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Synhesis of Semiconducting Silicides Thin Films far Phothnic Crystals and Investigation of Optical Circuit functions

Research Project

Project/Area Number 17360011
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionKyoto University

Principal Investigator

MAEDA Yoshihito  Kyoto University, Graduate School of Energy Science, Associate Professor (50275286)

Co-Investigator(Kenkyū-buntansha) TERAI Yoshikazu  Osaka University, Graduate Schcol of Engineering, Assistant Professor (90360049)
Project Period (FY) 2005 – 2007
Project Status Completed (Fiscal Year 2007)
Budget Amount *help
¥15,720,000 (Direct Cost: ¥14,700,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2007: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2006: ¥4,300,000 (Direct Cost: ¥4,300,000)
Fiscal Year 2005: ¥7,000,000 (Direct Cost: ¥7,000,000)
KeywordsPhotonic crystal / Semiconducting silicide / Optical circuit / Magnetic silicide / Photonics / Iron silicide / Thin film / Crystal growth / シリコンフォトニクス / 光半導体 / 磁性体フォトニクス / 光磁気効果 / オプトエレクトロニクス
Research Abstract

The optoelectronic integrated circuit (OEIC) on Si substrates which was composed from light emitting devices, photodiodes, light waveguides, some optical computing or logic circuits will be realized in near future. Now optimized materials and material processing are investigating, actively for its prompt realization. The first generation OEICs are composed from hybrid structures where integrated light sources, light detectors and some signal processors are connected with optical fibers. The next generation OEIC will be composed from optical circuits which have some optical performances and computing on Si substrates. In the Si-OEIC, photonic crystals have been expected to be main optical computing units.
In this research project, we have investigated fundamental properties of semiconducting silicides and ferromagnetic silicides towards application to photonic crystals, a high quality thin film synthesis, submicron processes required for fabrication of two dimensional photonic crystals, and analysis method for wave propagation on high index contrast photonic crystals.
For three years project, we have succeeded in synthesis of highly optical grade silicide thin films, establishment of submicron etching processes compatible with Si LSI processes, formation of waveguides on iron silicide photonic crystals, invention of conjugated inversion structures for improvement of coupling efficiency between different index structures, and examination of efficiency of light propagation on iron silicide photonic crystals fabricated in this project. These fruitful results achieved in this project will open Si based photonics using high index contrast materials with excellent optoelectronic functions. Moreover, we have brought these results pioneer area magneto-photonic crystals where light can be controlled by strong magnetic coupling with light (magneto-optical effects).

Report

(4 results)
  • 2007 Annual Research Report   Final Research Report Summary
  • 2006 Annual Research Report
  • 2005 Annual Research Report
  • Research Products

    (168 results)

All 2008 2007 2006 2005 Other

All Journal Article (68 results) (of which Peer Reviewed: 27 results) Presentation (96 results) Book (2 results) Remarks (2 results)

  • [Journal Article] Luminescence properties of β-FeSi_2 and its application to photonics2008

    • Author(s)
      Y. Maeda
    • Journal Title

      Applied Surface Science (印刷中)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Submicron dry-etching behavior of β-FeSi_2 thin films towards fabrication of photonic crystals2007

    • Author(s)
      A. Imai, S. Kunimatsu, K. Akiyama, Y. Terai, and Y. Maeda
    • Journal Title

      Thin Solid Films 515

      Pages: 8162-8165

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Semiconducting β-FeSi_2 towards optoelectronics and photonics2007

    • Author(s)
      Y. Maeda
    • Journal Title

      Thin Solid Films 515

      Pages: 8118-8121

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Photoluminescence enhancement by isolating β-FeSi_2 layer from defective layer2007

    • Author(s)
      Y. Ando, A. Imai, K. Akiyama, Y. Terai and Y. Maeda
    • Journal Title

      Thin Solid Films 515

      Pages: 8133-8135

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Carrier control of β-FeSi_2 by 1.2MeV-Au^<++> ion irradiation2007

    • Author(s)
      T. Jonishi, Y. Ando, A. Imai and Y. Maeda
    • Journal Title

      Thin Solid Films 515

      Pages: 8175-8178

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Nondestructive investigation of β-FeSi_2/Si interface by photoluminescence measurements2007

    • Author(s)
      Y. Terai, Y. Maeda, and Y. Fujiwara
    • Journal Title

      Thin Solid Films 515

      Pages: 8129-8132

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Control of β-FeSi_2/Si interface structure by Cu layer2007

    • Author(s)
      K. Akiyama, M. Itakura, S. Kaneko, H. Funakubo and Y. Maeda
    • Journal Title

      Thin Solid Films 515

      Pages: 8144-8148

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Axial orientation of molecular-beam-epitaxy grown Fe_3Si/Ge hybrid structures and its degradation2007

    • Author(s)
      Y. Maeda, T. Jonishi, K. Narumi, Y. Ando, K. Ueda, M. Kumano, T. Sadoh, and M. Miyao
    • Journal Title

      Appl. Phys. Lett. 91

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] 共役反転格子フォトニック結晶での導波解析2007

    • Author(s)
      國松俊佑, 寺井慶和, 前田佳均
    • Journal Title

      電子情報通信学会技術研究報告.シリコン材料・デバイス 107

      Pages: 39-42

    • NAID

      110006549257

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Fe_3Si/Ge(111)ヘテロエピタキシャル成長の軸配向性の評価2007

    • Author(s)
      平岩佑介, 佐道泰造, 宮尾正信, 鳴海一雅, 前田佳均
    • Journal Title

      電子情報通信学会技術研究報告.シリコン材料・デバイス 107

      Pages: 35-38

    • NAID

      110006549256

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] 強磁性体シリサイド/Geの低温エピタキシャル成長とスピントランジスタ2007

    • Author(s)
      安藤裕一郎, 上田公二, 熊野守, 佐道泰造, 鳴海一雅, 前田佳均, 宮尾正信
    • Journal Title

      電子情報通信学会技術研究報告.シリコン材料・デバイス(Proceedings of the 15th AWAD 2007) 107

      Pages: 221-224

    • NAID

      110006343819

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Submicron dry-etching behavior of β-FeSi_2 thin films towards fabrication of photonic crystals2007

    • Author(s)
      A., Imai, S., Kunimatsu, K., Akiyama, Y., Terai, Y., Maeda
    • Journal Title

      Thin Solid Films 515

      Pages: 8162-8165

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Semiconducting β-FeSi_2 towards optoelectronics and photonics2007

    • Author(s)
      Y., Maeda
    • Journal Title

      Thin Solid Films 515

      Pages: 8118-8121

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Carrier control of β-FeSi_2 by 1.2MeV-Au++ ion irradiation2007

    • Author(s)
      T., Jonishi, Y., Ando, A., Imai, Y., Maeda
    • Journal Title

      Thin Solid Films 515

      Pages: 8175-8178

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Photoluminescence enhancement by isolating β-FeSi_2 layer from defective layer2007

    • Author(s)
      Y., Ando, A.,_Imai, K., Akiyama, Y., Terai, Y., Maeda
    • Journal Title

