| Project/Area Number |
17360038
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Applied physics, general
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| Research Institution | Tokyo Institute of Technology |
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Principal Investigator |
NAKAMURA Kentaro Tokyo Institute of Technology, Precision and Intelligence Laboratory, Associate Professor (20242315)
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| Co-Investigator(Kenkyū-buntansha) |
UEHA Sadayuki Tokyo Institute of Technology, Precision and Intelligence Laboratory, Professor (90016551)
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| Project Period (FY) |
2005 – 2007
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| Project Status |
Completed (Fiscal Year 2007)
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| Budget Amount *help |
¥16,120,000 (Direct Cost: ¥15,100,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2007: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2006: ¥6,100,000 (Direct Cost: ¥6,100,000)
Fiscal Year 2005: ¥5,600,000 (Direct Cost: ¥5,600,000)
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| Keywords | ultrasonics / ultrasonic motor / ultrasonic actuator / piezoelectric actuator / multi-degree-of-freedom / piezoelectric ceramics / micro actuator / array |
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| Research Abstract |
This study presents the design of multi-degree-of-freedom ultrasonic actuator for the miniaturization and for the array arrangement on a substrate. Both cylinder and plate types were considered as suitable configurations for the array structure of the ultrasonic actuators.
For the cylinder type actuator, a simple configuration with a cylindrical stator and a piezoelectric element was suggested. Then, the ratio of the diameter against the height of the cylinder was determined as 0.5 for the resonance frequency matching using finite element analysis (FEN), and the rotations around all the axes were obtained using the single actuator of 14mm in height and 7.0mm in diameter. In the arrayed configuration, it was found that there was a vibration coupling among the element actuators. To suppress the unnecessary vibration, trench and barrier structures were considered using FEA. It was became clear that these configurations were not effective in the cylinder type. The structure of the cylinder-type actuator was appropriate for the synchronized excitation of the arrayed element actuators, and two-directional motion of 93° and the minimum step of 0.19μm of the plate on the actuators as a two-dimensional stage were prototyped.
For the plate type, a simple configuration using a cylindrical stator and a piezoelectric element with two-layered substrate was proposed. the unnecessary vibration in the plate type actuator array decreased more than in the cylinder type because of its structural feature, and effects of thin glue layer between the actuator and the substrate. Being based on the plate type, a 4x4 array was designed and fabricated. Using this model, a two-dimensional sliding table was prototyped. Wiring pattern for feeding electrical power to each element in a large-sized array actuator was studied.
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