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Development of Direct Injection Multi-gas ICP and Its Application of Elemental Analysis

Research Project

Project/Area Number 17350034
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Analytical chemistry
Research InstitutionTokyo Institute of Technology

Principal Investigator

OKINO Akitoshi  Tokyo Institute of Technology, Interdisciplinary Graduate School of Science and Engineering, Associate Professor (60262276)

Co-Investigator(Kenkyū-buntansha) HOTTA Eiki  Tokyo Institute of Technology, Interdisciplinary Graduate School of Science and Engineering, Professor (70114890)
KAWAMURA Tohru  Tokyo Institute of Technology, Interdisciplinary Graduate School of Science and Engineering, Associate Professor (10370214)
WATANABE Masato  Tokyo Institute of Technology, Interdisciplinary Graduate School of Science and Engineering, Assistant Professor (20251663)
Project Period (FY) 2005 – 2007
Project Status Completed (Fiscal Year 2007)
Budget Amount *help
¥15,580,000 (Direct Cost: ¥14,800,000、Indirect Cost: ¥780,000)
Fiscal Year 2007: ¥3,380,000 (Direct Cost: ¥2,600,000、Indirect Cost: ¥780,000)
Fiscal Year 2006: ¥4,200,000 (Direct Cost: ¥4,200,000)
Fiscal Year 2005: ¥8,000,000 (Direct Cost: ¥8,000,000)
KeywordsInductively Coupled Plasma / Atmospheric Plasma / Multi-Gas Plasma / Helium / Argon / Atomic Emission Spectrometry / Mass Spectrometry / ICP / 空気 / 元素分析
Research Abstract

Inductively coupled plasma mass spectrometry(ICP-MS) and ICP atomic emission spectrometry (ICP-AES) using argon ICP as an ionization or an excitation source have been widely utilized for trace elemental analysis. Unfortunately, it was difficult to excite high ionization potential elements because the ionization ability of argon plasma is not enough high. To overcome this problem, development of other powerful plasma sources, for example helium ICP, are expected.
In our research group, a new direct injection multi-gas ICP source for MS and AES has been developed. With the new ICP source, not only Ar but He, O_2, N_2, CO_2, N_2O, air and their mixture plasmas can be stably generated in atmospheric pressure. The torch consists of coaxial three quartz glass tube structure and the cooling gas, the plasma gas and the carrier gas flow between the tubes. To generate an adequate vortex flow at the plasma generating region even when helium gas is used, the torch has smaller gas inlet and short to … More rch configuration. Helium has about nine times higher kinematic viscosity than other gases so the vortex flow of helium easily turn into the laminar flow. It is apprehended that the cooling gas may immix into the plasma and it cause increasing of background emission for AES and background ion for MS. In this study, effect of the cooling gas kind and the flow rate on the emission properties in Ar and He ICP are investigated. The radial emission intensities of N_2, Ar and He are measured. As a result, it was found that when appropriate gas and flow rate are chosen, mixture of not only cooling gas but atmosphere into the plasma are reduced.
Furthermore, aqueous solutions can be directly introduced into the plasma like DIN (direct injection nebulize) or DIHEN (direct injection high-efficiency nebulizer) using conventional nebulizers. The new torch has a support gas flow around the nebulized solutions to reduce diffusion of the solutions into the plasma. As a result, the diffusion angle of the injected solutions effectively reduced. Then the emission intensities from the sample are increased and the experimental conditions for stable generation of plasmas with direct injection are expanded. The spectroscopic characteristics of the new direct injection multi-as ICP source are investigated. Less

Report

(4 results)
  • 2007 Annual Research Report   Final Research Report Summary
  • 2006 Annual Research Report
  • 2005 Annual Research Report
  • Research Products

    (54 results)

All 2008 2007 2006 2005 Other

All Journal Article (8 results) (of which Peer Reviewed: 3 results) Presentation (31 results) Book (2 results) Remarks (2 results) Patent(Industrial Property Rights) (11 results)

