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Development of Bio-Compatible Piezo-Electric Ultra Thin Film Fabrication Technologies for Implantable Nano-Actuator

Research Project

Project/Area Number 17360055
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Materials/Mechanics of materials
Research InstitutionDoshisha University (2007)
Osaka Institute of Technology (2005-2006)

Principal Investigator

NAKAMACHI Eiji  Doshisha University, Faculty of Life and Medical Science, Professor (60099893)

Co-Investigator(Kenkyū-buntansha) UEDA Sei  Osaka Institute of Technology, Faculty of Engineering, Professor (10176589)
UETSUJI Yasutomo  Osaka Institute of Technology, Faculty of Engineering, Associate Professor (00340604)
Project Period (FY) 2005 – 2007
Project Status Completed (Fiscal Year 2007)
Budget Amount *help
¥16,150,000 (Direct Cost: ¥15,700,000、Indirect Cost: ¥450,000)
Fiscal Year 2007: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2006: ¥1,800,000 (Direct Cost: ¥1,800,000)
Fiscal Year 2005: ¥12,400,000 (Direct Cost: ¥12,400,000)
KeywordsBio-Compatibility / Piezoelectric Material / Helicon Wave Plasma Sputtering / ab-initio calculation / Perovsekite Crystal Structure / Material Design / Process Crystallographic Technology / Optimum Fabrication Condition Search
Research Abstract

In this research, we have developed (1) a crystallographic process design algorithm based on the ab-initio molecular mechanics and the homogenization finite element analyses, (2) a sputtering process technique to generate a newly designed biocompatible piezoelectric material MgSiO_3 for the nano-actuator, and (3) the piezoelectric characterization techniques to qualify the promised functions for a nano-actuator, as described below;
1. Development of ab-initio・triple-scale simulation based bio-compatible piezo-electric material design system: A new biocompatible Perovskite crystal type elastic piezo-electric material was invented by employing a newly developed triple-scale analyses based design system. We found a candidate bio-compatible piezo-electric crystal material MgSiO_3. Further, the process crystallographic analysis algorithm was developed to find an optimum crystal structure of substrates for MgSiO_3 tetragonal structure, such as Ir and Cu.
2. Material process technology developm … More ent of a bio-compatible piezo-electric ultra-thin MgSiO_3 film by using Helicon wave sputtering apparatus.
An optimum condition of HWPS fabrication process to generate MgSiO_3 tetragonal perovskite structure was sought by using the experimental design method, the surface response method and the interpolation method. Finally, we found 1) the substrate temperature 613℃, 2) the target ratio 40.2% and the post annealing temperature 663℃.
3. Piezo-electric properties evaluations of a newly fabricated ultra-thin MgSiO_3 film. :
We evaluated piezo-electric properties of MgSiO_3 films by employing (1) the chemical compositions by the XPS, (2) the crystal structure by XRD・EBSD, (3) Surface morphology properties by SEM・AFM and (4) a piezo-electric constant d_<33> by using the AFM piezoelectric tester and a "double-beam" nano-vibration tester. It shows the piezoelectric constant d_<33>=2.70pm/V in the case of the high temperature sputtering, and further d_<33>=29.8pm/V in case of the combined process of low temperature sputtering at 613℃ and high temperature annealing at 663℃. Less

Report

(4 results)
  • 2007 Annual Research Report   Final Research Report Summary
  • 2006 Annual Research Report
  • 2005 Annual Research Report
  • Research Products

    (36 results)

All 2008 2007 2006 2005

All Journal Article (28 results) (of which Peer Reviewed: 8 results) Presentation (8 results)

  • [Journal Article] 電子線後方散乱法による圧電セラミックスの結晶形態分析とそれを用いたマルチスケール有限要素解析2008

    • Author(s)
      上辻 靖智, 佐藤 優, 長倉 秀幸, 西岡 久尚, 倉前 宏行, 槌谷 和義
    • Journal Title

      日本機械学会論文集 74-739(A)

