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Development of magnetostrictive foil with nano multilayer-hetero magnetic domain driven by lower magnetic field

Research Project

Project/Area Number 17560581
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Physical properties of metals
Research InstitutionHirosaki University

Principal Investigator

OKAZAKI Teiko  Hirosaki University, Hirosaki University, Graduate school of Science and Technology, Professer (10003328)

Co-Investigator(Kenkyū-buntansha) FURUYA Yasubumi  Hirosaki University, Graduate school of Science and Technology, Professer (20133051)
ONO Tosiro  Hirosaki University, Graduate school of Science and Technology, Professer (30374812)
Project Period (FY) 2005 – 2007
Project Status Completed (Fiscal Year 2007)
Budget Amount *help
¥3,750,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥150,000)
Fiscal Year 2007: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2006: ¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 2005: ¥2,600,000 (Direct Cost: ¥2,600,000)
Keywordsmagnetostriction / Bimorph multi-layers / actuator / micro-gas-valve / lower magnetic field / バイモルフタイプ / 振動型アクチュエータ素子 / マイクロバルブ / 複合膜・物性 / ナノ多層膜 / 振動型アクチュエータ / マイクロデバイス / 複合材料・物性
Research Abstract

1. Giant magnetostrictive Fe-Ga alloys are expected as actuator/sensor materials with high respective velocity and huge stress created by the magnetostriction. In order to develop magnetostrictive material induced by low magnetic field, we investigated magnetostrictive (positive magnetostriction / negative magnetostriction) bimorph-layers, that is, Fe_<80>Ga_<20> ribbon (146 μm)/ Ni (14 μm) film by magnetron sputtering system. The Fe_<80>Ga_<20> ribbon was prepared by rapidly solidification. Magnetostrictive property of the cantilever-type foil was measured using an optical lever method. Displacement of the upper part of the foil with length of 22 mm was 530 pin under low steady magnetic field of 40 kAm^<-1> and exhibits.- little hysteresis. These magnetostrictive properties also are maintained under low frequency of alternating magnetic field. Moreover, the displacement of the foil at the mechanical resonance frequency exhibits a peak and reaches to 2.0 mm at week magnetic field of 50 Oe.
2. The, magnetostrictive bimorph-layers was applied to micro-gas valve. These cantilever-type actuators can be bent by applying magnetic field parallel to length. A point of the actuator displaced about 300 μm under 500 Oe. The opening and closing action of a gas-valve consisted of magnetostrictive actuator can be controlled remotely by magnetic fields. Flow rate of gas can be driven 50 to 0 cc min^<-1> upon increasing magnetic field to 3500e. Response time after applying of magnetic field is below 0.15 sec, it is fast:

Report

(4 results)
  • 2007 Annual Research Report   Final Research Report Summary
  • 2006 Annual Research Report
  • 2005 Annual Research Report
  • Research Products

    (59 results)

All 2008 2007 2006 2005

All Journal Article (35 results) (of which Peer Reviewed: 13 results) Presentation (15 results) Book (5 results) Patent(Industrial Property Rights) (4 results)

  • [Journal Article] Superelastic Properties of Rapidly Solidified Fe-Pd Ribbons2008

    • Author(s)
      T. Okazaki, Y. Iwai, Y. Furuya
    • Journal Title

      Mater. Trans. JIM. 49

      Pages: 360-364

    • NAID

      10021144335

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Superelastic Properties of Rapidly Solidified Fe-Pd Ribbons2008

    • Author(s)
      T. Okazaki, et. al.
    • Journal Title

      Mater. Trans. JIM 49

      Pages: 360-364

    • NAID

      10021144335

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Superelastic Properties of Rapidly Solidified Fe-Pd Ribbons2008

    • Author(s)
      Teiko Okazaki
    • Journal Title

      Mater. Trans. 49

      Pages: 360-364

    • NAID

      10021144335

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Magnetostrictive Properties of Fe-Ga/Ni Bimorph Layers2007