      Thin Solid Films 515

      Pages: 8133-8135

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Nondestructive investigation of β-FeSi_2/Si interface by photoluminescence2007

    • Author(s)
      Y., Terai, Y., Maeda, Y., Fujiwara
    • Journal Title

      Thin Solid Films 515

      Pages: 8129-8132

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Control of β-FeSi_2/Si interface structure by Cu layer2007

    • Author(s)
      K., Akiyama, M., Itakura, S., Kaneko, H., Funakubo, Y., Maeda
    • Journal Title

      Thin Solid Films 515

      Pages: 8144-8148

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Axial orientation of molecular-beam-epitaxy grown Fe_3Si/Ge hybrid structures and its degradation2007

    • Author(s)
      Y., Maeda, T., Jonishi, N., Narumi, Y., Ando, K., Ueda, M., Kumano, T., Sadoh, M., Miyao
    • Journal Title

      Appl. Phys. Lett 91

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Analysis of wave propagation in conjugated inversion photonic crystals2007

    • Author(s)
      S., Kunimatsu, Y., Terai, Y., Maeda
    • Journal Title

      IEIC Technical Report 107

      Pages: 39-42

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Axial orientation of enitaxial growth of Fe_3Si on Ge(111)2007

    • Author(s)
      Y., Hiraiwa, T., Sadoh, M., Miyao, K., Narumi, Y., Maeda
    • Journal Title

      IEIC Technical Report 107

      Pages: 35-38

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Low temperature epitaxy of ferromagnetic silicide on Ge and spin transistors2007

    • Author(s)
      Y., Ando, K., Ueda, M., Kumano, T., Sadoh, K., Narumi, Y., Maeda, M., Miyao
    • Journal Title

      IEIC Technical Report 107

      Pages: 221-224

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Submicron dry-etching behavior of beta-FeSi2 thin films towards fabrication of photonic crystals2007

    • Author(s)
      A. Imai, S. Kunimatsu, K. Akiyama, Y. Terai and Y. Maeda
    • Journal Title

      Thin Solid Films 515

      Pages: 8162-8165

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Semiconducting beta-FeSi2 towards optoelectronics and photonics2007

    • Author(s)
      Y. Maeda
    • Journal Title

      Thin Solid Films 515

      Pages: 8118-8121

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Axial orientation of molecular-beam-epitaxy grown Fe3Si/Ge hybrid structures and its degradation2007

    • Author(s)
      Y. Maeda, T. Jonishi, K. Narumi, Y. Ando, T. Sadoh, and M. Miyao
    • Journal Title

      Applied Physics Letters 91

      Pages: 171910-171912

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Photoluminescence enhancement by isolating beta-FeSi2 layer from defective layer2007

    • Author(s)
      Y. Ando, A. Imai, K. Akiyama, Y. Terai, and Y. Maeda
    • Journal Title

      Thin Solid Films 515

      Pages: 8133-8135

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Carrier control of beta-FeSi2 by 1.2MeV-Au++ ion irradiation2007

    • Author(s)
      T. Jonishi, Y. Ando, A. Imai and Y. Maeda
    • Journal Title

      Thin Solid Films 515

      Pages: 8175-8178

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Nondestructive investigation of beta-FeSi2/Si interface by photoluminescence measurements2007

    • Author(s)
      Y. Terai, Y. Maeda and Y. Fujiwara
    • Journal Title

      Thin Solid Films 515

      Pages: 8129-8132

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Control of beta-FeSi2/Si interface structure by Cu layer2007

    • Author(s)
      K. Akiyama, M. Itakura, S. Kaneko, H. Funakubo and Y. Maeda
    • Journal Title

      Thin Solid Films 515

      Pages: 8144-8148

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 共役反転格子フォトニック結晶での導波解析2007

    • Author(s)
      國松 俊佑, 寺井 慶和, 前田 佳均
    • Journal Title

      電子情報通信学会技術研究報告.SDM, シリコン材料・デバイス 107

      Pages: 39-42

    • NAID

      110006549257

    • Related Report
      2007 Annual Research Report
  • [Journal Article] Fe3Si/Ge(111)ヘテロエピタキシャル成長の軸配向性の評価2007

    • Author(s)
      平岩 佑介, 佐道 泰造, 宮尾 正信, 鳴海 一雅, 前田 佳均
    • Journal Title

      電子情報通信学会技術研究報告.SDM, シリコン材料・デバイス 107

      Pages: 35-38

    • Related Report
      2007 Annual Research Report
  • [Journal Article] 強磁性体シリサイド/Geの低温エピタキシャル成長とスピントランジスタ2007

    • Author(s)
      安藤 裕一郎, 上田 公二, 熊野 守, 佐道 泰造, 鳴海 一雅, 前田 佳均, 宮尾 正信
    • Journal Title

      電子情報通信学会技術研究報告.SDM, シリコン材料・デバイス(Proc.the 15th AWAD 2007) 107

      Pages: 221-224

    • NAID

      110006343819

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Luminescence of beta-FeSi2 and application to photonics2007

    • Author(s)
      Y. Maeda
    • Journal Title

      Extended Abstracts of Fifth International Symposium on Control of Semiconductor Interfaces

      Pages: 37-38

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 鉄シリサイド・高屈折率フォトニック結晶の作製:反応性イオンエッチングによるサブミクロン微細加工2006

    • Author(s)
      今井章文, 寺井慶和, 前田佳均
    • Journal Title

      (社)応用物理学会シリサイド半導体研究会・技術研究報告 AP-063211

      Pages: 28-41

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Submicron dry-etching behavior of β-FeSi_2 thin films towards fabrication of photonic crystals2006

    • Author(s)
      A. Imai and Y. Maeda
    • Journal Title

      Proc. of Asia-Pacific Conference on Semiconducting Silicides Science and Technology 1

      Pages: 26-27

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Computation of photonic band structure and light propagation in β-FeSi_2 photonic crystals2006

    • Author(s)
      S. Kunimatsu, A. Imai, Y. Ando, and Y. Maeda
    • Journal Title

      Proc. of Asia-Pacific Conference on Semiconducting Silicides Science and Technology 1

      Pages: 54-55

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Semiconducting(β-FeSi_2 towards optoelectronics and photonics2006

    • Author(s)
      Y. Maeda
    • Journal Title

      Proc. of Asia-Pacific Conference on Semiconducting Silicides Science and Technology 1

      Pages: 5-7

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Fe系シリサイドによるフォトニック結晶の作製2006

    • Author(s)
      國松俊佑, 今井章文, 秋山賢輔, 前田佳均
    • Journal Title

      電子情報通信学会技術研究報告.シリコン材料・デバイス 106

      Pages: 7-10

    • NAID

      110005717118

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] β-FeSi_2のイオンビーム合成:アニールによるSi空孔の変化2006

    • Author(s)
      上西隆文, 安藤裕一郎, 前田佳均
    • Journal Title

      電子情報通信学会技術研究報告.シリコン材料・デバイス 106

      Pages: 11-14

    • NAID

      10018438042

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Reactive ion etching of β-FeSi_2/Si and fabrication of two dimensional photonic crystals2006

