • Peer Reviewed
• [Journal Article] Variable optical reflectance of a self-supported Si grating (2006)
  • Author(s): K.Hane, T.Kobayashi, F.-R.Hu, Y.Kanamori
  • Journal Title: Appl. Phys. Lett vol. 88
  • NAID: 120000775228
  • Peer Reviewed
• [Journal Article] Guided-mode resonant grating filter fabricated on silicon-on-insulator substrate (2006)
  • Author(s): Y.Kanamori, T.Kitani, K.Hane
  • Journal Title: Jpn. J. Appl. Phys vol. 45 Pages: 1883-1885
  • NAID: 40007177968
  • Peer Reviewed
• [Journal Article] Variable optical reflectance of a self-supported Si grating (2006)
  • Author(s): K.Hane
  • Journal Title: Applied Physics Letters 88・14
  • NAID: 120000775228
• [Journal Article] Piezoresistive rotation angle sensor integrated in micromirror (2006)
  • Author(s): M.Sasaki
  • Journal Title: Japanese Journal of Applied Physics 45・4B Pages: 3789-3793
  • NAID: 10022541010
• [Journal Article] Self-supported subwavelength gratings with a broad band of high reflectance analyzed by the rigorous coupled-wave method (2006)
  • Author(s): J.S.Ye
  • Journal Title: Journal Modern Optics 53・14 Pages: 1995-2004
• [Journal Article] Guided-mode resonant grating filter fabricated on silicon-on-insulator substrate (2006)
  • Author(s): Y.Kanamori, T.Kitani, K.Hane
  • Journal Title: Japanese Journal of Applied Physics 45・3A(in press)
  • NAID: 40007177968
• [Journal Article] Piezoresistive rotation angle sensor integrated in micromirror (2006)
  • Author(s): M.Sasaki, K.Haga, M.Tabata, K.Hane
  • Journal Title: Japanese Journal of Applied Physics 45(in press)
  • NAID: 10022541010
• [Journal Article] Deposition of thin and uniform photoresist on three-dimensional structures using fast flow in spray coating (2005)
  • Author(s): V.K.Singh, M.Sasaki, K.Hane, Y.Watanabe, H.Takamatsu, M.Kawakita, H.Hayashi
  • Journal Title: J. Micromech. Microeng vol. 15 Pages: 2339-2345
  • Peer Reviewed
• [Journal Article] Surface emission from solid polymer dye in a guided mode resonant grating filter structure (2005)
  • Author(s): T.Kobayashi, Y.Kanamori, K.Hane
  • Journal Title: Appl. Phys. Lett vol. 87
  • Peer Reviewed
• [Journal Article] Three-dimensional micro-machining for fiber-type optical control devices (2005)
  • Author(s): H.Kumazaki, S.Inaba, K.Hane, Y.Nasu
  • Journal Title: IEEJ Trans. SM vol. 125-E Pages: 211-215
  • NAID: 10015517870
  • Peer Reviewed
• [Journal Article] Technique for preparing defect-free spray coated resist-film on three-dimensional micro-electromecanical systems (2005)
  • Author(s): V.K.Singh, M.Sasaki, J.-H.Song, K.Hane
  • Journal Title: Jpn. J. Appl. Phys vol. 44 Pages: 2016-2020
  • Peer Reviewed
• [Journal Article] Compact triangular sensor array constructed by wafer bending (2005)
  • Author(s): S.Endou, M.Ishimori, M.Sasaki, K.Hane
  • Journal Title: Japanese Journal of Applied Physics 44・4B Pages: 2874-2878
• [Journal Article] Surface emission from solid polymer dye in a guided mode resonant grating filter structure (2005)
  • Author(s): T.Kobayashi, Y.Kanamori, K.Hane
  • Journal Title: Applied Physics Letters 87・15 Pages: 151106-151106
