• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Monolithic Integration of Ring-Resonator Optical Switches using Electro-Optic Material, on Si LSI

Research Project

Project/Area Number 17360166
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionHiroshima University

Principal Investigator

YOKOYAMA Shin  Hiroshima University, Research Center for Nanodevices and Systems, Professor (80144880)

Project Period (FY) 2005 – 2007
Project Status Completed (Fiscal Year 2007)
Budget Amount *help
¥12,300,000 (Direct Cost: ¥11,700,000、Indirect Cost: ¥600,000)
Fiscal Year 2007: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
Fiscal Year 2006: ¥3,200,000 (Direct Cost: ¥3,200,000)
Fiscal Year 2005: ¥6,500,000 (Direct Cost: ¥6,500,000)
KeywordsOptical interconnection / Optical switch / Electro-optic effect / Mach-Zhender interferometer / Optical ring resonator / (Ba, Sr)TiO_3 / Strained silicon / Electric-field drive optical switch / 電気光学材料 / マッハツェンダ干渉計 / 低温成長 / 歪みSi電気光学効果 / リング共振器 / キャリア濃度変調屈折率変化 / モノリシック集積 / 低温形成 / 光強度変調 / (Ba, St)TiO_3 / スパッタ / マッハツェンダー干渉計 / スピン塗布法 / スパッタ法
Research Abstract

The final target of the research is to realize the on-chip optical interconnection for high-speed LSI. The object of this study is to develop a technology for monolithic integration of compact optical switches on Si LSI at low temperatures below 450℃, at which the devices can be fabricated on top layer of the LSI without degradation of the metal-interconnect reliability.
In fiscal year of 2005, Mach-Zhender interferometer (MZI) optical switches were integrated using electro-optical material, (Ba,Sr)TiO_3 (BST), spin-coated and annealed at 550℃. Optical modulation was 2% at 90 V. The results were published in Appl. Phys. Lett. 88, 161107 (2006).
In 2006, the performance of the MZI was improved to 10% of modulation at 200 V. We have, for the first time, achieved to decrease the growth temperature of the BST film to 450℃, which is the target value (Jpn. J. Appl. Phys. 46, No. 4B, p. 2462 (2007)).
In 2007, we have tried to improve the BST film quality by adjusting composition elements and by employing Pt cap annealing. However, the further improvement of the MZI performance has not been obtained. Instead of the BST film, the strained silicon has been applied to the ring-resonator optical switches, and we have achieved the optical modulation of 33% at 200 V (IEICE Technical Report, OPE2007-143, p. 41 (2007) [in Japanese]). This is the first report on the electric-field drive Si ring-resonator switch, while the previous devices were current injection type with high power consumption. However, it was found that the mechanism of the optical modulation is not by electro-optic effect but by the carrier-concentration modulation at the Si surface induced by the electric-field. The small strain may be the reason for the no observation of the electro-optic effect. The further improvement is now under investigation.

Report

(4 results)
  • 2007 Annual Research Report   Final Research Report Summary
  • 2006 Annual Research Report
  • 2005 Annual Research Report
  • Research Products

    (119 results)

All 2008 2007 2006 2005 Other

All Journal Article (62 results) (of which Peer Reviewed: 26 results) Presentation (54 results) Remarks (2 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Imprint Property of Optical Mach-Zehnder Interferometer Using Sputter-Deposited(Ba,Sr)TiO_3 at 450℃2008

    • Author(s)
      M. Suzuki
    • Journal Title

      Jpn. J. App. Phys. 47,No.4

      Pages: 2897-2901

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Photoelastic Effect in Silicon Ring Resonator2008

    • Author(s)
      Y. Amemiya
    • Journal Title

      Jpn. J. App. Phys. 47,No.4

      Pages: 2910-2914

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Imprint Property of Optical Mach-Zehnder Interferometer Using Sputter-Deposited (Ba,Sr)TiO_3 at 450℃2008

    • Author(s)
      M., Suzuki, et. al.
    • Journal Title

      Jpn. J. App. Phys 47, 4

      Pages: 2897-2901

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Photoelastic Effect in Silicon Ring Resonator2008

    • Author(s)
      Y., Amemiya, et. al.
    • Journal Title

      Jpn. J. App. Phys 47, 4

      Pages: 2910-2914

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Transient Response in Monolithic Mach-Zehnder Optical Modulator using (Ba,Sr) TiO_3 Film Sputtered at Low Temperature on Silicon2007

    • Author(s)
      M. Suzuki
    • Journal Title

      Jpn. J. App. Phys. 46,No.4B

      Pages: 2462-2466

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Compact Multi-Mode Optical Ring Resonators for Interconnection on Si Chips2007

    • Author(s)
      Y. Tanushi
    • Journal Title

      Jpn. J. App. Phys. 46,No.4B

      Pages: 2364-2368

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] LSIにおける光配線技術2007

    • Author(s)
      横山 新
    • Journal Title

      応用物理 76巻第11号

      Pages: 1238-1245

    • NAID

      10019789939

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Imprint Property of Optical Mach-Zehnder Interferometer Using Sputter Deposited(Ba,Sr)TiO_3 at Low Temperature2007