    • Author(s)
      T. Okazaki, M. Tanaka, N. Okanisi, Y. Furuya
    • Journal Title

      Mater. Trans. JIM. 48

      Pages: 117-120

    • NAID

      10018508441

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Magnetostrictive Properties of Fe-Ga/Ni Bimorph Layers2007

    • Author(s)
      T. Okazaki, et. al.
    • Journal Title

      Mater. Trans. JIM. 48

      Pages: 117-120

    • NAID

      10018508441

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Fe基金属ガラス(FeCoZrMoWB)合金のガラス化温度(Tg)での変形加工度に伴う磁気特性変化2007

    • Author(s)
      橋本 賢治
    • Journal Title

      日本金属学会誌 71

      Pages: 553-558

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Magnetostrictive Properties of Fe-Ga/Ni Bimorph Layers2007

    • Author(s)
      Teiko Okazaki
    • Journal Title

      Mater. Trans. JIM. 48

      Pages: 117-120

    • NAID

      10018508441

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Two-Way Shape Memory Effect and Micromachine of Rapid-solidified Ferromagnetic Fe-Pd ribbon2006

    • Author(s)
      H. Tomita, T. Okazaki, Y. Furuya
    • Journal Title

      Mater. Trans. JIM 47

      Pages: 615-618

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Bimorph-type Magnetostrictive Actuator/Sensor Thin Films2006

    • Author(s)
      T. Okazaki, N. Okanisi, Y. Miura, Y. Furuya
    • Journal Title

      Mater. Res. Soc. Symp. Proc. 888

      Pages: 87-92

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Multi-functinal Surface Acoustic Wave Sensor for Monitoring Environmental and Structural Condition2006

    • Author(s)
      Y. Furuya, T. Kon, T. Okazaki Y. Saegusa, T. Nomura
    • Journal Title

      Proc. of SPIE 6172

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Fabrication of multiferroic actuator material by combining superelastic TiNi filler and a magntostrictive Ni matrix2006

    • Author(s)
      M.Hasegawa, T.Asano, K. Hasimoto, T.Okazaki, Y.Furuya
    • Journal Title

      IOP electronic journals, Smart Mater. Struct. 15

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Phase transformatin behavior and microstructure of rapidly solid ification Co-Ni-Ga alloys2006

    • Author(s)
      Y. Kishi, Z. Yajima, K. Shimizu, T. Okazaki, F. Furuya
    • Journal Title

      Materials science & Engineering A 438-440

      Pages: 965-969

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Two-Way Shape Memory Effect and Micromashine of Rapid-solidified Ferromagnetic Fe-Pd ribbon2006

    • Author(s)
      H. Tomita, et. al.
    • Journal Title

      Mater. Trans. JIM. 47

      Pages: 615-618

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Bimorph-typeMagnetostrictive Actuator/Sensor Thin Films2006

    • Author(s)
      T. Okazaki
    • Journal Title

      Mater. Res. Soc. Symp. Proc 888

      Pages: 87-92

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Multi-functinal Surface Acoustic Wave Sensor for Monitoring Environmental and Structural Condition2006

    • Author(s)
      Y. Furuya, et. al.
    • Journal Title

      Proc. of SPIE 6172

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Fabrication of multiferroic actuator material by combining superelastic TiNi filler and a magntostrictive Ni matrix2006

    • Author(s)
      M. Hasegawa, et. al.
    • Journal Title

      IOP electronic journals, Smart Mater. Struct 15

      Pages: 124-128

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Phase transformatin behavior and microstructure of rapidly solidification Co-Ni-Ga alloys2006

    • Author(s)
      Y. Kishi, et. al.
    • Journal Title

      Materials science & Engineering A 438-440

      Pages: 965-969

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] SINJIWAIGOUKINN NO SADOUGENNRI2006

