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Development of low-energy electron diffraction microcope

Research Project

Project/Area Number 17106001
Research Category

Grant-in-Aid for Scientific Research (S)

Allocation TypeSingle-year Grants
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionWaseda University

Principal Investigator

OSHIMA Chuhei  Waseda University, Faculty of Science and Engineering, Professor (10212333)

Co-Investigator(Kenkyū-buntansha) ROKUTA Eiji  Waseda University, 理工学術院, associated professor (80298166)
ISHIKAWA Tsuyoshi  Waseda University, 理工学術院, Assistant Professor (30409693)
Project Period (FY) 2005 – 2007
Project Status Completed (Fiscal Year 2007)
Budget Amount *help
¥91,780,000 (Direct Cost: ¥70,600,000、Indirect Cost: ¥21,180,000)
Fiscal Year 2007: ¥10,660,000 (Direct Cost: ¥8,200,000、Indirect Cost: ¥2,460,000)
Fiscal Year 2006: ¥16,120,000 (Direct Cost: ¥12,400,000、Indirect Cost: ¥3,720,000)
Fiscal Year 2005: ¥65,000,000 (Direct Cost: ¥50,000,000、Indirect Cost: ¥15,000,000)
KeywordsSingle-atom electron source / Electron diffraction microscope / Electron diffraction of single molecule / Large-solid-angle energy analyzer / Extremely high vacuum / 単文篠電子回折
Research Abstract

1) We developed practical single-atom electron sources ; in the case of Au-W tips, electric fields in FIM evaporate the top atom. The spatial coherence of the electron beams was improved largely. We confirmed high efficiency of 80% as the local current/the total emission current was established in the conventional SEM optics.
2) We developed the low-energy diffraction microscopy, of which the spatial resolutions are at present 1.7nm in the SEM mode, and 100nm at the diffraction mode.
3) We developed new techniques to grow up single-atomic-layer graphene sheet, of which the area is several tenths micro-meter in each dimension.
4) By using the developed apparatus, for the first time, we observer low-energy electron transmission patterns of Au-thin film, a grapheme sheet and pyrophylite

Report

(4 results)
  • 2007 Annual Research Report   Final Research Report Summary
  • 2006 Annual Research Report
  • 2005 Annual Research Report
  • Research Products

    (42 results)

All 2008 2007 2006 2005 Other

All Journal Article (25 results) (of which Peer Reviewed: 9 results) Presentation (14 results) Remarks (1 results) Patent(Industrial Property Rights) (2 results)

  • [Journal Article] Extreme high vacuum field emission microscope for study on the inherent fluctuation of field emission2007

    • Author(s)
      B.Cho、T.Itagaki, T.Ishikawa, E.Rokuta and C.Oshima
    • Journal Title

      J.Vacuum Science and Technol. B25

      Pages: 1420-1423

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Highly efficient electron gun with a single-atom electron source2007

    • Author(s)
      T.Ishikawa, T.Urata, B.Cho, E.Rokuta and C.Oshima
    • Journal Title

      Appl.Phys.Lett. 90

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Measurement of pressure in 10-10Pa range from the damping speed of field emission current2007

    • Author(s)
      B.Cho, T.Itagaki, T.Ishikawa and C.Oshima
    • Journal Title

      Appl.Phys.Lett. 91

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Coherent and intense multibeam generation by apex of sharp nano-objects:Electron half-circular prism2007

    • Author(s)
      B.Cho, T.Itagaki, T.Ishikawa and C.Oshima
    • Journal Title

      Appl.Phys.Lett. 91

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Angle-resolved ultraviolet photoelectron spectroscopy with a large sold angle analyzer2007

    • Author(s)
      D.Sakai, D.Miura, A.Maruyama, T.Ishikawa C.Oshima
    • Journal Title

      J.Electron Spectro.&Related phenomena 159

      Pages: 39-45

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Extrme high vacuum field emission microscope2007

    • Author(s)
      B. Cho, et. al.
    • Journal Title

      J. Vac. Sci. and Technol. B-25

      Pages: 1420-1420

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Highly efficient e-gun with a single-atom e-source2007

    • Author(s)
      T. Ishikawa, et. al.
    • Journal Title

      Appl. Phys. Lett. 90

      Pages: 143120-143120

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Measurement of pressure in 10^<-10> Pa range from damping speed2007

    • Author(s)
      B. Cho, et. al.
    • Journal Title

      Appl. Phys. Lett. 91

      Pages: 12105-12105

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Coherent and intense multi-beam generation2007

