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Study on texturing process by plasamaless dry etching for multi-crystalline silicon solar cells

Research Project

Project/Area Number 17560291
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionSeikei University

Principal Investigator

SAITO Yoji  Seikei University, Science and Technology, Professor (90196022)

Co-Investigator(Kenkyū-buntansha) UEHARA Shingo  Seikei University, Science and Technology, Professor (40232780)
Project Period (FY) 2005 – 2007
Project Status Completed (Fiscal Year 2007)
Budget Amount *help
¥2,050,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥150,000)
Fiscal Year 2007: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2006: ¥600,000 (Direct Cost: ¥600,000)
Fiscal Year 2005: ¥800,000 (Direct Cost: ¥800,000)
Keywordsdry etching / silicon solar cells / multicrvstalline / texture / reflectivity / chlorine trifluoride / passivation / lifetime / 太陽光発電 / 反射損失 / 電子顕微鏡 / 反射スペクトル / ハニカム構造 / グループ構造 / 発電効率
Research Abstract

The high conversion efficiency and the reduced cost have been required for the solar cells. One of the causes to suppress their efficiency is the surface reflection loss for the incident light. When the surface is rough, the incident light has more chance to go into the bulk, and the silicon surfaces have low reflectance. Single-crystalline silicon surfaces are usually textured to pyramid-like structures using an alkaline solution, utilizing the dependence of the etch rate on the crystalline - orientation. The texturization using an alkaline solution, however, is not applicable to multi-crystalline silicon wafers. The C1F_3 gas can etch silicon isotropically without plasma near room temperature, but hardly attacks silicon dioxide and positive-type photoresist films, as mask materials. Reflection loss of silicon solar cells can be reduced by texturization of the surfaces. In this study, single- and multi-crystalline silicon substrates were treated with chlorine trifluoride (C1F3) to create groove- and honeycomb-textured structures. We investigated surface structures and optical properties of the textured surfaces. By the treatment with C1F_3 gas, the reflectance of the textured surface without anti-reflection coating was obtained to be below 20% at wavelengths between 300 and 800 nm. The solar cells using the textured substrates were fabricated and their improved performances were demonstrated.
On the other hand, a number of the lattice defects in the multi-crystalline substrates degrade the solar cell performance. The short circuit current and conversion efficiency of the solar cells are increased by the passivation process using hydrogen plasma. The hydrogenation rate apparently increases at a reverse bias voltage near 0.6V during the hydrogenation process. The effects of the bias voltage on the hydrogenation are large at the substrate temperatures between 200C and 250C, and are considered to be caused by H^+ions, which would exist in the substrates.

Report

(4 results)
  • 2007 Annual Research Report   Final Research Report Summary
  • 2006 Annual Research Report
  • 2005 Annual Research Report
  • Research Products

    (52 results)

All 2008 2007 2006 2005

All Journal Article (26 results) (of which Peer Reviewed: 4 results) Presentation (26 results)

  • [Journal Article] Honeycomb-textured structures on crystalline silicon surfaces for solar cells by spontaneous dry etching with chlorine trifluoride gas2007

    • Author(s)
      Y.Saito and T.Kosuge
    • Journal Title

      Solar Energy Materials and Solar Cells 91

      Pages: 1800-1804

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Optical properties of groove-and honeycomb-textured silicon surfaces using chlorine trifluoride gas2007

    • Author(s)
      S.Narita, H.Sano, T.Momma, Y.Saito
    • Journal Title

      Proc.Int.Conf.on Elec.Eng.2007 1

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Electrical properties of silicon-related solar cells with groove-and honey comb-textured surfaces using chlorine trifluoride gas2007

    • Author(s)
      Y.Saito
    • Journal Title

      Proc.2007 Korea-Japan Joint Workshop on Advaneed Semiconductor Processes and Equipments 1

      Pages: 105-106

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] 結晶系半導体太陽電池のプラズマレスドライテクステャー化プロセス2007

