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Development of Optoelectronic Integrated Devices based on BIN-RE alloy semiconductor and Si

Research Project

Project/Area Number 17360160
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionToyohashi University of Technology

Principal Investigator

WAKAHARA Akihiro  Toyohashi University of Technology, Faculty of Engineering, Professor (00230912)

Co-Investigator(Kenkyū-buntansha) OKADA Hiroshi  Toyohashi University of Technology, Faculty of Engineering, Lecturer (30324495)
Project Period (FY) 2005 – 2007
Project Status Completed (Fiscal Year 2007)
Budget Amount *help
¥16,070,000 (Direct Cost: ¥15,500,000、Indirect Cost: ¥570,000)
Fiscal Year 2007: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Fiscal Year 2006: ¥2,500,000 (Direct Cost: ¥2,500,000)
Fiscal Year 2005: ¥11,100,000 (Direct Cost: ¥11,100,000)
KeywordsRare-earth element / III-Nitrides / Optoelectronics / 光電子集積回路 / ウエハ融着 / III族窒化物 / 光電子集積 / ヘテロエピタキシャル成長 / 発光過程
Research Abstract

In this work, we investigate optical properties of rare-earth contained group-III nitride alloy, called III-N-RE alloy, to clarify its potential for an active layer in a monolithic optoelectronic integrated circuits(OEICs) which is composed of Si/III-N-RE/Si wafer. Eu and./or Tb were chosen in the present work, because of intra 4f transition in these rare-earth elements can emit visible lighe which is suitable for Si-based high sensitive photodetectors.
1) High quality GaN layer, of which x-ray rocking curve linewidth is as narrow as 500aresec, was obtained by using y-Al_2O_3/Si(111) substrate
2) Energy transfer/back-transfer processes from host to rare-earth elements were investigated by means of time-resolved photoluminescence spectroscopy and the model in which energy back-transfer and energy loss via non-radiative recombination centers are incorporated, was proposed
3) Optical modal gain of A1GaNEu with Eu concentration of -'1% was as high as 100 cm-1, which is suitable for application of one-chip optical amplifier. Energy transfer efficiency of more than 30% was realized in A1GaNEu with Al composition of〜0.3, even at room temperature.
4) Double heterojunction structure of AIGaN.GaEuN/AIGaN was fabricated by using rf-MBE.
5) Room temperature operation of electroluminescent device composed of AIGaNEu active region was achieved.
6) Si/GaN/Si structure can be obtained by using direct wafer bonding technique with AIN interlayer to avoid melt-back etching due to Ga during the bonding process. However, the GaN layer was degraded by this bonding process and thus, further development concerning the bonding process is necessary.
According to these results, optoelectronic integrated devices will be realized in future

Report

(4 results)
  • 2007 Annual Research Report   Final Research Report Summary
  • 2006 Annual Research Report
  • 2005 Annual Research Report
  • Research Products

    (34 results)

All 2008 2007 2006 2005

All Journal Article (20 results) (of which Peer Reviewed: 6 results) Presentation (14 results)

  • [Journal Article] 380 keV proton irradiation effects on photoluminescence f Eu-doped GaN2008

    • Author(s)
      H. Okada, Y. Nakanishi, A. Wakahara, A. Yoshida, T. Ohshima
    • Journal Title

      Nuclear Instruments and Methods in Physics Research B 266

      Pages: 853-856

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Investigation of Tb-related green emission in group-III nitrides by time-resolved photoluminescence measurements2008

    • Author(s)
      A. Wakahara, K. Takemoto, F. Oikawa, H. Okada, T. Ohshima, H. Itoh
    • Journal Title

      phys. stat. solodi(a) Vol.205,(1)

      Pages: 56-59

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] 380 keV proton irradiation effects on photoluminescence of Eu-doped GaN2008

    • Author(s)
      H. Okada, Y. Nakanishi, A. Wakahara, A. Yoshida, T. Ohshima
    • Journal Title

      Nuclear Instruments and Methods in Physics Research B Vol.266

      Pages: 853-856

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] 380 keV proton irradiation effects on photoluminescence f Eu-doped GaN2008

    • Author(s)
      H.Okada, Y.Nakanishi, A.Wakahara, A.Yoshida, T.Ohshima
    • Journal Title

      Nuclear Instruments and Methods in Physics Researth B 266

      Pages: 853-856

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Investigation of Tb-related green emission in group-III nitrides by time-resolved photoluminescence measurements2007

    • Author(s)
      A. Wakahara, K. Takemoto, F. Oikawa, H. Okada, T. Ohshima, and H. Itoh
    • Journal Title

      Physica Status Solodi(a) 205

      Pages: 56-59

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Optical properties of Er-doped GaN2007

    • Author(s)
      H. Castaneda Lopez, S.-I. Kim, Y.-H. Kim, Y. T. Kim, A. Wakahara, C.-S. Son, and L.-H. Choi
    • Journal Title