    • Author(s)
      M. Suzuki
    • Journal Title

      Abst. Int. Conf. on Solid State Devices and Materials (SSDM2007)

      Pages: 116-117

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Photoelastic Effect in Silicon Ring Resonator2007

    • Author(s)
      Y. Amemiya
    • Journal Title

      Abst. Int. Conf. on Solid State Devices and Materials (SSDM2007)

      Pages: 282-283

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Transient Response in Monolithic Mach-Zehnder Optical Modulator using (Ba,Sr)TiO_3 Film Sputtered at Low Temperature on Silicon2007

    • Author(s)
      M., Suzuk, et. al.
    • Journal Title

      Jpn. J. App. Phys 46, 4

      Pages: 2462-2466

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Compact Multi-Mode Optical Ring Resonators for Interconnection on Si Ching2007

    • Author(s)
      Y., Tanushi, et. al.
    • Journal Title

      Jpn. J. App. Phys 46, 4

      Pages: 2364-2368

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Optical interconnection in LSI2007

    • Author(s)
      S., Yokoyama
    • Journal Title

      Oyo Buturi 76, 11

      Pages: 1238-1245

    • NAID

      10019789939

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Imprint Property of Optical Mach-Zehnder Interferometer Using Sputter Deposited (Ba,Sr)TiO_3 at Low Temperature2007

    • Author(s)
      M., Suzuki, et. al.
    • Journal Title

      Abst. Int. Conf. on Solid State Devices and Materials (SSDM2007)

      Pages: 116-117

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Photoelastic Effect in Silicon Ring Resonator2007

    • Author(s)
      Y., Amemiya, et. al.
    • Journal Title

      Abst. Int. Conf. on Solid State Devices and Materials (SSDM2007)

      Pages: 282-283

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Transient Response in Monolithic Mach-Zehnder Optical Modulator using (Ba, Sr) TiO_3 Film Sputtered at Low Temperature on Silicon2007

    • Author(s)
      M. Suzuki
    • Journal Title

      Jpn. J. App. Phys. 46, No.4B

      Pages: 2462-2466

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Compact Multi-Mode Optical Ring Resonators for Interconnection on SiChips2007

    • Author(s)
      Y. Tanushi
    • Journal Title

      Jpn. J. App. Phys. 46, No.4B

      Pages: 2364-2368

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Imprint Property of Optical Mach-Zehnder Interferometer Using Sputter Deposited (Ba, Sr) TiO_3 at Low Temperature2007

    • Author(s)
      M. Suzuki
    • Journal Title

      Ext. Abst. Int. Conf. on Solid State Devices and Materials

      Pages: 116-117

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Photoelastic Effect in Silicon Ring Resonator2007

    • Author(s)
      Y. Amemiya
    • Journal Title

      Ext. Abst. Int. Conf. on Solid State Devices and Materials

      Pages: 282-283

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Design and Simulation of Ring Resonator Switches using Electro-Optic Materials2006

    • Author(s)
      Y. Tanushi
    • Journal Title

      Jpn. J. Appl. Phys. 45,No.4B

      Pages: 3493-3497

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Structural and Optical Properties of Electro-Optic Material: Sputtered (Ba,Sr) TiO_32006

    • Author(s)
      M. Suzuki
    • Journal Title

      Jpn. J. Appl. Phys. 45,No.4B

      Pages: 3488-3492

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Groove-Buried Optical Waveguides Based on Metal Organic Solution-Derived Ba_<0.7>Sr_<0.3>TiO_3 Thin Films2006

    • Author(s)
      Zhimou Xu
    • Journal Title

      Jpn. J. Appl. Phys. 45,No.4B

      Pages: 3482-3487

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Fabrication of Spin-Coated Optical Waveguides for Optically Interconnected LSI and Influence of Fabrication Process on Underlying Metal-Oxide-Semiconductor Capacitors2006

    • Author(s)
      T. Tabei
    • Journal Title

      Jpn. J. Appl. Phys. 45,No.4B

      Pages: 3498-3503

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Monolithically integrated optical modulator based on polycrystalline Ba_<0.7>Sr_<0.3>TiO_3 thin films2006

    • Author(s)
      Zhimou Xu
    • Journal Title

      Appl. Phys. Lett. 88,No.16

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Optical properties of amorphous Ba_<0.7>Sr_<0.3>TiO_3 thin films obtained by metal organic decomposition technique2006

    • Author(s)
      Zhimou Xu
    • Journal Title

      Thin Solid Films 515

      Pages: 2326-2331

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Low Temperature Fabrication of Monolithic Mach-Zehnder Optical Modulator on Silicon using Sputtered (Ba,Sr) TiO_3 and Mechanism of Transient Response2006