  • [Journal Article] Fundamental and control of Bio-films2008

    • Author(s)
      Akitoshi, Okino, Hidekazu, Miyahara
    • Journal Title

      NTS Publishing

      Pages: 190-214

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] プラズマと分光分析 分光分析用の新しいプラズマ源2007

    • Author(s)
      宮原秀一, 沖野晃俊
    • Journal Title

      分光研究 56

      Pages: 266-276

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] New Plasma Sources for Spectroscopic Measurement2007

    • Author(s)
      Hidekazu, Miyahara, Akitoshi, Okino
    • Journal Title

      Journal of the Spectroscopical Society of Japan 56

      Pages: 266-276

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Plasma Energy-Atmospheric Gas Insulated Plasma2007

    • Author(s)
      Akitosshi, Okino
    • Journal Title

      JSPF, Nippon Jitsugyo Publishing

      Pages: 38-38

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] プラズマと分光分析 分光分析用の新しいプラズマ源2007

    • Author(s)
      宮原秀一 他
    • Journal Title

      分光研究 56

      Pages: 266-276

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 元素分析用マルチガス誘導結合プラズマ源の開発2006

    • Author(s)
      宮原秀一, 他
    • Journal Title

      ぶんせき 2006

      Pages: 578-580

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Development of Multi-gas ICP for Elemental Analysis2006

    • Author(s)
      Akitoshi, Okino, Hidekazu, Miyahara
    • Journal Title

      Bunseki 11

      Pages: 578-580

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] 元素分析用マルチガス誘導結合プラズマ源の開発2006

    • Author(s)
      沖野晃俊, 宮原秀一
    • Journal Title

      ぶんせき 2006・11

      Pages: 578-580

    • NAID

      10019373716

    • Related Report
      2006 Annual Research Report
  • [Presentation] 微少量試料分析用ドロプレット試料導入ヘリウム誘導結合プラズマの基本特性2007

    • Author(s)
      目黒太一, 他
    • Organizer
      電気学会プラズマ研究会
    • Place of Presentation
      同志社大学
    • Year and Date
      2007-12-21
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Fundamental Properties of Droplet Direct Injection Helium ICP2007

    • Author(s)
      T., Meguro, H., Miyahara, Y., Nagata, E., Hotta, A., Okino
    • Organizer
      IEEJ Plasma Symposium
    • Place of Presentation
      Kyoto
    • Year and Date
      2007-12-21
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 微少量試料分析のためのパルス同期プラズマ分析システム2007

    • Author(s)
      沖野晃俊, 他
    • Organizer
      東北大学金属材料研究所ワークショップ
    • Place of Presentation
      東北大学金属材料研究所
    • Year and Date
      2007-12-03
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] Pulse Synchronized Plasma Analysis System for Nano Liter Analysis2007

    • Author(s)
      A., Okino, H., Miyahara
    • Organizer
      Workshop of Institute for Materials Research
    • Place of Presentation
      Sendai
    • Year and Date
      2007-12-03
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Multi-gas high purity plasma source for reduce to atmospheric plasma processing2007

    • Author(s)
      H. Miyahara, et. al.
    • Organizer
      The Sixth Asian-European International Conference on Plasma Surface Engineering
    • Place of Presentation
      長崎
    • Year and Date
      2007-09-24
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Multi-gas high purity plasma source for reduce to atmospheric plasma processing2007

    • Author(s)
      H., Miyahara, T., Kageyasu, K., Takimoto, E., Hotta, A., Okino
    • Organizer
      The Sixth Asian-European International Conference on Plasma Surface Engineering
    • Place of Presentation
      Nagasaki, Japan
    • Year and Date
      2007-09-24
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Fundamental Characteristics of Pulse Synchronized ICP System for Nano-, Pico Liter Analysis2007

    • Author(s)
      Hidekazu Miyahara, et. al.
    • Organizer
      Colloquium Spectroscopicum Internationale XXXV
    • Place of Presentation
      Xiamen, China
    • Year and Date
      2007-09-23
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Multi-gas microplasma source for trace elemental analysis2007