      Revista Mexicana de Fisica S53

      Pages: 9-12

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Investigation of Tb-related green emission in group-III nitrides by time-resolved photoluminescence measurements2007

    • Author(s)
      A.Wakahara, K.Takemoto, F.Oikawa, H.Okada, T.Ohshima, and H.ltoh
    • Journal Title

      Physica Status Solodi(a) 205

      Pages: 56-59

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Optical properties of Er-doped GaN2007

    • Author(s)
      H.Castaneda Lopez, S.-I.Kim, Y.-H.Kim, Y.T.Kim, A.Wakahara, C.-S.Son, and I.-H.Choi
    • Journal Title

      Revista Mexicana de Fisica S53

      Pages: 9-12

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fluorescence EXAFS study on local structures around Eu atoms implanted in AI_xGai_<-x>N2006

    • Author(s)
      H. Ofuchi, T. Nishiwaki, K. Takaba, K. Ogawa, M. Tabuchi, Y. Takeda, A. Wakahara, A. Yoshida, T. Ohshima, H. Ito
    • Journal Title

      Physica B Vol.376-377

      Pages: 496-498

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Impact of AIGaN on Luminescence Capability of Rare-Earth Ions in A1GaN2006

    • Author(s)
      A. Wakahara
    • Journal Title

      Optical Materials Vol.28

      Pages: 731-737

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Fluorescence EXAFS study on local structures around Eu atoms implanted in A1xGal-xN2006

    • Author(s)
      H.Ofuchi, T.Nishiwaki, K.Takaba, K.Ogawa, M.Tabuchi, Y.Takeda, A.Wakahara, A.Yoshida, T.Ohshima, H.Ito
    • Journal Title

      Physica B 376-377

      Pages: 496-498

    • Related Report
      2006 Annual Research Report
  • [Journal Article] IMPACT OF A1GaN ON LUMINESCENCE CAPABILITY OF RARE- EARTH IONS IN AlGaN2006

    • Author(s)
      A.Wakahara
    • Journal Title

      Optical Materials 28・6-7

      Pages: 731-737

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Impact of AlGaN on Luminescence Capability of Rare-earth Ions in AlGaN2006

    • Author(s)
      A.Wakahara
    • Journal Title

      Optical Materials Volume 28, Issues 6-7

      Pages: 731-737

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Photoluminescence studies of Eu-implanted GaN epilayers2005

    • Author(s)
      V. Katchkanov, K. P. O'Donnell, S. Dalmasso, R. W. Martin, A. Braud, Y. Nakanishi, A. Wakahara, A. Yoshida
    • Journal Title

      physica status solidi(b) Vol.242,(7)

      Pages: 1491-1496

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Energy-back-transfer process in rare-earth doped AIGaN2005

    • Author(s)
      A. Wakahara, T. Fujiwara, H. Okada, A. Yoshida, T. Ohshima, H. Itho
    • Journal Title

      Mater. Res. Soc. Symp. Proc Vol.866

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Photoluminescence properties of Eu-implanted A1_xGai_<-x>N(0≦x≦1)2005

    • Author(s)
      T. Fujiwara, A. Wakahara, Y. Nakanishi, H. Okada, A. Yoshida, T. Ohshima T. Kamiya
    • Journal Title

      physica status solidi(c) Vol.2,(7)

      Pages: 2805-2808

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Enhancement of Th-related cathodeluminescence in AI_xGai_<-x>,N (0≦x≦1)2005

    • Author(s)
      A. Wakahara, Y. Nakanishi, T. Fujiwara, H. Okada, A. Yoshida, T. Ohshima, T. Kamiya
    • Journal Title

      physica status solidi(a) Vol.202,(5)

      Pages: 863-867

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Photoluminescence studies of Eu-implanted GaN epilayers2005

    • Author(s)
      V.Katchkanov, K.P.O'Donnell, S.Dalmasso, R.W.Martin, A.Brand, Y.Nakanishi, A.Wakahara, A.Yoshida
    • Journal Title

      Physica status solidi (b) Vol.242, No.7

      Pages: 1491-1496

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Energy-back-transfer process in rare-earth doped AlGaN2005

    • Author(s)
      A.Wakahara, T.Fujiwara, H.Okada, A.Yoshida, T.Ohshima, H.Itho
    • Journal Title

      Mater.Res.Soc.Symp.Proc. Vol.866

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Enhancement of Tb-related cathodoluminescence in Al_xGa_<1-x>N (0【less than or equal】x【less than or equal】1)2005

    • Author(s)
      A.Wakahara, Y.Nakanishi, T.Fujiwara, H.Okada, A.Yoshida, T.Ohshima, T.Kamiya
    • Journal Title

      Phys.Stat.Solidi (a) Vol.202, No.5

      Pages: 863-867

    • Related Report
      2005 Annual Research Report
  • [Presentation] Optical Gain of Eu^<3+> Ion Implanted AlGaN and Its Al Compositional Dependence2007

