| Project/Area Number |
17560094
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | University of Toyama |
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Principal Investigator |
TAKANO Noboru University of Toyama, Engineering, Research Assistant, 理工学研究部(工学), 助手 (60251881)
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| Co-Investigator(Kenkyū-buntansha) |
MORITA Noboru University of Toyama, Engineering, Professor, 理工学研究部(工学), 教授 (30239660)
YAMADA Shigeru University of Toyama, Engineering, Associate Professor, 理工学研究部(工学), 助教授 (00174714)
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| Project Period (FY) |
2005 – 2006
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| Project Status |
Completed (Fiscal Year 2006)
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| Budget Amount *help |
¥3,300,000 (Direct Cost: ¥3,300,000)
Fiscal Year 2006: ¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 2005: ¥2,300,000 (Direct Cost: ¥2,300,000)
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| Keywords | Diamond Array Tool / Silicon Mold / Anisotropic Etching / Polycrystalline Diamond / Reactive Ion Etching / Ultra Micro Machining |
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| Research Abstract |
In this study, we developed a diamond micro milling tool for micro-to-nano scale machining. This tool is manufactured by attaching a diamond cutting edge to tip of rotational axis. The diamond cutting edge with various shapes named "diamond array tool" are fabricated by depositing polycrystalline diamond using CVD on silicon molds which are made by anisotropic wet etching of the single crystal silicon or by reactive ion etching. The cutting edge has various shapes, the former is pyramidal, the latter are square, semicircle, triangle and trapezoid etc. By using this micro milling tool to machining for single crystal silicon, metallic glass and acrylic resin, the chip of these materials was observed largely by SEM image. It was found that the micro milling tool was possible to machining with high efficiency and accuracy.
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