      Pages: 342-347

    • NAID

      110006643456

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A Study on Bio-Compatible Piezoelectric Materials by First Principles Calculation2007

    • Author(s)
      Uetsuji, Y., Nakamachi, E., et. al.
    • Journal Title

      J. of Solid Mechanics and Materials Engng. 1-2

      Pages: 191-201

    • NAID

      130000078510

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] A proposal for optimization of crystal orientations in piezoelectric ceramics by multiscale finite element analysis through crystallographic homogenization method2007

    • Author(s)
      Uetsuji, Y., Nakamachi, E., et. al.
    • Journal Title

      Trans.Jpn.Soc.Mech.Eng. 72-721(A)

      Pages: 1296-1301

    • NAID

      130000078985

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Identification of Material Properties of PZT Single Crystal Based on A Crystallographic Homogenization Method2007

    • Author(s)
      Uetsuji, Y., Ueda, S., Nakamachi, E.
    • Journal Title

      Journal of Solid Mechanics and Materials Engineering 1-1

      Pages: 140-151

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] A Study on Bio-Compatible Piezoelectric Materials by First Principles Calculation2007

    • Author(s)
      Uetsuji, Y., Ueda, S., Nakamachi, E., et. al.
    • Journal Title

      Journal of Solid Mechanics and Materials Engineering 1-2

      Pages: 191-201

    • NAID

      110004999032

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Multi Scale Finite Element Analyses of Sheet Metals by Using SEM-EBSD Measured Crystallographic RVE Models2007

    • Author(s)
      Nakamachi, E., Tam, N. N., Morimoto, H.
    • Journal Title

      Int. J. Plasticity 23

      Pages: 450-489

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] A proposal for optimization of crystal orientations in piezolelctric ceramics by multiscale finite element analysis through crystallographic homogenization method2007

    • Author(s)
      Uetsuji, Y., Horio, M., Tsuchiya, Y., Nakamachi, E.
    • Journal Title

      Trans. JSME, Series A 72-721

      Pages: 1296-1301

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] マルチスケール圧電解析のための並列反復計算法の開発と性能評価2007

    • Author(s)
      倉前 宏行, 西岡 久尚, 上辻 靖智, 仲町 英治
    • Journal Title

      Transactions of JSCES(日本計算工学会誌) 2007

      Pages: 20070033-20070033

    • NAID

      130008056225

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Multi scale finite element analyses of sheet metals by using SEM-EBSD measured crystallographic RVE models2007

    • Author(s)
      Nakamachi, E., Tam, N.N., and Morimoto, H.
    • Journal Title

      Int.J.Plasticity 23

      Pages: 450-489

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A proposal for optimization of crystal orientations in piezoelec tricceramics by multiscale finite element analysis through crystallographic homogenization method2007

    • Author(s)
      Uetsuji, Y., Horio, M., Tsuchiya, Y and Nakamachi, E.
    • Journal Title

      Trans.Jpn.Soc.Mech.Eng. 72-721

      Pages: 296-1301

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A Study on Bio-Compatible Piezoelectric Materials by First Principles Calculation2007

    • Author(s)
      Uetsuji, Y, Imoto, K, Kumazawa, K, Tsuchiya, K, Ueda, S, Nakamachi E.
    • Journal Title

      Journal of Solid Mechanics and Materials Engineering 1・2

      Pages: 191-201

    • NAID

      110004999032

    • Related Report
      2006 Annual Research Report
  • [Journal Article] ヘリコン波プラズマスパッタによる生体適合圧電材料MgSiO_3創製技術の開発2006

    • Author(s)
      仲町 英治, 上辻 靖智, 他
    • Journal Title

      日本機械学会論文集(A編) 72-715

      Pages: 353-358

    • NAID

      110004702441

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Evaluation of Ferroelectric Properties of Piezololctric Ceramics Based on Crystallographic Homogenization Method and Crystal Orientation Analysis by SEM・EBSD Technique2006