    • Author(s)
      H., Miyahara, Y., Nagata, T., Meguro, E., Hotta, R., Shimada, A., Okino
    • Organizer
      CSI XXXV
    • Place of Presentation
      Xiamen, China
    • Year and Date
      2007-09-23
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] ドロプレット試料導入パルス同期ICPの基本特性2007

    • Author(s)
      目黒太一, 他
    • Organizer
      日本分析化学会第56年会
    • Place of Presentation
      徳島大学
    • Year and Date
      2007-09-19
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Fundamental Property of Pulse Synchronized Plasma Analysis System2007

    • Author(s)
      T., Meguro. H., Mivahara., Y., Nagata., E., Hotta, A., Okino
    • Organizer
      56th Annual meeting of Analytical Chemistry Society Japan
    • Place of Presentation
      Tokushima
    • Year and Date
      2007-09-19
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Fundamental Characteristics of Pulse Synchronized ICP System for Nano-, Pico Liter Analysis2007

    • Author(s)
      Akitoshi Okino, et. al.
    • Organizer
      EURO Analysis XIV
    • Place of Presentation
      アントワープ,ベルギー
    • Year and Date
      2007-09-10
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Fundamental Characteristics of Pulse Synchronized ICP System for Nano-, Pico Liter Analysis2007

    • Author(s)
      A., Okino, H., Miyahara, Y., Nagata, T., Meguro, K., Kumagai, E., Hotta
    • Organizer
      EURO Analysis XIV
    • Place of Presentation
      Antwerp, Belgium
    • Year and Date
      2007-09-10
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Fundamental Characteristics of Pulse Synchronized ICP System for Nano-, Pico Liter Malysis2007

    • Author(s)
      Akitoshi Okino, et. al.
    • Organizer
      EURO Analysis XIV
    • Place of Presentation
      アントワープ,ベルギー
    • Year and Date
      2007-09-10
    • Related Report
      2007 Annual Research Report
  • [Presentation] Spectroscopic Measurements of Pulse Operated Multi-Gas Inductively Coupled Plasma Source2007

    • Author(s)
      A., Okino, H., Miyahara, T., Kageyasu, K., Takimoto, E., Hotta
    • Organizer
      ESCAMPIG XVII
    • Place of Presentation
      Lecce, Italy
    • Year and Date
      2007-07-12
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 微少量試料分析用パルス同期プラズマ分析システム2007

    • Author(s)
      目黒太一, 他
    • Organizer
      プラズマ分光分析研究会2007年筑波セミナーイーブニングセミナー
    • Place of Presentation
      産業技術総合研究所
    • Year and Date
      2007-07-05
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] Pulse Synchronized Plasma Analysis System for Nano Liter Analysis2007

    • Author(s)
      T., Meguro, H., Miyahara, Y., Nagata, E., Hotta, A., Okino
    • Organizer
      Tsukuba Seminar
    • Place of Presentation
      Tsukuba
    • Year and Date
      2007-07-05
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] ドロプレット試料導入パルス同期ICP分析システムの開発2007

    • Author(s)
      宮原秀一, 他
    • Organizer
      第68回分析化学討論会
    • Place of Presentation
      宇都宮大学
    • Year and Date
      2007-05-19
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development of Pulse Synchronized Plasma Analysis System using Droplet Injection Nebulizer2007

    • Author(s)
      H., Miyahara, T., Meguro, Y., Nagata, E., Hotta, A., Okino
    • Organizer
      68th Bunsekikagaku Touronkai
    • Place of Presentation
      Utsunomiya
    • Year and Date
      2007-05-19
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Pulse Synchronized ICP System using Direct Droplet Injection Nebulizer for Nano-Liter Analysis2007

    • Author(s)
      A. Okino, et. al.
    • Organizer
      European Winter Conference on Plasma Spectrochemistry
    • Place of Presentation
      Taormina, Italy
    • Year and Date
      2007-02-18
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Pulse Synchronized ICP System using Direct Droplet Injection Nebulizer for Nano-Liter Analysis2007