    • Author(s)
      T. Okazaki, et. al.
    • Journal Title

      KINZOKU 76

      Pages: 126-126

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Next-Generation Actuator Materials and Devices2006

    • Author(s)
      T. Okazaki, et. al.
    • Journal Title

      SIEMUSI SYUPPN

      Pages: 384-384

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Bimorph-type Magnetostrictive Actuator/Sensor Thin Films2006

    • Author(s)
      Teiko Okazaki
    • Journal Title

      Mater. Res. Soc. Symp. Proc. 888

      Pages: 87-92

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Multi-functinal Surface Acoustic Wave Sensor for Monitoring nvironmental and Structural Condition2006

    • Author(s)
      Yasubumi Furuya
    • Journal Title

      Proc. of SPIE 6172

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Fabrication of multiferroic actuator material by combining superelastic TiNi filler and a magntostrictive Ni matrix2006

    • Author(s)
      Masanobu Hasegawa
    • Journal Title

      IOP electronic journals, Smart Mater. Struct. 15

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Phase transformatin behavior and microstructure of rapidly solidification Co-Ni-Ga alloys2006

    • Author(s)
      Yoichi Kishi
    • Journal Title

      Materials science & Engineering A 438-440

      Pages: 965-969

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Two-Way Shape Memory Effect and Micromachine of Rapidly Solidified Ferromagnetic Fe-Pd Ribbon2006

    • Author(s)
      Harunobu Tomita
    • Journal Title

      Mater.Trans. 47(In press)

    • Related Report
      2005 Annual Research Report
  • [Journal Article] 急冷凝固Co-Ni薄帯の応力誘起FCC-FCTマルテンサイト相変態2005

    • Author(s)
      上野孝史, 久保田健, 岡崎禎子, 古屋泰文
    • Journal Title

      日本金属学会誌 69

      Pages: 643-648

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Magnetostrictive of Poly-crystalline Strong-Textured Fe-17at%Ga Laminates2005

    • Author(s)
      C. Saito, Y. Furuya, T. Okazaki, M. Omori
    • Journal Title

      Mater. Trans. JIM 46

      Pages: 1933-1937

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Development of Magnetostrictive Fe-Ga and Fe-Pd Thin Film,2005

    • Author(s)
      T. Okazaki, S. Watanabe, N. Okanisi, T. Ono, Y.Furuya
    • Journal Title

      Mater. Res. Soc. Symp. Proc. 855E

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Texture Observations of Ferromagnetic Shape Memory of Nanostructure FE-Pd Alloy by Laser and Electronic Microscope2005

    • Author(s)
      T. Okazaki, et.al
    • Journal Title

      Procc. of The Fourth International Conference on Intelligent Processing and Manufacturing of Materials, Sendai, Japan

      Pages: 495-502

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Stress-induced FCC-HCP Martensite Transfoemation of Rapidly-solidified Co-Ni Foil2005

    • Author(s)
      T. Ueno, et. al.
    • Journal Title

      J. Japan Inst. Metal 69

      Pages: 643-648

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Magnetostrictive of Poly-crystalline Strong-Textured Fe-17at% Ga Lamunates2005

    • Author(s)
      C. Saito, et. al.
    • Journal Title

      Mater. Trans. JIM. 46

      Pages: 1933-1937

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Development of Magnetostrictive Fe-Ga and Fe-Pd Thin Film2005

    • Author(s)
      T. Okazaki, et. al.
    • Journal Title

      Mater. Res. Soc. Symp. Proc. 855E

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Texture Observations of Ferromagnetic Shape Memory of Nanostructure FE-Pd Alloy by Laser and Electronic Microscope2005

    • Author(s)
      T. Okazaki, et. al.
    • Journal Title

      Procc. of The Fourth International Conference on Intelligent Processing and Manufacturing of Materials, Sendai, Japan

      Pages: 495-502

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Development of Magnetostrictive Fe-Ga and Fe-Pd Thin Films2005