    • Author(s)
      齋藤 洋司, 門馬 正, 小菅 雄史
    • Journal Title

      成蹊大学理工学研究報告 44

      Pages: 43-44

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Honeycomb-textured structures on crystalline silicon surfaces for solar cells by spontaneous dry etching with chlorine trifluoride gas2007

    • Author(s)
      Y., Saito, T., Kosuge
    • Journal Title

      Solar Energy Materials and Solar Cells Vol. 91

      Pages: 1800-1804

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Optical properties of groove-and honeycomb-textured silicon surfaces using chlorine trifluoride gas2007

    • Author(s)
      S., Narita, H., Sano, T., Momma, Y., Saito
    • Journal Title

      Proc. Int. Conf. on Electrical Eng

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Electrical properties of silicon-related solar cells with groove-and honeycomb-textured surfaces using chlorine trifluoride gas2007

    • Author(s)
      Y., Saito
    • Journal Title

      Proc. 2007 Korea-Japan Joint Workshop on Advanced Semiconductor Processes and Equipments

      Pages: 105-106

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] texturing process by plasamaless dry etching for crystalline silicon solar cells2007

    • Author(s)
      Y., Saito, T., Kosuge, T., Momma
    • Journal Title

      The Journal of Science and Technology, Seikei Univ Vol. 44, No. 2

      Pages: 43-44

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] 結晶系半導体太陽電池のプラズマレスドライテクステヤー化プロセス2007

    • Author(s)
      齋藤 洋司, 門馬 正, 小菅 雄史
    • Journal Title

      成蹊大学理工学研究報告 44

      Pages: 43-44

    • Related Report
      2007 Annual Research Report
  • [Journal Article] プラズマレスドライエッチングによるシリコン表面処理とその赤外線センサ作製への応用2007

    • Author(s)
      齋藤 洋司
    • Journal Title

      日本赤外線学会第4回赤外放射の応用関連学会等年会 IR-07-03

      Pages: 21-25

    • Related Report
      2006 Annual Research Report
  • [Journal Article] プラズマレスドライエッチングによるシリコン表面処理とその応用2006

    • Author(s)
      齋藤 洋司
    • Journal Title

      電気学会フィジカルセンサ研究会資料 PHS-06-20

      Pages: 5-12

    • NAID

      10018459522

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary 2006 Annual Research Report
  • [Journal Article] Preparation of honeycomb-textured structures on crystalline silicon surfaces for solar cells by spontaneous dry etching with chlorine trifluoride gas2006

    • Author(s)
      Y.Saito and T.Kosuge
    • Journal Title

      Proc.Int.Conf.on Electrical Eng.2006

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Chlorine-trifluoride-textured crystalline silicon solar cells with antireflective nitride films2006

    • Author(s)
      H.Yamazaki, T.Kosuge, T.Momma, Y.Saito
    • Journal Title

      Proc.Int.Conf.on Electrical Eng.2006

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Surface treatments of silicon by plasmaless etching and their applications2006

    • Author(s)
      Y., Saito
    • Journal Title

      The Papers of Tech. Meet. On Phys. Sensor, IEE Japan

      Pages: 5-12

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Preparation of honeycomb-textured structures on crystalline silicon surfaces for solar cells by spontaneous dry etching with chlorine trifluoride gas2006

    • Author(s)
      Y., Saito, T., Kosuge
    • Journal Title

      Proc. Int. Conf. on Electrical Eng

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Chlorine-trifluoride-textured crystalline silicon solar cells with antireflective nitride films2006

    • Author(s)
      H., Yamazaki, T., Kosuge, T., Momma, Y., Saito
    • Journal Title

      Proc. Int. Conf. on Electrical Eng

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Optical properties of crystalline silicon surface textured by spontaneous dry etching with chlorine trifluoride gas2006

    • Author(s)
      Y.Saito, H.Yamazaki, T.Kosuge
    • Journal Title

      Abstracts of 2006 Material Research Society Spring Meeting

      Pages: 616-616

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Preparation of honeycomb-textured structures on crystalline silicon surfaces for solar cells by spontaneousdry etching with chlorine trifluoride gas2006