    • Author(s)
      A. Imai, Y. Ando, K. Akiyama, Y. Terai, and Y. Maeda
    • Journal Title

      Proceedings of the 16th International Microscopic Congress II

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Fabrication of silicide photonic crystals with high index contrast by reactive ion etching2006

    • Author(s)
      A., Imai, Y., Terai, Y., Maeda
    • Journal Title

      Research Report on Semiconducting Silicides, JSAP 063211

      Pages: 28-41

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Submicron dry-etching behavior of β-FeSi_2 thin films towards photonic crystals2006

    • Author(s)
      A., Imai, Y., Maeda
    • Journal Title

      Proceedings of Asia-Pacific Conf. on Semiconducting Silicide Science and Technology (APAC-SILICIDE 2006) 1

      Pages: 26-27

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Computation of photonic band structure and light propagation in β-FeSi_2 photonic crystals2006

    • Author(s)
      S., Kunimatsu, A., Imai, Y., Ando, Y., Maeda
    • Journal Title

      Proceedings of Asia-Pacific Conf. on Semiconducting Silicide Science and Technology (APAC-SILICIDE 2006) 1

      Pages: 54-55

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Semiconducting β-FeSi_2 towards optoelectronic and photonics2006

    • Author(s)
      Y., Maeda
    • Journal Title

      Proceedings of Asia-Pacific Conf. on Semiconducting Silicide Science and Technology (APAC-SILICIDE 2006) 1

      Pages: 5-7

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Fabrication of iron-silicide photonic crystals2006

    • Author(s)
      S., Kunimatsu, A., Imai, K., Akiyama, Y., Maeda
    • Journal Title

      IEIC Technical Report 106

      Pages: 7-10

    • NAID

      110005717118

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Ion-beam synthesis of β-FeSi_2 : Vacancy change by annealing2006

    • Author(s)
      T., Jonishi, Y., Ando, Y., Maeda
    • Journal Title

      IEIC Technical Report 106

      Pages: 11-14

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Reactive ion etching of β-FeSi_2/Si and fabrication of two dimensional photonic crystals2006

    • Author(s)
      A., Imai, Y., Ando, K., Akiyama, Y., Terai, Y., Maeda
    • Journal Title

      Proceedings of the 16th International Microscopic Congress, II

      Pages: 1349-1349

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Submicron dry-etching behavior of beta-FeSi2 thin films towards fabrication of photonic crystals2006

    • Author(s)
      A.Imai, Y.Maeda
    • Journal Title

      Proc. of Asia-Pacific Conference on Semiconducting Silicides Science and Technology I

      Pages: 26-27

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Reactive ion etching of beta-FeSi2/Si and fabrication of two dimensional photonic crystals2006

    • Author(s)
      A.Imai, Y.Ando, K.Akiyama, Y.Terai, Y.Maeda
    • Journal Title

      Proceedings of the 16th International Microscopy Congress II

      Pages: 1349-1349

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Fe系シリサイドによるフォトニック結晶の作製2006

    • Author(s)
      國松 俊佑, 今井 章文, 秋山 賢輔, 前田 佳均
    • Journal Title

      電子情報通信学会技術研究報告(ED,電子デバイス) Vol. 106, No. 378

      Pages: 7-10

    • NAID

      110005717118

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Computation of photonic band structure and light propagation in beta-FeSi2 photonic crystals2006

    • Author(s)
      S.Kunimatsu, A.Imai, Y.Ando, Y.Maeda
    • Journal Title

      Proc. of Asia-Pacific Conference on Semiconducting Silicides Science and Technology I

      Pages: 54-55

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Semiconducting beta-FeSi2 towards optoelectronics and photonics2006

    • Author(s)
      Y.Maeda
    • Journal Title

      Proc. of Asia-Pacific Conference on Semiconducting Silicides Science and Technology I

      Pages: 5-7

    • Related Report
      2006 Annual Research Report
  • [Journal Article] β-FeSi2のイオンビーム合成 : アニールによるSi空孔の変化2006

    • Author(s)
      上西隆文, 安藤裕一郎, 前田佳均
    • Journal Title

      電子情報通信学会技術研究報告(ED,電子デバイス) Vol. 106, No. 378

      Pages: 11-14

    • NAID

      110005717273

    • Related Report
      2006 Annual Research Report
  • [Journal Article] 鉄シリサイド・高屈折率フォトニック結晶の作製:反応性イオンエッチングによるサブミクロン微細加工2006

    • Author(s)
      今井章文
    • Journal Title

      (社)応用物理学会シリサイド半導体研究会・技術研究報告 AP-063211

      Pages: 28-41

    • Related Report
      2005 Annual Research Report
  • [Journal Article] β-FeSi_2の1.55μm発光増強2005

    • Author(s)
      安藤裕一郎, 今井章文, 前田佳均, 寺井慶和, 秋山賢輔
    • Journal Title

      電子情報通信学会技術研究報告(IEIC Technical Report) SDM205-201-223

      Pages: 113-117

    • NAID

      110003488373

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] 環境に優しい光半導体:β-FeSi_22005

    • Author(s)
      前田佳均
    • Journal Title

      日本金属学会誌 まてりあ 44・6

      Pages: 471-476

    • NAID

      10016439626

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] 鉄シリサイド半導体の基礎と応用2005

    • Author(s)
      前田佳均
    • Journal Title

      機能材料 25・9

      Pages: 5-14

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary 2005 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Epitaxial growth of Al-doped(β-FeSi_2 on Si by ion beam synthesis2005

    • Author(s)
      Y. Maeda, Y. Terai, and M. Itakura
    • Journal Title

      Jpn. J. Appl. Phys. 44

      Pages: 2502-2505

    • NAID

      10015704647

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] 1.54μm photoluminescence enhancement in β-FeSi_2 by surface oxidation2005

    • Author(s)
      Y. Maeda and Y. Terai
    • Journal Title

      Jpn. J. Appl. Phys. 44

      Pages: 2492-2495

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] 1.55 μm Photoluminescence enhancement of β-FeSi_22005

    • Author(s)
      Y., Ando, A., Imai, Y., Maeda, Y., Terai, K., Akiyama
    • Journal Title

      IEIC Technical Report 205-201-223

      Pages: 113-117

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Ecologically friendly optical semiconductor : β-FeSi_22005

    • Author(s)
      Y., Maeda
    • Journal Title

      Materia 44-6

      Pages: 471-476

    • NAID

      10016439626

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Fundamental properties of iron silicides and their applications2005

    • Author(s)
      Y., Maeda
    • Journal Title

      Functional Materials 25-9

      Pages: 5-14

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Epitaxial growth of Al-doped β-FeSi_2 on Si by ion beam synthesis2005

    • Author(s)
      Y., Maeda, Y., Terai, Y., Itakura
    • Journal Title

      Jpn. J. Appl. Phys 44

      Pages: 2502-2505

    • NAID

      10015704647

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] 1.54μm photoluminescence enhancement in β-FeSi_2 by surface oxidation2005

