Carbon Nanotube Growth using photo-excitation

• Project/Area Number: 17560015
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Applied materials science/Crystal engineering
• Research Institution: Meijo University
• Principal Investigator: MARUYAMA Takahiro Meijo University, 理工学部, 准教授 (30282338)
• Co-Investigator(Kenkyū-buntansha): NARITSUKA Shigeya 名城大学, 理工学部, 教授 (80282680)
• Project Period (FY): 2005 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥3,760,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥360,000); Fiscal Year 2008: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000); Fiscal Year 2007: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000); Fiscal Year 2006: ¥600,000 (Direct Cost: ¥600,000); Fiscal Year 2005: ¥1,600,000 (Direct Cost: ¥1,600,000)
• Keywords: カーボンナノチューブ / 低温成長 / 光励起 / ラマン分光 / ガスソース成長 / 紫外線 / ガスソース成長法 / 触媒化学気相成長法 / SiC / 走査トンネル顕微鏡

Research Abstract

単層カーボンナノチューブ(SWNT)の低温成長を目的とし、高真空アルコールガスソース成長装置を開発し、通常の化学気相成長(CVD)法よりもエタノール成長圧力を大幅に低減した成長条件でカーボンナノチューブ(CNT)成長を行なった。その結果、成長圧力10^<-4>Paにおいて400℃でのSWNTの成長を実現した。さらに、触媒担持材として酸化Alバッファ層を用いることで、一桁程度生成量を増加させた。また、CNT成長中に真空紫外線照射を行なったところ、直径1nm以上のSWNTの生成が抑制され、SWNTの平均直径が減少する様子がみられた。関連して、SiC表面分解法におけるCNT生成過程の観察を行い、本手法におけるCNT生成モデルを提案するとともに、カイラリティがzigzagタイプのみにそろうメカニズムに関して考察を行なった。

Research Products

• [Journal Article] Low-Temperature Synthesis of Single-Walled Carbon Nanotubes by Alcohol Gas Source Growth in High Vacuum (2009)
  • Author(s): T. Maruyama, K. Sato, Y. Mizutani, K. Tanioku, T. Shiraiwa, and S. Naritsuka
  • Journal Title: J. Nanosci. Nanotechnol. (掲載決定)
  • Peer Reviewed
• [Journal Article] Effect of Annealing in a Hydrogen Atmosphere on Carbon Nanocap Formation in Surface Decomposition of 6H-SiC(000-1 (2009)
  • Author(s): K. Ueda, Y. Iijima, T. Maruyama, and S. Naritsuka
  • Journal Title: J. Nanosci. Nanotechnol. (掲載決定)
  • Peer Reviewed
• [Journal Article] Effect of Buffer Thickness on Single-Walled Carbon Nanotube Growth using Aluminum Oxide Buffer Layer with Alcohol Gas Source Method (2009)
  • Author(s): Kuniori Sato, Tomoyuki Shiraiwa Takahiro Maruyama, and Shigeya Naritsuka
  • Journal Title: J. Nanosci. Nanotechnol. (掲載決定)
  • Peer Reviewed
• [Journal Article] Enhancement of Single-Walled Carbon Nanotube Formation using Aluminum Oxide Buffer Layer in Alcohol Gas Source Method (2009)
  • Author(s): T. Maruyama, T. Shiraiwa, K. Sato, S. Naritsuka
  • Journal Title: Mater. Res. Soc. Svmp. Proc. 1142(on line)
  • Peer Reviewed
• [Journal Article] Low temperature growth of carbon nanotubes on Si substrates in high vacuum (2008)
  • Author(s): Kenji Tanioku, Takahiro Maruyama, and Shigeya Naritsuka
  • Journal Title: Diamond Relat. Mater. 17 Pages: 589-593
  • Peer Reviewed
• [Journal Article] Low temperature growth of carbon nanotubes on Si substrates in high vacuum (2008)
  • Author(s): K. Tanioku, T. Maruyama, S. Naritsuka
  • Journal Title: Diamond Relat. Mater. 17 Pages: 589-593
  • Peer Reviewed