    • Author(s)
      Y.Saito, T.Kosuge
    • Journal Title

      Proc. Int. Conf. on Electrical Eng. 2006

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Chlorine-trifluoride-textured crystalline silicone solar cells with antireflective nitride films2006

    • Author(s)
      H.Yamazaki, T.Kosuge, T.Momma, Y.Saito
    • Journal Title

      Proc. Int. Conf. on Electrical Eng. 2006

    • Related Report
      2006 Annual Research Report
  • [Journal Article] 三フッ化塩素処理したシリコン基板表面の反射率に与える熱プロセスの影響の検討2006

    • Author(s)
      成田, 山崎, 門馬, 齋藤
    • Journal Title

      第67回応用物理学会学術講演会予稿集 III

      Pages: 718-718

    • Related Report
      2006 Annual Research Report
  • [Journal Article] 三フッ化塩素ガスを用いてハニカム構造にテクスチャ化したシリコン表面の光学的評価2006

    • Author(s)
      小菅雄史, 土橋善之助, 門馬 正, 齋藤洋司
    • Journal Title

      第53回応用物理学関係連合講演会予稿集 III巻

    • Related Report
      2005 Annual Research Report
  • [Journal Article] 酸窒化膜を有する三フッ化塩素テクスチャ結晶系シリコン太陽電池の光学特性2006

    • Author(s)
      上戸隆行, 成田昌平, 山崎英雅, 門馬 正, 齋藤洋司
    • Journal Title

      第53回応用物理学関係連合講演会予稿集 III巻

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Maskless surface treatments of crystalline silicon by spontaneous dry etching with chlorine trifluoride gas for photovoltaic cells2005

    • Author(s)
      Y. Saito
    • Journal Title

      Proc. 2005 Korea-Japan Joint Workshop on Advanced Semiconductor Processes and Equipments

      Pages: 179-182

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Maskless surface treatments of crystalline silicon by spontaneous dry etching with chlorine trifluoride gas for photovoltaic cells2005

    • Author(s)
      Y., Saito
    • Journal Title

      Proc. 2005 Korea-Japan Joint Workshop on Advanced Semiconductor Processes and Equipments

      Pages: 179-182

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Optical properties of polycrystalline silicon surfaces for solar cells treated with chlorine trifluoride gas"2005

    • Author(s)
      T.Kosuge, T.Momma, Y.Saito
    • Journal Title

      Proc.Int.Conf.on Elec.Eng.2005

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Maskless surface treatments of crystalline silicon by spontaneous dry etching with chlorine trifluoride gas for photovoltaic cells"2005

    • Author(s)
      Y.Saito
    • Journal Title

      Proc. 2005 Korea-Japan Joint Workshop on Advanced Semiconductor Processes and Equipments

      Pages: 179-182

    • Related Report
      2005 Annual Research Report
  • [Presentation] 多結晶Si太陽電池の水素パッシベーションにおけるバイアス電圧の効果2008

    • Author(s)
      佐野 英之, 富田 誠一, 幸畑 隼人, 門馬 正, 齋藤 洋司
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      日本大学
    • Year and Date
      2008-03-30
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] Effects of bias voltage on hydrogen passivation in multicrystalline silicon solar cell2008

    • Author(s)
      H., Sano, S., Tomita, H., Kohata, T., Momma, Y., Saito
    • Organizer
      The 55th Spring Meet., The Jpn. Soc. of Appl. Phys. and Rel. Soc
    • Place of Presentation
      Funabashi
    • Year and Date
      2008-03-30
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 銀粒子触媒を用いた単結晶シリコンへの逆ピラミッド構造形成と太陽電池への応用2007

    • Author(s)
      津留 親佑, 圓山 洋介, 松村 道雄, 成田 昌平, 齋藤 洋司
    • Organizer
      2007年電気化学秋季大会
    • Place of Presentation
      東京工業大学
    • Year and Date
      2007-09-19
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] CIF_3テクスチャ処理したシリコン基板表面の反射率に与える熱プロセスの影響2007