    • Author(s)
      A., Okino, K., Takimoto, H., Miyahara, T., Kageyasu, E., Hotta
    • Organizer
      European WC. on Plasma Spectrochemistry
    • Place of Presentation
      Taormina, Italy
    • Year and Date
      2007-02-18
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Droplet Direct Injection Nebulizer for Nano-Liter Analysis2006

    • Author(s)
      H. Miyahara, et. al.
    • Organizer
      Asia-Pacific Winter Conference on Plasma Spectrochemistry
    • Place of Presentation
      Bngkok, Thailand
    • Year and Date
      2006-11-27
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Droplet Direct Injection Nebulizer for Nano-Liter Analysis Thailand2006

    • Author(s)
      H., Miyahara, K., Takimoto, T., Kageyasu, E., Hotta, A., Okino
    • Organizer
      Asia-Pacific Winter Conf. on Plasma Spectrochem
    • Place of Presentation
      Bngkok
    • Year and Date
      2006-11-27
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Droplet Direct Injection System for Inductively Coupled Plasma Source2006

    • Author(s)
      Kazuyasu Takimoto, et. al.
    • Organizer
      33rd The Federation of Analytical Chemistry and Spectroscopy Societies
    • Place of Presentation
      Orlando, USA
    • Year and Date
      2006-09-24
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Droplet Direct Injection System for Inductively Coupled Plasma Source2006

    • Author(s)
      K., Takimoto, T., Kageyasu, H., Miyahara, W., Kumagai, E., Hotta, A., Okino
    • Organizer
      FACSS 2006
    • Place of Presentation
      Orlando, USA
    • Year and Date
      2006-09-24
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Low Pressure Multi-Gas Inductively Coupled Plasma Source2006

    • Author(s)
      Taichi Kageyasu, et. al.
    • Organizer
      プラズマ・パルスパワー合同研究会
    • Place of Presentation
      Kauai, Hawaii
    • Year and Date
      2006-08-07
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Low-Pressure Multi-Gas Inductively Coupled Plasma Source2006

    • Author(s)
      T., Kageyasu, H., Miyahara, K., Takimoto, E., Hotta, A., Okino
    • Organizer
      IEEJ Plasma and Pulsed-power Joint meeting, Aug.7, 2006
    • Place of Presentation
      Kauai, Hawaii
    • Year and Date
      2006-08-07
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Spectroscopic Measurements of Pulse Operated Multi-Gas Inductively Coupled Plasma Source2006

    • Author(s)
      Akitoshi Okino, et. al.
    • Organizer
      European Conference on the Atomic and Molecular Physics of Ionized Gases
    • Place of Presentation
      Lecce, Italy
    • Year and Date
      2006-07-12
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Pulse Operated Multi-Gas Inductively Coupled Plasma Source2006

    • Author(s)
      Akitoshi Okino, et. al.
    • Organizer
      2006 IEEE Int. Conf. on Plasma Science
    • Place of Presentation
      Traverse City, USA
    • Year and Date
      2006-06-04
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Spectroscopic characteristics of pulse operated high power multi-gas inductively coupled plasma2006

    • Author(s)
      H. Miyahara, et. al.
    • Organizer
      2006 Spring annual meeting of spectroscopy
    • Place of Presentation
      東京工業大学
    • Year and Date
      2006-05-16
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Spectroscopic characteristics of pulse operated high power multi-gas ICP2006

    • Author(s)
      H., Miyahara, T., Kageyasu, K., Takimoto, E., Hotta, R., Shimada, A., Okino
    • Organizer
      Spring annual meeting of spectroscopy
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2006-05-16
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Improvement of Direct Injection Multi-Gas ICP Source for AES and MS2005

    • Author(s)
      Akitoshi Okino, et. al.
    • Organizer
      32nd FACSS and 51st ICASS
    • Place of Presentation
      Quebec City, Canada
    • Year and Date
      2005-10-09
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Book] バイオフィルムの基礎と制御2008