• [Journal Article] STM and XPS studies of early stages of carbon nanotube growth by surface decomposition of 6H-SiC(000-1) under various oxygen pressures (2007)
  • Author(s): T. Maruyama, H. Bang, N. Fujita, Y. Kawamura, S. Naritsuka, and M. Kusunoki
  • Journal Title: Diamond Relat. Mater 16 Pages: 1078-1081
  • Peer Reviewed
• [Journal Article] STM and XPS studies of early stages of carbon nanotube growth by surface decomposition of 6H-SiC(000-1)under various oxygen pressures (2007)
  • Author(s): 丸山隆浩
  • Journal Title: Diamond and Related Materials 16 Pages: 1078-1081
  • Peer Reviewed
• [Journal Article] Characterization of small-diameter carbon nanotubes and carbon nanocaps on SiC(000-1) using Raman spectroscopy (2006)
  • Author(s): T. Maruyama, T. Shiraiwa, N. Fujita, Y. Kawamura, S. Naritsuka, and M. Kusunoki
  • Journal Title: Jpn. J. Appl. Phys. 45 Pages: 7231-7233
  • NAID: 10018246912
  • Peer Reviewed
• [Journal Article] Scanning-tunneling-microscopy of the formation of carbon nanocaps on SiC(000-1) (2006)
  • Author(s): T. Maruyama, H. Bang, Y. Kawamura, N. Fujita, K. Tanioku, T. Shiraiwa, Y. Hozumi, S. Naritsuka and M. Kusunoki
  • Journal Title: Chem. Phys. Lett. 423 Pages: 317-320
  • Peer Reviewed
• [Journal Article] Observation of Nanosized Caps Structures on 6H-SiC(0001-) Substrates by Ultrahigh-Vacuum Scanning Tunneling Microscopy (2006)
  • Author(s): H. Bang, Y. Ito, Y. Kawamura, E. Hosoda, C. Yoshida, T. Maruyama, S. Naritsuka and M. Kusunoki
  • Journal Title: Jpn. J. Appl. Phys. 45 Pages: 372-374
  • Peer Reviewed
• [Journal Article] Scanning-tunneling-mnicroscopy of the formation of carbon nanocaps on SiC(000-1) (2006)
  • Author(s): T.Maruyama, H.Bang, Y.Kawamura, N.Fujita, K.Tanioku, T.Shiraiwa, Y.Hozumi, S.Naritsuka, M.Kusunoki
  • Journal Title: Chem. Phys. Lett. 423巻 Pages: 317-320
• [Journal Article] Characterization of small-diameter carbon nanotubes and carbon nanocaps on SiC(000-1) using Raman spectroscopy (2006)
  • Author(s): T.Maruyama, T.Shiraiwa, N.Fujita, Y.Kawamura, S.Naritsuka, M.Kusunoki
  • Journal Title: Jpn. J. Appl. Phys. 45巻 Pages: 7231-7233
  • NAID: 10018246912
• [Journal Article] Observation of Nanosized Caps Structures on 6H-SiC(000 1^^-) Substrates by Ultrahigh-Vacuum Scanning Tunneling Microscopy (2006)
  • Author(s): H.Bang, Y.Ito, Y.Kawamura, E.Hosoda, C.Yoshida, T.Maruyama, S.Naritsuka, M.Kusunoki
  • Journal Title: Jpn.J.Appl.Phys. 45巻 Pages: 372-374
• [Presentation] アルコールガスソース法によるカーボンナノチューブ低温成長におけるA1_2O_x膜厚の影響 (2009)
  • Author(s): 佐藤一徳, 水谷芳裕, 丸山隆浩, 成塚重弥
  • Organizer: 第56回応用物理学関係連合講演会
  • Place of Presentation: 筑波大学(つくば市)
  • Year and Date: 2009-04-02
• [Presentation] 高真空アルコールガスソース法による単層カーボンナノチューブ低温成長における酸化アルミニウムバッファ層の効果 (2009)
  • Author(s): 水谷芳裕, 佐藤一徳, 丸山隆浩, 成塚重弥
  • Organizer: 第36回フラーレン・ナノチューブ総合シンポジウム
  • Place of Presentation: 名城大学(名古屋)
  • Year and Date: 2009-03-05
• [Presentation] Low Temperature Synthesis of Single-Walled Carbon Nanotube by Alcohol Gas Source Growth in High Vacuum (2008)
