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Establishment of innovational materials surface treatment / modification technology with using supercritical cluster plasma fluid

Research Project

Project/Area Number 17360349
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Material processing/treatments
Research InstitutionThe University of Tokyo

Principal Investigator

TERASHIMA Kazuo  The University of Tokyo, Graduate School of Frontier Sciences, Associate Professor, 大学院新領域創成科学研究科, 助教授 (30176911)

Co-Investigator(Kenkyū-buntansha) KOSHIZAKI Naoto  Agency of Industrial Science & Technology, (AIST), Center of Nano-architectonics, Research Team Leader, 界面ナノアーキテクトロニクス研究センター, チームリーダー(研究職) (40344197)
Project Period (FY) 2005 – 2006
Project Status Completed (Fiscal Year 2006)
Budget Amount *help
¥15,300,000 (Direct Cost: ¥15,300,000)
Fiscal Year 2006: ¥6,100,000 (Direct Cost: ¥6,100,000)
Fiscal Year 2005: ¥9,200,000 (Direct Cost: ¥9,200,000)
Keywordssupercritical fluid / supercritical cluster plasma / supercritical cluster plasma fluid / surface treatment / deposition / cleaning / carbon nano-structured materials / Cu thin film / 材料表面加工プロセス / 堆積
Research Abstract

(A) We generated micrometer-scale discharge plasma in high-pressure H_2O and Xe up to supercritical conditions. In our previous paper, we reported the existence of two peculiar features in the breakdown voltages under high-pressure CO_2. The first one was the downward shift at the right-hand side of Paschen's curve above about 2.5 MPa, and the second one was the drastic decrease in the breakdown voltages near the critical point. We have experimentally confirmed that these features are also observed in H_2O and Xe, even though there are some differences among these materials. Our theoretical fitting involving a density fluctuation term ED agrees well with the experimental results, especially for Xe. We suppose that these unique features are brought about by decreases in the electron-to-particle cross section □, ionization potential □_i, and secondary electron coefficient □', and changes in the discharge space.
(B) We diagnosed the inner state of the supercritical CO_2-DBD (dielectric bar … More rier discharge) plasma by micro-Raman spectroscopy. From Raman band of CO_2 near 1388 cm' inside the plasma, the large-wavenumber shift, which correspond to a decrease of CO_2 density was not observed. It was also found that the Raman band obtained from CO_2 with the plasma showed a local shift near the critical point, comparing with other high-pressure condition.
(C) Under an optimal condition, dense Cu-carbon composite films were successfully deposited by dielectric barrier discharge method in sc-CO_2 and Ar. Diagnostics of DBD generated in scCO_2 and scAr was conducted. From V-I measurement, the negative charge density of our SCF plasma was estimated to be more than 10^<18> cm^<-3>, which shows that our SCF plasma has a high density of ions and electrons, which are required for obtaining a highly reactive plasma. Cu/C films were successfully obtained and its dependence on power frequency and applied voltage was studied. Cu content of films obtained in an scCO_2 and scAr was about 10 % and 60 % maximum, respectively. This result suggests the advantage of Ar in terms of the fineness of synthesized materials. The deposition rate was about 300 nm/min in scCO_2 and 190 nm/min in scAr. These results suggest the potential of an SCF plasma processing for realization of high-speed metal film deposition. Moreover, strip-line microwave micro plasma was also generated, in which substrate conditions, such as temperature and distance from plasma, can be controlled independently of plasma. Less

Report

(3 results)
  • 2006 Annual Research Report   Final Research Report Summary
  • 2005 Annual Research Report
  • Research Products

    (24 results)

All 2007 2006 2005

All Journal Article (22 results) Book (2 results)

  • [Journal Article] Carbon materials syntheses using dielectric barrier discharge micoplasma in supercritical carbon dioxide environments2007

    • Author(s)
      T.Tomai, K Katahira, H.Kubo, Y.Shimizu, N.Koshizaki, K.Terashima
    • Journal Title

      J. Supercritical Fluids 41

      Pages: 404-411

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] 超臨界流体プラズマを用いたカーボン・ナノマテリアルの創製2007

    • Author(s)
      笘居高明, 寺嶋和夫
    • Journal Title

      New Diamond 23巻・1号

      Pages: 6-11

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] 超臨界流体プラズマの生成と材料プロセスへの応用2007

    • Author(s)
      菊池, 笘居, 久保, 寺嶋和夫
    • Journal Title

      マテリアルインテグレーション 20巻・4号

      Pages: 43-50

    • NAID

      10025519351

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Diagnostics of supercritical CO_2 dielectric barrier discharge plasma by raman spectroscopy2007

    • Author(s)
      T.Tomai, H.Yui, K.Terashima
    • Journal Title

      Proceedings ISPC 18 (in press)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Carbon materials syntheses using dielectric barrier discharge micoplasma in supercritical carbon dioxide environments2007

    • Author(s)
      T.Tomai, K Katahira, H.Kubo, Y.Shimizu, N.Koshizaki, K.Terashima
    • Journal Title

      J.Supercritical Fluids 41

      Pages: 404-411

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Fabrication of carbon nano-structured materials with using supercritical fluid plasma (in Japanese)2007