    • Author(s)
      佐野 英之, 成田 昌平, 門馬 正, 齋藤 洋司
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-06
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] Heat treatment effects on surface reflection of chlorine-trifloride-textured single crystalline silicon2007

    • Author(s)
      H., Sano, S., Narita, T., Momma, Y., Saito
    • Organizer
      The 68th Autumn Meet., The Jpn. Soc. of Appl. Phys
    • Place of Presentation
      Sapporo
    • Year and Date
      2007-09-06
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 三フッ化塩素ガスを用いてハニカム状テクスチャ処理を行った結晶シリコン太陽電池の特性2007

    • Author(s)
      成田 昌平, 佐野 英之, 門馬 正, 齋藤 洋司
    • Organizer
      日本材料科学会平成19年度学術大会講演会
    • Place of Presentation
      東京工業大学
    • Year and Date
      2007-05-25
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] 三フッ化塩素ガスを用いてグループ状テクスチャ処理を行った結晶シリコン太陽電池の特性2007

    • Author(s)
      佐野 英之, 成田 昌平, 門馬 正, 齋藤 洋司
    • Organizer
      日本材料科学会平成19年度学術大会講演会
    • Place of Presentation
      東京工業大学
    • Year and Date
      2007-05-25
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Electrical properties of honeycomb-, textured solar cells using C1F3 gas2007

    • Author(s)
      S., Narita, H., Sano, T., Momma, Y., Saito
    • Organizer
      2007 Annual Meet. Mat. Sci. Soc. Japan
    • Place of Presentation
      Tokyo
    • Year and Date
      2007-05-25
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Electrical properties of groove-textured solar, cells using C1F3 gas2007

    • Author(s)
      H., Sano, S., Narita, T., Momma, Y., Saito
    • Organizer
      2007 Annual Meet. Mat. Sci. Soc. Japan
    • Place of Presentation
      Tokyo
    • Year and Date
      2007-05-25
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Optical properties of groove- and honeycomb-textured silicon surfaces using chlorine trifluoride gas2007

    • Author(s)
      S., Narita, H., Sano, T., Momma, Y., Saito
    • Organizer
      The 54th Spring Meet., The Jpn. Soc. of Appl. Phys. and Rel. Soc
    • Place of Presentation
      Sagamihara
    • Year and Date
      2007-03-27
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] プラズマレスドライエッチングによるシリコン表面処理とその赤外線センサ作製への応用2007

    • Author(s)
      齋藤 洋司
    • Organizer
      日本赤外線学会第4回赤外放射の応用関連学会等年会
    • Place of Presentation
      東京大学
    • Year and Date
      2007-02-07
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Surface treatments of silicon and their application to fabrication process of photo-electroric devices by plasmaless dry etching2007

    • Author(s)
      Y., Saito
    • Organizer
      The 4th annual meeting of the Societies Related to Infrared Radiation
    • Place of Presentation
      Tokyo
    • Year and Date
      2007-02-07
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 三フッ化塩素処理したシリコン基板表面の反射率に与える熱プロセスの影響の検討2006

    • Author(s)
      成田, 山崎, 門馬, 齋藤
    • Organizer
      第67回応用物理学会学術講演会
    • Place of Presentation
      立命館大学
    • Year and Date
      2006-09-01
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Influence of heat treatments on reflectance of textured surfaces of silicon substrates2006

    • Author(s)
      S., Narita, H., Yamazaki, T., Momma, Y., Saito
    • Organizer
      The 67th Autumn Meet., The Jpn. Soc. of Appl. Phys
    • Place of Presentation
      Kusatsu
    • Year and Date
      2006-09-01
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 三フッ化塩素ガスを用いた微小ハニカム状テクスチャ処理結晶系シリコン太陽電池の作製2006

    • Author(s)
      山崎 英雅, 小菅 雄史, 土橋 善之助, 門馬 正, 齋藤 洋司
    • Organizer
      日本材料科学会平成18年度学術大会講演会
    • Place of Presentation
      東京工業大学
    • Year and Date
      2006-05-26
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 高周波スパッタにより結晶系シリコン上に堆積させた酸窒化反射防止膜の評価2006