  • Author(s): T. Maruyama, K. Sato, Y. Mizutani and S. Naritsuka
  • Organizer: The IUMRS international Conference in Asia 2008 (IUMRS-ICA 2008) O7
  • Place of Presentation: Nagoya Congress Center, Japan
  • Year and Date: 2008-12-11
• [Presentation] Low Temperature Synthesis of Single-Walled Carbon Nanotube by Alcohol Gas Source Growth in High Vacuum (2008)
  • Author(s): T, Maruyama, K. Sato, Y. Mizutani, S. Naritsuka
  • Organizer: The IUMRS international Conference in Asia 2008(IUMRS-ICA 2008)
  • Place of Presentation: 名古屋国際会議場(名古屋)
  • Year and Date: 2008-12-11
• [Presentation] Carbon Nanotube Growth by SiC Surface Decomposition in Hydrogen Ambient (2008)
  • Author(s): K. Ueda, Y. Iijima, T. Maruyama, S. Naritsuka
  • Organizer: The IUMRS international Conference in Asia 2008(IUMRS-ICA 2008)
  • Place of Presentation: 名古屋国際会議場(名古屋)
  • Year and Date: 2008-12-11
• [Presentation] Effect of Buffer Thickness on Single-Walled Carbon Nanotube Growth using Aluminum Oxide Buffer Layer with Alcohol Gas Source Method (2008)
  • Author(s): K. Sato, T. Shiraiwa, T. Maruyama, S. Naritsuka
  • Organizer: The IUMRS international Conference in Asia 2008(IUMRS-ICA 2008)
  • Place of Presentation: 名古屋国際会議場(名古屋)
  • Year and Date: 2008-12-11
• [Presentation] Influence of Al oxide buffer layer for improving SWNT yield by alcohol gas source technique (2008)
  • Author(s): Takahiro Maruyama, Tomoyuki Shiraiwa, and Shigeya Naritsuka
  • Organizer: 2008 MRS Fall Meeting JJ 5.6
  • Place of Presentation: Hynes Convention Center and Sheraton Boston Hotel, Boston, MA, USA
  • Year and Date: 2008-12-01
• [Presentation] Influence of Al oxide buffer layer for improving SWNT yield by alcoholgas source technique (2008)
  • Author(s): T. Maruyama, T. Shiraiwa, S. Naritsuka
  • Organizer: 2008 MRS Fall Meeting
  • Place of Presentation: ボストン(アメリカ)
  • Year and Date: 2008-12-01
• [Presentation] 単層カーボンナノチューブの低温成長技術 (2008)
  • Author(s): 丸山隆浩
  • Organizer: 東海ものづくり創生協議会、平成20年度第2回技術シーズ発表会、ミッドランドスクエア5階会議室A
  • Place of Presentation: 名古屋市中村区
  • Year and Date: 2008-10-23
• [Presentation] Dependence of SWNT growth yield on Al oxide buffer layer thickness by alcohol gas source method in high vacuum (2008)
  • Author(s): T. Maruyama, T. Shiraiwa, S. Naritsuka
  • Organizer: 19th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, and Nitrides (Diamond 2008)
  • Place of Presentation: Sitges, Spain
  • Year and Date: 2008-09-08
• [Presentation] SiC表面分解カーボンナノチューブ生成における水素ガスの効果 (2008)
  • Author(s): 上田和史, 飯島祐樹, 丸山隆浩, 成塚重弥
  • Organizer: 第69回応用物理学学術講演会
  • Place of Presentation: 中部大学(春日井市)
  • Year and Date: 2008-09-05
• [Presentation] 酸化Alバッファ層を用いたアルコールガスソース法によるカーボンナノチューブ低温成長 (2008)
  • Author(s): 佐藤一徳, 丸山隆浩, 成塚重弥
  • Organizer: 第69回応用物理学学術講演会
  • Place of Presentation: 中部大学(春日井市)
  • Year and Date: 2008-09-04
• [Presentation] Enhancement of Carbon Nanotube Growth at Low Temperature using A1_2O_x Buffer Layer in Alcohol Gas Source Method (2008)
