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Development of the carbon thin films nanostructured by femtosecond laser pulse with a super low friction coefficient and local conductivity

Research Project

Project/Area Number 17360362
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Material processing/treatments
Research InstitutionFukui National College of Technology

Principal Investigator

YASUMARU Naoki  Fukui National College of Technology, Mechanical Engineering, Professor (90158006)

Co-Investigator(Kenkyū-buntansha) MITAZAKI Kenzo  Kyoto University, Institute of Advanced Energy, Professor (50293957)
KATO Hirotaka  Fukui National College of Technology, Mechanical Engineering, Professor (30311020)
Project Period (FY) 2005 – 2007
Project Status Completed (Fiscal Year 2007)
Budget Amount *help
¥11,910,000 (Direct Cost: ¥11,400,000、Indirect Cost: ¥510,000)
Fiscal Year 2007: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2006: ¥3,200,000 (Direct Cost: ¥3,200,000)
Fiscal Year 2005: ¥6,500,000 (Direct Cost: ¥6,500,000)
Keywordsfemtosecond laser / ablation / hard thin film / DLC / nanostructure / scanning probe microscope / tribology / トライボロジ-特性 / トライポロジー特性
Research Abstract

We report tribological properties of diamond-like carbon (DLC) film of which surface has been nanostructured with femtosecond (fs) laser pulses. A broad area on the DLC surface was nanostructured using a precise target-scan system developed for the fs-laser processing. In the present experiment we have developed two types of laser scan. One is a parallel scan to produce a uniformly nanostructured surface. The other is a crossed scan along a net-like pattern to form a partially nanostructured area on the surface. The results obtained are summarized as follows.
1) The nanostructure has been formed uniformly on the DLC surface over the area of 15 x 15 mm^2.
2) The structured surface at E=110μJ near the ablation threshold is uniformly modified to the GC layer.
3) The friction coefficient of the structured DLC film has shown a small decrease for the steel ball but a small increase for the ceramic WC-Co ball.
4) A large improvement of the friction coefficient of the DLC surface has been achieved by coating the MoS2 layer on the nanostructured DLC surface. The measured friction coefficients μ of the surface were 0.07 with the steel ball and 0.02-0.04 with the WC-Co ball.
5) The net-like patterning of the ablated zone created by the crossed scan produces an effective method to increase maintaining the initial surface flatness.
6) The nano-indentation test and nano-scratch test (100〜2000μN) indicate that the laser-treated surface layer modified to GC becomes soft and its friction coefficient increases as compared with that of the untreated DLC.

Report

(4 results)
  • 2007 Annual Research Report   Final Research Report Summary
  • 2006 Annual Research Report
  • 2005 Annual Research Report
  • Research Products

    (71 results)

All 2008 2007 2006 2005

All Journal Article (50 results) (of which Peer Reviewed: 11 results) Presentation (21 results)

  • [Journal Article] Control of tribological properties of diamond-like carbon films with femtosecond-laser induced nanostructuring2008

    • Author(s)
      N.Yasumaru
    • Journal Title

      Applied Surface Science 254

      Pages: 2364-2368

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] 各種雰囲気におけるDLCコーティング膜の摩擦摩耗特性2008

    • Author(s)
      山品 陽平
    • Journal Title

      日本機械学会北信越支部第45期総会・講演会講演論文集

      Pages: 375-376

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Journal Article] フェムト秒レーザーによりナノ構造を加工されたDLC薄膜のトライボ甲ジー特性2008

    • Author(s)
      中長 貴志
    • Journal Title

      日本機械学会北陸信越学生会第37回学生員卒業研究発表講演会講演論文集

      Pages: 149-150

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Control of tribological properties of diamond-like carbon films with femtosecond-laser induced nanostructuring2008

    • Author(s)
      N. Yasumaru, K. Miyazaki, J. Kiuchi
    • Journal Title

      Applied Surface Science Vol.254

      Pages: 2364-2368

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Control of tribological properties of diamond-like carbon films with femtosecond-laser induced nanostructuring2008