    • Author(s)
      M. Suzuki
    • Journal Title

      Abst. Int. Conf. on Solid State Devices and Materials (SSDM2006)

      Pages: 48-49

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Compact Multi-Mode Optical Ring Resonators for Interconnection on Si Chips2006

    • Author(s)
      Y. Tanushi
    • Journal Title

      Abst. Int. Conf. on Solid State Devices and Materials (SSDM2006)

      Pages: 44-45

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Design and Simulation of Ring Resonator Switches using Electro-Optic Materials2006

    • Author(s)
      Y., Tanushi, et. al.
    • Journal Title

      Jpn. J. Appl. Phys 45, 4

      Pages: 3493-3497

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Structural and Optical Properties of Electro-Optic Material : Sputtered (Ba,Sr)TiO_32006

    • Author(s)
      M., Suzuki, et. al.
    • Journal Title

      Jpn. J. Appl. Phys 45, 4

      Pages: 3488-3492

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Groove-Buried Optical Waveguides Based on Metal Organic Solution-Derived Ba^<0.7>Sr^<0.3>TiO_3 Thin Films2006

    • Author(s)
      Zhimou, Xu, et. al.
    • Journal Title

      Jpn. J. Appl. Phys 45, 4

      Pages: 3482-3487

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Fabrication of Spin-Coated Optical Waveguides for Optically Interconnected LSI and Influence of Fabrication Process on Underlying Metal-Oxide-Semiconductor Capacitors2006

    • Author(s)
      T., Tabei, et. al.
    • Journal Title

      Jpn. J. Appl. Phys 45, 4

      Pages: 3498-3503

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Monolithically integrated optical modulator based on polycrystalline Ba^<0.7>Sr^<0.3>TiO_3 thin films2006

    • Author(s)
      Zhimou, Xuet, et. al.
    • Journal Title

      Appl. Phys. Lett 88, 16

      Pages: 161107-161107

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Optical properties of amorphous Ba^<0.7>Sr^<0.3>TiO_3 thin films obtained by metal organic decomposition technique2006

    • Author(s)
      Zhimou, Xu, et. al.
    • Journal Title

      Thin Solid Films 515

      Pages: 2326-2331

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Low Temperature Fabrication of Monolithic Mach-Zehnder Optical Modulator on Silicon using Sputtered (Ba,Sr)TiO_3 and Mechanism of Transient Response2006

    • Author(s)
      M., Suzuki, et. al.
    • Journal Title

      Abst. Int. Conf. on Solid State Devices and Materials (SSDM2006)

      Pages: 48-49

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Compact, Multi-Moae Optical Ring Resonators for Interconnection on Si Chips2006

    • Author(s)
      Y., Tanushi, et. al.
    • Journal Title

      Abst. Int. Conf. on Solid State Devices and Materials (SSDM2006)

      Pages: 44-45

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Design and Simulation of Ring Resonator Switches using Elector-Optic Materials2006

    • Author(s)
      Y.Tanushi, S.Yokoyama
    • Journal Title

      Jpn. J. Appl. Phys. 45, No. 4B

      Pages: 3493-3497

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Structural and Optical Properties of Electro-Optic Material : Sputtered (Ba,Sr)TiO_32006

    • Author(s)
      M.Suzuki, Zhimou Xu, Y.Tanushi, S.Yokoyama
    • Journal Title

      Jpn. J. Appl. Phys. 45, No. 4B

      Pages: 3488-3492

    • NAID

      10022543077

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Groove-Buried Optical Waveguides Based on Metal Organic Solution-Derived Ba_<0.7>Sr_<0.3>TiO_3 Thin Films2006

    • Author(s)
      Zhimou Xu, M.Suzuki, Y.Tanushi, K.Wakushima, S.Yokoyama
    • Journal Title

      Jpn. J. Appl. Phys. 45, No. 4B

      Pages: 3482-3487

    • NAID

      10022543087

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Monolithically integrated optical modulator based on polycrystalline Ba_<0.7>Sr_<0.3>TiO_3 thin films2006

    • Author(s)
      Zhimou Xu, M.Suzuki, Y.Tanushi, S.Yokoyama
    • Journal Title

      Appl. Phys. Lett. 88, No. 16

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Optical properties of amorphous Ba_<0.7>Sr_<0.3>TiO_3 thin films obtained by metal organic decomposition technique2006

    • Author(s)
      Zhimou Xu, Y.Tanushi, M.Suzuki, K.Wakushima, S.Yokoyama
    • Journal Title

      Thin Solid Films 515

      Pages: 2326-2331

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Low Temperature Fabrication of Monolithic Mach-Zehnder Optical Modulator on Silicon using Sputtered (Ba,Sr)TiO_3 and Mechanism of Transient Response2006

    • Author(s)
      M.Suzuki, K.Nagata, Y.Tanushi, S.Yokoyama
    • Journal Title

      Abst. Int. Conf. on Solid State Devices and Materials (SSDM2006)

