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Research on Deep-UV Semiconductor Laser Lasing in 205~250nm Region

Research Project

Project/Area Number 17106005
Research Category

Grant-in-Aid for Scientific Research (S)

Allocation TypeSingle-year Grants
Research Field Electron device/Electronic equipment
Research InstitutionKogakuin University

Principal Investigator

KAWANISHI Hideo  Kogakuin University, 工学部, 教授 (70016658)

Co-Investigator(Kenkyū-buntansha) HONDA Tooru  工学院大学, 工学部, 教授 (20251671)
SAKAMOTO Tesuo  工学院大学, 工学部, 准教授 (20313067)
HASEGAWA Fumio  工学院大学, 工学部, 教授 (70143170)
Project Period (FY) 2005 – 2009
Project Status Completed (Fiscal Year 2009)
Budget Amount *help
¥86,450,000 (Direct Cost: ¥66,500,000、Indirect Cost: ¥19,950,000)
Fiscal Year 2009: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2008: ¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2007: ¥6,240,000 (Direct Cost: ¥4,800,000、Indirect Cost: ¥1,440,000)
Fiscal Year 2006: ¥15,860,000 (Direct Cost: ¥12,200,000、Indirect Cost: ¥3,660,000)
Fiscal Year 2005: ¥56,030,000 (Direct Cost: ¥43,100,000、Indirect Cost: ¥12,930,000)
Keywords半導体レーザ / 窒化物半導体 / 深紫外域 / 量子井戸構造 / 超格子 / 深紫外半導体レーザ / 量子井戸 / ワイドギャップ / エピタキシャル成長 / 窒化物半導体' / ワイドギヤツプ / 深紫外 / 室化物半導体 / 光学異方性 / 発振モード
Research Abstract

AlGaN is becoming promising semiconductors for developing violet to deep-ultraviolet light emitting semiconductor devices. The AlGaN has a large optical gain to achieve the lasing in this spectral region, as if the AlGaN has anisotropic optical property. Then, the shortest lasing of 228.9nm was demonstrated, for the first time, at room temperature under optical pumping by our experiment. And, extremely promising result as highly doped p-type AlGaN was demonstrated by carbon-doped AlGaN grown by low-pressure metal organic vapor phase epitaxy. The maximum hall-concentration that we have achieved was 3x10^<18>[cm^<-3>].

Report

(6 results)
  • 2009 Annual Research Report   Final Research Report ( PDF )
  • 2008 Annual Research Report
  • 2007 Annual Research Report
  • 2006 Annual Research Report
  • 2005 Annual Research Report
  • Research Products

    (58 results)

All 2010 2009 2008 2007 2006 2005 2004 Other

All Journal Article (24 results) (of which Peer Reviewed: 14 results) Presentation (22 results) Book (3 results) Remarks (4 results) Patent(Industrial Property Rights) (5 results)

  • [Journal Article] AlGaN系深紫外半導体レーザの現状と課題2010

    • Author(s)
      川西英雄
    • Journal Title

      No.1

      Pages: 7-11

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] AlGaN系深紫外半導体レーザの現状と課題2010

    • Author(s)
      川西英雄
    • Journal Title

      Microoptics News 28

      Pages: 7-10

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Investigation on Conductivity at the Gan/AIN/SiC Subsrate interface for Vertical2008

    • Author(s)
      Yuu Wakamiya, Fumio Hasegawa, Hideo Kawanishi
    • Journal Title

      Physica Status Solidi No.6

      Pages: 1505-1507

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Reduction of Threading Dislocations in AlGaN/AIN/SiC Epitaxial Layers by Controlled Strain with (AIN/GaN) Multibuffer-layer Structure2007

    • Author(s)
      Kouichi Murakawa, Eiichiro Niikura, Fumio Hasegawa, Hideo Kawanishi
    • Journal Title

      Japan. J. Appl. Phys 46,No.6A

      Pages: 3301-3304

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Improvement of crystal quality of AIN and AlGaN epitaxial layers by controlling the strain with the (AIN/GaN) multi-buffer layer2007

    • Author(s)
      Eiichiro Niikura, Koichi Murakawa, Fumio Hasegawa, Hideo Kawanishi
    • Journal Title

      Journal of Crystal Growth 298

      Pages: 345-345

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Reduction of Threading Dislocations in AlGaN/AIN/SiC Epitaxial Layers by Controlled Strain with (AIN/GaN) Multibuffer-layer Structure2007

    • Author(s)
      Kouichiro Murakawa, Eiichiro Nikura, Fumio Hasegawa, Hideo Kawanishi
    • Journal Title

