Synhesis of Semiconducting Silicides Thin Films far Phothnic Crystals and Investigation of Optical Circuit functions
| Project/Area Number |
17360011
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Applied materials science/Crystal engineering
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| Research Institution | Kyoto University |
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Principal Investigator |
MAEDA Yoshihito Kyoto University, Graduate School of Energy Science, Associate Professor (50275286)
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| Co-Investigator(Kenkyū-buntansha) |
TERAI Yoshikazu Osaka University, Graduate Schcol of Engineering, Assistant Professor (90360049)
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| Project Period (FY) |
2005 – 2007
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| Project Status |
Completed (Fiscal Year 2007)
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| Budget Amount *help |
¥15,720,000 (Direct Cost: ¥14,700,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2007: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2006: ¥4,300,000 (Direct Cost: ¥4,300,000)
Fiscal Year 2005: ¥7,000,000 (Direct Cost: ¥7,000,000)
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| Keywords | Photonic crystal / Semiconducting silicide / Optical circuit / Magnetic silicide / Photonics / Iron silicide / Thin film / Crystal growth / シリコンフォトニクス / 光半導体 / 磁性体フォトニクス / 光磁気効果 / オプトエレクトロニクス |
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| Research Abstract |
The optoelectronic integrated circuit (OEIC) on Si substrates which was composed from light emitting devices, photodiodes, light waveguides, some optical computing or logic circuits will be realized in near future. Now optimized materials and material processing are investigating, actively for its prompt realization. The first generation OEICs are composed from hybrid structures where integrated light sources, light detectors and some signal processors are connected with optical fibers. The next generation OEIC will be composed from optical circuits which have some optical performances and computing on Si substrates. In the Si-OEIC, photonic crystals have been expected to be main optical computing units.
In this research project, we have investigated fundamental properties of semiconducting silicides and ferromagnetic silicides towards application to photonic crystals, a high quality thin film synthesis, submicron processes required for fabrication of two dimensional photonic crystals, and analysis method for wave propagation on high index contrast photonic crystals.
For three years project, we have succeeded in synthesis of highly optical grade silicide thin films, establishment of submicron etching processes compatible with Si LSI processes, formation of waveguides on iron silicide photonic crystals, invention of conjugated inversion structures for improvement of coupling efficiency between different index structures, and examination of efficiency of light propagation on iron silicide photonic crystals fabricated in this project. These fruitful results achieved in this project will open Si based photonics using high index contrast materials with excellent optoelectronic functions. Moreover, we have brought these results pioneer area magneto-photonic crystals where light can be controlled by strong magnetic coupling with light (magneto-optical effects).
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Report
(4 results)
Research Products
(168 results)
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[Journal Article] Axial orientation of molecular-beam-epitaxy grown Fe_3Si/Ge hybrid structures and its degradation2007
Author(s)
Y., Maeda, T., Jonishi, N., Narumi, Y., Ando, K., Ueda, M., Kumano, T., Sadoh, M., Miyao
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Journal Title
Description
「研究成果報告書概要(欧文)」より
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[Journal Article] Low temperature epitaxy of ferromagnetic silicide on Ge and spin transistors2007
Author(s)
Y., Ando, K., Ueda, M., Kumano, T., Sadoh, K., Narumi, Y., Maeda, M., Miyao
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Journal Title
IEIC Technical Report 107
Pages: 221-224
Description
「研究成果報告書概要(欧文)」より
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[Journal Article] Reactive ion etching of β-FeSi_2/Si and fabrication of two dimensional photonic crystals2006