    • Author(s)
      Y., Maeda, Y., Terai
    • Journal Title

      Jpn. J. Appl. Phys 44

      Pages: 2492-2495

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] β-FeSi2の1.55μm発光増強2005

    • Author(s)
      安藤裕一郎
    • Journal Title

      電子情報通信学会技術研究報告(IEIC Technical Report) SDM205-201-223

      Pages: 113-117

    • Related Report
      2005 Annual Research Report
  • [Journal Article] 環境にやさしい光半導体:β-FeSi22005

    • Author(s)
      前田佳均
    • Journal Title

      日本金属学会誌 まてりあ 44・6

      Pages: 471-476

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Enhancement of 1.54μm photoluminescence in β-FeSi2 by surface oxidation2005

    • Author(s)
      Y.Terai
    • Journal Title

      Jpn.J.Appl.Phys. 44・4B

      Pages: 2492-2495

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Epitaxial growth of Al-doped β-FeSi2 on Si by ion-beam synthesis2005

    • Author(s)
      Y.Maeda
    • Journal Title

      Jpn.J.Appl.Phys. 44・4B

      Pages: 2502-2505

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Luminescence properties of β-FeSi_2 and its application to photonics

    • Author(s)
      Y., Maeda
    • Journal Title

      Applied Surface Science (in press)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] β-FeSi2の遠赤外分光と発光特性2008

    • Author(s)
      前田佳均, 平岩佑介
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      日本大学
    • Year and Date
      2008-03-30
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] Far-IR study of β-FeSi_2 and photoluminescence properties2008

    • Author(s)
      Y., Maeda, Y., Hiraiwa
    • Organizer
      The 55th JSAP Spring Meeting
    • Place of Presentation
      Nihon University
    • Year and Date
      2008-03-30
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Xeマーカーを用いたFe_3Si/Ge界面での相互拡散の検討2008

    • Author(s)
      平岩佑介, 安藤裕一郎, 佐道泰造, 宮尾正信, 前田佳均
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      日本大学
    • Year and Date
      2008-03-29
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Investigation of interdiffusion at Fe_3Si/Ge by Xe marker2008

    • Author(s)
      Y., Hiraiwa, Y., Ando, T., Sadoh, M., Miyao, Y., Maeda
    • Organizer
      The 55th JSAP Spring Meeting
    • Place of Presentation
      Nihon University
    • Year and Date
      2008-03-29
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Xeマーカーを用いたFe3Ge/Ge界面での相互拡散の検討2008

    • Author(s)
      平岩佑介, 安藤裕一郎, 佐道泰造, 宮尾正信, 前田佳均
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      日本大学
    • Year and Date
      2008-03-29
    • Related Report
      2007 Annual Research Report
  • [Presentation] 共役反転格子フォトニック結晶での導波解析2007

    • Author(s)
      國松俊佑, 寺井慶和, 前田佳均
    • Organizer
      電子情報通信学会, SDM, シリコン材料・デバイス研究会
    • Place of Presentation
      奈良先端科学技術大学
    • Year and Date
      2007-12-24
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Analysis of wave propagation on photonic crystals with conjugated Inversion interface structures2007

    • Author(s)
      S., Kunimatsu, Y., Terai, Y,. Maeda
    • Organizer
      IEIC SDM Meeting
    • Place of Presentation
      Nara Institute Technology
    • Year and Date
      2007-12-24
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 共役反転格子フォトニック結晶での導波解析2007

    • Author(s)
      國松俊祐, 寺井慶和, 前田佳均
    • Organizer
      電子情報通信学会技術研究会.SDM, シリコン材料・デバイス
    • Place of Presentation
      大阪市
    • Year and Date
      2007-12-24
    • Related Report
      2007 Annual Research Report
  • [Presentation] Luminescence of β-FeSi_2 and application to photonics2007

    • Author(s)
      Y. Maeda
    • Organizer
      Fifth International Symposium on Control of Semiconductor Interfaces(ISCSI-V)
    • Place of Presentation
      首都大学東京
    • Year and Date
      2007-11-13
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Diffusion behavior in Fe_3Si/Ge hybrid structures and related degradation of axial orientation2007

    • Author(s)
      Y. Hiraiwa, T. Jonishi, Y. Ando, K. Narumi, M. Kumano, K. Ueda, T. Sadoh, M. Miyao, and Y. Maeda,
    • Organizer
      Fifth International Symposium on Control of Semiconductor Interfaces(ISCSI-V)
    • Place of Presentation
      首都大学東京
    • Year and Date
      2007-11-13
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Luminescence of β-FeSi_2 and application to photonics2007

    • Author(s)
      Y., Maeda
    • Organizer
      Fifth International Symposium on Control of Semiconductor Interface (ISCSI-V)
    • Place of Presentation
      Tokyo Met. University
    • Year and Date
      2007-11-13
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 「研究成果報告書概要(欧文)」より2007

    • Author(s)
      Y., Hiraiwa, T., Jonishi, Y., Ando, K., Narumi, M., Kumano, K., Ueda, T., Sadoh, M., Miyao, Y., Maeda
    • Organizer
      Fifth International Symposium on Control of Semiconductor Interface (ISCSIV)
    • Place of Presentation
      Tokyo Met. University
    • Year and Date
      2007-11-13
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Luminescence of beta-FeSi2 and application to photonics2007

    • Author(s)
      Y. Maeda
    • Organizer
      Fifth International Symposium on Control of Semiconductor Interfaces (ISCSI-V)
    • Place of Presentation
      首都大学東京
    • Year and Date
      2007-11-13
    • Related Report
      2007 Annual Research Report
  • [Presentation] Diffusion behavior in Fe3Si/Ge hybrid structures and related degradation of axial orientation2007

    • Author(s)
      T. Jonishi, Y. Ando, K. Narumi, K. Ueda, T. Sadoh, M. Miyao, and Y. Maeda
    • Organizer
      Fifth International Symposium on Control of Semiconductor Interfaces (ISCSI-V)
    • Place of Presentation
      首都大学東京
    • Year and Date
      2007-11-13
    • Related Report
      2007 Annual Research Report
  • [Presentation] 環境材料としての鉄シリサイド系とその応用2007

    • Author(s)
      前田佳均
    • Organizer
      応用物理学会九州支部シンポジウム講演
    • Place of Presentation
      九州工業大学
    • Year and Date
      2007-11-10
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Iron-sfficides as ecomaterials and their application2007

    • Author(s)
      Y., Maeda
    • Organizer
      JSAP Kyushu-chapter Symposium on Ecomaterials and electronics
    • Place of Presentation
      Kyushu Institute of Technology
    • Year and Date
      2007-11-10
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 環境材料としての鉄シリサイド系とその応用2007

    • Author(s)
      前田佳均
    • Organizer
      応用物理学会九州支部シンポジウム
    • Place of Presentation
      九州工業大学
    • Year and Date
      2007-11-10
    • Related Report
      2007 Annual Research Report
  • [Presentation] シリサイド共役反転格子フォトニック結晶での導波解析2007