• [Journal Article] Deposition of thin and uniform photoresist on three-dimensional structures using fast flow in spray coating (2005)
  • Author(s): V.K.Singh, M.Sasaki, K.Hane, Y.Watanabe, H.Takamatsu, M.Kawakita, H.Hayashi
  • Journal Title: Journal of Micromechanics and Microengineering 15・12 Pages: 2339-2345
• [Presentation] Fabrication of variable drop filters with resonant cavities in photonic crystals using thin comb-drive actuators (2008)
  • Author(s): Y.Kanamori, K.Takahashi, K.Hane
  • Organizer: 21th Int. Microprocesses and Nanotechnology Conf
  • Place of Presentation: Fukuoka, Japan
  • Year and Date: 2008-10-30
• [Presentation] Silicon substrate with antireflection subwavelength gratings for optical communication devices fabricated with nano-particle masks (2008)
  • Author(s): S.Haida, Y.Kanamori, K.Hane
  • Organizer: 21th Int. Microprocesses and Nanotechnology Conf
  • Place of Presentation: Fukuoka, Japan
  • Year and Date: 2008-10-29
• [Presentation] Silicon microring resonator connected with submicron comb actuator (2008)
  • Author(s): K. Hane
  • Organizer: International Conference on Optical MEMS and Nanophotoincs
  • Place of Presentation: Freibrug, Germany
  • Year and Date: 2008-08-14
• [Presentation] Silicon Self-Suspended Resonant Grating Filters at Telecommunication Wavelength (2008)
  • Author(s): J.Ye, N.Matsuyama, Y.Kanamori, K.Hane
  • Organizer: CLEO 2008
  • Place of Presentation: San Jose, U.S.A
  • Year and Date: 2008-05-06
• [Presentation] Subwavelength gratings combined with MEMS (2007)
  • Author(s): K.Hane, J.-S.Ye, Y.Kanamori
  • Organizer: The 14th Int. Display Workshops
  • Place of Presentation: Sapporo, Japan
  • Year and Date: 2007-12-06
• [Presentation] Subwavelength gratings combined with MEMS (2007)
  • Author(s): K. Hane
  • Organizer: The 14th International Display Workshops
  • Place of Presentation: Sapporo, Japan
  • Year and Date: 2007-12-06
• [Presentation] Fabrication of pitch-variable MEMS gratings using thermal and electronic actuators (2007)
  • Author(s): Y.Kanamori, T.Kobayashi, K.Hane
  • Organizer: 2007 Int. Microprocesses and Nanotechnology Conf
  • Place of Presentation: Kyoto, Japan
  • Year and Date: 2007-11-06
• [Presentation] Performance of tense thin film torsion bar for large-rotation and low-voltage driving of micromirror (2007)
  • Author(s): M.Sasaki, S.Yuki, K.Hane
  • Organizer: 2007 Int. Conf. on Solid State Devices and Materials
  • Place of Presentation: Tsukuba, Japan
  • Year and Date: 2007-09-18
• [Presentation] Passivated piezoresistive rotation angle sensor integrated in micromirror (2007)
  • Author(s): M.Sasaki, M.Tabata, K.Hane
  • Organizer: Int. Conf. on Optical MEMS and Nanophotoincs
  • Place of Presentation: Hualien, Taiwan
  • Year and Date: 2007-08-16
• [Presentation] Mechanical-contact-based submicron- Si- waveguide optical microswitch at telecommunication wavelengths (2007)
  • Author(s): E.Bulgan, Y.Kanamori, K.Hane
  • Organizer: Int. Conf. on Optical MEMS and Nanophotoincs, Hualien
  • Place of Presentation: Taiwan
  • Year and Date: 2007-08-14
• [Presentation] Optically flat micromirror using stretched membrane with crystallization-induced stress (2007)
