| Co-Investigator(Kenkyū-buntansha) |
KUMIGASHIRA Isao 東京大学, 大学院・工学系研究科, 准教授 (00345092)
OHKUBO Koji 東京大学, 大学院・工学系研究科, 助教 (20376487)
HORIBA Kanta 東京大学, 大学院・工学系研究科, 助教 (10415292)
ONO Kanta 高エネルギー加速器研究機構, 物質構造科学研究所, 准教授 (70282572)
OKABAYASHI Jun 東京大学, 大学院・工学系研究科, 助手 (70361508)
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| Budget Amount *help |
¥109,850,000 (Direct Cost: ¥84,500,000、Indirect Cost: ¥25,350,000)
Fiscal Year 2009: ¥7,410,000 (Direct Cost: ¥5,700,000、Indirect Cost: ¥1,710,000)
Fiscal Year 2008: ¥10,660,000 (Direct Cost: ¥8,200,000、Indirect Cost: ¥2,460,000)
Fiscal Year 2007: ¥10,660,000 (Direct Cost: ¥8,200,000、Indirect Cost: ¥2,460,000)
Fiscal Year 2006: ¥24,570,000 (Direct Cost: ¥18,900,000、Indirect Cost: ¥5,670,000)
Fiscal Year 2005: ¥56,550,000 (Direct Cost: ¥43,500,000、Indirect Cost: ¥13,050,000)
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| Research Abstract |
In order to investigate chemical, electronic and magnetic structures in nano-devices, environmental catalysts and other inhomogeneous systems, we have developed nano-spectroscopy using two types of photoelectron microscopy, namely projection type and scanning type, with synchrotron radiation, and have applied them to LSI nanostructures, magnetic nanostructures, resistance RAM and non-Pt catalysts successfully. We have achieved the following eight points.
1. Projection-type PEEM was modified to improve the spatial resolution up to 22 nm by means of anti-vibration setup and image processing software for sample drift correction.
2. Scanning-type 3DnanoESCA was developed with spatial resolution of 92 nm by pin-point angle-resolved photoelectron spectroscopy.
3. Magnetic imaging by XMCD-PEEM was realized for permalloy nanostructures and patterned LSMO nanostructures for non-volatile magnetic memory applications.
4. In situ imaging by PEEM was realized for LSI high-k gate insulators during vacuum annealing.
5. Pin-point in-depth analysis by 3DnanoESCA was realized for LSI high-k gate insulators.
6. PEEM imaging at Cu L edges for CuO and Cu revealed the ReRAM mechanism with reduction/oxidation switching.
7. Micro XAS at Pt and Co absorption edges for tapered-cut anode/electrolyte/cathode of fuel cells revealed the degradation mechanism.
8. Hard X-ray PEEM enabled the visualization of deeply embedded Au nano-patterns.
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