NANO-AREA STRAIN MEASUREMENTS FOR SEMICONDUCTOR MATERIALS AND DEVICES BY USING A HIGH-RESOLUTION MICRODIFFRACTION SYSTEM
| Project/Area Number |
17360015
|
|---|
| Research Category |
Grant-in-Aid for Scientific Research (B)
|
| Allocation Type | Single-year Grants |
|---|
| Section | 一般 |
|---|
| Research Field |
Applied materials science/Crystal engineering
|
|---|
| Research Institution | JAPAN SYNCHROTRON RADIATION RESEARCH INSTITUTE |
|---|
Principal Investigator |
KIMURA Shigeru JAPAN SYNCHROTRON RADIATION RESEARCH INSTITUTE, RESEARCH & UTILIZATION DIVISION, SENIOR SCIENTIST, 利用研究促進部門, 主幹研究員 (50360821)
|
|---|
| Co-Investigator(Kenkyū-buntansha) |
SAKATA Osami JAPAN SYNCHROTRON RADIATION RESEARCH INSTITUTE, RESEARCH & UTILIZATION DIVISION, SENIOR SCIENTIST, 利用研究促進部門表面構造チーム, 主幹研究員 (40215629)
竹田 晋吾 (財)高輝度光科学研究センター, 利用研究促進部門, 協力研究員 (60373528)
|
|---|
| Project Period (FY) |
2005 – 2006
|
| Project Status |
Completed (Fiscal Year 2006)
|
| Budget Amount *help |
¥14,300,000 (Direct Cost: ¥14,300,000)
Fiscal Year 2006: ¥6,400,000 (Direct Cost: ¥6,400,000)
Fiscal Year 2005: ¥7,900,000 (Direct Cost: ¥7,900,000)
|
|---|
| Keywords | X-RAY DIFFRACTION / SYNCHROTRON RADIATION / STRAIN / MICRO-AREA / INTERFACE / THIN FILM |
|---|
| Research Abstract |
Among of the X-ray diffraction techniques, a measurement of distribution of intensity in a reciprocal space, which is so-called a reciprocal space map (RSM) measurement, is effective for characterizing strain status of an epitaxial layer because lattice tilt is separated from lattice spacing. If we can measure the RSMs with using an X-ray microbeam, it is expected to be a more powerful tool for characterizing the local strain behaviors in detail.
Microdiffraction systems using a phase zone plate (ZP) are suitable for characterizing strain status of epitaxial layers. This is because the hard x-ray microbeam produced by a ZP has both a sub-micrometer beam size and a relatively low angular divergence of the sub-milliradian order. However, this angular divergence is not sufficient for the precise RSM measurements. Consequently, we have developed a new high-angular-resolution X-ray microdiffraction system for RSM measurements on the BL13XU at the SPring-8. This system uses a focused beam produced by using a phase ZP combined with a narrow slit. This arrangement produces a focused beam featuring both small size and small angular divergence. The beam size and angular divergence are measured to be 0.5×1.6 μm^2 and 100 μrad, respectively. This microbeam enables us to perform high-resolution X-ray microdiffraction experiments. Our system is also suitable for RSM measurements, because it is equipped with a precise θ-2θ goniometer with 125-nm-resolved XYZ sample-positioning stages. Using this system, we demonstrated that the RSM measurements were effective for characterizing the local strain status of the strain-relaxed SiGe buffer layers and GaN-based ridge-stripe laser structures.
|
Report
(3 results)
Research Products
(8 results)