    • Author(s)
      N. Yasumaru
    • Journal Title

      Applied Surface Science 254

      Pages: 2364-2368

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] フェムト秒レーザーによりナノ構造を加工されたDLC薄膜のトライボロジー特性2008

    • Author(s)
      中長 貴志
    • Journal Title

      日本機械学会北陸信越学生会第37回学生員卒業研究発表講演会講演論文集

      Pages: 149-150

    • Related Report
      2007 Annual Research Report
  • [Journal Article] DLCコーティング膜の摩擦摩耗特性2007

    • Author(s)
      山品 陽平
    • Journal Title

      日本金属学会・日本鉄鋼協会北陸信越支部平成19年度連合講演会概要集

      Pages: 106-106

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Journal Article] Tribological Properties of the DLC film with femtosecond-laser-induced nanostructure2007

    • Author(s)
      N.Yasumaru
    • Journal Title

      Proceedings of 8th International Symposium on Laser Precision Microfabrication, LPM2007

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Tribological Properties of Diamond-Like Carbon Films with Surface Nano-Structure Formed by Femtosecond Laser Pulses2007

    • Author(s)
      N.Yasumaru
    • Journal Title

      Journal of Laser Micro/Nanoengineering 2

      Pages: 162-165

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] フェムト秒レーザによるナノ加工とトライボロジー特性の制御2007

    • Author(s)
      安丸 尚樹
    • Journal Title

      月刊トライボロジー 234号

      Pages: 26-28

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] フェムト秒レーザーによるナノ物質制御と新機能創出2007

    • Author(s)
      宮崎 健創
    • Journal Title

      京都大学エネルギー理工学研究所限属エネルギー複合機構研究センター共同研究成果報告書

      Pages: 5-6

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Friction Properties of the DLC Film with Periodic Structures in Nano-scale2007

    • Author(s)
      A.Mizuno
    • Journal Title

      Tribology Online 1号

      Pages: 44-48

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Tribological Properties of the DLC film with femtosecond-laser-induced nanostructure2007

    • Author(s)
      N. Yasumaru, K. Miyazaki, J. Kiuchi, K. Komai
    • Journal Title

      Proceedings of 8th International Symposium on Laser Precision Microfabrication P-73

      Pages: 1-4

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Tribological Properties of Diamond-Like Carbon Films with Surface Nano-Structure Formed by Femtosecond Laser Pulses2007

    • Author(s)
      N. Yasumaru, K. Miyazaki, J. Kiuchi, K. Komai
    • Journal Title

      Journal of Laser Micro/Nanoengineering

      Pages: 162-165

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Femtosecond-Laser-induced Nanostructuring of Hard Thin Films and Control of Tribological Characteristics2007

    • Author(s)
      N. Yasumaru, K. Miyazaki, J. Kiuchi
    • Journal Title

      The Tribology Vol.21

      Pages: 26-28

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Tribological Properties of the DLC film with femtosecond-laser-induced nanostructure2007

    • Author(s)
      N. Yasumaru
    • Journal Title

      Proceedings of 8th International Symposium on Laser Precision Microfabrication, LPM2007

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Tribological Properties of Diamond-Like Carbon Films with Surface Nano-Structure Formed by Femtosecond Laser Pulses2007

    • Author(s)
      N. Yasumaru
    • Journal Title

      Journal of Laser Micro/Nanoengineering 2

      Pages: 162-165

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] フェムト秒レーザによるナノ加工とトライボロジー特性の制御2007

    • Author(s)
      安丸尚樹, 宮崎健創, 木内淳介
    • Journal Title

      月刊トライボロジー 234号

      Pages: 26-28

    • Related Report
      2006 Annual Research Report
  • [Journal Article] フェムト秒レーザによる次世代表面設計技術2006

    • Author(s)
      安丸 尚樹
    • Journal Title

      第67回レーザ加工学会講演論文集

      Pages: 199-204

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] 硬質薄膜のフェムト秒レーザープロセシングとトライボロジー特性2006

    • Author(s)
      駒井 謙治郎
    • Journal Title

      日本機械学会2006年度年次大会講演論文集(1)

      Pages: 531-532

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] フェムト秒レーザーによる硬質薄膜の微細加工2006

    • Author(s)
      安丸 尚樹
    • Journal Title

      第3回マイクロマテリアルシンポジウム講演論文集

      Pages: 45-49

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Tribological Properties of Diamond-Like Carbon Films with Surface Nano-Structure Formed by Femtosecond Laser Pulses2006

    • Author(s)
      N.Yasumaru
    • Journal Title

      Proceedings of International Congress on Laser Advanced Materials Processing (LAMP2006)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] 薄膜表面のナノ加工と次世代表面設計技術2006

    • Author(s)
      安丸 尚樹
    • Journal Title

      LASER EXPO 2006レーザー技術特別セミナー講演予稿集

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] フェムト秒レーザー加工DLC薄膜のトライボロジー特性2006

    • Author(s)
      駒井 謙治郎
    • Journal Title

      日本材料学会2006年度年次大会講演論文集(1)

      Pages: 417-418

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] フェムト秒レーザーによるDLC薄膜表面のナノ構造形成過程2006

    • Author(s)
      宮崎 健創
    • Journal Title

      京都大学エネルギー理工学研究所附属エネルギー複合機構研究センター共同研究成果報告書

      Pages: 63-63

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] フェムト秒レーザーによりナノ構造が形成されたDLC薄膜のトライボロジー特性2006

    • Author(s)
      山口 光弘
    • Journal Title

      日本機械学会北陸信越学生会第35回学生員卒業研究発表講演会講演論文集

      Pages: 187-188

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Friction Properties of the DLC Film with Periodic Structures in Nano-scale2006

    • Author(s)
      A. Mizuno, T. Honda, J. Kiuchi, Y. Iwai, N. Yasumaru, K. Miyazaki
    • Journal Title

      Tribology Online Vol.1

      Pages: 44-48

    • NAID

      130000066406

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Next-Generation Surface Design Technology with Femtosecond Laser Pulses-Nanostructure and Modified Layer formed on Thin Films-2006

    • Author(s)
      N. Yasumaru, K. Miyazaki, J. Kiuchi
    • Journal Title

      Proceedings of the 67th Laser Materials Processing Conference

      Pages: 199-204

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Femtosecond Laser Processing of Hard Thin Films and Control of Tribological Characteristics2006

    • Author(s)
      K. Komai, N. Yasumaru, K. Miyazaki, J. Kiuchi
    • Journal Title

      Proceed. of the Mechanical Engineering Congress, 2006 Japan(MECJ-06) Vol.1

      Pages: 531-532

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Microstructuring of Hard Thin Films with Femtosecond Laser Pulses2006

    • Author(s)
      N. Yasumaru, K. Miyazaki, J. Kiuchi, K. Komai
    • Journal Title

      Proceed. of The 3rd Symposium on Micromaterials

      Pages: 45-49

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Tribological Properties of Diamond-Like Carbon Films with Surface Nano-Structure Formed by Femtosecond Laser Pulses2006

    • Author(s)
      N. Yasumaru, K. Miyazaki, J. Kiuchi, K. Komai
    • Journal Title

      Proceed. of the International Congress on Laser Advanced Materials Processing(LAMP 2006) WeP20

      Pages: 1-4

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Friction Properties of the DLC Film with Periodic Structures in Nano-scale2006

    • Author(s)
      A.Mizuno, T.Honda, J.Kiuchi, Y.Iwai, N.Yasumaru, K.Miyazaki
    • Journal Title

      Tribology Online 1号

      Pages: 44-48

    • NAID

      130000066406

    • Related Report
      2006 Annual Research Report
  • [Journal Article] フェムト秒レーザーによる次世代表面設計技術2006

    • Author(s)
      安丸尚樹, 宮崎健創, 木内淳介
    • Journal Title

      第67回レーザー加工学会講演論文集

      Pages: 199-204

    • Related Report
      2006 Annual Research Report
  • [Journal Article] 硬質薄膜のフェムト秒レーザープロセシングとトライボロジー特性2006

    • Author(s)
      駒井謙次郎, 安丸尚樹, 宮崎健創, 木内淳介
    • Journal Title

      日本機械学会2006年度年次大会論文集(1)

      Pages: 531-532

    • Related Report
      2006 Annual Research Report
  • [Journal Article] フェムト秒レーザーによる硬質薄膜の微細加工2006

    • Author(s)
      安丸尚樹, 宮崎健創, 木内淳介, 駒井謙次郎
    • Journal Title

      第3回マイクロマテリアルシンポジウム講演論文集

      Pages: 45-49

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Tribological Properties of Diamond-Like Carbon Films with Surface Nano-Structure Formed by Femtosecond Laser Pulses2006

    • Author(s)
      N.Yausmaru, K.Miyazaki, J.Kiuchi, K.Komai
    • Journal Title

      Proceedings of International Congress on Laser Advanced Materials Processing(LAMP2006)

    • Related Report
      2006 Annual Research Report
  • [Journal Article] フェムト秒レーザーによりナノ構造が形成されたDLC薄膜のトライボロジー特性2006

    • Author(s)
      山口光弘, 安丸尚樹, 駒井謙治郎, 宮崎健創, 木内 淳介
    • Journal Title

      日本機械学会北陸信越学生会第35回学生員卒業研究発表講演会

      Pages: 187-188

    • Related Report
      2005 Annual Research Report
  • [Journal Article] フェムト秒レーザーによる硬質薄膜表面のナノ構造形成と制御2005

    • Author(s)
      安丸 尚樹
    • Journal Title

      レーザー研究(レーザー解説小特集号「フェムト秒レーザーによるナノアブレーション」) 33

      Pages: 519-524

    • NAID

      10029621797

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Fluence dependence on femtosecond-laser-induced nanostructure formed on TiN and CrN2005

    • Author(s)
      N.Yasumaru
    • Journal Title

      Applied Physics A;Materials Science & Processing 81

      Pages: 933-937

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] フェムト秒レーザーアブレーションによるナノ構造生成と表面改質2005

    • Author(s)
      宮崎 健創
    • Journal Title

      未来材料 5

      Pages: 28-34

    • NAID

      40006887286

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Reflectivity in femtosecond-laser-induced structural changes of diamond-like carbon film2005

    • Author(s)
      K.Miyazaki
    • Journal Title

      Applied Physics A;Materials Science & Processing 80

      Pages: 17-21

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Control of Periodic Nanostructures Formed on Hard Thin Films with Femtosecond Laser Pulses2005

    • Author(s)
      N. Yasumaru, K. Miyazaki, J. Kiuchi
    • Journal Title

      The Review of Laser Engineering Vol.33

      Pages: 519-524

    • NAID

      10029621797

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Fluence dependence on femtosecond- laser-induced nanostructure formed on TiN and CrN2005

    • Author(s)
      N. Yasumaru, K. Miyazaki, J. Kiuchi
    • Journal Title

      Appi. Phys. A Vol.81

      Pages: 933-937

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Surface Nanostructure and Modified Layer formed on Hard Thin Films with Femtosecond Laser Ablation2005

    • Author(s)
      K. Miyazaki, N. Yasumaru
    • Journal Title

      Expected Materials for the Future Vol.5

      Pages: 28-34

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Reflectivity in femtosecond-laser-induced structural changes of diamond-like carbon film2005

    • Author(s)
      K. Miyazaki, N. Maekawa, W. Kobayashi, N. Yasumaru, J. Kiuchi
    • Journal Title

      Appl. Phys. A Vol.80

      Pages: 17-21

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] フェムト秒レーザーによるナノ加工と次世代トライボロジー制御技術2005

    • Author(s)
      安丸尚樹, 宮崎健創, 木内淳介
    • Journal Title

      福井県地域結集型共同研究事業最終成果発表会

      Pages: 13-14

    • Related Report
      2005 Annual Research Report
  • [Journal Article] フェムト秒レーザーによる硬質薄膜表面のナノ構造形成と制御2005

    • Author(s)
      安丸尚樹, 宮崎健創, 木内淳介
    • Journal Title

      レーザー研究(レーザー解説小特集号「フェムト秒レーザーによるナノアブレーション」) 33巻・8号

      Pages: 519-524

    • NAID

      10029621797

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Fluence dependence on femtosecond-laser-induced nanostructure formed on TiN and CrN2005

    • Author(s)
      N.Yasumaru, K.Miyazaki, J.Kiuchi
    • Journal Title

      Applied Physics A ; Materials Science & Processing 81巻

      Pages: 933-937

    • Related Report
      2005 Annual Research Report
  • [Journal Article] フェムト秒レーザーアブレーションによるナノ構造生成と表面改質2005

    • Author(s)
      宮崎健創, 安丸尚樹
    • Journal Title

      未来材料 5巻・9号

      Pages: 28-34

    • NAID

      40006887286

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Reflectivity in femtosecond- laser-induced structural changes of diamond-like carbon film2005

    • Author(s)
      K.Miyazaki, N.Maekawa, W.Kobayashi, N.Yasumaru, J.Kiuchi
    • Journal Title

      Applied Physics A ; Materials Science & Processing 80巻

      Pages: 17-21

    • Related Report
      2005 Annual Research Report
  • [Presentation] 各種雰囲気におけるDLCコーティング膜の摩擦摩耗特性2008

    • Author(s)
      山品 陽平
    • Organizer
      日本機械学会北信越支部第45期総会・講演会
    • Place of Presentation
      福井市
    • Year and Date
      2008-03-08
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] フェムト秒レーザーによりナノ構造を加工されたDLC薄膜のトライボロジー特性2008

    • Author(s)
      中長 貴志
    • Organizer
      日本機械学会北陸信越学生会第37回学生員卒業研究発表講演会
    • Place of Presentation
      福井市
    • Year and Date
      2008-03-07
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] DLCコーティング膜の摩擦摩耗特性2007

    • Author(s)
      山品 陽平
    • Organizer
      日本金属学会・日本鉄鋼協会北陸信越支部平成19年度連合講演会
    • Place of Presentation
      福井市
    • Year and Date
      2007-12-01
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] Properties of the DLC film with femtosecond-laser-induced nanostructure2007

    • Author(s)
      N. Yasumaru, K. Miyazaki, J. Kiuchi and K. Komai, Tribological
    • Organizer
      8th International Symposium on Laser Precision Microfabrication, LPM2007
    • Place of Presentation
      Wien
    • Year and Date
      2007-05-26
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Tribological Properties of the DLC film with femtosecond-laser-induced nanostructure2007

    • Author(s)
      N.Yasumaru
    • Organizer
      第8回レーザー精密微細加工国際シンポジウムLPM2007
    • Place of Presentation
      オーストリア,ウィーン市
    • Year and Date
      2007-04-26
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Tribological Properties of the DLC film with femtosecond-laser-induced nanostructure2007

    • Author(s)
      N.Yasumaru
    • Organizer
      第8回レーザー精密微細加工国際シンポジウムLPM2007
    • Place of Presentation
      オーストリア、ウィーン市
    • Year and Date
      2007-04-26
    • Related Report
      2007 Annual Research Report
  • [Presentation] Next-Generation Surface Design Technology with Femtosecond Laser Pulses-Nanostructure and Modified Layer formed on Thin Films-2006

    • Author(s)
      N. Yasumaru, K. Miyazaki and J. Kiuchi
    • Organizer
      The 67th Laser Materials Processing Conference
    • Place of Presentation
      Tokyo
    • Year and Date
      2006-12-12
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] フェムト秒レーザによる次世代表面設計技術2006

    • Author(s)
      安丸 尚樹
    • Organizer
      第67回レーザ加工学会講演会
    • Place of Presentation
      東京都
    • Year and Date
      2006-12-05
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Friction Properties of the DLC Film with Periodic Structures in Nano-scale2006

    • Author(s)
      A. Mizuno, T. Honda, J. Kiuchi, Y. Iwai, N. Yasumaru and K. Miyazaki
    • Organizer
      The Third Asia International Conference on Tribology
    • Place of Presentation
      Kanazawa
    • Year and Date
      2006-10-17
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Friction Properties of the DLC Film with Periodic Structures in Nano-scale2006

    • Author(s)
      A.Mizuno
    • Organizer
      アジアトライボロジーシンポジウムAsiatrib2006
    • Place of Presentation
      金沢市
    • Year and Date
      2006-10-15
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 硬質薄膜のフェムト秒レーザープロセシングとトライボロジー特性2006

    • Author(s)
      駒井 謙治郎
    • Organizer
      日本機械学会2006年度年次大会
    • Place of Presentation
      熊本市
    • Year and Date
      2006-09-20
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Femtosecond Laser Processing of Hard Thin Films and Control of Tribological Characteristics2006

    • Author(s)
      K. Komai, N. Yasumaru, K. Miyazaki and J. Kiuchi
    • Organizer
      The Mechanical Engineering Congress, 2006 Japan(MECJ-06)
    • Place of Presentation
      Kumamoto
    • Year and Date
      2006-09-19
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Microstructuring of Hard Thin Films with Femtosecond Laser Pulses2006

    • Author(s)
      N. Yasumaru, K. Miyazaki, J. Kiuchi and K. Komai
    • Organizer
      The 3rd Symposium on Micromaterials
    • Place of Presentation
      Kyoto
    • Year and Date
      2006-09-11
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] フェムト秒レーザーによる硬質薄膜の微細加工2006

    • Author(s)
      安丸 尚樹
    • Organizer
      第3回マイクロマテリアルシンポジウム
    • Place of Presentation
      京都市
    • Year and Date
      2006-09-05
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Tribological Properties of Diamond-Like Carbon Films with Surface Nano-Structure Formed by Femtosecond Laser Pulses2006

    • Author(s)
      N.Yasumaru
    • Organizer
      先端材料のレーザー加工国際会議LAMP2006
    • Place of Presentation
      奈良市
    • Year and Date
      2006-05-20
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Tribological Properties of Diamond-Like Carbon Films with Surface Nano-Structure Formed by Femtosecond Laser Pulses2006

    • Author(s)
      N. Yasumaru, K. Miyazaki, J. Kiuchi and K. Komai
    • Organizer
      The International Congress on Laser Advanced Materials Processing (LAMP2006)
    • Place of Presentation
      Kyoto
    • Year and Date
      2006-05-16
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] フェムト秒レーザー加工DLC薄膜のトライボロジー特性2006

    • Author(s)
      駒井 謙治郎
    • Organizer
      日本材料学会2006年度年次大会
    • Place of Presentation
      京都市
    • Year and Date
      2006-05-10
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Femtosecond- Laser-induced Nanostructuring of Thin Film Surfaces and Next-Generation Surface Design Technology2006

    • Author(s)
      N. Yasumaru
    • Organizer
      Special Seminar on Laser Technology, Laser EXPO 2006
    • Place of Presentation
      Yokohama
    • Year and Date
      2006-04-20
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 薄膜表面のナノ加工と次世代表面設計技術2006

    • Author(s)
      安丸 尚樹
    • Organizer
      LASER EXPO 2006 レーザー技術特別セミナー
    • Place of Presentation
      横浜市
    • Year and Date
      2006-04-05
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] フェムト秒レーザーによりナノ構造が形成されたDLC薄膜のトライボロジー特性2006

    • Author(s)
      山口 光弘
    • Organizer
      日本機械学会北陸信越学生会第35回学生員卒業研究発表講演会
    • Place of Presentation
      長野市
    • Year and Date
      2006-03-08
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] フェムト秒レーザーによるナノ加工と次世代トライボロジー制御技術2005

    • Author(s)
      安丸 尚樹
    • Organizer
      福井県地域結集型共同研究事業最終成果発表会
    • Place of Presentation
      福井市
    • Year and Date
      2005-12-13
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary

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Published: 2005-04-01   Modified: 2016-04-21  

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