      Pages: 48-49

    • NAID

      10022544289

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Design and Simulation of Ring Resonator Switches using Electro-Optic Materials2006

    • Author(s)
      Y.Tanushi
    • Journal Title

      Jpn.J.Appl.Phys. 45,No.4B(未定)

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Structural and Optical Properties of Electro-Optic Material : Sputtered (Ba, Sr)TiO_32006

    • Author(s)
      M.Suzuki
    • Journal Title

      Jpn.J.Appl.Phys. 45,No.4B(未定)

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Groove-Buried Optical Waveguides Based on Metal Organic Solution-Derived Ba_<0.7>Sr_<0.3>TiO_3 Thin Films2006

    • Author(s)
      Zhimou Xu
    • Journal Title

      Jpn.J.Appl.Phys. 45,No.4B(未定)

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Monolithically integrated optical modulator based on polycrystalline Ba_<0.7>Sr_<0.3>TiO_3 thin films2006

    • Author(s)
      Zhimou Xu
    • Journal Title

      Appl.Phys.Lett. 88,No.16(未定)

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Optical properties of amorphous Ba_<0.7>Sr_<0.3>TiO_3 thin films obtained by metal organic decomposition technique2006

    • Author(s)
      Zhimou Xu
    • Journal Title

      Thin Solid Films (未定)

    • Related Report
      2005 Annual Research Report
  • [Journal Article] スパッタ(Ba, Sr)TiO_3電気光学材料を用いたマッハツェンダ型光スイッチ2006

    • Author(s)
      鈴木昌人
    • Journal Title

      第53回応用物理学会関係連合講演会講演予稿集 第3分冊

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Structure and Optical Band-Gap Energies of Ba_<0.5>Sr_<0.5>TiO_3 Thin Films Fabricated by RF Magnetron Plasma Sputtering2005

    • Author(s)
      Zhimou Xu
    • Journal Title

      Jpn. J. Appl. Phys. 44,No.12

      Pages: 8507-8511

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Design and Simulation of Ring Resonator Switches using Electro-Optic Materials2005

    • Author(s)
      Y. Tanushi
    • Journal Title

      Abst. Int. Conf. on Solid State Devices and Materials (SSDM2005)

      Pages: 318-319

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Structural and Optical Properties of Electro-Optic Material: Sputtered (Ba,Sr) TiO_32005

    • Author(s)
      M. Suzuki
    • Journal Title

      Abst. Int. Conf. on Solid State Devices and Materials (SSDM2005)

      Pages: 732-733

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Groove-Buried Optical Waveguides Based on Metal Organic Solution-Derived Ba_<0.7>Sr_<0.3>TiO_3 Thin Films2005

    • Author(s)
      Zhimou Xu
    • Journal Title

      Abst. Int. Conf. on Solid State Devices and Materials (SSDM2005)

      Pages: 738-739

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Fabrication of spin-coat optical waveguides for optically interconnected LSl and influence of fabrication process on lower layer MOS capacitors2005

    • Author(s)
      T. Tabei
    • Journal Title

      Abst. Int. Conf. on Solid State Devices and Materials (SSDM2005)

      Pages: 332-333

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Novel Fabrication Technique of Optical Waveguides using Low Density Silicon Nitride Films Deposited by Plasma-Enhanced Chemical Vapor Deposition2005

    • Author(s)
      S. Yokoyama
    • Journal Title

      Abst. Int. Conf. on Solid State Devices and Materials (SSDM2005)

      Pages: 736-737

    • NAID

      10022543084

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] High-Speed and Low-Voltage Ring Resonator Optical Switches Using Electro-and Magneto-Optic Materials2005

    • Author(s)
      Y. Tanushi
    • Journal Title

      Proc, 2nd International Conference on Group IV Photonics (2005)

      Pages: 165-167

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Structure and Optical Band-Gap Energies of Ba^<0.5>Sr^<0.5>TiO_3 Thin Films Fabricated by RF Magnetron Plasma Sputtering2005

    • Author(s)
      Zhimou, Xu, et. al.
    • Journal Title

      Jpn. J. Appl. Phys 44, 12

      Pages: 8507-8511

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Design and Simulation of Ring Resonator Switches using Electro-Optic Materials2005

    • Author(s)
      Y., Tanushi, et. al.
    • Journal Title

      Abst. Int. Conf. on Solid State Devices and Materials (SSDM2005)

      Pages: 318-319

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Structural and Optical Properties of Electro-Optic Material : Sputtered (Ba,Sr)TiO_32005

    • Author(s)
      M., Suzuki, et. al.
    • Journal Title

      Abst. Int. Conf. on Solid State Devices and Materials (SSDM2005)

      Pages: 732-733

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Groove-Buried Optical Waveguides Based on Metal Organic Solution-Derived Ba^<0.7>Sr^<0.3>TiO_3 Thin Films2005

    • Author(s)
      Zhimou, Xu, et. al.
    • Journal Title

      Abst. IM. Conf. on Solid State Devices and Materials (SSDM2005)