    • Author(s)
      T.Tomai, K.Terashima
    • Journal Title

      New Diamond 23

      Pages: 6-11

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Generation of supercritical fluid plasma and its application of materials processing (in Japanese)2007

    • Author(s)
      H.Kikuchi, T.Tomai, H.Kubo, K.Terashima
    • Journal Title

      Materials Integration 20

      Pages: 43-50

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Diagnostics of supercritical CO_2 dielectric barrier discharge plasma by raman spectroscopy2007

    • Author(s)
      T.Tomai, H.Yui, K.Terashima
    • Journal Title

      Proceedings of ISPC18

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Carbon materials syntheses using dielectric barrier discharge microplasma in supercritical carbon dioxide environments2007

    • Author(s)
      Takaaki Tomai, Ken Katahira, Hirotake Kubo, Yoshiki Shimizu, Takeshi Sasaki, Naoto Koshizaki, Kazuo Terashima
    • Journal Title

      J.Supercritical Fluids

    • Related Report
      2006 Annual Research Report
  • [Journal Article] 超臨界流体プラズマを用いたカーボン・ナノマテリアルの創製2007

    • Author(s)
      笘居高明, 寺嶋和夫
    • Journal Title

      NEW DIAMOND Vol.23・第84号

      Pages: 6-11

    • Related Report
      2006 Annual Research Report
  • [Journal Article] 超臨界流体プラズマの生成と材料プロセスへの応用2007

    • Author(s)
      菊池宏和, 笘居高明, 久保裕丈, 寺嶋和夫
    • Journal Title

      Materials Integration Vol.20・No.04

      Pages: 43-50

    • NAID

      10025519351

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Micrometer-scale discharge in high-pressure H_2O and Xe environments including supercritical fluid2006

    • Author(s)
      M.Sawada, T.Tomai, T.Ito, H.Fujiwara, K.Terashima
    • Journal Title

      J. Appl. Phys. 100

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Generation of dielectric barrier discharge in N_2 and CO_2 environments up to supercritical conditions2006

    • Author(s)
      T.Tomai, T.Ito, K.Terashima
    • Journal Title

      Thin Solid Films 506-507

      Pages: 409-413

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Micrometer-scale discharge in high-pressure H_2O and Xe environments including supercritical fluid2006

    • Author(s)
      M.Sawada, T.Tomai, T.Ito, H.Fujiwara, K.Terashima
    • Journal Title

      J.Appl.Phys. 100

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] 「研究成果報告書概要(欧文)」より2006

    • Author(s)
      K.Tachibana, K.Terashima
    • Journal Title

      Micro-/Nano-Plasma Technology and its Industrial Application

    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Micrometer-scale discharge in high-pressure H2O and Xe environments including supercritical fluid2006

    • Author(s)
      Masayoshi Sawada, Takaaki Tomai, Tsuyohito Ito, Hideyuki Fujiwara, Kazuo Terashima
    • Journal Title

      Jarnal of Applied Physics Vol.100

      Pages: 123304-123304

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Generation of dielectric barrier discharge in N2 and CO2 environments up to supercritical conditions2006

    • Author(s)
      Takaaki Tomai, Kazuo Terashima
    • Journal Title

      Thin Solid Films Vol.506-507

      Pages: 409-413

    • Related Report
      2006 Annual Research Report
  • [Journal Article] マイクロプラズマの基礎と材料デバイスへの応用2006

    • Author(s)
      寺嶋和夫
    • Journal Title

      機能性材料 Vol.26・No.5

      Pages: 7-14

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Generation of dielectric barrier discharge in N_2 and CO_2 environments up to supercritical conditions2006

    • Author(s)
      T.Tomai, T.Ito, K.Terashima
    • Journal Title

      Thin Solid Films (In press)

    • Related Report
      2005 Annual Research Report
  • [Journal Article] マイクロプラズマとその応用2006

    • Author(s)
      寺嶋和夫
    • Journal Title

      真空ジャーナル 104・1

      Pages: 13-17

    • Related Report
      2005 Annual Research Report
  • [Journal Article] マイクロ・ナノ領域でのプラズマの発生法-極限への挑戦2005

    • Author(s)
      寺嶋和夫, 笘居高明, 金 載浩
    • Journal Title

      静電気学会誌 29・3

      Pages: 150-155

    • Related Report
      2005 Annual Research Report
  • [Journal Article] マイクロプラズマの新しい応用展開2005

    • Author(s)
      寺嶋和夫, 笘居高明, 石原大輔
    • Journal Title

      化学工業 56・6

      Pages: 340-344

    • Related Report
      2005 Annual Research Report
  • [Book] マイクロ・ナノプラズマ技術と産業応用2006

    • Author(s)
      橘邦英, 寺嶋和夫 監修
    • Total Pages
      329
    • Publisher
      シーエムシー出版社
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Book] マイクロ・ナノプラズマ技術とその産業応用2006

    • Author(s)
      橘 邦英, 寺嶋和夫 監修
    • Total Pages
      329
    • Publisher
      シーエムシー出版
    • Related Report
      2006 Annual Research Report

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Published: 2005-04-01   Modified: 2016-04-21  

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