    • Author(s)
      B. Cho, et. al.
    • Journal Title

      Appl. Phys. Lett. 91

      Pages: 163102-163102

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Angle-resolved ultra-violet photoelectron spectroscopy2007

    • Author(s)
      D. Sakai, et. al.
    • Journal Title

      J. Electron spectro. & Replated Phenom 159

      Pages: 39-39

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Extreme high vacuum field emission microscope for study on the inherent fluctuation of field emission.2007

    • Author(s)
      B.Cho、T.Itagaki, T.Ishikawa, E.Rokuta and C.Oshima
    • Journal Title

      J.Vacuum Science and Technol. B25

      Pages: 1420-1423

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Measurement of pressure in 10-10Pa range from the damping speed of field emission current2007

    • Author(s)
      B.Cho, T.Itagaki, T.Ishikawa and C.Oshima
    • Journal Title

      Appl.Phys.Lett 91

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Coherent and intense multibeam generation by apex of sharp nano-objects: Electron half-circular prism2007

    • Author(s)
      B.Cho, T.Itagaki, T.Ishikawa and C.Oshima
    • Journal Title

      Appl.Phys.Lett 91

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Angle-resolved ultraviolet photoelectron spectroscopy with a large sold angle analyzer.2007

    • Author(s)
      D.Sakai, D.Miura, A.Maruyama, T.Ishikawa and C.Oshima
    • Journal Title

      J.Electron Spectro. & Related phenomena 159

      Pages: 39-45

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Large Solid-Angle Analyzer Applied to Angle-resolved Ultraviolet Photoelectron Spectroscopy2007

    • Author(s)
      D.Sakai, D.Miura, t.Nakajima, t.Ishikawa, C.Oshima
    • Journal Title

      Journal of Electron Spectroscopy and Related Phenomena January

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Stabilities in field electron emissions from noble-metal covered W nano-tips : apex structure dependence2006

    • Author(s)
      T.Itagaki, E.Rokuta, H.-S.Kuo, K.nomura, Oshima
    • Journal Title

      Surface and Interface Analysis 39

      Pages: 299-303

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Construction of an electron analyzer with a wide acceptance solid angle2006

    • Author(s)
      D.Sakai, T.Ishikawa, C.Oshim
    • Journal Title

      Surface Sci. 600

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Demountable single-atom electron source2005

    • Author(s)
      C.Oshima, E.Rokuta, T.ITagaki, T.Ishikawa, T-T.Tsong
    • Journal Title

      e-J.Surf.Sci.Nanotech. 3

      Pages: 312-316

    • NAID

      130004438968

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Novel macroscopic BC3 honeycomb sheet2005

    • Author(s)
      H.Tanaka, Y.Kawamata, H.Yanagisawa, C.Oshima
    • Journal Title

      Solid State Communications 136

      Pages: 22-25

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Atomic-scale field emitter with swlf-reparable function and thermodynamically stable structure2005

    • Author(s)
      E.Rokuta, T.Itagaki, T.Ishikawa, B-L.Cho, T.T.Tsong, C.Oshima
    • Journal Title

      Applied Surface Science 251

      Pages: 205-209

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Highly coherent electrons emitted from Nano-scaled Areas2005

    • Author(s)
      C.Oshima, E.Rokuta, B.Cho
    • Journal Title

      Chinese Journal of Physics 43

      Pages: 145-153

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Phonon Density of States of Pseudomorphic fcc-Fe Film2005

    • Author(s)
      T.Tanaka, C.Oshima, Tsunoda
    • Journal Title

      J.Phys.Society of Jpn. 74

      Pages: 1762-1765

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Surface Structure analysis of monolayer films composed of light elements by X-ray photoelectron diffraction2005

    • Author(s)
      H.Nakamura, C.Oshima, Y.Nihei
    • Journal Title

      Surface and Interface Analaysis 36

      Pages: 1513-1515

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Novel structures of carbon layers on a Pt(111) surface2005

    • Author(s)
      T.Fujita, W.Kobayashi, C.Oshima
    • Journal Title

      Surface and Interface Analysis 37

      Pages: 120-123

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Surface Structure analysis of Zr-O/W(100) at high temperature by X-ray photoelectron diffraction2005

    • Author(s)
      K.Tamura, H.Ishii, M.Owari, C.Oshima, Y.Nihei
    • Journal Title

      Surface and Interface Analaysis 37

      Pages: 217-220

    • Related Report
      2005 Annual Research Report
  • [Presentation] Fabrication way of Single atomic layer sheet Organization of submission2008

