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Research of Bio-nano Display using Ferritin Protein

Research Project

Project/Area Number 17360164
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionNara Institute of Science and Technology

Principal Investigator

URAOKA Yukiharu  Nara Institute of Science and Technology, Material Science, Assoxiate Professor, 物質創成科学研究科, 助教授 (20314536)

Co-Investigator(Kenkyū-buntansha) FUYUKI Takashi  Nara Institute of Science and Technology, Material Science, Professor, 物質創成科学研究科, 教授 (10165459)
HATAYAMA Tomoaki  Nara Institute of Science and Technology, Material Science, Assistant Professor, 物質創成科学研究科, 助手 (90304162)
YANO Hiroshi  Nara Institute of Science and Technology, Material Science, Assistant Professor, 物質創成科学研究科, 助手 (40335485)
Project Period (FY) 2005 – 2006
Project Status Completed (Fiscal Year 2006)
Budget Amount *help
¥14,800,000 (Direct Cost: ¥14,800,000)
Fiscal Year 2006: ¥7,900,000 (Direct Cost: ¥7,900,000)
Fiscal Year 2005: ¥6,900,000 (Direct Cost: ¥6,900,000)
KeywordsFerritin Protein / Thin Film Transistor / Poly silicon film / Metal Induced Crystalization / Display / System On Panel / Nano Particle / Ni catalyst / シリコン薄膜 / 結晶化 / ニッケル / 固相成長 / バイオミネラリゼーション / シリサイド
Research Abstract

Polycrystalline silicon (poly-Si) films fabricated on glass or plastic substrates have attracted much attention due to their applications in thin-film transistors (TFT) for flat-panel displays or future displays, such as a system-on-panel. In this study, we propose a new method utilizing biotechnology to obtain high-quality poly-Si thin films. As the nucleus of silicon crystallization, the Ni core of ferritin with a diameter of 7 nm was adsorbed on the surface of a-Si films by a bottom-up process. By adjusting the density of ferritin on the a-Si film, we controlled the Ni nucleus density and performed the solid-phase crystallization of the a-Si film.
The a-Si film with a controlled crystal nucleus was heated up to 550℃in 10 min and then annealed for 25 h in N_2 ambient in an RTA furnace. Rapid heating suppresses the generation of a natural nucleus and poly-Si growth proceeds laterally from the controlled nucleus of NiSi_2. It is reported that the activation energies of Ni/a-Si → NiSi_2, … More a-Si → crystalline Si, and the generation of a natural nucleus are 1.45, 2.7, and 4.4eV, respectively. Therefore, it is estimated that the rapid heating and continuous annealing at 550℃ enhanced the reaction of NiSi_2 dominantly, thus the crystal growth of poly-Si proceeded.
Furthermore, to examine grain size and crystalline orientation, EBSD analysis was performed. The "grains" were defined as the regions with the same crystallographic orientations and the same phases. Mapping images showed that definite grains were not observed at a density of 10^<11>cm^<-2>, therefore, the microcrystalline structure was dominant. For the film with a density of 10^<10>cm^<-2>, a mixture of grains and a microcrystalline structure was confirmed. However, for the film with a core density of 10^9cm^<-2>, definite grains were confirmed and their size was uniform. The orientations of the grains were random in all samples. The film without cores prepared as reference had no grains. The average grain sizes estimated from the size distribution, were 0.36 a m, 0.48 it m and 3.06 μm for the core densities of 10^<11>, 10^<10> and 10^9 cm^<-2>, respectively. Thus, grain size increased markedly with decreasing core density. Less

Report

(3 results)
  • 2006 Annual Research Report   Final Research Report Summary
  • 2005 Annual Research Report
  • Research Products

    (20 results)

All 2007 2006 2005

All Journal Article (17 results) Book (3 results)

  • [Journal Article] Enlargement of Grain size poly-Si suing Ferritin Protein with Ni Nano Particles2007

    • Author(s)
      Y.Nanjo, Y.Uraoka, T.Fuyuki, M.Okuda, I.Yamashita
    • Journal Title

      The 3rd International TFT Conference

      Pages: 90-90

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] パルスRTAによるNi内包フェリチンタンパク質を用いたシリコン薄膜の結晶化2007

    • Author(s)
      越知誠弘, 南条泰弘, 菅原祐太, 浦岡行治, 冬木隆, 奥田充宏, 山下一郎
    • Journal Title

      第56回応用物理学会学術講演会 講演予稿集 No. 2

      Pages: 916-916

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Enlargement of Grain size poly-Si suing Ferritin Protein with Ni Nano particles2007

    • Author(s)
      Y.Nanjo, Y.Uraoka, T.Fuyuki, M.Okuda, I.Yamashita
    • Journal Title

      The proceeding of the 3rd International TFT Conference

      Pages: 90-90

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Pulse RTA Crystallization of Amorphous Si Film Using Ferritin Protein with Ni Nano-Particles2007

    • Author(s)
      M.Ochi, Y.Nanjo, Y.Sugawara, Y.Uraoka, T.Fuyuki, M.Okuda, I.Yamashita
    • Journal Title

      The proceeding of Applied Physics Symposium No.2

      Pages: 916-916

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Enlargement of Grain size poly-Si suing Ferritin Protein with Ni Nano particles2007

