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Fabrication and analysis of optical properties in spherical microcavity using nc-Si dispersed films

Research Project

Project/Area Number 17560306
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionKanazawa University

Principal Investigator

INOKUMA Takao  Kanazawa University, Graduate School of Natural Science and Technology, Associate Professor, 自然科学研究科, 助教授 (50221784)

Project Period (FY) 2005 – 2006
Project Status Completed (Fiscal Year 2006)
Budget Amount *help
¥3,500,000 (Direct Cost: ¥3,500,000)
Fiscal Year 2006: ¥1,100,000 (Direct Cost: ¥1,100,000)
Fiscal Year 2005: ¥2,400,000 (Direct Cost: ¥2,400,000)
Keywordsquantum dot / nano-materials / applied optics / microcavity / 量子コンピュータ
Research Abstract

This research work aimed to establish a novel fabrication method of microsphere optical cavity including silicon nanocrystallites. Then their optical properties are analyzed from a viewpoint of cavity quantum electrodynamic theory with respect to an interaction between spontaneously emitted light and microcavity.
Amorphous (α-)SiOx and α-SiO_2 films as bases of samples are deposited using a radio-frequency sputtering method and a thermal oxidation method, respectively. Tungsten substrates are used in order to ensure heat resistance. The thickness of the films were 5μm. The sputtering target was SiO_2 disc with Si tips on it. The composition of the films deposited was controlled by varying the number of Si tips. An electron-beam drawing system was used for microfabrication of the films into island-like patterns. Circular patterns of chromium with 0.5-20μm in diameter were formed on the film by a lift-off process. The film was then etched by CF_4-plasma reactive ion etching. The columner patterns fabricated were checked by scanning electron microscope. Those columner islands of SiOx fims were heated up to around softening point, that is, 1200-1600℃. The samples inserted in a Mo cell were in an atmosphere of Ar gas flow in order to avoid oxidation. The optimal condition of heating was 2 minutes at 1600℃. Under this condition, the columner islands were successfully deformed into hemispherical shapes. However, analysis of their optical properties was difficult at that point in time.

Report

(3 results)
  • 2006 Annual Research Report   Final Research Report Summary
  • 2005 Annual Research Report
  • Research Products

    (8 results)

All 2006 2005

All Journal Article (8 results)

  • [Journal Article] Structural and photo-luminescence Properties of nanocrystalline silicon films deposited at low temperature by plasma-enhanced chemical vapor deposition2006

    • Author(s)
      A.M.Ali
    • Journal Title

      Applied Surface Science 253

      Pages: 1198-1204

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] Roles of SiH_4 and SiF_4 in growth and structural changes of poly-Sifilms2006

    • Author(s)
      A.H.Adel
    • Journal Title

      Surface Science 600

      Pages: 4418-4425

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Structural and photo-luminescence Properties of nanocrystalline silicon films deposited at low temperature by plasma-enhanced chemical vapor deposition2006

    • Author(s)
      Atif Mossad Ali, Takao Inokuma, Seiichi Hasegawa
    • Journal Title

      Applied Surface Science Vol.253

      Pages: 1198-1204

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Roles of SiH4 and SiF4 in growth and structural changes of poly-Si films2006

    • Author(s)
      Azadeh Haddad Adel, Takao Inokuma, Yoshihiro Kurata, Seiichi Hasegawa
    • Journal Title

      Surface Science Vol. 600

      Pages: 4418-4425

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Roles of SiH_4 and SiF_4 in growth and structural changes of poly-Si films2006

    • Author(s)
      A.H.Adel
    • Journal Title

      Surface Science 600

      Pages: 4418-4425

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Characterization of Structure and role of different textures in polycrystalline Si films2005

    • Author(s)
      A.H.Adel
    • Journal Title

      Journal of Non-crystalline Solids 351

      Pages: 2107-2114

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Characterization of structure and role of different textures in polycrystalline Si films2005

    • Author(s)
      Azadeh Haddad Adel, Takao Inokuma, Yoshihiro Kurata, Seiichi Hasegawa
    • Journal Title

      Journal of Non-crystalline Solids Vol. 351

      Pages: 2107-2114

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Characterization of structure and role of different textures in polycrystalline Si films2005

    • Author(s)
      Azadeh Haddad Adel
    • Journal Title

      Journal of Non-Crystalline Solids 351

      Pages: 2107-2114

    • Related Report
      2005 Annual Research Report

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Published: 2005-04-01   Modified: 2016-04-21  

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