    • Author(s)
      國松俊佑, 寺井慶和, 秋山賢輔, 前田佳均
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-07
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] 強磁性体シリサイド(Fe_3Si)/半導体(Ge)ヘテロ界面の原子層制御2007

    • Author(s)
      上田公二, 熊野 守, 安藤裕一郎, 佐道泰造, 鳴海一雅, 前田佳均, 宮尾正信
    • Organizer
      第68回応用物理学会学術講演会:講演奨励賞受賞講演
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-07
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Fe_3Si/Geヘテロエピタキシャル成長層の軸配向性の成長温度依存性の考察2007

    • Author(s)
      安藤裕一郎, 上西隆文, 鳴海一雅, 熊野 守, 上田公二, 佐道泰造, 前田佳均, 宮尾正信
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-07
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Fe_3Si/Geヘテロエピタキシャル界面における相互拡散と軸配向性2007

    • Author(s)
      上西隆文, 安藤裕一郎, 平岩佑介, 鳴海一雅, 熊野守, 上田公二, 佐道泰造, 宮尾正信, 前田佳均
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-07
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] MBE法による[Fe_3Si/Ge]_2多層ヘテロエピタキシャル成長の検討2007

    • Author(s)
      熊野 守, 安藤裕一郎, 上田公二, 権丈 淳, 佐道泰造, 前田佳均, 宮尾正信
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-07
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Analysis of wave propagation on conjugated inversion photonic crystals2007

    • Author(s)
      S., Kunimatsu, Y., Terai, K., Akiyama, Y., Maeda
    • Organizer
      The 68th JSAP Fall Meeting
    • Place of Presentation
      Hokkaido Institute of Technology
    • Year and Date
      2007-09-07
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Atomic layer control of ferromagnetic silicide/semiconductor hetero Structures2007

    • Author(s)
      K., Ueda, M., Kumano, Y., Ando, T., Sadoh, K., Narumi, Y., Maeda, M., Miyao
    • Organizer
      The 68th JSAP Fall Meeting
    • Place of Presentation
      Hokkaido Institute of Technology
    • Year and Date
      2007-09-07
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Growth temperature dependence of axial orientation of Fe_3Si/Ge hetero Structures2007

    • Author(s)
      Y., Ando, T., Jonishi, K., Narumi, M., Kumano, K., Ueda, T., Sadoh, Y., Maeda, M., Miyao
    • Organizer
      The 68th JSAP Fall Meeting
    • Place of Presentation
      Hokkaido Institute of Technology
    • Year and Date
      2007-09-07
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Interdiffusion at Fe_3Si/Ge hetero-interface and its axial orientation2007

    • Author(s)
      T., Jonishi, Y., Ando, Y., Hiraiwa, K., Narumi, M., Kumano, K., Ueda, T., Sadoh, M., Miyao, Y., Maeda
    • Organizer
      The 68th JSAP Fall Meeting
    • Place of Presentation
      Hokkaido Institute of Technology
    • Year and Date
      2007-09-07
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] MBE growth of [Fe_3Si/Ge]. multilayered heterostructures2007

    • Author(s)
      M., Kumano, Y., Ando, K., Ueda, J., Kenjo, T., Sadoh, Y., Maeda, M., Miyao
    • Organizer
      The 68th JSAP Fall Meeting
    • Place of Presentation
      Hokkaido Institute of Technology
    • Year and Date
      2007-09-07
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 強磁性体シリサイド(Fe3Si)/半導体(Ge)ヘテロ界面の原子層制御2007

    • Author(s)
      上田公二, 熊野守, 安藤裕一郎, 佐道泰造, 鳴海一雅, 前田佳均, 宮尾正信
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-07
    • Related Report
      2007 Annual Research Report
  • [Presentation] Fe3Si/Geヘテロエピタキシャル界面における相互拡散と軸配向性2007

    • Author(s)
      上西隆文, 安藤裕一郎, 平岩佑介, 鳴海一雅, 熊野守, 上田公二, 佐道泰造, 宮尾正信,
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-07
    • Related Report
      2007 Annual Research Report
  • [Presentation] Fe3Si/Geヘテロエピタキシャル成長層の軸配向性の成長温度依存性の考察2007

    • Author(s)
      安藤裕一郎, 上西隆文, 鳴海一雅, 熊野守, 上田公二, 佐道泰造, 前田佳均,
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-07
    • Related Report
      2007 Annual Research Report
  • [Presentation] MBE法による[Fe3Si/Ge]2多層ヘテロエピタキシャル成長の検討2007

    • Author(s)
      熊野 守, 安藤裕一郎, 上田公二, 権丈 淳, 佐道泰造, 前田佳均, 宮尾正信
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-07
    • Related Report
      2007 Annual Research Report
  • [Presentation] 共役反転フォトニック結晶の導波解析2007

    • Author(s)
      國松俊佑, 寺井慶和, 前田佳均
    • Organizer
      応用物理学会・第10回シリサイド系半導体・夏の学校講演会
    • Place of Presentation
      静岡県掛川市
    • Year and Date
      2007-07-29
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Conjugated inversion photonic crystals and wave propagation on them2007

    • Author(s)
      S., Kunimatsu, Y., Terai, Y., Maeda
    • Organizer
      The 10th Summer Seminar of JSAP on Semiconducting Silicides
    • Place of Presentation
      Kakegawa
    • Year and Date
      2007-07-29
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 共役反転フォトニック結晶の導波解析2007

    • Author(s)
      國松俊祐, 秋山賢輔, 寺井慶和, 前田佳均
    • Organizer
      応用物理学会・第10回シリサイド系半導体・夏の学校
    • Place of Presentation
      掛川市
    • Year and Date
      2007-07-29
    • Related Report
      2007 Annual Research Report
  • [Presentation] 鉄シリサイド・フォトニック結晶2007

    • Author(s)
      前田佳均
    • Organizer
      応用物理学会・第10回シリサイド系半導体・夏の学校セミナー
    • Place of Presentation
      静岡県掛川市
    • Year and Date
      2007-07-28
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Iron-silicide photonic crystals2007

    • Author(s)
      Y., Maeda
    • Organizer
      The 10th Summer Seminar of JSAP on Semiconducting Silicides
    • Place of Presentation
      Kakegawa
    • Year and Date
      2007-07-28
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 鉄シリサイド・フォトニック結晶2007

    • Author(s)
      前田佳均
    • Organizer
      応用物理学会・第10回シリサイド系半導体・夏の学校
    • Place of Presentation
      掛川市
    • Year and Date
      2007-07-28
    • Related Report
      2007 Annual Research Report
  • [Presentation] Submicron sized fabrication of iron silicides for their applications to photonic crystals2007

    • Author(s)
      A. Imai, S. Kunimatsu, Y. Ando, Y. Terai, Y. Maeda
    • Organizer
      European Material Research Society, 2007 Spring Meeting
    • Place of Presentation
      ストラスブール(仏)
    • Year and Date
      2007-05-27
    • Related Report
      2007 Annual Research Report
  • [Presentation] RBS study of epitaxial growth of ferromagnetic Fe3Si on Ge2007