  • Author(s): 丸山隆浩, 佐藤一徳, 白岩倫行, 成塚重
  • Organizer: 第35回フラーレン・ナノチューブ総合シンポジウム
  • Place of Presentation: 東京工業大学(東京都目黒区)
  • Year and Date: 2008-08-28
• [Presentation] Role of Al oxide buffer layer in carbon nanotube growth by alcohol gas source method (2008)
  • Author(s): K. Sato, K. Tanioku, T. Shiraiwa, T. Maruyama, S. Naritsuka
  • Organizer: The 27th Electronic Materials Symposium (EMS-27)
  • Place of Presentation: ラフォーレ修善寺(伊豆長岡、静岡)
  • Year and Date: 2008-07-09
• [Presentation] High yield synthesis and growth mechanism of carbon nanotube using alcohol gas source method in high vacuum (2008)
  • Author(s): Takahiro Maruyama, Kuninori Sato, Kenji Tanioku, Tomoyuki Shiraiwa, Shigeya Naritsuka
  • Organizer: Ninth International Conference on the Science and Application of Nanotubes (NT08)
  • Place of Presentation: Le Corum, Montpellier, France
  • Year and Date: 2008-06-30
• [Presentation] High yield synthesis and growth mechanism of carbon nanotube using alcohol gas source method in high vacuum (2008)
  • Author(s): T. Maruyama, K. Sato, K. Tanioku, T. Shiraiwa, S. Naritsuka
  • Organizer: Ninth International Conference on the Science and Application of Nanotubes (NT08)
  • Place of Presentation: モンペリエ(フランス)
  • Year and Date: 2008-06-30
• [Presentation] ガスソース法によるカーボンナノチューブ成長への酸化Alバッファ層挿入効果 (2008)
  • Author(s): 丸山隆浩, 白岩倫行, 成塚重弥
  • Organizer: 第55回応用物理学関係連合講演会29p-J-20
  • Place of Presentation: 日本大学理工学部船橋キャンパス
  • Year and Date: 2008-03-29
• [Presentation] SiC表面分解カーボンナノチューブ生成法における雰囲気ガスの影響 (2008)
  • Author(s): 上田和史
  • Organizer: 中部地区ナノテクノロジー・ネットワーク総合支援成果報告会
  • Place of Presentation: 岡崎コンファレンスセンター(岡崎、愛知)
  • Year and Date: 2008-03-19
• [Presentation] Effect of Al oxide buffer layer on SWNT growth using alcohol gas source in high vacuum (2008)
  • Author(s): 白岩倫行
  • Organizer: 第34回フラーレン・ナノチューブ総合シンポジウム
  • Place of Presentation: 名城大学(名古屋)
  • Year and Date: 2008-03-04
• [Presentation] Time Dependence of Carbon Nanotube Growth by Gas Source Method using Alcohol in High Vacuum (2008)
  • Author(s): 谷奥健次
  • Organizer: 第34回フラーレン・ナノチューブ総合シンポジウム
  • Place of Presentation: 名城大学(名古屋)
  • Year and Date: 2008-03-03
• [Presentation] TEM observation of Carbon Nanotube Pattern Fabricated on SiC(000-1)using Ta mask (2008)
  • Author(s): 穂積葉子
  • Organizer: 第34回フラーレン・ナノチューブ総合シンポジウム
  • Place of Presentation: 名城大学(名古屋)
  • Year and Date: 2008-03-03
• [Presentation] Low Temperature Synthesis of Carbon Nanotube on Si substrate Using Alcohol Gas Source in High Vacuum (2007)
  • Author(s): T. Maruyama, K. Tanioku, S. Naritsuka
  • Organizer: 2007MRS Fall Meeting II 14.3, Hynes Convention Center and Sheraton Boston Hotel
  • Place of Presentation: Boston, MA, USA
  • Year and Date: 2007-11-28
• [Presentation] Low Temperature Synthesis of Carbon Nanotube on Si substrate Using Alcohol Gas Source in High Vacuum (2007)
  • Author(s): 丸山隆浩
  • Organizer: 2007MRS Fall Meeting
  • Place of Presentation: ハインズコンベンションセンター(ボストン、アメリカ)
  • Year and Date: 2007-11-28