    • Author(s)
      Y.Nanjo, Y.Uraoka, T.Fuyuki, M.Okuda, I.Yamashita
    • Journal Title

      The 3rd International TFT Conference

      Pages: 90-90

    • Related Report
      2006 Annual Research Report
  • [Journal Article] フエリチンタンパクを用いたシリコン薄膜の低温結晶化2007

    • Author(s)
      南条泰弘, 浦岡行治, 冬木隆, 奥田充宏, 山下一郎
    • Journal Title

      第53回応用物理学会学術講演会 講演予稿集 No.2

      Pages: 892-892

    • Related Report
      2006 Annual Research Report
  • [Journal Article] パルスRTAによるNi内包フェリチンタンパク質を用いたシリコン薄膜の結晶化2007

    • Author(s)
      越知誠弘, 南条泰弘, 菅原祐太, 浦岡行治, 冬木隆, 奥田充宏, 山下一郎
    • Journal Title

      第56回応用物理学会学術講演会 講演予稿集 No.2

      Pages: 916-916

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Ni内包フェリチンタンパク質を用いた多結晶シリコンの大粒径化2006

    • Author(s)
      南条泰弘, 浦岡行治, 冬木隆, 奥田充宏, 山下一郎
    • Journal Title

      シリコン材料デバイス研究会 SDM2006-203

      Pages: 7-7

    • NAID

      110006163349

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] フェリチンタンパクを用いたシリコン薄膜の低温結晶化2006

    • Author(s)
      南条泰弘, 浦岡行治, 冬木隆, 奥田充宏, 山下一郎
    • Journal Title

      第53回応用物理学会学術講演会 講演予稿集 No. 2

      Pages: 892-892

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Enlargement of Grain size poly-Si suing Ferritin Protein with Ni Nano particles2006

    • Author(s)
      Y.Nanjo, Y.Uraoka, T.Fuyuki, M.Okuda, I.Yamashita
    • Journal Title

      The proceeding of Silicon Materials and Device Meeting

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Low-Temperature Crystalization of Amorphous Si Film Using Ferritin Protein with Ni Nano-Particles2006

    • Author(s)
      Y.Nanjo, Y.Uraoka, T.Fuyuki, M.Okuda, I.Yamashita
    • Journal Title

      The proceeding of Applied Physics Symposium No.2

      Pages: 892-892

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Study of low-temerature crystallization of amorphous Si film obtained using ferritin with Ni nanoparticles2005

    • Author(s)
      H.Kirimura, Y.Uraoka, T.Fuyuki, M.Okuda, I.Yamashita
    • Journal Title

      Appllied Physics Letters 86

      Pages: 262106-262106

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Low-Temperature Crystalization of Amorphous Si Film Using Ferritin Protein with Ni Nano-Particles2005

    • Author(s)
      H.Kirimura, Y.Uraoka, T.Fuyuki, M.Okuda, I.Yamashita
    • Journal Title

      Active-Matrix Liquid-Crystal Displays (AMLCD2005)

      Pages: 319-322

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Study of low-temerature crystallization of amorphous Si film2005

    • Author(s)
      H.Kirimura, Y.Uraoka, T.Fuyuki, M.Okuda, I.Yamashita
    • Journal Title

      Appllied Physics Letters 86

      Pages: 262106-262106

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Low-Temperature Crystalization of Amorphous Si Film Using Ferritin Protein with Ni Nano-Particles2005

    • Author(s)
      H.Kirimura, Y.Uraoka, T.Fuyuki, M.Okuda, I.Yamashita
    • Journal Title

      Active-Matrix Liquid-Crystal Displays, Kanazawa, Japan.

      Pages: 319-322

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Low-Temperature Crystallization of Amorphous Si Films Using Ferritin Protein with Ni Nanoparticles2005

    • Author(s)
      Hiroya Kirimura, Yukiharu Uraoka, ana Takashi Fuyuki, M.Okuda, I.Yamashita
    • Journal Title

      Proceeding of Active Matrix Liquid Crystal Display 2005

      Pages: 319-319

    • Related Report
      2005 Annual Research Report
  • [Journal Article] フェリチンタンパクを用いたシリコン薄膜の低温結晶化2005

    • Author(s)
      桐村浩哉, 南条泰弘, 浦岡行治, 冬木隆, 奥田光宏, 山下一郎
    • Journal Title

      薄膜材料デバイス研究会

      Pages: 37-37

    • Related Report
      2005 Annual Research Report
  • [Book] 低温ポリシリコン薄膜トランジスタの開発-システムオンパネルをめざして2007

    • Author(s)
      浦岡行治
    • Total Pages
      343
    • Publisher
      CMC出版
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Book] Development of Low Temperature Poly-Si Thin Film Transistors for System on Panel2007

    • Author(s)
      Yukiharu Uraoka
    • Total Pages
      343
    • Publisher
      CMC publication office
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Book] 低温ポリシリコン薄膜トランジスタの開発-システムオンパネルをめざして2007

    • Author(s)
      浦岡行治監修
    • Total Pages
      343
    • Publisher
      CMC出版
    • Related Report
      2006 Annual Research Report

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Published: 2005-04-01   Modified: 2016-04-21  

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