      Japan. J. Appl. Phys 46

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Improvement of Crystal Quality of n-AIGaN by Alternate-Source-Feeding Metal Organic Vapor Phase Epitaxy2007

    • Author(s)
      Ken-ichi Isono
    • Journal Title

      Japan.J.AppI.Phys 46

      Pages: 5711-5714

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Reduction of Threading Dislocations in AIGaN/AIN/SiC Epitaxial Layers by Control led Strain with (AIN/GaN) Multibuffer-layer Structure2007

    • Author(s)
      Kouichi Murakawa
    • Journal Title

      Japan.J.AppI.Phys 46

      Pages: 3301-3304

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] I mprovement of crystal quality of AIN and AiGaN epitaxial layers by controlling the strain with the (AIN/GaN) multi-buffer layer2007

    • Author(s)
      E.Niikura, K.Murakawa, F.Hasegawa, H.Kawanishi
    • Journal Title

      Journal of Crystal Growth 298

      Pages: 345-348

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Reduction of Threading Dislocations in AlGaN/AIN/SiC Epitaxial Layers by Controlled Strain with (AIN/GaN) Multibuffer-layer Structure2007

    • Author(s)
      Koichiro Murakawa, EIichiro Nikura, Fumio Hasegawa, Hideo Kawanishi
    • Journal Title

      Japan. J. Appl. Phys 46・6A(掲載確定、ページ未定)

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Experimental energy difference between heavy-or light-hole valence band and crystal-field split-off-hole valence band in AlxGaN1-xN2006

    • Author(s)
      Hideo Kawanishi, Eiichiro Niikura, Mao Yamamoto, Shoichiro Takeda
    • Journal Title

      Appl. Phys. Lett 89,25

      Pages: 251107-251107

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Extremely weak surface emission from (0001) c-plane AlGaN multiple quantum well structure in deep-ultraviolet spectral region2006

    • Author(s)
      Hideo Kawanishi, Masanori Senuma, Mao Yamamoto, Eiichiro Niikura, Takeaki Nukui
    • Journal Title

      Appl. Phys. Lett 89,8

      Pages: 81121-81121

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Anisotropic polarization characteristics of lasing and spontaneous surface and edge emissions from deep-ultraviolet (λ〓240 nm) AlGaN multiple-quantum-well lasers2006

    • Author(s)
      Hideo Kawanishi, Masanori Senuma, Takeaki Nukui
    • Journal Title

      Appl Phys. Lett 89,4

      Pages: 41126-41126

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Experimental energy difference between heavy- or light-hole valence band and crystal-field split-off-hole valence band in Al_x GaN_<1-x> N2006

    • Author(s)
      Hideo Kawanishi, Eiichiro Niikura, Mao Yamamoto, Shoichiro Takeda
    • Journal Title

      Appl. Phys. Lett, 89・25

      Pages: 251107-251107

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Extremely weak surface emission from (0001) c-plane AlGaN multiple quantum well structure in deep-ultraviolet spectral region2006

    • Author(s)
      Hideo Kawanishi, Eiichiro Niikura, Mao Yamamoto
    • Journal Title

      Appl. Phys. Lett, 89・8

      Pages: 81121-81121

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Anisotropic polarization characteristics of lasing and spontaneous surface and edge emissions from deep-ultraviolet ( λ = 240 nm) AlGaN multiple-quantum-well lasers2006

    • Author(s)
      Hideo Kawanishi, Masanori Senuma, Takeaki Nukui
    • Journal Title

      Appl. Phys. Lett, 89・4

      Pages: 41126-41126

    • Related Report
      2006 Annual Research Report
  • [Journal Article] 深紫外AlGaN多重量子井戸半導体レーザーの工学的異方特性2006

    • Author(s)
      川西英雄, 瀬沼正憲, 貫井猛晶
    • Journal Title

      日本工学会(応用物理学会) 35巻・5号

      Pages: 265-267

    • Related Report
      2006 Annual Research Report
  • [Journal Article] 紫外AlGaN多重量子井戸型半導体レーザ光の光学的異方特性2006

    • Author(s)
      川西, 瀬沼, 貫井
    • Journal Title

      光学(Japanese J.Optics) 35・5(掲載予定)

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Anisotropic polarization characteristics of lasing and spontaneous surface and edge emission from deep-ultra violet (λ≒240nm) AlGaN multiple-quantum-well lasers2006

    • Author(s)
      H.Kawanishi, M.Senuma, T.Nukui
    • Journal Title

      Appl.Phys.Lett (掲載予定)