    • Place of Presentation
      Waseda University
    • Year and Date
      2008-03-26
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Single-Atom Electron sources Applied to Electron Microscopy2007

    • Author(s)
      Chuhei Oshima
    • Organizer
      9th International Atomically Control Surfaces and Nano-technology
    • Place of Presentation
      東大生産研
    • Year and Date
      2007-11-15
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Single-atom electron sources applied to electron microscopy2007

    • Author(s)
      C. Oshima, T. Ishikawa
    • Organizer
      9th International Atomically control surfaces and nano-technology
    • Place of Presentation
      Univ. of Tokyo Japan
    • Year and Date
      2007-11-15
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Application of the single-atom electron source to scanning electron microscopy2007

    • Author(s)
      裏田 友洋、石川 剛、趙 福來、六田 英治、野々 垣良三、米澤 彬、斉藤 秀一、大島 忠平
    • Organizer
      6th International Symposium on Atomic Level Characterizations for New Materials and Devices'07
    • Place of Presentation
      金沢アートホール
    • Year and Date
      2007-10-30
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] Study on field emission properties from Au-covered nanotip2007

    • Author(s)
      野村 健一, 板垣 考洋, Kuo Hong-Shi, Tsong T.T, 大島 忠平
    • Organizer
      6th International Symposium on Atomic Level Characterizations for New Materials and Devices'07
    • Place of Presentation
      金沢アートホール
    • Year and Date
      2007-10-30
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] Emission properties from Au-W alloy2007

    • Author(s)
      K. Nomura, et. al.
    • Organizer
      6th International symposium of Atomic level Characterization for New Materials and Devices 07
    • Place of Presentation
      Kanazawa, Japan
    • Year and Date
      2007-10-30
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 低速電子回折顕微鏡の開発2007

    • Author(s)
      石川 剛, 裏田 友洋, 趙 福來, 小粥 啓子, 米澤 彬, 野々 垣良三, 大島 忠平
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-04
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] Development of new microscope2007

    • Author(s)
      T. Ishikawa, et. al.
    • Organizer
      68th meeting of Applied Physics.
    • Place of Presentation
      Sapporo, Japan
    • Year and Date
      2007-09-04
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] コヒーレント低速電子線回折顕微鏡の開発2007

    • Author(s)
      石川 剛, 大島 忠平
    • Organizer
      日本顕微鏡学会 第63回学術講演会
    • Place of Presentation
      朱鷺メッセ
    • Year and Date
      2007-05-21
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Electron diffraction microscopy2007

    • Author(s)
      C. Oshima, T. Ishikawa
    • Organizer
      63rd meeting of microscopy society
    • Place of Presentation
      Conference site of Toki Messe
    • Year and Date
      2007-05-21
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] コヒーレント低速電子線回折顕微鏡の開発2007

    • Author(s)
      石川 剛, 大島 忠平
    • Organizer
      日本顕微鏡学会第63回学術講演会
    • Place of Presentation
      新潟県朱鷺メッセ
    • Year and Date
      2007-05-21
    • Related Report
      2007 Annual Research Report
  • [Presentation] パーマロイ極高真空容器と電子顕微鏡2007

    • Author(s)
      大島 忠平, 石川 剛
    • Organizer
      応用物理学会学術講演会
    • Place of Presentation
      武蔵工大
    • Year and Date
      2007-03-27
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development of Single-Atom Electron Source2007

    • Author(s)
      Chuhei Oshima
    • Organizer
      中華民国物理学会
    • Place of Presentation
      国立中央大学 台湾
    • Year and Date
      2007-01-23
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development of Single-atom electron source2007

    • Author(s)
      C. Oshima
    • Organizer
      Chinese Society of Physics
    • Place of Presentation
      Taipei, Taiwan
    • Year and Date
      2007-01-23
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Remarks] 「研究成果報告書概要(和文)」より

    • URL

      http://www.surface.phys.waseda.ac.jp

    • Related Report
      2007 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 単原子膜の製造法2008

    • Inventor(s)
      大島 忠平
    • Industrial Property Rights Holder
      早稲田大学
    • Industrial Property Number
      2008-079582
    • Filing Date
      2008-03-26
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 単原子膜の製造方法

    • Inventor(s)
      大島 忠平
    • Industrial Property Rights Holder
      早稲田大学
    • Industrial Property Number
      2008-079582
    • Related Report
      2007 Annual Research Report

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Published: 2005-04-01   Modified: 2016-04-21  

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