• [Presentation] Surface Oxidation and Carbon Nanotube Formation in Surface Decomposition of 6H-SiC (2007)
  • Author(s): 丸山隆浩
  • Organizer: 2007MRS Fall Meeting
  • Place of Presentation: ハインズコンベンションセンター(ボストン、アメリカ)
  • Year and Date: 2007-11-27
• [Presentation] Surface Oxidation and Carbon Nanotube Formation in Surface Decomposition of 6H-SiC (2007)
  • Author(s): T. Maruyama, N. Fujita, S. Naritsuka, M. Kusunoki
  • Organizer: 2007MRS Fall Meeting II 5.26, Hynes Convention Center and Sheraton Boston Hotel
  • Place of Presentation: Boston, MA, USA
  • Year and Date: 2007-11-26
• [Presentation] SiC表面分解カーボンナノチューブ生成法におけるナノチューブ/SiC界面制御 (2007)
  • Author(s): 丸山隆浩、楠美智子、成塚重弥
  • Organizer: 第37回結晶成長国内会議05aB04
  • Place of Presentation: 北海道大学、札幌市北区、(招待講演)
  • Year and Date: 2007-11-15
• [Presentation] 6H-SiC(000-1)の表面酸化およびカーボンナノキャップ形成と酸素圧力の関係 (2007)
  • Author(s): 藤田奈緒美
  • Organizer: 第68回応用物理学学術講演会
  • Place of Presentation: 北海道工業大学(札幌)
  • Year and Date: 2007-09-07
• [Presentation] 高真空下におけるカーボンナノチューブ成長の触媒膜厚依存性 (2007)
  • Author(s): 谷奥健次
  • Organizer: 第68回応用物理学学術講演会
  • Place of Presentation: 北海道工業大学(札幌)
  • Year and Date: 2007-09-06
• [Presentation] Effect of Additional Minute Amounts of Carbon on Nanocap Size when formed by SiC Surface Decomposition (2007)
  • Author(s): 丸山隆浩
  • Organizer: The 15th International Conference on Crystal Growth
  • Place of Presentation: ソルトレイクシティ、アメリカ
  • Year and Date: 2007-08-13
• [Presentation] Carbon nanotube growth on SiO_2/Si at low tempreture using alcohol gas source in high vacuum (2007)
  • Author(s): T. Maruyama, K. Tanioku and S. Naritsuka
  • Organizer: Extended Abstracts of the 26th Electronic Materials Symposium (EMS-26), I2
  • Place of Presentation: Laforet Biwako, Moriyama, Shiga
  • Year and Date: 2007-07-05
• [Presentation] Carbon nanotube growth on SiO_2/Si at low tempreture using alcohol gas source in high vacuum (2007)
  • Author(s): 丸山隆浩
  • Organizer: Extended Abstracts of the 26th Electronic Materials Symposium(EMS-26)
  • Place of Presentation: ラ・フォーレびわこ(守山、滋賀)
  • Year and Date: 2007-07-05
• [Presentation] Synthesis and characterization of carbon nanotube grown by alcohol gas source in high vacuum (2007)
  • Author(s): 谷奥健次
  • Organizer: Eighth International Conference on the Science and Application of Nanotubes(NT07)
  • Place of Presentation: Parque Metalurgico(オウロプレット、ブラジル)
  • Year and Date: 2007-06-29
• [Presentation] Selective area growth of carbon nanotube on SiC(000-1)using Ti mask pattern (2007)
  • Author(s): 穂積葉子
  • Organizer: Eighth International Conference on the Science and Application of Nanotubes(NT07)
  • Place of Presentation: Parque Metalurgico(オウロプレット、ブラジル)
  • Year and Date: 2007-06-29
• [Presentation] Low temperature growth of carbon nanotube on Si substrates in high vacuum (2007)
  • Author(s): 谷奥健次
  • Organizer: New Diamond and Nano Carbons
  • Place of Presentation: 千里ライフサイエンスセンター(豊中、大阪)
  • Year and Date: 2007-05-29