  • Author(s): M.Sasaki, T.Sasaki, K.Hane, H.Miura
  • Organizer: Int. Conf. on Optical MEMS and Nanophotoincs
  • Place of Presentation: Hualien, Taiwan
  • Year and Date: 2007-08-13
• [Presentation] Self-supported pitch-variable guided-mode resonant grating filters at telecom wavelength (2007)
  • Author(s): Y.Kanamori, N.Matsuyama, J.-S.Ye, K.Hane
  • Organizer: Int. Conf. on Optical MEMS and Nanophotoincs
  • Place of Presentation: Hualien, Taiwan
  • Year and Date: 2007-08-12
• [Presentation] Driving of micromirror and simultaneous detection of rotation angle using integrated piezoresistive sensor (2007)
  • Author(s): M.Sasaki, M.Tabata, K.Hane
  • Organizer: The 14th Int. Conf. on Solid-State Sensors, Actuators and Microsystems
  • Place of Presentation: Lyon France
  • Year and Date: 2007-06-10
• [Presentation] Tunable optical filters with a nanostructured suspended grating (2007)
  • Author(s): J.-S.Ye, Y.Kanamori, F.-R.Hu, K.Hane
  • Organizer: Int. Conf. on Nanoscience and Technology
  • Place of Presentation: Beijing, China
  • Year and Date: 2007-06-04
• [Presentation] Fiber-Bragg gratuned by micro-heater array (2006)
  • Author(s): V.K.Singh, M.Sasaki, K.Hane
  • Organizer: 5th Int. Conf. on Optics-photonics Design and Fabrication
  • Place of Presentation: Nara, Japan
  • Year and Date: 2006-12-07
• [Presentation] Tunable optical filters by using self-suspended subwavelength gratings (2006)
  • Author(s): J.-S.Ye, Y.Kanamori, F.-R.Hu, K.Hane
  • Organizer: 5th Int. Conf. on Optics-photonics Design and Fabrication
  • Place of Presentation: Nara, Japan
  • Year and Date: 2006-12-07
• [Presentation] Photonic structure and materials combined with micro/nano-electro-mechanical systems (2006)
  • Author(s): K.Hane, F.-R.Hu, Y.Kanamori
  • Organizer: The 1st Int. Workshop on Functional Materials and The 3rd Int. Workshop on Nanophysics and nanotechnology
  • Place of Presentation: Halong, Vietnum
  • Year and Date: 2006-12-07
• [Presentation] MENS for subwavelength optics (2006)
  • Author(s): K.Hane
  • Organizer: The 6th US-Japan Joint Symposium on Nano systems
  • Place of Presentation: Tokyo, Japan
  • Year and Date: 2006-10-11
• [Presentation] Movable guided-mode resonant grating filters by four bimorph actuators for wavelength selective dynamic reflection control (2006)
  • Author(s): Y.Kanamori, T.Kitani, K.Hane
  • Organizer: IEEE/LEOS Int. Conf. on Optical MEMs and Their Application
  • Place of Presentation: Big Sky, U.S.A
  • Year and Date: 2006-08-22
• [Presentation] Silicon microring resonator connected with submicron comb actuator (2006)
  • Author(s): K.Takahashi, Y.Kanamori, K.Hane
  • Organizer: Int. Conf. on Optical MEMS and Nanophotoincs
  • Place of Presentation: Freibrug, Germany
  • Year and Date: 2006-08-14
• [Presentation] Optical MEMS and NEMS : Thin film micro/nano machining and integration (2006)
  • Author(s): K.Hane
  • Organizer: The 49th Society of Vacuum Coaters Tech. Conf
  • Place of Presentation: Washington, DC, U.S.A
  • Year and Date: 2006-04-25
• [Presentation] Micro/nano opt-mechanical systems using silicon micromachining technology (2005)
