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Evaluation of thin film on metal and semiconductor surface by electroanalytical methods and certification of thin film standards for surface analysis

Research Project

Project/Area Number 17550086
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Analytical chemistry
Research InstitutionTokyo University of Science

Principal Investigator

TANAKA Tatsuhiko  Tokyo University of Science, Faculty of Engineering, Professor (40084389)

Co-Investigator(Kenkyū-buntansha) 林 英男  東京理科大学, 工学部, 助手 (10385536)
Project Period (FY) 2005 – 2007
Project Status Completed (Fiscal Year 2007)
Budget Amount *help
¥3,740,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥240,000)
Fiscal Year 2007: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2006: ¥800,000 (Direct Cost: ¥800,000)
Fiscal Year 2005: ¥1,900,000 (Direct Cost: ¥1,900,000)
Keywordscharacterization and evaluation / galvanized steel sheet / silicon wafer / thin film reference materials / chemical analysis
Research Abstract

Precise electroanalytical methods have been developed for the evaluation of galvanized steel sheet and silicon wafer. The proposed methods are successfully applicable to certify thin film reference materials for surface analysis.
1. Measurement of zinc deposits on galvanized steel sheet
A galvanized steel sheet sample was decomposed with an acid mixture on heating. To the solution was added L (+)-ascorbic acid in order to reduce matrix iron (III) to iron (II) ; pH of the solution was then adjusted to 4. The solution was then diluted to a definite volume with a dilute acid mixture pre-adjusted to pH 4. Zinc (II) in the sample solution was electrodeposited into a hanging mercury drop electrode at -1.15 V vs. Ag/AgC1 for 20 min. The deposits were then stripped at a scan rate of 50 mV/s to -0.7 V vs. Ag/AgC1. The zinc film thickness at the pm level on a galvanized steel sheet was measured with good precision by anodic stripping voltammetry.
The thickness was measured also by stripping coulometry, which involves the complete electrodeposition of zinc(II) in the sample solution, followed by stripping of the deposits and measurement of quantity of electricity (area). The amounts of zinc deposits linked to SI units can be obtained by this definitive method.
2. Measurement of thickness of silicon dioxide film on silicon wafer surface
Silicon dioxide film on silicon wafer surfaces was dissolved in a dilute hydrogen fluoride solution. A complex of silicon(PV) with hexaammonium heptamolybdate, P-silicododecamolybdate, was adsorbed electrolytically on a glassy carbon electrode at -1.0 V vs. Ag/AgC1 for 10 min. The deposits were then stripped by a positive-going scan to -0.3 V vs. Ag/AgC1 at a rate of 50 mV/s. Adsorptive stripping voltammetry is applicable to the measurement of 1 to 100 nm of the film thickness.

Report

(4 results)
  • 2007 Annual Research Report   Final Research Report Summary
  • 2006 Annual Research Report
  • 2005 Annual Research Report
  • Research Products

    (14 results)

All 2008 2007 2006 2005

All Journal Article (9 results) (of which Peer Reviewed: 3 results) Presentation (4 results) Book (1 results)

  • [Journal Article] Determination of the purity of acidimetric standards by constant-current coulometry,and intercomparison between CRMs2007

    • Author(s)
      T. Asakai
    • Journal Title

      Accred.Qual.Assur. 12

      Pages: 151-155

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] 電気的手法による鉄鋼分析の革新2007

    • Author(s)
      田中 龍彦
    • Journal Title

      ふぇらむ 12

      Pages: 468-472

    • NAID

      10019553258

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Determination of the purity of acidimetric standards by constant-current coulometry, and the intercomparison between CRMs2007

    • Author(s)
      T., Asakai, et. al.
    • Journal Title

      Accred. Qual. Assur 12(2)

      Pages: 151-155

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Electrochemical analysis of iron and steel2007

    • Author(s)
      T., Tanaka
    • Journal Title

      Bull. Iron Steel Inst. Jpn 12(7)

      Pages: 468-472

    • NAID

      10019553258

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] "Coulometric titration" in Introduction to Analytical Techniques for Iron and Steel, Part II2007

    • Author(s)
      T., Tanaka
    • Journal Title

      The Iron and Steel Institute of Japan

      Pages: 57-62

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Determination of trace boron in iron andsteel by adsorptive stripping volyammetry using Beryllon III2006

    • Author(s)
      T. Tanaka
    • Journal Title

      ISIJ International 46

      Pages: 1318-1323

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Determination of trace boron in iron and steel by adsorptive stripping voltammetry using Beryllon III2006

    • Author(s)
      T., Tanaka, et. al.
    • Journal Title

      ISIJ Int 46(9)

      Pages: 1318-1323

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] アノーディックストリッピングボルタンメトリーによる鋼中微量トランプ元素(亜鉛,鉛,ビスマス)の同時定量2005

    • Author(s)
      田中 龍彦
    • Journal Title

      鉄と鋼 91

      Pages: 595-601

    • NAID

      110001788907

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Simultaneous determination of trace tramp elements (Zn, Pb and Bi) in steel by anodic stripping voltammetry2005

    • Author(s)
      T., Tanaka, et. al.
    • Journal Title

      Tetsu-to-Hagane 91(7)

      Pages: 595-601

    • NAID

      110001788907

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] ストリッピングボルタンメトリーによるシリコンウエハ上Sio_2膜厚の測定2008

    • Author(s)
      田中 龍彦
    • Organizer
      日本分析化学会第69回分析化学討論会
    • Place of Presentation
      名古屋国際会議場
    • Year and Date
      2008-05-16
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Evaluation of silicon dioxide film on silicor wafer surfaces by stripping voltammetry2008

    • Author(s)
      M., Ogura, et. al.
    • Organizer
      The 69th JSAC Meeting
    • Place of Presentation
      Nagoya Congress Center
    • Year and Date
      2008-05-16
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Evaluation of galvanized sheet iron by stripping voltammetry2008

    • Author(s)
      T., Tanaka, et. al.
    • Organizer
      The 155th ISIJ Meeting
    • Place of Presentation
      Musashi Institute of Technology
    • Year and Date
      2008-03-27
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] ストリッピングボルタンメトリーによる亜鉛めっき鋼板の膜厚測定2008

    • Author(s)
      深川美菜
    • Organizer
      日本鉄鋼協会第155回春季講演大学
    • Place of Presentation
      武蔵工業大学
    • Year and Date
      2008-03-27
    • Related Report
      2007 Annual Research Report
  • [Book] 続入門鉄鋼分析技術(電量滴定法)2007

    • Author(s)
      日本鉄鋼協会評価・分析・解析部会編
    • Publisher
      日本鉄鋼協会
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary

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Published: 2005-04-01   Modified: 2016-04-21  

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