• [Presentation] Carbon nanotube growth on Si substrate using pulse arc plasma in high vacuum (2007)
  • Author(s): 白岩倫行
  • Organizer: New Diamond and Nano Carbons
  • Place of Presentation: 千里ライフサイエンスセンター(豊中、大阪)
  • Year and Date: 2007-05-29
• [Presentation] STM and XPS studies of early stage of carbon nanotube growth on 6H-SiC(000-1) under various oxygen pressures (2006)
  • Author(s): T. Maruyama, N. Fujita, Y. Kawamura, H. Bang, S. Naritsuka and M. Kusunoki
  • Organizer: The 17th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, and Nitrides, DIAM2006
  • Place of Presentation: Estoril, Portugal
  • Year and Date: 2006-09-04
• [Presentation] Carbon Nanocpap and Carbon Nanotube Growth on SiC by Surface Decomposition (2006)
  • Author(s): T. Maruyama, S. Naritsuka, M. Kusunoki
  • Organizer: 14^<th> Int. Conf. Composites/Nano Engineering (ICCE-14), Renaissance Suites
  • Place of Presentation: Broomfield, Boulder, Colorado, USA
  • Year and Date: 2006-07-03
• [Presentation] Formation process of carbon nanocap from SiC(000-1) surface through thermal decomposition (2006)
  • Author(s): T. Maruyama, Y. Kawamura, H. Bang, N. Fujita, T. Shiraiwa, K. Tanioku, Y. Hozumi, S. Naritsuka and M. Kusunoki
  • Organizer: 第30回フラーレン・ナノチューブ総合シンポジウム2P-29
  • Place of Presentation: 名城大学(名古屋)
  • Year and Date: 2006-01-08
• [Presentation] STM observation of formation process of carbon nanotube from 6H-SiC (000-1) (2005)
  • Author(s): T. Maruyama, Y. Kawamura, H. Bang, N. Fujita, T. Shiraiwa, K. Tanioku, Y. Hozumi, S. Naritsuka and M. Kusunoki
  • Organizer: Abstract of 2005 MRS fall meeting, Hynes Convention Center and Sheraton Boston Hotel
  • Place of Presentation: Boston, MA, Rall
  • Year and Date: 2005-11-28
• [Presentation] STM and XPS study of CNT nano-cap formation from 6H-SiC(000-1) (2005)
  • Author(s): T. Maruyama, Y. Kawamura, H. Bang, N. Fujita, T. Shiraiwa, K. Tanioku, Y. Hozumi, S. Naritsuka and M. Kusunoki
  • Organizer: 第29回フラーレン・ナノチューブ総合シンポジウム 2P-21
  • Place of Presentation: 京都大学
  • Year and Date: 2005-07-25
• [Presentation] SiC表面におけるナノキャップ形成過程 (2005)
  • Author(s): 丸山隆浩、方炯軫、河村康之、吉田千紗、細田悦子、成塚重弥、楠美智子
  • Organizer: 文部科学省ナノテクノロジー総合支援プロジェクト「分子・物質総合合成・解析支援グループ」成果発表会、「分子・物質に視点をおいたナノテクノロジー・ナノサイエンスIII」
  • Place of Presentation: 岡崎コンファレンスセンター
  • Year and Date: 2005-03-23
• [Book] 「ナノカーボンハンドブック」,「炭化ケイ素の表面分解による大面積CNT膜の開発と機械的応用への期待」 (2007)
  • Author(s): 楠美智子、三宅晃司、丸山隆浩、宇佐美初彦、遠藤守信、飯島澄男監修
  • Publisher: 株式会社エヌ・ティー・エス
• [Book] ナノカーボンハンドブック (2007)
  • Author(s): 楠美智子
  • Publisher: 株式会社エヌ・ティー・エス
• [Remarks]
  • URL: http://wwwrz.meijo-u.ac.jp/labo/naritsuka_maruyama/nm_main.htm
• [Patent(Industrial Property Rights)] カーボンナノチューブの製造方法 (2006)
  • Inventor(s): 粟野祐二、成塚重弥、川端章夫、丸山隆浩
  • Industrial Property Rights Holder: 富士通株式会社、学校法人名城大学
  • Filing Date: 2006
• [Patent(Industrial Property Rights)] カーボンナノチューブの作製方法、電流制御素子及びその作製方法 (2006)
  • Inventor(s): 成塚重弥、丸山隆浩、楠美智子
  • Industrial Property Rights Holder: 学校法人名城大学、財団法人ファインセラミックスセンター
  • Filing Date: 2006-05-25