    • Author(s)
      Teiko Okazaki
    • Journal Title

      Mater.Res.Soc.Symp.Proc. 855E

    • Related Report
      2005 Annual Research Report
  • [Journal Article] 急冷凝固Co-Ni薄帯の応力誘起FCC-FCTマルテンサイト相変態2005

    • Author(s)
      上野 孝史
    • Journal Title

      日本金属学会誌 69

      Pages: 643-648

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Magnetostriction of Polycrystalline Strong-Textured Fe-17at%Ga Laminates2005

    • Author(s)
      Cihiro Saito
    • Journal Title

      Mater.Trans. 46

      Pages: 1933-1937

    • Related Report
      2005 Annual Research Report
  • [Presentation] バイモルフ磁歪アクチュエータ素子を用いたマイクロバルブの試作2007

    • Author(s)
      岡崎 禎子
    • Organizer
      日本金属学会秋季大会
    • Place of Presentation
      岐阜大学
    • Year and Date
      2007-09-19
    • Related Report
      2007 Annual Research Report
  • [Presentation] Fe-Ga/Fe-Pd磁歪多層膜化によるセンサ/アクチュエータ素子の開発2007

    • Author(s)
      佐藤 俊亮
    • Organizer
      日本金属学会秋季大会
    • Place of Presentation
      岐阜大学
    • Year and Date
      2007-09-19
    • Related Report
      2007 Annual Research Report
  • [Presentation] Crystallity control multi-layered films with polycrystalline FeCo and amorphous SiO_22007

    • Author(s)
      Masato Yegashi
    • Organizer
      THE NINTH INTERNATIONAL SYMPOSIUM ON SPUTTERING & PLASUMA PROCESSES
    • Place of Presentation
      Kanazawa, Japan
    • Year and Date
      2007-06-06
    • Related Report
      2007 Annual Research Report
  • [Presentation] Magnetic-field Driverl Micromachine Applying Multi-functional Fe-Pd2007

    • Author(s)
      T. Obazaki and Y. Furuya
    • Organizer
      World Forum on Smart Materials and Smart Structures Technology
    • Place of Presentation
      Nanjing, China,
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Magnetic-field Driven Micromachine Applying Multi-functional Fe-Pd2007

    • Author(s)
      T. Okazaki and Y. Furuya
    • Organizer
      World Forum on Smart Materials and Smart Structures Technology
    • Place of Presentation
      Nanjing, China
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] Multi-functional Surface Acoustic Wave Sensor for Monitoring Environmental and Structural Condition2006

    • Author(s)
      Y. Furuya, T. Kon, T. Okazaki, Y. Saigusa and T. Nomura
    • Organizer
      SPIE 13th Annual Symposium
    • Place of Presentation
      San Diego, California USA
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Giant Magnetostrictive Actuator/Sensor Thin Films2006

    • Author(s)
      T. Okazaki, Y. Furuya, I. Takeuchi and M. Wuttig
    • Organizer
      7th Japan-France Joint Seminar on Intelligent Materials and Systems
    • Place of Presentation
      Nice, France,
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Multi-functinal Surface Acoustic Wave Sensor for Monitoring nvironmental and Structural Condition2006

    • Author(s)
      Y. Furuya, ed. al.
    • Organizer
      SPIE 13^<th> Annual Symposium, San Diego
    • Place of Presentation
      California USA
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Giant Magnetostrictive Actuator/Sensor Thin Films2006

    • Author(s)
      T. Okazaki, ed. al.
    • Organizer
      7^<th> Japan-France Joint Seminar on Intelligane Materials and Systems
    • Place of Presentation
      Nice, France
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Bimorph-type Magnetostrictive Actuator/Sensor Thin Film2005

    • Author(s)
      T. Okazaki, N. Okanisi, Y. Miura, M. Michigami, Y. Furuya, I. Takeuchi and M. Wutting
    • Organizer
      Material Research Society, FALL MEETING
    • Place of Presentation
      Boston, USA
    • Year and Date
      2005-11-29
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Bimorph-type Magnetostrictive Actuator/Sensor Thin Film2005