      Pages: 738-739

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Fabrication of spin-coat optical waveguides for optically interconnected LSI and influence of fabrication process on lower layer MOS capacitors2005

    • Author(s)
      T., Tabei, et. al.
    • Journal Title

      Abst. Int. Conf. on Solid State Devices and Materials (SSDM2005)

      Pages: 332-333

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Novel Fabrication Technique of Optical Waveguides using. Low Density Silicon Nitride Films Deposited by Plasma-Enhanced Chemical Vapor Deposition2005

    • Author(s)
      S., Yokoyama, et. al.
    • Journal Title

      Abst. Int. Conf. on Solid State Devices and Materials (SSDM2005)

      Pages: 736-737

    • NAID

      10022543084

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] High-Speed and Low-Voltage Ring Resonator Optical Switches Using Electro- and Magneto-Optic Materials2005

    • Author(s)
      Y., Tanushi, et. al.
    • Journal Title

      Proc. 2nd Int. Conf. on Group IV Photonics

      Pages: 165-167

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] High-Speed and Low-Voltage Ring Resonator Optical Switches Using Electro- and Magneto-Optic Materials2005

    • Author(s)
      Y.Tanushi
    • Journal Title

      Proc.2nd International Conference on Group IV Photonics (Antwerp, Belgium, Sept.21-23,2005)

      Pages: 165-167

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Structure and Optical Band-Gap Energies of Ba_<0.5>Sr_<0.5>TiO_3 Thin Films Fabricated by RF Magnetron Plasma Sputtering2005

    • Author(s)
      Zhimou Xu
    • Journal Title

      Jpn.J.Appl.Phys. 44,No.12

      Pages: 8507-8511

    • Related Report
      2005 Annual Research Report
  • [Presentation] シリコンリング共振器を用いた電界駆動光変調素子2008

    • Author(s)
      徳永智大
    • Organizer
      第55会応用物理学関係連合講演会
    • Place of Presentation
      千葉,日本大学
    • Year and Date
      2008-03-29
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Electric-Field Drive Optical Modulator Using Si Ring Resonator2008

    • Author(s)
      T., Tokunaga, et. al.
    • Organizer
      The 55th Spring Meeting, 2008, The Japan Society of Applied Physics and Related Societies
    • Place of Presentation
      Chiba
    • Year and Date
      2008-03-29
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] シリコンリング共振器を用いた電界駆動光変調素子2008

    • Author(s)
      徳永智大
    • Organizer
      応用物理学会
    • Place of Presentation
      日本大学
    • Year and Date
      2008-03-29
    • Related Report
      2007 Annual Research Report
  • [Presentation] 電気光学材料(Ba, Sr) TiO_3薄膜の低温結晶化2008

    • Author(s)
      永田和真
    • Organizer
      第55会応用物理学関係連合講演会
    • Place of Presentation
      千葉,日本大学
    • Year and Date
      2008-03-28
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Low Temperature Crystallization of Electro-Optic Material : (Ba,Sr)TiO_32008

    • Author(s)
      K., Nagata, et. al.
    • Organizer
      The 55th Spring Meeting, 2008, The Japan Society of Applied Physics and Related Societies
    • Place of Presentation
      Chiba
    • Year and Date
      2008-03-28
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 電気光学材料(Ba, Sr) TiO3薄膜の低温結晶化2008

    • Author(s)
      永田和真
    • Organizer
      応用物理学会
    • Place of Presentation
      日本大学
    • Year and Date
      2008-03-28
    • Related Report
      2007 Annual Research Report
  • [Presentation] シリコンリング共振器を用いた電界駆動光変調素子2007

    • Author(s)
      徳永智大
    • Organizer
      電子情報通信学会研究会
    • Place of Presentation
      東京,機械振興会館
    • Year and Date
      2007-12-14
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Electric-Field Drive Optical Modulator Using Si Ring Resonator2007

    • Author(s)
      T., Tokunaga, et. al.
    • Organizer
      Optoelectronics Res. Meeting, The Inst. of Electronics, Information, and Communication Engineers
    • Place of Presentation
      Tokyo
    • Year and Date
      2007-12-14
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] シリコンリング共振器における光弾性効果2007

    • Author(s)
      徳永智大
    • Organizer
      電子情報通信学会光エレクトロニクス研究会
    • Place of Presentation
      東京都機械振興会館
    • Year and Date
      2007-12-14
    • Related Report
      2007 Annual Research Report
  • [Presentation] Photoelastic Effect in Silicon Ring Resonator2007

    • Author(s)
      Y. Amemiya
    • Organizer
      Int. Conf. on Solid State Devices and Materials
    • Place of Presentation
      筑波国際会議場
    • Year and Date
      2007-09-20
    • Related Report
      2007 Annual Research Report
  • [Presentation] Imprint Property of Optical Mach-Zehnder Interferometer Using Sputter Deposited (Ba, Sr) TiO_3 at Low Temperature2007