    • Related Report
      2005 Annual Research Report
  • [Journal Article] 光励起によるAlGaN多重量子井戸型深紫外レーザーの発振特性-発振波長域240~ 360nm2005

    • Author(s)
      川西英雄、高野隆好、瀬沼正憲、貫井猛晶
    • Journal Title

      応用物理 第74巻第11号

      Pages: 1462-1462

    • NAID

      10016763487

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] 光励起によるAlGaN多重量子井戸型深紫外レーザの発振特性-発振波長240〜360nm-2005

    • Author(s)
      川西, 高野, 瀬沼, 貫井
    • Journal Title

      応用物理 74・11

      Pages: 1458-1462

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Relationship between Excess Ga and Residual Oxides in Amorphous GaN Films Deposited by Compound Source Molecular Beam Epitaxy2005

    • Author(s)
      N.Obinata, K.Sugimoto, K.Ijima, M.Ishibashi, S.Egawa, T.Honda, H.Kawanishi
    • Journal Title

      Japan.J.Appl.Phys. 44・12

      Pages: 8432-8434

    • NAID

      10016958670

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Structure and Properties of Deep-UV AlGaN MQW Laser

    • Author(s)
      Hideo Kawanishi
    • Journal Title

      Proceedings of iNOW2008 発行中

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Invesigation on Conductivity at the Gan/AIN/Sic Subsrate interface for Vertical Nitraide Power FETs

    • Author(s)
      Yuu Wakamiya
    • Journal Title

      Physica Status Solidi(to be published)

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Presentation] AlGaN系深紫外半導体レーザの現状と課題2010

    • Author(s)
      川西英雄
    • Organizer
      第115回微小光学研究会
    • Place of Presentation
      東京
    • Related Report
      2009 Annual Research Report
  • [Presentation] Lasing characteristics of deep-UV and UV AlGaN MQW lasers operating from 230nm to 356nm spectral region2009

    • Author(s)
      川西英雄
    • Organizer
      APWS2009
    • Place of Presentation
      中国・長家界
    • Related Report
      2009 Annual Research Report
  • [Presentation] Epitaxial Growth of High Quality AlN on SiC or Al_2O_3 Substrate by Alternate Source-Feeding Low Pressure Metal-Organic Vapor Phase Epitaxy2009

    • Author(s)
      T.Takeda, H.Kawanishi, H.Anzai, T.Nakadate
    • Organizer
      APWS2009
    • Place of Presentation
      中国・長家界
    • Related Report
      2009 Annual Research Report
  • [Presentation] Epitaxial Growth of High Quality AlN on SiC or Al_2O_3 Substrate by Alternate Source-Feeding Low Pressure Metal-Organic Vaper Phase Epitaxy2009

    • Author(s)
      T.Nakadate, T.Takeda, H.Kawashi
    • Organizer
      ICNS-8
    • Place of Presentation
      韓国・済州島
    • Related Report
      2009 Annual Research Report
  • [Presentation] Electroconductive control of AlGaN crystal growth on(0001)Al_2O_3 substrate2009

    • Author(s)
      T.Takeda, T.Nakadate, H.Anzai, H.Kawanishi
    • Organizer
      ICNS-8
    • Place of Presentation
      韓国・済州島
    • Related Report
      2009 Annual Research Report
  • [Presentation] Lasing characteristics of deep-UV and UV AlGaN MQW lasers operating from 230nm to 356nm spectral region2009

    • Author(s)
      川西英雄
    • Organizer
      WOCSDICE 2009
    • Place of Presentation
      Spain Maraga
    • Related Report
      2009 Annual Research Report
  • [Presentation] 交互供給エピタキシャル成長法と深紫外AlGaN多重量子井戸半導体レーザの真性光学異方特性(シンポジウム)2009

    • Author(s)
      川西英雄
    • Organizer
      応用物理学会
    • Place of Presentation
      富山
    • Related Report
      2009 Annual Research Report
  • [Presentation] 高温AlNあるいは低温AlNによるAlGaNエピタキシャル層の結晶品質の差違(一般講演)2009

    • Author(s)
      武田, 中館, 川西
    • Organizer
      応用物理学会
    • Place of Presentation
      富山
    • Related Report
      2009 Annual Research Report
  • [Presentation] Crystal quality control of AlN template grown on SiC substrate using (AlN/GaN) multi-buffer layer and alternate source-Feeding Mo-VPE2008