    • Author(s)
      Y. Ando, T. Jonishi, K. Ueda, T. Sadoh, M. Miyao, and Y. Maeda
    • Organizer
      European Material Research Society, 2007 Spring Meeting
    • Place of Presentation
      ストラスブール(仏)
    • Year and Date
      2007-05-27
    • Related Report
      2007 Annual Research Report
  • [Presentation] Enhancement of photoluminescence from ion-beam synthesized beta-FeSi2/Si2007

    • Author(s)
      T. Jonishi, Y. Ando, and Y. Maeda
    • Organizer
      European Material Research Society, 2007 Spring Meeting
    • Place of Presentation
      ストラスブール(仏)
    • Year and Date
      2007-05-27
    • Related Report
      2007 Annual Research Report
  • [Presentation] Atomically controlled hetero-epitaxy of Fe_3Si/SiGe for spintronics application,2007

    • Author(s)
      M. Miyao, T. Sadoh, and Y. Maeda
    • Organizer
      The 5th International Conference on Silicon Epitaxy and Heterostructures(ICSI-5)
    • Place of Presentation
      Marseilles・France
    • Year and Date
      2007-05-24
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Atomically controlled heteroepitaxy of Fe_3Si/Ge for spintronics application2007

    • Author(s)
      M., Miyao, T., Sadoh, Y., Maeda
    • Organizer
      The 5th International Conference on Silicon Epitaxy and Heterostructures (ICSI-5)
    • Place of Presentation
      Marseilles. France
    • Year and Date
      2007-05-24
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Atomically controlled hetero-epitaxy of Fe3Si/SiGe for spintronics application2007

    • Author(s)
      M. Miyao, T. Sadoh, and Y. Maeda
    • Organizer
      The 5th International Conference on Silicon Epitaxy and Heterostructures (ICSI-5)
    • Place of Presentation
      マルセーユ(仏)
    • Year and Date
      2007-05-24
    • Related Report
      2007 Annual Research Report
  • [Presentation] Fe_3Siリフトオフ法による磁性体フォトニック結晶の作製2007

    • Author(s)
      國松俊佑, 今井章文, 寺井慶和, 秋山賢輔, 前田佳均
    • Organizer
      第54回応用物理学会関係連合講演会
    • Place of Presentation
      青山学院大学
    • Year and Date
      2007-03-29
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] RBSによるFe_3Si/Geエピタキシャル成長の評価2007

    • Author(s)
      安藤裕一郎, 上西隆文, 西蔭義明, 鳴海一雅, 上田公二, 佐道泰造, 宮尾正信, 前田佳均
    • Organizer
      第54回応用物理学会関係連合講演会
    • Place of Presentation
      青山学院大学
    • Year and Date
      2007-03-29
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Fe_3Siエピタキシャル界面での原子拡散の成長温度依存性2007

    • Author(s)
      上西隆文, 安藤裕一郎, 西蔭義明, 鳴海一雅, 上田公二, 佐道泰造, 宮尾正信, 前田佳均
    • Organizer
      第54回応用物理学会関係連合講演会
    • Place of Presentation
      青山学院大学
    • Year and Date
      2007-03-29
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Fabrication of magnet-photonic crystals by lift-off processes of Fe_3Si2007

    • Author(s)
      S., Kunimatsu, A., Imai, Y., Terai, K., Akiyama, Y., Maeda
    • Organizer
      The 54th JSAP Spring Meeting
    • Place of Presentation
      Aoyama-Gakuin University
    • Year and Date
      2007-03-29
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] RBS study of epitaxial growth of Fe_3Si on Ge2007

    • Author(s)
      Y., Ando, T., Jonishi, Y., Nishikage, K., Narumi, K., Ueda, T., Sadoh, M., Miyao, Y., Maeda
    • Organizer
      The 54th JSAP Spring Meeting
    • Place of Presentation
      Aoyama-Gakuin University
    • Year and Date
      2007-03-29
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Growth temperature dependence of atomic diffusion at Fe_3Si/Ge epitaxial interface2007

    • Author(s)
      T., Jonishi, Y., Ando, Y., Nishikage, K., Narumi, K., Ueda, T., Sadoh, M., Miyao, Y., Maeda
    • Organizer
      The 54th JSAP Spring Meeting
    • Place of Presentation
      Aoyama-Gakuin University
    • Year and Date
      2007-03-29
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Fe3Siリフトオフ法による磁性体フォトニック結晶の作製2007

    • Author(s)
      國松俊佑, 今井章文, 寺井慶和, 秋山賢輔, 前田佳均
    • Organizer
      第54回応用物理学関係連合講演会
    • Place of Presentation
      青山学院大学
    • Year and Date
      2007-03-29
    • Related Report
      2007 Annual Research Report
  • [Presentation] RBSによるFe3Si/Geエピタキシャル成長の評価2007

    • Author(s)
      安藤裕一郎, 上西隆文, 西蔭義明, 鳴海一雅, 上田公二, 佐道泰造, 宮尾正信, 前田佳均
    • Organizer
      第54回応用物理学関係連合講演会
    • Place of Presentation
      青山学院大学
    • Year and Date
      2007-03-29
    • Related Report
      2007 Annual Research Report
  • [Presentation] Fe3Siエピタキシャル界面での原子拡散の成長温度依存性2007

    • Author(s)
      上西隆文, 安藤裕一郎, 西蔭義明, 鳴海一雅, 上田公二, 佐道泰造, 宮尾正信, 前田佳均
    • Organizer
      第54回応用物理学関係連合講演会
    • Place of Presentation
      青山学院大学
    • Year and Date
      2007-03-29
    • Related Report
      2007 Annual Research Report
  • [Presentation] RBS study of epitaxial growth of ferromagnetic Fe_3Si on Ge2007

    • Author(s)
      Y. Ando, T. Jonishi, K. Ueda, T. Sadoh, M. Miyao, and Y. Maeda
    • Organizer
      European Materials Research Society
    • Place of Presentation
      Strasbourg, France
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Submicron sized fabrication of iron silicides for their applications to photonic crystals2007

    • Author(s)
      A. Imai, S. Kunimatsu, Y. Ando, Y. Terai, and Y. Maeda
    • Organizer
      European Materials Research Society
    • Place of Presentation
      Strasbourg, France
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Enhancement of photoluminescence from ion-beam synthesized β-FeSi_2/Si2007

    • Author(s)
      T. Jonishi, Y. Ando, and Y. Maeda
    • Organizer
      European Materials Research Society
    • Place of Presentation
      Strasbourg, France
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] RBS study of epitaxial growth of ferromagnetic Fe_3Si on Ge2007

    • Author(s)
      Y., Ando, T., Jonishi, K., Ueda, T., Sadoh, M., Miyao, Y., Maeda
    • Organizer
      European MRS Spring Meeting
    • Place of Presentation
      Strasbourg, France
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Submicron sized fabrication of iron silicides for their applications to photonic crystals2007

    • Author(s)
      A., Imai, S., Kunimatsu, Y., Ando, Y., Teral, Y., Maeda
    • Organizer
      European MRS Spring Meeting
    • Place of Presentation
      Strasbourg, France
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Enhancement of photoluminescence from ion-beam synthesized β-FeSi_22007