    • Author(s)
      M. Suzuki
    • Organizer
      Int. Conf. on Solid State Devices and Materials (SSDM2007)
    • Place of Presentation
      筑波
    • Year and Date
      2007-09-19
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Photoelastic Effect in Silicon Ring Resonator2007

    • Author(s)
      Y. Amemiya
    • Organizer
      Int. Conf. on Solid State Devices and Materials (SSDM2007)
    • Place of Presentation
      筑波
    • Year and Date
      2007-09-19
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Imprint Property of Optical Mach-Zehnder Interferometer Using Sputter Deposited (Ba,Sr)TiO_3 at Low Temperature2007

    • Author(s)
      M., Suzuki, et. al.
    • Organizer
      Int. Conf. on Solid State Devices and Materials (SSDM2007)
    • Place of Presentation
      Tsukuba
    • Year and Date
      2007-09-19
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Photoelastic Effect in Silicon Ring Resonator2007

    • Author(s)
      Y., Amemiya, et. al.
    • Organizer
      Int. Conf. on Solid State Devices and Materials (SSDM2007)
    • Place of Presentation
      Tsukuba
    • Year and Date
      2007-09-19
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Imprint Property of Optical Mach-Zehnder Interferometer Using Sputter Deposited (Ba, Sr) TiO_3 at Low Tempearature2007

    • Author(s)
      M. Suzuki
    • Organizer
      Int. Conf. on Solid State Devices and Materials
    • Place of Presentation
      筑波国際会議場
    • Year and Date
      2007-09-19
    • Related Report
      2007 Annual Research Report
  • [Presentation] Photoelastic Effect in Silicon Ring Resonator2007

    • Author(s)
      Y., Amemiya, et. al.
    • Organizer
      The 68th Autumn Meeting, 2007, The Japan Society of Applied Physics
    • Place of Presentation
      Hokkaido
    • Year and Date
      2007-09-14
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 電気光学材料(Ba, Sr) TiO_3導波路の赤外光における伝搬損失2007

    • Author(s)
      永田和真
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-05
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 低温(450℃)スパッタ(Ba, Sr) TiO_3を用いたマッハツェンダ型光スイッチのインプリント特性2007

    • Author(s)
      鈴木昌人
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-05
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] propagation loss of (Ba,Sr)TiO_3 waveguide for infrared light2007

    • Author(s)
      M., Nagata, et. al.
    • Organizer
      The 68th Autumn Meeting, 2007, The Japan Society of Applied Physics
    • Place of Presentation
      Hokkaido
    • Year and Date
      2007-09-05
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Imprint Property of Mach-Zhender Interferometer Using Sputter Deposited (Ba,Sr)TiO_3 at Low Temperature (450℃)2007

    • Author(s)
      M., Suzuki, et. al.
    • Organizer
      The 68th Autumn Meeting, 2007, The Japan Society of Applied Physics
    • Place of Presentation
      Hokkaido
    • Year and Date
      2007-09-05
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 低温(450℃)スパッタ(Ba, Sr)TiO_3を用いたマッハツエンダ型光スイッチのインプリント特性2007

    • Author(s)
      鈴木昌人
    • Organizer
      応用物理学会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-05
    • Related Report
      2007 Annual Research Report
  • [Presentation] 電気光学材料(Ba, Sr)TiO_3導波路の赤外光における伝搬損失2007

    • Author(s)
      永田和真
    • Organizer
      応用物理学会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-05
    • Related Report
      2007 Annual Research Report
  • [Presentation] シリコンリング共振器における光弾性効果,"2007年秋期第68回応用物理学会学術講演会2007

    • Author(s)
      雨宮嘉照
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-04
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] シリコンリング共振器における光弾性効果2007

    • Author(s)
      雨宮嘉照
    • Organizer
      応用物理学会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-04
    • Related Report
      2007 Annual Research Report
  • [Presentation] Low Temperature Fabrication of Monolithic Mach-Zehnder Optical Modulator on Sillcon using Sputtered (Ba,Sr) TiO_3 and Mechanism of Transient Response2006

    • Author(s)
      M. Suzuki
    • Organizer
      Int. Conf. on Solid State Devices and Materials (SSDM2006)
    • Place of Presentation
      横浜
    • Year and Date
      2006-09-06
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Compact Multi-Mode Optical Ring Resonators for Interconnection on Si Chips2006

    • Author(s)
      Y. Tanushi
    • Organizer
      Int. Conf. on Solid State Devices and Materials (SSDM2006)
    • Place of Presentation
      横浜
    • Year and Date
      2006-09-06
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Low Temperature Fabrication of Monolithic Mach-Zehnder Optical Modulator on Silicon using Sputtered (Ba,Sr)TiO_3 and Mechanism of Transient Response2006

    • Author(s)
      M., Suzuki, et. al.
    • Organizer
      Int. Conf. on Solid State Devices and Materials (SSDM2006)
    • Place of Presentation
      Yokohama
    • Year and Date
      2006-09-06
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Compact Multi-Mode Optical Ring Resonators for Interconnection on Si Chips2006

