Understanding the dynamic behavior of blistering on the semiconductor surface and its application for nanofabrication

• Project/Area Number: 17560025
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Thin film/Surface and interfacial physical properties
• Research Institution: Aichi Institute of Technology
• Principal Investigator: IWATA Hiroyuki Aichi Institute of Technology, 工学部・電気学科, 講師 (20261034)
• Project Period (FY): 2005 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥3,960,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥360,000); Fiscal Year 2008: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000); Fiscal Year 2007: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000); Fiscal Year 2006: ¥900,000 (Direct Cost: ¥900,000); Fiscal Year 2005: ¥1,500,000 (Direct Cost: ¥1,500,000)
• Keywords: 水素イオン注入 / スマートカット / 透過型電子顕微鏡 / ブリスタリング / 結晶欠陥 / RBS / 格子欠陥 / ナノデバイス

Research Abstract

水素イオンが高濃度に注入された半導体シリコンに発生する結晶欠陥の性状を透過型電子顕微鏡観察から評価し、加熱による表面薄膜切り出し後の形状との関連性を詳細に調べた。少量の異種イオンの照射を併用し、現象の低温化を明らかにした.
加熱前後の試料内水素分布と欠陥分布の変化を検出した. 事前に試料表面に溝加工を施し、その後加熱処理を行うことにより, ナノオーダ精度で瞬時にナノ構造物を大量に作製する手法の取り掛かりとなる基礎的データを得た.