    • Author(s)
      T., Jonishi, Y., Ando, Y., Maeda
    • Organizer
      European MRS Spring Meeting
    • Place of Presentation
      Strasbourg, France
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Fabrication of iron-silicide photonic crystals2006

    • Author(s)
      S., Kunimatsu, A., Imai, Y., Terai, Y., Maeda
    • Organizer
      IEIC SDM Meeting
    • Place of Presentation
      Osaka
    • Year and Date
      2006-12-24
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Fe系シリサイドによるフォトニック結晶の作製2006

    • Author(s)
      國松俊佑, 今井章文, 寺井慶和, 前田佳均
    • Organizer
      電子情報通信学会, SDM, シリコン材料・デバイス研究会
    • Place of Presentation
      大阪市
    • Year and Date
      2006-11-24
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Siエッチングガスを用いたFe系シリサイドのサブミクロン加工:フォトニク結晶の作製を目指して2006

    • Author(s)
      今井章文, 寺井慶和, 秋山賢輔, 前田佳均
    • Organizer
      第67回応用物理学会学術講演会:講演奨励賞受賞記念講演
    • Place of Presentation
      立命館大学
    • Year and Date
      2006-08-30
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] β-FeSi_2:2次元フォトニック結晶のサイズ誤差の影響2006

    • Author(s)
      國松俊佑, 今井章文, 寺井慶和, 前田佳均
    • Organizer
      第67回応用物理学会学術講演会
    • Place of Presentation
      立命館大学
    • Year and Date
      2006-08-30
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] あたらしい応用を求めて:高屈折率シリサイド・フォトニック結晶への展開2006

    • Author(s)
      前田佳均
    • Organizer
      第67回応用物理学会学術講演会:シンポジウム講演
    • Place of Presentation
      立命館大学
    • Year and Date
      2006-08-30
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] β-FeSi_2のイオンビーム合成:Si空孔の変化2006

    • Author(s)
      上西隆文, 安藤裕一郎, 前田佳均
    • Organizer
      第67回応用物理学会学術講演会
    • Place of Presentation
      立命館大学
    • Year and Date
      2006-08-30
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 高輝度発光β-FeSi_2のイオンビーム合成:表面偏析のメカニズム2006

    • Author(s)
      安藤裕一郎, 上西隆文, 今井章文, 前田佳均
    • Organizer
      第67回応用物理学会学術講演会
    • Place of Presentation
      立命館大学
    • Year and Date
      2006-08-30
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Submicron fabrication of iron-silicides by Si process gases towards photonic crystals2006

    • Author(s)
      A., Imai, Y., Terai, K., Akiyama, Y., Maeda
    • Organizer
      The 67th JSAP Annual Meeting
    • Place of Presentation
      Ritsumeikan University
    • Year and Date
      2006-08-30
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Two-dimensional β-FeSi_2 photonic crystals : Influence of size error2006

    • Author(s)
      S., Kunimatsu, A., Imai, Y., Terai, Y., Maeda
    • Organizer
      The 67th JSAP Fall Meeting
    • Place of Presentation
      Ritsumeikan University
    • Year and Date
      2006-08-30
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Toawards novel application of silicides : High index contrast photonic crystals2006

    • Author(s)
      Y., Maeda
    • Organizer
      The 67th JSAP Fall Symposium
    • Place of Presentation
      Ritsumeikan University
    • Year and Date
      2006-08-30
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Ion beam synthesis of β-FeSi_2 : Si vacancy-change2006

    • Author(s)
      T., Jonishi, Y., Ando, Y., Maeda
    • Organizer
      The 67th JSAP Fall Meeting
    • Place of Presentation
      Ritsumeikan University
    • Year and Date
      2006-08-30
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Ion beam synthesis of highly efficient light emission β-FeSi_2 : surface segregation mechanism2006

    • Author(s)
      Y., Ando, T., Jonishi, A., Imai, Y., Maeda
    • Organizer
      The 67th JSAP Fall Meeting
    • Place of Presentation
      Ritsumeikan University
    • Year and Date
      2006-08-30
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 鉄シリサイド・高屈折率フォトニック結晶の作製2006

    • Author(s)
      前田佳均, 今井章文, 寺井慶和, 秋山賢輔
    • Organizer
      応用物理学会・第9回シリサイド系半導体研究会講演会
    • Place of Presentation
      明治大学
    • Year and Date
      2006-03-26
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Fabrication of iron silicide high-index contrast photonic crystals2006

    • Author(s)
      Y., Maeda, A., Imai, Y., Terai, K., Akiyama
    • Organizer
      The 9th Meeting of Semiconducting Silicides
    • Place of Presentation
      Meiji University
    • Year and Date
      2006-03-26
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] β-FeSi_2フォトニック結晶の作製(I):反応性イオンエッチングの検討2006

    • Author(s)
      今井章文, 寺井慶和, 秋山賢輔, 前田佳均
    • Organizer
      第53回応用物理学関係連合会講演会
    • Place of Presentation
      武蔵工業大学
    • Year and Date
      2006-03-25
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] A1ドープβ-FeSi_2の2ステップアニールとフォトルミネッセンス特性2006

    • Author(s)
      安藤裕一郎, 今井章文, 前田佳均, 寺井慶和, 秋山賢輔
    • Organizer
      第53回応用物理学関係連合会講演会
    • Place of Presentation
      武蔵工業大学
    • Year and Date
      2006-03-25
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Fabrication of β-FeSi_2 photonic crystals(I) : Reactive ion etching2006

    • Author(s)
      A., Imai, Y., Terai, K., Akiyama, Y., Maeda
    • Organizer
      The 53rd JSAP Spring Meeting
    • Place of Presentation
      Musashi Institute of Technology
    • Year and Date
      2006-03-25
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Photoluminescence properties of Al-doped β-FeSi_2 annealed by two-step Processes2006

    • Author(s)
      Y., Ando, A., Imai, Y., Maeda, Y., Terai, K., Akiyama
    • Organizer
      The 53rd JSAP Spring Meeting
    • Place of Presentation
      Musashi Institute of Technology
    • Year and Date
      2006-03-25
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Semiconducting β-FeSi_2 towards optoelectronics and photonics2006

    • Author(s)
      Y. Maeda
    • Organizer
      Asia-Pacific Conference on Semiconducting Silicides Science and Technology towards Sustainable Optoelectronics(APAC-SILICIDE 2006)
    • Place of Presentation
      京都大学
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Photoluminescence enhancement by isolathing β-FeSi_2 layer from defective layer2006

    • Author(s)
      Y. Ando, A. Imai, Y. Terai, K. Akiyama, and Y. Maeda
    • Organizer
      Asia-Pacific Conference on Semiconducting Silicides Science and Technology towards Sustainable Optoelectronics(APAC-SILICIDE 2006)
    • Place of Presentation
      京都大学
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Computation of photonic band structure and light propagation in β-FeSi_2 photonic crystals2006