    • Author(s)
      Uetsuji, Y., Nakamachi, E., et. al.
    • Journal Title

      JSME International Journal, Series A 49-2

      Pages: 209-215

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Fabrication of Smart Material PZT Thin Films by RF Magnetron Sprttering Method in Micro Acruators2006

    • Author(s)
      Tsuchiya, K., Kitagawa, T., Uetsuji, Y., Nakamachi, E.
    • Journal Title

      JSME International Journal, Series A 49-2

      Pages: 201-208

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Development of Fabrication Technique of Bio-Compatible Piezoelectric Material MgSiO_3 by Using Helicon Wave Plasma Sputter2006

    • Author(s)
      Nakamachi, E., et. al.
    • Journal Title

      Trans. of JSME, Series A 72-715

      Pages: 353-358

    • NAID

      110004702441

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Evaluation of Ferroelectric Properties of Piezoelectric Ceramics Based on Crystallographic Homogenization Method an Crystal Orientation Analysis by SEM-EBSD Technique2006

    • Author(s)
      Uetsuji, Y, Yoshida, T, Yamanaka, T, Tsuchiya, K, Ueda, S, Nakamachi E.
    • Journal Title

      JSME Int.J.,Ser.A 49・2

      Pages: 209-215

    • NAID

      110004998935

    • Related Report
      2006 Annual Research Report
  • [Journal Article] 第一原理計算による新規生体適合圧電材料特性評価2006

    • Author(s)
      上辻靖智, 大西倫之, 槌谷和義, 仲町英治
    • Journal Title

      日本機械学会講演論文集第19回計算力学講演会 06・09

      Pages: 633-634

    • Related Report
      2006 Annual Research Report
  • [Journal Article] 晶系判別および第一原理計算による生体適合無鉛圧電材料の構造評価2006

    • Author(s)
      上辻靖智, 熊澤完信, 大西倫之, 槌谷和義, 仲町英治
    • Journal Title

      日本機械学会論文集(A編) 72・722

      Pages: 1472-1478

    • NAID

      110004837516

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Development of Mgsio_3 Biocompatible Piezoelectric Film for Bio-MEMS Actuator2006

    • Author(s)
      MAEDA, K, UENOYA, T, TSUCHIYA, K, UETSUJI, Y, NAKAMACHI,E
    • Journal Title

      Proc.of SPIE Conference 6415・26

      Pages: 49-49

    • Related Report
      2006 Annual Research Report
  • [Journal Article] 生体適合圧電薄膜Mgsio_3の創製技術の開発2006

    • Author(s)
      前田健次郎, 槌谷和義, 上野谷敏之, 上辻靖智, 仲町英治
    • Journal Title

      日本機械学会 2006年度年次大会講演論文集 06・01

      Pages: 433-434

    • Related Report
      2006 Annual Research Report
  • [Journal Article] ヘリコン波プラズマスパッタによる生体適合圧電材料MgSiO_3創製技術の開発2006

    • Author(s)
      仲町英治, 奥田雄二, 熊澤完臣, 上辻靖智, 槌谷和義, 中易秀敏
    • Journal Title

      日本機械学会論文集(A) 72・715

      Pages: 353-358

    • NAID

      110004702441

    • Related Report
      2005 Annual Research Report
  • [Journal Article] 生体適合圧電材料MgSiO_3のナノ薄膜創製技術の開発2006

    • Author(s)
      前田健次郎, 仲町英治
    • Journal Title

      日本機械学会第18回バイオエンジニアリング講演会講演論文集 05-66

      Pages: 185-186

    • Related Report
      2005 Annual Research Report
  • [Journal Article] 第一原理計算による生体適合圧電材料の探究2005

    • Author(s)
      上辻 靖智, 仲町 英治, 他
    • Journal Title

      日本機械学会論文集(A編) 71-706

      Pages: 944-951

    • NAID

      110004999032

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Development of Blood Extraction System for Health Monitoring System2005

    • Author(s)
      Tsuchita, K., Nakanishi, N., Uetsuji, Y., Nakamachi, E.
    • Journal Title