Research Products

• [Journal Article] Effect of Impurity Co-implantation on Hydrogen Surface Exfoliation (2008)
  • Author(s): H.Iwata, M.Takagi, Y.Tokuda
  • Journal Title: JAEA Takasaki Annual Report 2006 JAEA-Review 2007-060 Pages: 150-150
  • Peer Reviewed
• [Journal Article] TEM and HRTEM Observations of Microstructural Change of Silicon Single Crystal Scratched under Very Small Loading Forces by AFM Materials Transactions (2008)
  • Author(s): Makoto Takagi, Kenji Onodera, Akihito Matsumuro, Hiroyuki Iwata, Katsuhiro Sasaki and Hiroyasu Saka
  • Journal Title: 49 Pages: 1298-1302
  • Peer Reviewed
• [Journal Article] Effect of Impurity Co-implantation on Hydrogen Surface Blistering (2008)
  • Author(s): H.Iwata, M.Takagi, Y.Tokuda
  • Journal Title: International Journal of Advanced Microscopy and TheoreticalCalculations 1 Pages: 1262-263
• [Journal Article] 水素ブリスタリングにおけるフッ素注入援用効果 (2008)
  • Author(s): 岩田博之、徳田豊、高木誠, 井村徹
  • Journal Title: 日本顕微鏡学会第61回学術講演会要旨集, 顕微鏡 Vol.40 Supplement 1 Pages: 462-462
• [Journal Article] TEM and HRTEM Observations of Microstructural Change of Silicon Single Crystal Scratched under Very Small Loading Forces by AFM (2008)
  • Author(s): Makoto Takagi, Kenji Onodera, Akihito Matsumuro, Hiroyuki Iwata, Katsuhiro Sasaki, Hiroyasu Saka
  • Journal Title: Materials Transactions 49 Pages: 1298-1302
  • NAID: 10021147448
  • Peer Reviewed
• [Journal Article] Effect of Impurity Co-implantation on Hydrogen Surface Blistering (2008)
  • Author(s): H. Iwata, M. Takagi, Y. Tokuda
  • Journal Title: International Journal of Advanced Microscopy and Theoretical Calculations 1 Pages: 262-263
• [Journal Article] 極微小電流計測型ナノプローブその場観察システムの開発 (2007)
  • Author(s): 岩田博之, 奥田東
  • Journal Title: 愛知工業大学総合技術研究所研究報告 9 Pages: 47-52
  • NAID: 110007163232
• [Journal Article] SPMを用いたSi単結晶のナノ加工と表面の構造変化 (2007)
  • Author(s): 吉田浩也, 松室昭仁, 岩田博之, 高木誠
  • Journal Title: 精密工学会誌 73 Pages: 1149-1153
  • NAID: 110006403576
  • Peer Reviewed
• [Journal Article] Effect of Impurity Co-implantation on Hydrogen Surface Exfoliation (2007)
  • Author(s): H. Iwata, M. Takagi, Y. Tokuda
  • Journal Title: JAEA-Review 060 Pages: 150-150
  • Peer Reviewed
• [Journal Article] Effect of Boron Co-implantation on Hydrogen induced Exfoliation (2006)
  • Author(s): H.Iwata, Y.Tokuda, M.Takagi, T.Imura
  • Journal Title: Proceedings of 16^<th> International Microscopy Congress 3 Pages: 1352-1352
  • Peer Reviewed
• [Journal Article] RBS/Cを用いた水素イオン注入欠陥の評価 (2006)
  • Author(s): 岩田博之、清水孝延、横井久人、石神龍哉、伊藤慶文、徳田豊、高木誠
  • Journal Title: 総合技術研究所総合報告 8 Pages: 77-80
  • NAID: 110004812523
• [Journal Article] Effect of Boron Co-implantation on Hydrogen induced Exfoliation; (2006)
  • Author(s): H.Iwata, Y.Tojuda, M.Takagi, T.Imura
  • Journal Title: Proceedings of 16^th International Microscopy Congress 3 Pages: 1352-1352
• [Journal Article] RBS/Cを用いた水素イオン注入欠陥の評価 (2006)
  • Author(s): 岩田博之, 清水孝延, 横井久人, 石神龍哉, 伊藤慶文, 徳田豊, 高木誠
  • Journal Title: 総合技術研究所総合報告 8 Pages: 77-80
  • NAID: 110004812523
• [Journal Article] カーボンナノチューブ短針を用いた高アスペクト比なのスケール穴加工法の開発 (2006)
  • Author(s): 松室昭仁, 高木誠, 岩田博之, 松本章宏, 野間日出男, 井村徹;
  • Journal Title: 総合技術研究所総合報告 8 Pages: 33-37
• [Journal Article] SPMによる引掻試験でシリコン単結晶に生じた微構造変化のTEM観察 (2006)
  • Author(s): 高木誠, 小野寺健司, 岩田博之, 井村徹, 佐々木勝寛, 松公恭;
  • Journal Title: 総合技術研究所総合報告 8 Pages: 39-41
• [Journal Article] Impact toughness of an ingot hypereutectic Al-23 mass% Si alloy improved by rotary-die equal-channel angular pressing (2005)
  • Author(s): Aibin Ma, Kazutaka Suzuki, Naobumi Saito, Yoshinori Nishida, Makoto Takagi, Ichinose Shigematsu, Hiroyuki Iwata
  • Journal Title: Material Science and Engineering A399 Pages: 181-189
• [Journal Article] Tensile property of an Al-11 mass%Si alloy at elevated temperatures processed by rotary-die equal-channel angular pressing (2005)
  • Author(s): Aibin Ma, Makoto Takagi, Naobumi Saito, Hiroyuki Iwata, Yoshinori Nishida, Kazutaka Suzuki, Ichinori Shigematsu
  • Journal Title: Material Science and Engineering A408 Pages: 147-153
  • Peer Reviewed
• [Journal Article] 水素ブリスタリングにおけるフッ素注入援用効果,日本顕微鏡学会第61回学術講演会要旨集 (2005)
  • Author(s): 岩田博之, 徳田豊, 高木誠, 井村徹
  • Journal Title: 顕微鏡 Vol.40 Supplement 1 Pages: 462-462
• [Journal Article] Impact toughness of an ingot hypereutectic Al-23 mass% Si alloy improved by rotary-die equal-channel angular pressing, (2005)
  • Author(s): Aibin Ma, Kazutaka Suzuki, Naobumi Saito, Yoshinori Nishida, Makoto Takagi, Ichinose Shigematsu, Hiroyuki Iwata
  • Journal Title: Material Science and Engineering, A399 Pages: 181-189
• [Journal Article] Tensile property of an Al-11 mass%Si alloy at elevated temperatures processed by rotary-die equal-channel angular pressing, (2005)
  • Author(s): Aibin Ma, Makoto Takagi, Naobumi Saito, Hiroyuki Iwata, Yoshinori Nishida, Kazutaka Suzuki, Ichinori Shigematsu
  • Journal Title: Material Science and Engineering, A408 Pages: 147-153
• [Journal Article] TEM Observation of Microstructural Change of Silicon Single Crystal Caused by Scratching Tests Using SPM, (2005)
  • Author(s): M.Takagi, K.Onodera, H.Iwata, T.Imura, K.Sasaki, H.Saka
  • Journal Title: Materials Research Society Sympo.Proc. Pages: 247-252
  • NAID: 110004812516
• [Presentation] SiC水素ブリスタリングの注入温度依存性 (2008)
  • Author(s): 岩田博之, 高木誠, 徳田豊
  • Organizer: 日本顕微鏡学会第64回学術講演会
  • Place of Presentation: 京都国際会議場
• [Presentation] Sic水素ブリスタリングの注入温度依存性 (2008)
  • Author(s): 岩田博之, 高木誠, 徳田豊
  • Organizer: 日本顕微鏡学会第64回学術講演会
  • Place of Presentation: 京都国際会議場
• [Presentation] Effect of Impurity Co-implantation on Hydrogen Surface Blistering (2008)
  • Author(s): H. Iwata, M. Takagi, Y. Tokuda
  • Organizer: The 1^<st> International Symposium Advanced Microscopy and Theoretical Calculations
  • Place of Presentation: 名古屋国際会議場
• [Presentation] 低温イオン注入を用いた半導体材料の結晶欠陥評価とデバイス作製への応用 (2008)
  • Author(s): 岩田博之, 高木誠, 徳田豊
  • Organizer: 平成20年原子力機構施設利用一般共同研究成果報告会
  • Place of Presentation: 茨城県東海村リコッティ
• [Presentation] 光顕その場加熱観察によるSiC水素ブリスタリングの動的挙動 (2007)
  • Author(s): 岩田博之, 高木誠, 徳田豊
  • Organizer: 日本顕微鏡学会第64回学術講演会
  • Place of Presentation: 新潟朱鷺メッセ
• [Presentation] 光顕その場加熱観察によるSiC水素ブリスタリングの動的挙動 (2007)
  • Author(s): 岩田博之, 高木誠, 徳田豊
  • Organizer: 日本顕微鏡学会第64回学術講演会
  • Place of Presentation: 朱鷺メッセ,新潟