    • Author(s)
      上戸 隆行, 山崎 英雅, 門馬 正, 齋藤 洋司
    • Organizer
      日本材料科学会平成18年度学術大会講演会
    • Place of Presentation
      東京工業大学
    • Year and Date
      2006-05-26
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 三フッ化塩素処理したシリコン基板表面の反射率に与える熱プロセスの影響の検討2006

    • Author(s)
      成田 昌平, 山崎 英雅, 門馬 正, 齋藤 洋司
    • Organizer
      日本材料科学会平成18年度学術大会講演会
    • Place of Presentation
      東京工業大学
    • Year and Date
      2006-05-26
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Fabrication of fine honeycomb-textured solar cells using C1F3 gas2006

    • Author(s)
      H., Yamazaki, T., Kosuge, Y., Tsuchihashi, T., Momma, Y., Saito
    • Organizer
      2006 Annual Meet. Mat. Sci. Soc. Japan
    • Place of Presentation
      Tokyo
    • Year and Date
      2006-05-26
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] A Study on oxynitride anti-reflection films deposited onto crystalline silicon by a high frequency sputtering method2006

    • Author(s)
      T., Uendo, H., Yamazaki, S., Narita, T., Momma, Y., Saito
    • Organizer
      2006 Annual Meet. Mat. Sci. Soc. Japan
    • Place of Presentation
      Tokyo
    • Year and Date
      2006-05-26
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Influence of annealing on reflectance of textured surfaces of silicon substrates2006

    • Author(s)
      S., Narita, H., Yamazaki, T., Momma, Y., Saito
    • Organizer
      2006 Annual Meet. Mat. Sci. Soc. Japan
    • Place of Presentation
      Tokyo
    • Year and Date
      2006-05-26
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Optical properties of crystalline silicon surfaces textured by spontaneous dry etching with chlorine trifluoride gas2006

    • Author(s)
      Y.Saito, H.Yamazaki, T.Kosuge
    • Organizer
      2006 Material Research Society Spring Meeting
    • Place of Presentation
      San Francisco,USA
    • Year and Date
      2006-04-19
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Optical properties of crystalline silicon surfaces textured by spontaneous dry etching with chlorine trifluoride gas2006

    • Author(s)
      Y., Saito, H., Yamazaki, T., Kosuge
    • Organizer
      2006 Material Research Society Spring Meeting
    • Place of Presentation
      San Francisco
    • Year and Date
      2006-04-19
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 三フッ化塩素ガスを用いてハニカム構造にテクスチャ化したシリコン表面の光学的評価2006

    • Author(s)
      小菅 雄史, 土橋 善之助, 門馬 正, 齋藤 洋司
    • Organizer
      第53回応用物理学関係連合講演会
    • Place of Presentation
      武蔵工業大学
    • Year and Date
      2006-03-26
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 酸窒化膜を有する三フッ化塩素テクスチャ結晶系シリコン太陽電池の光学特性2006

    • Author(s)
      上戸 隆行, 成田 昌平, 山崎 英雅, 門馬 正, 齋藤 洋司
    • Organizer
      第53回応用物理学関係連合講演会
    • Place of Presentation
      武蔵工業大学
    • Year and Date
      2006-03-26
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Optical properties of honeycomb-textured silicon surfaces using chlorine trifluoride gas2006

    • Author(s)
      T., Kosuge, Y., Tsuchihashi, T., Momma, Y., Saito
    • Organizer
      The 53th Spring Meet., The Jpn. Soc. of Appl. Phys. and Rel. Soc
    • Place of Presentation
      Tokyo
    • Year and Date
      2006-03-26
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Optical properties of textured solar cells with silicon oxynitride films2006

    • Author(s)
      T., Uendo, H., Yamazaki, S., Narita, T., Momma, Y., Saito
    • Organizer
      The 53th Spring Meet., The Jpn. Soc. of Appl. Phys. and Rel. Soc
    • Place of Presentation
      Tokyo
    • Year and Date
      2006-03-26
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary

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Published: 2005-04-01   Modified: 2016-04-21  

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