Author(s)
A., Imai, Y., Ando, K., Akiyama, Y., Terai, Y., Maeda
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Journal Title
Proceedings of the 16th International Microscopic Congress, II
Pages: 1349-1349
Description
「研究成果報告書概要(欧文)」より
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[Journal Article] β-FeSi_2の1.55μm発光増強2005
Author(s)
安藤裕一郎, 今井章文, 前田佳均, 寺井慶和, 秋山賢輔
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Journal Title
電子情報通信学会技術研究報告(IEIC Technical Report) SDM205-201-223
Pages: 113-117
NAID
Description
「研究成果報告書概要(和文)」より
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[Presentation] 「研究成果報告書概要(欧文)」より2007
Author(s)
Y., Hiraiwa, T., Jonishi, Y., Ando, K., Narumi, M., Kumano, K., Ueda, T., Sadoh, M., Miyao, Y., Maeda
Organizer
Fifth International Symposium on Control of Semiconductor Interface (ISCSIV)
Place of Presentation
Tokyo Met. University
Year and Date
2007-11-13
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[Presentation] Atomic layer control of ferromagnetic silicide/semiconductor hetero Structures2007
Author(s)
K., Ueda, M., Kumano, Y., Ando, T., Sadoh, K., Narumi, Y., Maeda, M., Miyao
Organizer
The 68th JSAP Fall Meeting
Place of Presentation
Hokkaido Institute of Technology
Year and Date
2007-09-07
Description
「研究成果報告書概要(欧文)」より
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[Presentation] Growth temperature dependence of axial orientation of Fe_3Si/Ge hetero Structures2007
Author(s)
Y., Ando, T., Jonishi, K., Narumi, M., Kumano, K., Ueda, T., Sadoh, Y., Maeda, M., Miyao
Organizer
The 68th JSAP Fall Meeting
Place of Presentation
Hokkaido Institute of Technology
Year and Date
2007-09-07
Description
「研究成果報告書概要(欧文)」より
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[Presentation] Interdiffusion at Fe_3Si/Ge hetero-interface and its axial orientation2007
Author(s)
T., Jonishi, Y., Ando, Y., Hiraiwa, K., Narumi, M., Kumano, K., Ueda, T., Sadoh, M., Miyao, Y., Maeda
Organizer
The 68th JSAP Fall Meeting
Place of Presentation
Hokkaido Institute of Technology
Year and Date
2007-09-07
Description
「研究成果報告書概要(欧文)」より
Related Report
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[Presentation] MBE growth of [Fe_3Si/Ge]. multilayered heterostructures2007
Author(s)
M., Kumano, Y., Ando, K., Ueda, J., Kenjo, T., Sadoh, Y., Maeda, M., Miyao
Organizer
The 68th JSAP Fall Meeting
Place of Presentation
Hokkaido Institute of Technology
Year and Date
2007-09-07
Description
「研究成果報告書概要(欧文)」より
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[Presentation] RBS study of epitaxial growth of Fe_3Si on Ge2007
Author(s)
Y., Ando, T., Jonishi, Y., Nishikage, K., Narumi, K., Ueda, T., Sadoh, M., Miyao, Y., Maeda
Organizer
The 54th JSAP Spring Meeting
Place of Presentation
Aoyama-Gakuin University
Year and Date
2007-03-29
Description
「研究成果報告書概要(欧文)」より
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[Presentation] Growth temperature dependence of atomic diffusion at Fe_3Si/Ge epitaxial interface2007
Author(s)
T., Jonishi, Y., Ando, Y., Nishikage, K., Narumi, K., Ueda, T., Sadoh, M., Miyao, Y., Maeda
Organizer
The 54th JSAP Spring Meeting
Place of Presentation
Aoyama-Gakuin University
Year and Date
2007-03-29
Description
「研究成果報告書概要(欧文)」より
Related Report
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[Presentation] RBS study of epitaxial growth of ferromagnetic Fe_3Si on Ge2007
Author(s)
Y., Ando, T., Jonishi, K., Ueda, T., Sadoh, M., Miyao, Y., Maeda
Organizer
European MRS Spring Meeting
Place of Presentation
Strasbourg, France
Description
「研究成果報告書概要(欧文)」より
Related Report
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[Presentation] Submicron sized fabrication of iron silicides for their applications to photonic crystals2007
Author(s)
A., Imai, S., Kunimatsu, Y., Ando, Y., Teral, Y., Maeda
Organizer
European MRS Spring Meeting
Place of Presentation
Strasbourg, France
Description
「研究成果報告書概要(欧文)」より
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[Presentation] β-FeSi2の発光増強2005
Author(s)
安藤裕一郎, 今井章文, 前田佳均, 寺井慶和, 秋山賢輔
Organizer
電子情報通信学会, SDM, シリコン材料・デバイス研究会
Place of Presentation
奈良先端科学技術大
Year and Date
2005-12-21
Description
「研究成果報告書概要(和文)」より
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[Presentation] シリサイド半導体の展望2005
Author(s)
前田佳均, 今井章文, 寺井慶和, 秋山賢輔
Organizer
第8回シリサイド系半導体研究会講演会
Place of Presentation
徳島市民会館
Year and Date
2005-09-12
Description
「研究成果報告書概要(和文)」より
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