    • Author(s)
      S. Kunimatsu, A. Imai, Y. Terai, and Y. Maeda
    • Organizer
      Asia-Pacific Conference on Semiconducting Silicides Science and Technology towards Sustainable Optoelectronics(APAC-SILICIDE 2006)
    • Place of Presentation
      京都大学
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Submicron dry-etching behavior of β-FeSi_2 thin films towards fabrication of photonic crystals2006

    • Author(s)
      A. Imai, S. Kunimatsu, K. Akiyama, Y. Terai, and Y. Maeda
    • Organizer
      Asia-Pacific Conference on Semiconducting Silicides Science and Technology towards Sustainable Optoelectronics(APAC-SILICIDE 2006)
    • Place of Presentation
      京都大学
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Carrier control of β-FeSi_2 by 1.2MeV-Au^<++> ion irradiation2006

    • Author(s)
      T. Jonishi, Y. Ando, A. Imai and Y. Maeda
    • Organizer
      Asia-Pacific Conference on Semiconducting Silicides Science and Technology towards Sustainable Optoelectronics(APAC-SILICIDE 2006)
    • Place of Presentation
      京都大学
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Nondestructive investigation of β-FeSi_2/Si interface by photoluminescence measurements2006

    • Author(s)
      Y. Terai, Y. Maeda, and Y. Fujiwara
    • Organizer
      Asia-Pacific Conference on Semiconducting Silicides Science and Technology towards Sustainable Optoelectronics(APAC-SILICIDE 2006)
    • Place of Presentation
      京都大学
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Reactive ion etching of β-FeSi_2/Si and fabrication of two dimensional photonic crystals2006

    • Author(s)
      A. Imai, S. Kunimatsu, Y. Terai, K. Akiyama, and Y. Maeda
    • Organizer
      The 16th International Microscopy Congress
    • Place of Presentation
      札幌国際会議場
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Enhancement of Photoluminescence from Ion-Beam Synthesized β-FeSi_2/Si2006

    • Author(s)
      Y. Ando, T. Jonishi, Y. Terai, and Y. Maeda
    • Organizer
      The 16th International Microscopy Congress
    • Place of Presentation
      札幌国際会議場
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Semiconducting β-FeSi_2 towards optoelectronic and photonics2006

    • Author(s)
      Y., Maeda
    • Organizer
      Asia-Pacific Conf. on Semiconducting Silicide Science and Technology (APAC-SILICIDE 2006)
    • Place of Presentation
      Kyoto University
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Photoluminescence enhancement by isolating β-FeSi_2 layer from defective Layer2006

    • Author(s)
      Y., Ando, A., Imai, K., Akiyama, Y., Terai, Y., Maeda
    • Organizer
      Asia-Pacific Conf. on Semiconducting Silicide Science and Technology (APAC-SILICIDE 2006)
    • Place of Presentation
      Kyoto University
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Computation of photonic band structure and light propagation in β-FeSi_2 photonic crystals2006

    • Author(s)
      S., Kunimatsu, A., Imai, Y., Ando, Y., Maeda
    • Organizer
      Asia-Pacific Conf. on Semiconducting Silicide Science and Technology (APAC-SILICIDE 2006)
    • Place of Presentation
      Kyoto University
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Submicron dry-etching behavior of β-FeSi_2 thin films towards fabrication of photonic crystals2006

    • Author(s)
      A., Imai, S., Kunimatsu, K., Akiyama, Y., Terai, Y., Maeda
    • Organizer
      Asia-Pacific Conf. on Semiconducting Silicide Science and Technology (APAC-SILICIDE 2006)
    • Place of Presentation
      Kyoto University
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Carrier control of β-FeSi_2 by 1.2MeV-Au++ ion irradiation2006

    • Author(s)
      T., Jonishi, Y., Ando, A., Imai, Y., Maeda
    • Organizer
      Asia-Pacific Conf. on Semiconducting (APAC-SILICIDE 2006)
    • Place of Presentation
      Kyoto University
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Nondestructive investigation of β-FeSi_2/Si interface by photoluminescence2006

    • Author(s)
      Y., Terai, Y., Maeda, Y., Fujiwara
    • Organizer
      Asia-Pacific Conf on Semiconducting (APAC-SILICIDE 2006)
    • Place of Presentation
      Kyoto University
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Reactive ion etching of β-FeSi_2 and fabrication of two dimensional photonic crystals2006

    • Author(s)
      A., Imai, S., Kunimatsu, Y,. Ural, K., Akiyama, Y., Maeda
    • Organizer
      The 16th International Microscopic Congress
    • Place of Presentation
      Sapporo International Conference Hall
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Enhancement of photoluminescence from ion-beam synthesized β-FeSi_2 Si2006

    • Author(s)
      Y., Ando, T., Jonishi, Y., Terai, Y., Maeda
    • Organizer
      The 16th International Microscopic Congress
    • Place of Presentation
      Sapporo Inter national Conference Hall
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] β-FeSi2の発光増強2005

    • Author(s)
      安藤裕一郎, 今井章文, 前田佳均, 寺井慶和, 秋山賢輔
    • Organizer
      電子情報通信学会, SDM, シリコン材料・デバイス研究会
    • Place of Presentation
      奈良先端科学技術大
    • Year and Date
      2005-12-21
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Enhancement of light emission of β-FeSi_22005

    • Author(s)
      Y., Ando, A., Imai, Y., Maeda, Y., Teral, K., Akiyama
    • Organizer
      IEIC SDM Meeting
    • Place of Presentation
      Nara Institute of Science and Technology
    • Year and Date
      2005-12-21
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] シリサイド半導体の展望2005

    • Author(s)
      前田佳均, 今井章文, 寺井慶和, 秋山賢輔
    • Organizer
      第8回シリサイド系半導体研究会講演会
    • Place of Presentation
      徳島市民会館
    • Year and Date
      2005-09-12
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Perspective technology of semiconducting silicides2005

    • Author(s)
      Y., Maeda, A., Imai, Y., Terai, K., Akiyama
    • Organizer
      The 8th Meeting of Semiconducting Silicides
    • Place of Presentation
      Tokushima Civic Hall
    • Year and Date
      2005-09-12
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Book] 日本学術振興会第131委員会編 薄膜ハンドブックー第2版, 4.24 化合物半導体薄膜, (V)Fe-Si薄膜2008

    • Author(s)
      前田佳均(分担執筆)
    • Total Pages
      3
    • Publisher
      オーム社
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Book] Chapter 4, Section 4.24 Compound semiconductor thin film, (V) Fe-Si thin film2008

    • Author(s)
      Y., Maeda
    • Total Pages
      3
    • Publisher
      Thin Film Handbook, Second Edition by Thin Film 131 commission of JSPS, OHM Publishing Co. Ltd
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Remarks] 「研究成果報告書概要(和文)」より

    • URL

      http://www004.upp.so-net.ne.jp/silicide/index.htm

    • Related Report
      2007 Final Research Report Summary
  • [Remarks]

    • URL

      http://www004.upp.so-net.ne.jp/silicide/index.htm

    • Related Report
      2007 Annual Research Report

URL: 

Published: 2005-04-01   Modified: 2016-04-21  

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