    • Author(s)
      A. Wakahara, T. Shimojo, H. Kawai, H. Okada, T. Ohshima, S. Sato
    • Organizer
      The 7th international conference on nitride semiconductors
    • Place of Presentation
      Las Vegas, USA
    • Year and Date
      2007-09-19
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Optical Gain of Eu3+ Ion Implanted AIGaN and Its Al Compositional Dependence2007

    • Author(s)
      A.Wakahara, T.Shimojo, H.Kawai, H.Okada, T.Ohshima, S.Sato
    • Organizer
      The 7th international conference on nitride semiconductors
    • Place of Presentation
      LasVegas,USA
    • Year and Date
      2007-09-19
    • Related Report
      2007 Annual Research Report
  • [Presentation] Optical gain of Eu^<3+> ion implanted AIGaN and its Al compositional dependence2007

    • Author(s)
      A. Wakahara, T. Shimojo, H. Kawai, H. Okada, T. Ohshima, S. Sato
    • Organizer
      The 7th Int. Conf. on Nitride Semiconductors
    • Place of Presentation
      Las Vegas, USA
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Monolithic Optoelectronic Integrated Circuits (Invited)2007

    • Author(s)
      A. Wakahara
    • Organizer
      4th Int. Workshop on Nanoscale Semiconductor Devices
    • Place of Presentation
      Jeju, Korea
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Luminescence Properties of Tb-Implanted AI_xGai_<-x>N Epitaxial Layer2007

    • Author(s)
      J.H. Park, Y. Furukawa, H. Okada, A. Wakahara
    • Organizer
      The 8th Korea-Japan Joint Workshop on Advanced Semiconductor Processes and Equipments
    • Place of Presentation
      Busan, Korea
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development of Eu-doped AIGaN for Optoelectronic Integrated System -Optical Gain and Loss Measurement2007

    • Author(s)
      A. Wakaham, H. Okada, J.-H. Park, K. Takemoto, T. Shimojyo, A. Yoshida
    • Organizer
      The 8th Korea-Japan Joint Workshop on Advanced Semiconductor Processes and Equipments
    • Place of Presentation
      Busan, Korea
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Energy transfer process in AIGaN : Tb by time-resolved photoluminescence analysis2006

    • Author(s)
      A. Wakahara, K. Takemoto, F. Oikawa, H. Okada
    • Organizer
      International Union MRS-ICA-2006
    • Place of Presentation
      Jeju, Korea
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Investigation of Tb-related green emission in group-Ill nitrides by time-resolved photoluminescence measurements2006

    • Author(s)
      A. Wakahara, K. Takemoto, F. Oikawa, H. Okada, T. Ohshima, H. Itoh
    • Organizer
      2nd Workshop on Impurity Based Electroluminescent Devices and Materials
    • Place of Presentation
      Nanki-shirahama, Japan
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] A novel structure of Si/GaN/SiIγ-Al_2O_3/Si for MEMS applications2006

    • Author(s)
      S. Hatakenaka, A. Wakahara, H. Okada, M. Itoh, M. Ishida
    • Organizer
      Asia-Pacific Conf. on Transducers and Micro-Nano Tech
    • Place of Presentation
      Singapore
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Optical investigation of Implantation Conditions on the luminescence Properties of Eu-doped Al_xGa_<-x>,N2006

    • Author(s)
      J.-H. Park, H. Okada, A. Wakahara
    • Organizer
      The 7th Japan-Korea Joint Workshop on Advanced Semiconductor Processes and Equipments
    • Place of Presentation
      Nam, Japan
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Optical Properties of AIGaN doped with Rare-Earth Impurity for CMOS Compatible Optoelectronic Integration2006

    • Author(s)
      A. Wakahara, H. Okada, J.-H. Park, F. Oikawa, A. Yoshida
    • Organizer
      The 7th Japan-Korea Joint Workshop on Advanced Semiconductor Processes and Equipments
    • Place of Presentation
      Nara, Japan
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Impact of AIGaN on Luminescence Capability of Rare-earth Ions in AIGaN2005

    • Author(s)
      A. Wakahara
    • Organizer
      European MRS
    • Place of Presentation
      Strasbourg, France
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Energy-back-transfer process in rare-earth doped AlGaN2005

    • Author(s)
      A. Wakahara, T. Fujiwara, H. Okada, A. Yoshida, T. Ohshima H. Itho
    • Organizer
      MRS Spring meeting
    • Place of Presentation
      San Francisco, CA, USA
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Visible light-emission increased in rare-earth-doped GaN and related nitride alloy semiconductors2005

    • Author(s)
      A. Yoshida, Y. Nakanishi, A. Wakahara
    • Organizer
      4th ISSS Int. Conf. on Smart Materials, Structures and Systems
    • Place of Presentation
      Bangalore, India
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary

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Published: 2005-04-01   Modified: 2016-04-21  

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