  • Author(s): K.Hane, M.Sasaki, Y.Kanamori, F.R.Hu
  • Organizer: Nanoengineering Symposium 2005
  • Place of Presentation: Daeon, Korea
  • Year and Date: 2005-10-28
• [Presentation] Piezoresistive rotation angle sensor integrated in micromirror (2005)
  • Author(s): M.Sasaki, M.Tabata, T.Haga and K.Hane
  • Organizer: Int. Conf. on Solid State Devices and Materials
  • Place of Presentation: Kobe, Japan
  • Year and Date: 2005-09-16
• [Presentation] Performance of tense thin film torsion bar for large-rotation and low-voltage driving of micromirror (2005)
  • Author(s): M.Sasaki, S.Yuuki, K.Hane
  • Organizer: IEEE/LEOS Int. Conf. on Optical MEMs and Their Application
  • Place of Presentation: Oulu, Finland
  • Year and Date: 2005-08-03
• [Presentation] A surface emitting solid polymer dye laser using a guided mode resonant grating for bio-optical detections (2005)
  • Author(s): T.Kobayashi, Y.Kanamori, K.Hane
  • Organizer: IEEE/LEOS Int. Conf. on Optical MEMs and Their Application
  • Place of Presentation: Oulu, Finland
  • Year and Date: 2005-08-01
• [Book] 光通信用ナノマシン (2008)
  • Author(s): 羽根一博
  • Total Pages: 5
  • Publisher: オプトロニクス
• [Book] Comprehensive Microsystems 3.01 Micro-Mirrors (2008)
  • Author(s): 羽根一博
  • Total Pages: 63
  • Publisher: Elsevier
• [Book] ナノテクのための工学入門第5章マイクロマシニング・ナノマシニング (2007)
  • Author(s): 羽根一博
  • Total Pages: 243
  • Publisher: 共立出版
• [Remarks]
  • URL: http://www.hane.
• [Patent(Industrial Property Rights)] 光導波路デバイス及びその製造方法 (2008)
  • Inventor(s): 羽根一博 金森義明
  • Industrial Property Rights Holder: 東北大学
  • Patent Publication Number: 2008-268891
  • Filing Date: 2008-11-06
• [Patent(Industrial Property Rights)] 光導波路デバイス及びその製造方法 (2008)
  • Inventor(s): 羽根一博, 金森義明
  • Industrial Property Rights Holder: 東北大学
  • Industrial Property Number: 2008-043834
  • Filing Date: 2008-02-26
• [Patent(Industrial Property Rights)] 光導波路デバイス装置及びその製造方法 (2007)
  • Inventor(s): 羽根一博、金森義明
  • Industrial Property Rights Holder: 東北大学
  • Industrial Property Number: 2007-076749
  • Filing Date: 2007-03-23
• [Patent(Industrial Property Rights)] 光フィルター装置及びその製造方法 (2007)
  • Inventor(s): 金森義明、羽根義明
  • Industrial Property Rights Holder: 東北大学
  • Industrial Property Number: 2007-076748
  • Filing Date: 2007-03-23
• [Patent(Industrial Property Rights)] 光導波路デバイス装置及びその製造方法 (2007)
  • Inventor(s): 羽根一博, 金森義明
  • Industrial Property Rights Holder: 東北大学
  • Industrial Property Number: 2007-076749
  • Filing Date: 2007-03-23
• [Patent(Industrial Property Rights)] マイクロミラーデバイスとその製造方法,マイクロミラーデバイスの角度計測方法,およびマイクロミラーデバイス応用装置 (2005)
  • Inventor(s): 佐々木実、羽根一博
  • Industrial Property Rights Holder: 東北大学
  • Industrial Property Number: 2005-219851
  • Filing Date: 2005-07-29
• [Patent(Industrial Property Rights)] レーザー共振器装置およびその製造方法 (2005)
  • Inventor(s): 羽根一博、金森義明
  • Industrial Property Rights Holder: 東北大学
  • Industrial Property Number: 2005-185888
  • Filing Date: 2005-06-27
• [Patent(Industrial Property Rights)] サブ波長周期格子を用いたレーザー装置 (2005)
  • Inventor(s): 羽根一博、金森義明
  • Industrial Property Rights Holder: 東北大学
  • Industrial Property Number: 2005-158129
  • Filing Date: 2005-05-31