    • Author(s)
      沖野晃俊(分担)
    • Publisher
      NTS
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Book] カラー図解 プラズマエネルギーのすべて2007

    • Author(s)
      沖野晃俊(分担)
    • Total Pages
      38
    • Publisher
      日本実業出版社
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Remarks] 「研究成果報告書概要(和文)」より

    • URL

      http://www.es.titech.ac.jp/okino/index.html

    • Related Report
      2007 Final Research Report Summary
  • [Remarks] 沖野研究室ホームページ

    • URL

      http://www.es.titech.ac.jp/okino/index.html

    • Related Report
      2007 Annual Research Report
  • [Patent(Industrial Property Rights)] プラズマ処理装置及びプラズマ処理方法2007

    • Inventor(s)
      沖野晃俊, 宮原秀一, 後藤優, 永田洋一, 目黒太一, 中島尚紀, 熊谷航
    • Industrial Property Rights Holder
      東京工業大学
    • Industrial Property Number
      2007-253796
    • Filing Date
      2007-09-28
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 高周波整合器2007

    • Inventor(s)
      沖野晃俊, 宮原秀一, 景安泰千
    • Industrial Property Rights Holder
      東京工業大学
    • Industrial Property Number
      2007-001926
    • Filing Date
      2007-01-10
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 高周波整合器2007

    • Inventor(s)
      沖野晃俊, 宮原秀一, 景安泰千
    • Industrial Property Rights Holder
      東京工業大学
    • Filing Date
      2007-01-10
    • Related Report
      2006 Annual Research Report
  • [Patent(Industrial Property Rights)] 処理装置および処理方法2006

    • Inventor(s)
      鐘ケ江正巳, 沖野晃俊, 宮原秀一
    • Industrial Property Rights Holder
      東京工業大学
    • Industrial Property Number
      2006-172388
    • Filing Date
      2006-06-22
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Patent(Industrial Property Rights)] プラズマ源, 処理装置及び処理方法2006

    • Inventor(s)
      沖野晃俊, 宮原秀一, 鐘ケ江正巳
    • Industrial Property Rights Holder
      東京工業大学
    • Industrial Property Number
      2006-196931
    • Filing Date
      2006-07-19
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 処理装置および処理方法2006

    • Inventor(s)
      鐘ヶ江正巳, 沖野晃俊, 宮原秀一
    • Industrial Property Rights Holder
      東京工業大学
    • Filing Date
      2006-06-22
    • Related Report
      2006 Annual Research Report
  • [Patent(Industrial Property Rights)] プラズマ源,処理装置及び処理方法2006

    • Inventor(s)
      沖野晃俊, 宮原秀一, 鐘ヶ江正巳
    • Industrial Property Rights Holder
      東京工業大学
    • Filing Date
      2006-07-19
    • Related Report
      2006 Annual Research Report
  • [Patent(Industrial Property Rights)] プラズマ分析システム2005

    • Inventor(s)
      沖野晃俊, 宮原秀一, 大場吾郎
    • Industrial Property Rights Holder
      東京工業大学
    • Industrial Property Number
      2005-181643
    • Filing Date
      2005-06-22
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 液体導入プラズマシステム2005

    • Inventor(s)
      沖野晃俊, 宮原秀一, 大場吾郎
    • Industrial Property Rights Holder
      東京工業大学
    • Industrial Property Number
      2007-181642
    • Filing Date
      2005-06-02
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Patent(Industrial Property Rights)] プラズマ分析システム2005

    • Inventor(s)
      沖野 晃俊, 宮原 秀一, 大場 吾郎
    • Filing Date
      2005-06-22
    • Related Report
      2005 Annual Research Report
  • [Patent(Industrial Property Rights)] 液体導入プラズマシステム2005

    • Inventor(s)
      沖野 晃俊, 宮原 秀一, 大場 吾郎
    • Filing Date
      2005-06-22
    • Related Report
      2005 Annual Research Report

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Published: 2005-04-01   Modified: 2016-04-21  

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