    • Author(s)
      Hideo Kawanishi, Tomohito Takeda, Yusuke Tsutagawa, Fumio Hasegawa
    • Organizer
      2nd International Symposium on Growth of III-Nitrides (ISGN-2)
    • Place of Presentation
      Shuzenji, Shizuoka, Japan
    • Related Report
      2009 Final Research Report
  • [Presentation] Extremely Small Edge Dislocation Density of AlN Template Grown on 4H-SiC Substrate by ASFE-MOVPE with (AlN/GaN) MBL Structure2008

    • Author(s)
      Hideo Kawanishi, Tomohito Takeda, Yusuke Tsutagawa
    • Organizer
      14th Inernational Conference on Metal Organic Vapor Phase Epitaxy
    • Place of Presentation
      Metz, France
    • Related Report
      2009 Final Research Report
  • [Presentation] Experimental weak surface emission from (0001) c-lane AlGaN multiple quantum well structure in deep-ultaraviolet spectral region2008

    • Author(s)
      Hideo Kawanishi
    • Organizer
      Workshops on Frontier Optoelectronic Materials and Devices, T7
    • Place of Presentation
      Hakone, Kanagawa, Japan
    • Related Report
      2009 Final Research Report
  • [Presentation] Structure and Properties of Deep-UV AlGaN MQW Laser2008

    • Author(s)
      Hideo Kawanishi
    • Organizer
      iNOW2008
    • Place of Presentation
      山梨 河口湖
    • Related Report
      2008 Annual Research Report
  • [Presentation] Extremely Small Edge Dislocation Density of AIN Template Grown on 4H-SiC Substrate by ASFE-MOVPE with (AlN/GaN) MBL Structure2008

    • Author(s)
      Hideo Kawanishi
    • Organizer
      IC-MOVPE 2008
    • Place of Presentation
      フランス、Metz
    • Related Report
      2008 Annual Research Report
  • [Presentation] Crystal Quality Control of AIN Template Grown on SiC Substrate using (AlN/GaN)Multi-Buffer Layer and Alternate Source-Feeding MO-VPE2008

    • Author(s)
      Hideo Kawanishi
    • Organizer
      2nd ISGN-2008
    • Place of Presentation
      静岡、修善寺
    • Related Report
      2008 Annual Research Report
  • [Presentation] High Quality AIN Epitaxial Layer Grown on Sic or A12O3Substrate by Alternate Source-Feeding Low Pressure Metal-Organic Vapor Phase Epitaxy2008

    • Author(s)
      Hideo Kawanishi
    • Organizer
      IWN-2008
    • Place of Presentation
      スイス、モントルー
    • Related Report
      2008 Annual Research Report
  • [Presentation] Experimental weak surface emission from (0001) c-lane AIGaN multiple quantum well structure in deep-ultaraviolet spectral region2008

    • Author(s)
      Hideo Kawanishi,
    • Organizer
      Worksshops on Frontier Optoelectronic Materialsand Devices
    • Place of Presentation
      Hakone,Kanagawa,Japan
    • Related Report
      2007 Annual Research Report
  • [Presentation] Reduction of Threading Dislocations in AlGan/AIN/SiC Epitxial Layers by Tensile Strain in a-Axis Induced with the (AIN/GaN) Multi-Buffer-Layer2007

    • Author(s)
      Kouichi Murakawa, Fumio Hasegawa, Hideo Kawanishi
    • Organizer
      7th International Conference of Nitride semiconductors
    • Place of Presentation
      MP29, MGM Grand Hotel, Las Vegas, Nevada, USA
    • Related Report
      2009 Final Research Report
  • [Presentation] 7th International Conference of Nitride semiconductors, MP322007

    • Author(s)
      Eiichiro Niikura, Koichi Murakawa, Shoichiro Takeda, Fumio Hasegawa, Hideo Kawanishi
    • Organizer
      7th International Conference of Nitride semiconductors
    • Place of Presentation
      MP32, MGM Grand Hotel, Las Vegas, Nevada, USA
    • Related Report
      2009 Final Research Report
  • [Presentation] Anisotropic Polarization of Deep-UV Lasing and Spontaneous Surface and Edge Emissions from c- and m-plane AlGaN2007

    • Author(s)
      Hideo Kawanishi, Eiichiro Niikura, Masanori Senuma, Shoichiro Takeda
    • Organizer
      The 3rd Asia-Pacific Workshop on Widegap Semiconductors
    • Place of Presentation
      MO1-4, Jeonju Core Riviera Hotel, Jeonju, Korea
    • Related Report
      2009 Final Research Report
  • [Presentation] Dislocation Reduction in AIN Template grown on SiC by Tensile Strain induced by (AIN/GaN) Multi-Buffer-Layer2007

