| Project/Area Number |
17360165
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Electron device/Electronic equipment
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| Research Institution | Okayama University |
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Principal Investigator |
KIM SeokBeom Okayama University, Graduate School of Natural Science and Technology, Associate Professor (00287963)
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| Co-Investigator(Kenkyū-buntansha) |
MURASE Satoru Okayama University, Graduate School of Natural Science and Technology, Professor (10312597)
NANATO Nozomu Okayama University, Graduate School of Natural Science and Technology, Assistant Professor (80362953)
HOKAWA Kozi Kanagawa Institute of Technology, School of Engineering, Professor (30257406)
KO Keisin Kanagawa Institute of Technology, School of Engineering, professor (30257414)
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| Project Period (FY) |
2005 – 2007
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| Project Status |
Completed (Fiscal Year 2007)
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| Budget Amount *help |
¥16,000,000 (Direct Cost: ¥15,400,000、Indirect Cost: ¥600,000)
Fiscal Year 2007: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
Fiscal Year 2006: ¥4,400,000 (Direct Cost: ¥4,400,000)
Fiscal Year 2005: ¥9,000,000 (Direct Cost: ¥9,000,000)
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| Keywords | magnetic sensor / semiconductor / junction of semiconductor / magnetic field visualizing / 2-axis magnetic field components / Oxide superconducting film / 磁気センター / 2軸磁場成分測 |
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| Research Abstract |
The Hall sensor is very convenient magnetic sensor for measuring current density in a non-destructive and contactless way. It is widely used to estimate the current density distribution or the magnetic properties of superconducting material, and many measurement methods using Hall sensor have been reported In order to realize a highly functional measuring system with real time and high spatial resolution, and to estimate properties of superconducting film with complex structure or pattern, it is very important to develop a novel Hall sensor array with small size, plane structure and two or three axis. Recently, the new LSI manufacture technology combining with bonding technology such as system on chip (SoC), system in package (SiP) has been developed Using this technology, the highly functional semiconductor devices with new structure, small size and low cost can be realized Therefore, we developed a two-axis Hall sensor array using epitaxial liftoff (ELO) film bonding technology. The Hall sensor array was fabricated on the Si substrate with plane structure and ran measure directly axial and radial magnetic field components. And we have been developing the magnetic field measurement and visualization system with Hall sensor probes to study the critical current density distribution or magnetic properties of high temperature superconducting films.
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