    • Author(s)
      Y., Tanushi, et. al.
    • Organizer
      Int. Conf. on Solid State Devices and Materials (SSDM2006)
    • Place of Presentation
      Yokohama
    • Year and Date
      2006-09-06
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 低温(450℃)堆積(Ba, Sr) TiO_3を用いた電気光学材料を用いたマッハツェンダ光スイッチのモノリシック集積2006

    • Author(s)
      鈴木昌人
    • Organizer
      第67回応用物理学会学術講演会
    • Place of Presentation
      立命館大学
    • Year and Date
      2006-08-31
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Monolithic Integration of Mach-Zhender Optical Switch using (Ba,Sr)TiO_3 Deposited at Low Temnerature (450℃)2006

    • Author(s)
      M., Suzuki, et. al.
    • Organizer
      The 67th Autumn Meeting, 2006, The Japan Society of Applied Physics
    • Place of Presentation
      Shiga
    • Year and Date
      2006-08-31
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] チップ内光インターコネクションのための小型マルチモードリング共振器2006

    • Author(s)
      田主裕一朗
    • Organizer
      第67回応用物理学会学術講演会
    • Place of Presentation
      立命館大学
    • Year and Date
      2006-08-29
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Compact Multi-Mode Optical Ring Resonators for Interconnection on Si Chips2006

    • Author(s)
      Y., Tanushi, et. al.
    • Organizer
      The 67th Autumn Meeting, 2006, The Japan Society of Applied Physics
    • Place of Presentation
      Shiga
    • Year and Date
      2006-08-29
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 積層リング共振器型シリコン光スイッチの製作と評価2006

    • Author(s)
      涌島圭太
    • Organizer
      第53回応用物理学関係連合講演会
    • Place of Presentation
      武蔵工業大学
    • Year and Date
      2006-03-25
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] スパッタ(Ba, Sr) TiO_3電気光学材料を用いたマッハツェンダ型光スイッチ2006

    • Author(s)
      鈴木昌人
    • Organizer
      第53回応用物理学関係連合講演会
    • Place of Presentation
      武蔵工業大学
    • Year and Date
      2006-03-25
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Monolithically integrated optical modulator based on Ba_,0.7>Sr_<0.3>TiO_3 thin films2006

    • Author(s)
      Zhimou Xu
    • Organizer
      第53回応用物理学関係連合講演会
    • Place of Presentation
      武蔵工業大学
    • Year and Date
      2006-03-25
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Fabrication and Characterization of Silicon Optical Switches using Stacked Ring Resonator2006

    • Author(s)
      K., Wakushima, et. al.
    • Organizer
      The 53rd Spring Meeting, 2006, The Japan Society of Applied Physics and Related Societies
    • Place of Presentation
      Tokyo
    • Year and Date
      2006-03-25
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Monolithically integrated optical modulator based on Ba^<0.7>Sr^<0.3>TiO_3 thin films2006

    • Author(s)
      Zhimou, Xu, et. al.
    • Organizer
      The 53rd Spring Meeting, 2006, The Japan Society of Applied Physics and Related Societies
    • Place of Presentation
      Tokyo
    • Year and Date
      2006-03-25
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] High-Speed and Low-Voltage Ring Resonator Optical Switches Using Electro- and Magneto-Optic Materials2005

    • Author(s)
      Y. Tanushi
    • Organizer
      2nd International Conference on Group IV Photonics (2005)
    • Place of Presentation
      Antwerp, Belgium
    • Year and Date
      2005-09-23
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] High-Speed and Low-Voltage Ring Resonator Optical Switches Using Electro- and Magneto-Optic Materials2005

    • Author(s)
      Y., Tanushi, et. al.
    • Organizer
      2nd Int. Conf. on Group IV Photonics (2005)
    • Place of Presentation
      Antwerp, Belgium
    • Year and Date
      2005-09-23
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Fabrication of spin-coat optical waveguides for optically interconnected LSI and influence of fabrication process on lower layer MOS capacitors2005

    • Author(s)
      T. Tabei
    • Organizer
      Int. Conf. on Solid State Devices and Materials (SSDM2005)
    • Place of Presentation
      神戸
    • Year and Date
      2005-09-14
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Novel Fabrication Technique of Optical Waveguides using Low Density Silicon Nitride Films Deposited by Plasma-Enhanced Chemical, Vapor Deposition2005

    • Author(s)
      S. Yokoyama
    • Organizer
      Int. Conf. on Solid State Devices and Materials (SSDM2005)
    • Place of Presentation
      神戸
    • Year and Date
      2005-09-14
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Fabrication of spin-coat optical waveguides for optically interconnected LSI and influence of fabrication process on lower layer MOS capacitors2005