    • Author(s)
      Kouichi Murakawa, Eiichiro Niikura, Fumio Hasegawa, Hideo Kawanishi
    • Organizer
      The 3rd Asia-Pacific Workshop on Widegap Semiconductors
    • Place of Presentation
      PO-9, Jeoniju Core Riviera hotel, Jeonju, Korea
    • Related Report
      2009 Final Research Report
  • [Presentation] Reduction of Point Defects in N-AlGaN by an Altenate Source Feeding Metalorganic Vapor Phase Epitaxy2007

    • Author(s)
      Kenichi Isono, Eiichiro Niikura, Kouichi Murakawa, Fumio Hasegawa, Hideo Kawanishi
    • Organizer
      he 3rd Asia-Pacific Workshop on Widegap Semiconductors
    • Place of Presentation
      PO-13, Jeoniju Core Riviera hotel, Jeonju, Korea
    • Related Report
      2009 Final Research Report
  • [Presentation] M-mode lasing and anisotropic polarization property of AIGaN multiple quantum well lasers in deep-ultraviolet spectral region2007

    • Author(s)
      Hideo Kawanishi, Masanori Senuma, Takeaki Nukui
    • Organizer
      SPIE Photonics West
    • Place of Presentation
      San Jose, California, USA
    • Related Report
      2009 Final Research Report
  • [Book] Wide Bandgap Semiconductor(Mechanical and Thermal Properties of Wide Semiconductors)2007

    • Author(s)
      Takahashi, Yoshikawa, Hasegawa
    • Publisher
      Springer
    • Related Report
      2009 Final Research Report
  • [Book] ワイドギャップ半導体光・電子デバイス2006

    • Author(s)
      高橋、吉川、長谷川
    • Publisher
      共立出版
    • Related Report
      2009 Final Research Report
  • [Book] ワイドキャップ半導体光・電子デバイス(第二章編集、2.2.4節、5.2.7節執筆)2006

    • Author(s)
      監修・高橋清, 編著/長谷川文夫, 吉川昭彦
    • Total Pages
      421
    • Publisher
      森北出版
    • Related Report
      2006 Annual Research Report
  • [Remarks]

    • URL

      http://www.ns.kogakuin.ac.jp/~wwc1048/

    • Related Report
      2009 Final Research Report
  • [Remarks] ホームページ

    • URL

      http://www.ns.kogakuin.ac.jp/~wwc1048/

    • Related Report
      2009 Annual Research Report
  • [Remarks] ホームページ

    • URL

      http://www.ns.kogakuin.ac.jp/~wwc1048/

    • Related Report
      2008 Annual Research Report
  • [Remarks]

    • URL

      http://www.ns.kogakuin.ac.jp/~wwc1048/

    • Related Report
      2007 Annual Research Report
  • [Patent(Industrial Property Rights)] 窒化物半導体結晶の成長法、成長装置、および、プログラム2009

    • Inventor(s)
      橋本英喜、堀内明彦、川西英雄
    • Industrial Property Rights Holder
      本田技研工業、川西英雄
    • Filing Date
      2009-04-23
    • Related Report
      2009 Final Research Report
  • [Patent(Industrial Property Rights)] 窒化物半導体結晶の成長法、成長装置、および、プログラム2005

    • Inventor(s)
      橋本英喜、堀内明彦、川西英雄
    • Industrial Property Rights Holder
      本田技研工業、川西英雄
    • Filing Date
      2005-08-31
    • Related Report
      2009 Final Research Report
  • [Patent(Industrial Property Rights)] 窒化物半導体結晶の成長2005

    • Inventor(s)
      橋本 英喜, 堀内 明彦, 川西 英雄
    • Industrial Property Rights Holder
      本田技研工業, 川西 英雄
    • Filing Date
      2005-08-31
    • Related Report
      2005 Annual Research Report
  • [Patent(Industrial Property Rights)] Growth of Nitrade Semiconductor Crystals2004

    • Inventor(s)
      H. Hashimoto, A. Horiuchi, H. Kawanishi
    • Industrial Property Rights Holder
      HONDA MOTOR CO.LTD, H. Kawanishi
    • Filing Date
      2004-08-31
    • Related Report
      2009 Final Research Report
  • [Patent(Industrial Property Rights)] Growth of Nitrade Semiconductor Crystals

    • Inventor(s)
      H. Hashimoto, A. Horiuchi, H. Kawanishi
    • Industrial Property Rights Holder
      HONDA MOTOR CO.LTD, H. Kawanishi
    • Related Report
      2009 Final Research Report

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Published: 2005-04-01   Modified: 2016-04-21  

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