      Biomedical Microdevices 7-4

      Pages: 347-353

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Identification of Crystal Grain Properties of PZT Ceramics using A Crystallographic Homogenization Method2005

    • Author(s)
      Uetsuji, Y., Ueda, S., Nakamachi, E., et. al.
    • Journal Title

      Theoretical and Applied Mechanics 54

      Pages: 77-82

    • NAID

      130004463551

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] A study on Bio-Compatible Piezoelectlic Material by First principles Calculation2005

    • Author(s)
      Uestuji, Y., Nakamachi, E., et. al.
    • Journal Title

      Trans. of JSME, Series A 71-706

      Pages: 944-951

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] 第一原理計算による生体適合圧電材料の探索2005

    • Author(s)
      上辻靖智, 井本浩平, 熊澤完臣, 槌谷和義, 上田整, 仲町英治
    • Journal Title

      日本機械学会論文集(A) 71・706

      Pages: 944-951

    • Related Report
      2005 Annual Research Report
  • [Journal Article] 生体適合圧電薄膜の創製2005

    • Author(s)
      前田健次郎, 仲町英治
    • Journal Title

      日本材料学会第54期学術講演会講演論文集 54

      Pages: 321-322

    • Related Report
      2005 Annual Research Report
  • [Presentation] マルチスケール圧電解析のための並列反復計算法の性能評価2007

    • Author(s)
      倉前 宏行, 西岡 久尚, 上辻 靖智, 仲町 英治
    • Organizer
      日本計算工学会 第12回計算工学講演会, 講演論文集」(第12巻, 第2号, pp.639-642)
    • Place of Presentation
      国立オリンピック記念青少年総合センター(東京)
    • Related Report
      2007 Annual Research Report
  • [Presentation] 生体適合圧電薄膜MgSiO_3の創製技術の開発2006

    • Author(s)
      前田 健次郎, 仲町 英治(2006, p.p.433-434)
    • Organizer
      日本機械学会2006年度 年次大会
    • Place of Presentation
      熊本大学
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Multi-Scale Finite Element Modeling of Piezoelectric Materials by A Crystallographic Homogenization Method2006

    • Author(s)
      Uetsuji, Y., Nakamachi, E.
    • Organizer
      III European Conference on Computational Mechanics
    • Place of Presentation
      Lisbon, Portugal
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Multi Scale Finite Element Analyses By Using SEM-EBSD Crystallographic Modeling and Parallel Computing2006

    • Author(s)
      Nakamachi, E.
    • Organizer
      Symposium of Multiscale Analysis
    • Place of Presentation
      Shanghai
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development of blood extraction pump by Shape Memory Alloy actuator for Bio-MEMS2006

    • Author(s)
      Tsuchiya, K., Shimazu, Y., Uetsuji, Y., Nakamachi, E.
    • Organizer
      Proc. SPIE International Symposium on Biomedical Applications of Micro-and Nanoengineering
    • Place of Presentation
      Australia
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development of MgSiO_3 Biocompatible Piezoelectric Film for Bio-MEMS Actuator2006

    • Author(s)
      Maeda, K., Uetsuji, Y., Nakamachi, E.
    • Organizer
      Proc. SPIE International Symposium on Biomedical Applications of Micro-and Nanoengineering
    • Place of Presentation
      Australia
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Multi-scale Finite Element Modeling of Polycrystalline Piezoelectric Materials2005

    • Author(s)
      Uetsuji, Y., Ueda, S., Nakamachi, E., et. al.
    • Organizer
      8th Euro. Multigrid Conf. Multigrid, Multilevel and Multiscale Methods
    • Place of Presentation
      The Netherlands
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development of Wearable medical device for Bio-MEMS2005

    • Author(s)
      Nakanishi, N., Yamamoto, H., Tsuchiya, K., Uetsuji, Y., Nakamachi, E.
    • Organizer
      Proc. of SPIE Int. Symposium on Microelectronics MEMS and Nanotechnology
    • Place of Presentation
      Australia
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary

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Published: 2005-04-01   Modified: 2016-04-21  

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