    • Author(s)
      T., Tabei, et. al.
    • Organizer
      Int. Conf. on Solid State Devices and Materials (SSDM2005)
    • Place of Presentation
      Kobe
    • Year and Date
      2005-09-14
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Novel Fabrication Technique of Optical Waveguides using Low Density Silicon Nitride Films Deposited by Plasma-Enhanced Chemical Vapor Deposition2005

    • Author(s)
      S., Yokoyama, et. al.
    • Organizer
      Int. Conf. on Solid State Devices and Materials (SSDM2005)
    • Place of Presentation
      Kobe
    • Year and Date
      2005-09-14
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Design and Simulation of Ring Resonator Switches using Electro-Optic Materials2005

    • Author(s)
      Y. Tanushi
    • Organizer
      Int. Conf. on Solid State Devices and Materials (SSDM2005)
    • Place of Presentation
      神戸
    • Year and Date
      2005-09-13
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Structural and Optical.Properties of Electro-Optic Material: Sputtered (Ba,Sr) TiO_32005

    • Author(s)
      M. Suzuki
    • Organizer
      Int. Conf. on Solid State Devices and Materials (SSDM2005)
    • Place of Presentation
      神戸
    • Year and Date
      2005-09-13
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Groove-Buried Optical Waveguides Based on Metal Organic Solution-Derived Ba_<0.7>Sr_<0.3>TiO_3 Thin Films2005

    • Author(s)
      Zhimou Xu
    • Organizer
      Int. Conf. on Solid State Devices and Materials (SSDM2005)
    • Place of Presentation
      神戸
    • Year and Date
      2005-09-13
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Design and Simulation of Ring Resonator Switches using Electro-Optic Materials2005

    • Author(s)
      Y., Tanushi, et. al.
    • Organizer
      Int. Conf. on Solid State Devices and Materials (SSDM2005)
    • Place of Presentation
      Kobe
    • Year and Date
      2005-09-13
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Structural and Optical Properties of Electro-Optic Material : Sputtered (Ba,Sr)TiO_32005

    • Author(s)
      M., Suzuki, et. al.
    • Organizer
      Int. Conf. on Solid State Devices and Materials (SSDM2005)
    • Place of Presentation
      Kobe
    • Year and Date
      2005-09-13
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Groove-Buried Optical Waveguides Based on Metal Organic Solution-Derived Ba^<0.7>Sr^<0.3>TiO_3 Thin Films2005

    • Author(s)
      Zhimou, Xu, et. al.
    • Organizer
      Int. Conf. on Solid State Devices and Materials (SSDM2005)
    • Place of Presentation
      Kobe
    • Year and Date
      2005-09-13
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] スパッタ(Ba, Sr)TiO_3電気光学材料を用いたマッハツェンダ型光スイッチ2005

    • Author(s)
      鈴木昌人
    • Organizer
      第66回応用物理学会学術講演会
    • Place of Presentation
      徳島大学
    • Year and Date
      2005-09-09
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] A study of optical waveguides based on metal organic solution-derived Ba_<0.7>Sr_<0.3>TiO_3 thin films2005

    • Author(s)
      Zhimou Xu
    • Organizer
      第66回応用物理学会学術講演会
    • Place of Presentation
      徳島大学
    • Year and Date
      2005-09-09
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Evaluation of Optical Waveguide with Electro-Optic Material : Sputtered (Ba,Sr)TiO_3 Properties2005

    • Author(s)
      M., Suzuki, et. al.
    • Organizer
      The 66th Autumn Meeting, 2005, The Japan Society of Applied Physics
    • Place of Presentation
      Tokushima
    • Year and Date
      2005-09-09
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] A study of optical waveguides based on metal organic solution-derived Ba^<0.7>Sr^<0.3>TiO_3 thin films2005

    • Author(s)
      Zhimou, Xu, et. al.
    • Organizer
      The 66th Autumn Meeting, 2005, The Japan Society of Applied Physics
    • Place of Presentation
      Tokushima
    • Year and Date
      2005-09-09
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Mach-Zhender Optical Switching Electro-Optic Material : Sputtered (Ba,Sr)TiO_32005

    • Author(s)
      M., Suzuki, et. al.
    • Organizer
      The 53rd Spring Meeting, 2006, The Japan Society of Applied Physics and Related Societies
    • Place of Presentation
      Tokyo
    • Year and Date
      2005-03-25
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Remarks] 「研究成果報告書概要(和文)」より

    • URL

      http://www.rcns.hiroshima-u.ac.jp/

    • Related Report
      2007 Final Research Report Summary
  • [Remarks] の中の、センターニュースの欄

    • URL

      http://www.rcis.hiroshima-u.ac.jp/rcns/

    • Related Report
      2007 Annual Research Report
  • [Patent(Industrial Property Rights)] 光集積回路装置2008

    • Inventor(s)
      横山 新
    • Industrial Property Rights Holder
      広島大学長
    • Filing Date
      2008-02-27
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary

URL: 

Published: 2005-04-01   Modified: 2016-04-21  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi