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Studies on Semiconductor Nanostructure Formed by Low-temperature Chemical Vapor Deposition and Application to Nanodevices

Research Project

Project/Area Number 17510107
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Microdevices/Nanodevices
Research InstitutionMuroran Institute of Technology

Principal Investigator

FUKUDA Hisashi  Muroran Institute of Technology, Faculty of Engineering, Professor (10261380)

Co-Investigator(Kenkyū-buntansha) TAKEDA Keiki  Hokkaido University of Education, Faculty of Engineering, Assistant (70352060)
Project Period (FY) 2005 – 2007
Project Status Completed (Fiscal Year 2007)
Budget Amount *help
¥3,150,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥150,000)
Fiscal Year 2007: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2006: ¥1,100,000 (Direct Cost: ¥1,100,000)
Fiscal Year 2005: ¥1,400,000 (Direct Cost: ¥1,400,000)
KeywordsCrystal Growth / Quantum Dots / Nanodevices / Focused Ion Beam
Research Abstract

Organic Thin Film Transistor (OTFT) memories with a nanocrystal carbon (nc-C) dots arranged in channel region were fabricated using a focused ion beam (FIB) system with a precursor of low energy Ga^+ ion and carbon source. The crystallinity of nc-C dots was investigated by Raman spectroscopy and atomic force microscopy (AFM). Raman spectra indicate the evidence of crystallization of nc-C after annealed at 600℃ by the sharp peak at 1565 cm^<-1> in graphite (sp^2), while no peak of diamond (sp^3) could be seen at 1333 cm^<-1>. The AFM images showed the nc-C dots controlled with diameter of 100 nm. The above results revealed that the nc-C dots had sufficiently stick onto SiO_2 films. The hysterisis loop in the threshold voltage characteristics appeared in the device in which voltage shift is 0.32 V after charge injection into the nc-C dots.. In next stage, we will analyze the erase step and retention characteristics.

Report

(4 results)
  • 2007 Annual Research Report   Final Research Report Summary
  • 2006 Annual Research Report
  • 2005 Annual Research Report
  • Research Products

    (20 results)

All 2008 2007 2006 2005

All Journal Article (13 results) (of which Peer Reviewed: 5 results) Presentation (4 results) Book (3 results)

  • [Journal Article] ESR and X-ray Diffraction Studies on Thin Films of Poly-3-hexyl-thiophene: Molecular Orientation and Magnetic Interactions2008

    • Author(s)
      K. Sugiyama, T. Kojima, H. Fukuda, H. Yashiro, T. Matsuura and Y. Shimoyama
    • Journal Title

      Thin Solid Films 516

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Molecular Orientation and Electromagnetic Properties of Perhydrogenated and Perfluorinated Copper Phthalocyanine Thin Films2008

    • Author(s)
      K. Sugiyama, S. Izuka, H. Yashiro, H. Fukuda, Y. Shimoyama
    • Journal Title

      Jpn. J. of Appl. Phys. 47

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] ESR and X-ray Diffraction Studies on Thin Films of Poly-3-hexyl-thiophene: Molecular Orientation and Magnetic Interactions2008

    • Author(s)
      K. Sugiyama, T. Kojima, H. Fukuda, H. Yashiro, T. Matsuura and Y. Shimoyama
    • Journal Title

      Thin Solid Films Vol. 516

      Pages: 2691-2694

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Molecular Orientation and Electromagnetic Properties of Perhydrogenated and Perfluorinated Copper Phthalocyanine Thin Films2008

    • Author(s)
      K. Sugiyama, S. Izuka, H. Yashiro, H. Fukuda and Y. Shimoyama
    • Journal Title

      Jpn. J. Appl. Vol.47

      Pages: 492-495

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Carbon Nano Dots Scale by Focused Ion Beam System for MIS Diode Nano Devices2007

    • Author(s)
      Ruslinda A. Rahim, H. Kurahashi, K. Uesngi and H. Fukuda
    • Journal Title

      Surface Science 601

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Carbon Nano Dots Scale by Focused Ion Beam System for MIS Diode Nano Devices2007

    • Author(s)
      Ruslinda A. Rahim, H. Kurahashi, K. Uesugi and H. Fukuda
    • Journal Title

      Surface Science Vol. 601

      Pages: 5112-5115

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Carbon Nano Dots Scale by Focused Ion Beam System for MISDiode Nano Devices2007

    • Author(s)
      Ruslinda A. Rahim, H. Kurahashi, K. Uesugi and H. Fukuda
    • Journal Title

      Surface Science 601

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Organic Thin Film Transistor Memories with Carbon Nanodots Fabricated by Focused Ion Beam Chemical Vapor Deposition2007

    • Author(s)
      H. Fukuda, Ruslinda A. Rahim, Y. Tada, N. Wainai, K. Uesugi and Y. Shimoyama
    • Journal Title

      Abstracts of the 2007 International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies, Nagano

      Pages: 74-74

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] ぺンタセン薄膜形成と有機トランジスタへの応用2007

    • Author(s)
      和井内 紀行, 野坂 隆之, 杉山 慶輔, 下山 雄平, 福田 永
    • Journal Title

      第42回応用物理学会北海道支部・第3回日本光学会北海道支部合同学術講演会予稿集

      Pages: 27-27

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Semiconductor Nano-structure Fabrication and its Application to Next Generation Nano Devices2006

    • Author(s)
      R.A.Rahim, H.Kurahashi, K.Uesugi, H.Fukuda
    • Journal Title

      Abstracts of 10^<th> ISSP International Symposium on Nanoscience at Surfaces

      Pages: 196-196

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Molecular Orientation Vacuum-Deposited Films of Cu-Phthalocyanine2006

    • Author(s)
      K.Sugiyama, H.Abe, H.Yashiro, H.Fukuda, T.Matsuura, Y.Shimoyama
    • Journal Title

      Abstracts of the 7^<th> International Conference on Nano-Molecular Electronics

      Pages: 104-104

    • Related Report
      2006 Annual Research Report
  • [Journal Article] An ESR Study of Thin Films of Poly-3hexyl-thiophene : Molecular Orientation and Magnetic Interactions2006

    • Author(s)
      K.Sugiyama, T.Kojima, Y.Yashiro, H.Fukuda, T.Matsuura, Y.Shimoyama
    • Journal Title

      Abstracts of the 7^<th> International Conference on Nano-Molecular Electronics

      Pages: 106-106

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Novel Self-assemble Process of Ge Nanoparticles in SiO_2 Films2005

    • Author(s)
      H.Fukuda, K.Takeya, H.Maeda, R.A.Rahim, M.Nishino, M.Yoshino, K.Takeda
    • Journal Title

      Abstracts of 4^<th> International Symposium on Surface Science and Nanotechnology

      Pages: 253-253

    • Related Report
      2005 Annual Research Report
  • [Presentation] ペンタセン薄膜形成と有機トランジスタへの応用(2)2008

    • Author(s)
      夛田 芳広、三浦 雄史、山田真也、杉山 慶輔、下山 雄平、福田 永
    • Organizer
      第43回応用物理学会北海道支部・第4回日本光学会北海道支部合同学術講演会予稿集
    • Place of Presentation
      北海道大学
    • Year and Date
      2008-01-11
    • Related Report
      2007 Annual Research Report
  • [Presentation] Organic Thin Film Transistor Memories with Carbon Nanodots Fabricated by Focused Ion Beam Chemical Vapor Deposition2007

    • Author(s)
      H. Fukuda, Ruslinda A. Rahim, Y. Tada, N. Wainai, K. Uesugi and Y. Shimoyama
    • Organizer
      2007 International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies
    • Place of Presentation
      メルパルク長野
    • Year and Date
      2007-06-20
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] K. Uesugi, Organic Thin Film Tranjistor Memories with Carbon Nanodots Fabricated by Focused Ion Beam Chemical Vapor2007

    • Author(s)
      H. Fukuda, Ruslinda A. Rahim, Y. Tada, N. Wainai, and K.
    • Organizer
      2007 International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies
    • Place of Presentation
      Nlagano
    • Year and Date
      2007-06-20
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Molecular Orientration of Copper Phthalocyanine and Perfluorinated Copper Phthalocyanine Thin Films2007

    • Author(s)
      Y. Shimoyama, K. Sugiyama, S. Iizuka and H. Fukuda
    • Organizer
      2007 International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies
    • Place of Presentation
      Nagano
    • Year and Date
      2007-06-20
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Book] 有機エレクトロニクスの展開〜最新開発状況と実用化への課題〜2007

    • Author(s)
      福田永
    • Total Pages
      13
    • Publisher
      情報機構
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Book] 有機エレクトロニクスの展開〜最新開発状況と実用化への課題〜2007

    • Author(s)
      福田 永(共著)
    • Total Pages
      11
    • Publisher
      情報機構
    • Related Report
      2007 Annual Research Report
  • [Book] 表面物性工学ハンドブック2007

    • Author(s)
      福田 永(共著)
    • Total Pages
      15
    • Publisher
      丸善
    • Related Report
      2006 Annual Research Report

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Published: 2005-04-01   Modified: 2016-04-21  

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