    • Author(s)
      T. Okazaki, ed. al.
    • Organizer
      Material Research Society, FALL MEETING
    • Place of Presentation
      Boston. USA
    • Year and Date
      2005-11-29
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development Multi-ferroic Actuator/Sensor Material and Device for Intel lligent/Smart Technology2005

    • Author(s)
      Y. Furuya and T. Okazaki
    • Organizer
      Material Research Society, FALL MEETING
    • Place of Presentation
      Boston, USA
    • Year and Date
      2005-11-27
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development Multi-ferroic Actuator/Sensor Material and Device for Intellligent/Smart Technology2005

    • Author(s)
      Y. Furuya and T. Okazaki
    • Organizer
      Material Research Society, FALL MEETING
    • Place of Presentation
      Boston, USA
    • Year and Date
      2005-11-27
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development Multi-ferroic Actuator/Sensor Material and Device for Intel lligent/Smart Technology2005

    • Author(s)
      T. Okazaki and Y. Furuya
    • Organizer
      Japan-France Joint Seminar on Intelligent Materials and International Symposium on Smart Materials
    • Place of Presentation
      Tokyo, Japan
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development Multi-ferroic Actuator/Sensor Material and Device for Intellligent/Smart Technology2005

    • Author(s)
      T. Okazaki and Y. Furuya
    • Organizer
      Japan-France Joint Seminar on Intelligent Materials and International Symposium on Smart Materials
    • Place of Presentation
      Tokyo, Japan
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Book] 金属2006

    • Author(s)
      岡崎禎子, 冨田晴伸, 古屋泰文
    • Total Pages
      126
    • Publisher
      アグネ技術センター
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Book] 未来型アクチュエータ材料・デバイス2006

    • Author(s)
      岡崎禎子, 岡西紀昌, 古屋泰文
    • Total Pages
      384
    • Publisher
      シーエスシー出版
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Book] Next-Generation Actuator Materials and Devices2006

    • Author(s)
      T. Okazaki, et. al.
    • Total Pages
      384
    • Publisher
      SIEMUSI SYUPPN
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Book] 未来型アクチュエータ材料・デバイス2006

    • Author(s)
      古屋 泰文
    • Total Pages
      384
    • Publisher
      シーエムシー出版
    • Related Report
      2006 Annual Research Report
  • [Book] 金属2006

    • Author(s)
      岡崎 禎子
    • Total Pages
      4
    • Publisher
      アグネ技術センター
    • Related Report
      2005 Annual Research Report
  • [Patent(Industrial Property Rights)] 磁歪式ガスバルブ2007

    • Inventor(s)
      斉藤千尋 今泉伸夫 岡崎禎子 古屋泰文
    • Industrial Property Rights Holder
      並木精密宝石(株), 弘前大学
    • Filing Date
      2007-03-01
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 磁歪複合合金2006

    • Inventor(s)
      古屋泰文 岡崎禎子 今泉伸夫 中村元一 宮崎伸幸 斉藤千尋
    • Industrial Property Rights Holder
      並木精密宝石(株)
    • Filing Date
      2006-02-09
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Patent(Industrial Property Rights)] マイクロマシン2005

    • Inventor(s)
      古屋泰文 冨田晴伸 岡崎禎子
    • Industrial Property Rights Holder
      弘前大学
    • Filing Date
      2005-08-01
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Patent(Industrial Property Rights)] マイクロマシン2005

    • Inventor(s)
      古屋 泰文, 冨田 晴伸, 岡崎 禎子
    • Industrial Property Rights Holder
      国立大学法人弘前大学
    • Industrial Property Number
      2005-023025
    • Filing Date
      2005-08-19
    • Related Report
      2005 Annual Research Report

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Published: 2005-04-01   Modified: 2016-04-21  

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