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Porous Silicon Formation by Means of Metal Particle Enhanced Etching and Its Structure Control

Research Project

Project/Area Number 17560638
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Material processing/treatments
Research InstitutionUNIVERSITY OF HYOGO

Principal Investigator

YAE Shinji  University of Hyogo, Graduate School of Engineering, Associate Professor, 大学院工学研究科, 准教授 (00239716)

Co-Investigator(Kenkyū-buntansha) MATSUDA Hitoshi  University of Hyogo, Graduate School of Engineering, Professor, 大学院工学研究科, 教授 (60118015)
FUKUMURO Naoki  University of Hyogo, Graduate School of Engineering, Research Associate, 大学院工学研究科, 助教 (10347528)
Project Period (FY) 2005 – 2006
Project Status Completed (Fiscal Year 2006)
Budget Amount *help
¥1,400,000 (Direct Cost: ¥1,400,000)
Fiscal Year 2006: ¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 2005: ¥900,000 (Direct Cost: ¥900,000)
KeywordsPorous Silicon / Ultrafine Metal Particles / Photoelectrochemistr / Electroless Plating / Patterning / Wet-Process / Surface Treatment / 表面処理
Research Abstract

(1) We investigate the electroless displacement deposition of metal particles (Pt, Rh, Pd, Cu, Ag, and Au) onto n-Si wafers from a metal-salt solution containing HF. The particle density of metals varies widely, depending on the kind of metal. Deposited metals can be classified into two types of nucleation behavior. One consists of the platinum group elements, which display lower particle densities than elements of the other group and depend on the type of pretreatment of the n-Si wafer. The second group consists of the copper group elements, which display higher particle density than the first group and are independent of pretreatment. The size of deposited particles decreases from hundreds nm to ten nm as the particle density increases.
(2) Metal-particle-enhanced HF etching of Si can produce micrometer-sized macroporous and nanometer-sized microporous Si by simple immersion of metal-particle-modified Si in a HF aqueous solution without a bias or a particular oxidizing agent. The etching rate of Si and the structure of produced porous Si are changed by the dissolved oxygen concentration of the HF solution and the photoillumination intensity on Si during etching. For n-Si, porous layer is only formed on the metal particle deposited area of the wafers. Both macro and microporous layers are formed on n-Si wafers modified with Pt, gold, or silver particles. Pd particles show a unique behavior in which the etching of n-Si proceeds at a high rate accompanying hydrogen evolution under dark conditions and the absence of dissolved oxygen. For Pt-particle-deposited p-Si, porous layers are formed by HF immersion. Under continuous photoillumination, porous Si is formed mainly on the non-photoirradiation side surface of p-Si, as opposed to the photoirradiation side of n-Si.

Report

(3 results)
  • 2006 Annual Research Report   Final Research Report Summary
  • 2005 Annual Research Report
  • Research Products

    (21 results)

All 2007 2006 2005

All Journal Article (21 results)

  • [Journal Article] Solar to chemical conversion using metal nanoparticle modified microcrystalline silicon thin film photoelectrode2007

    • Author(s)
      S.Yae, N.Fukumuro, Y.Nakato, H.Matsuda 他6名
    • Journal Title

      Sol. Energy Mater. Sol. Cells 91・4

      Pages: 224-229

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Structure of Porous Si Formed by Metal-Particle (Pt, Pd) Enhanced HF Etching2007

    • Author(s)
      Shinji Yae, Naoki Fukumuro, Hitoshi Matsuda 他3名
    • Journal Title

      Trans. Mater. Res. Soc. Jpn. (印刷中)

    • NAID

      130007922775

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Nucleation behavior in electroless displacement deposition of metals on silicon from hydrofluoric acid solutions2007

    • Author(s)
      Shinji Yae, Naoki Fukumuro, Hitoshi Matsud 他3名
    • Journal Title

      Electrochimica Acta (印刷中)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Solar to chemical conversion using metal nanoparticle modified microcrystalline silicon thin film photoelectrode2007

    • Author(s)
      S.Yae, N.Fukumuro, H.Matsuda et al.
    • Journal Title

      Sol. Energy Mater. Sol. Cells 91-4

      Pages: 224-229

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Structure of Porous Si Formed by Metal-particle (Pt, Pd) Enhanced HF Etching2007

    • Author(s)
      S.Yae, N.Fukumuro, H.Matsuda et al.
    • Journal Title

      Trans. Mater. Res. Soc. Jpn. (in press)

    • NAID

      130007922775

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Nucleation behavior in electroless displacement deposition of metals on silicon from hydrofluoric acid solutions2007

    • Author(s)
      S.Yae, N.Fukumuro, H.Matsuda et al.
    • Journal Title

      Electrochimica Acta (in press)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Solar to chemical conversion using metal nanoparticle modified microcrystalline silicon thin film photoelectrode2007

    • Author(s)
      S.Yae, T.Kobayashi, M.Abe, N.Nasu, N.Fukumuro, S.Ogawa, N.Yoshida, S.Nonomura, Y.Nakato, H.Matsuda
    • Journal Title

      Sol. Energy Mater. Sol. Cells 91・4

      Pages: 224-229

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Structure of Porous Formed by Metal-Particle (Pt, Pd) Enhanced HF Etching2007

    • Author(s)
      Shinji Yae, Makoto Abe, Tatsunori Kawagishi, Kentarou Suzuki, Naoki Fukumuro, Hitoshi Matsuda
    • Journal Title

      Trans. Mater. Res. Soc.Jpn. (印刷中)

    • Related Report
      2006 Annual Research Report
  • [Journal Article] 太陽光水分解・湿式太陽電池2006

    • Author(s)
      八重真治, 福室直樹, 松田 均
    • Journal Title

      マテリアルインテグレーション 19・2

      Pages: 21-25

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary 2005 Annual Research Report
  • [Journal Article] Antireflective Porous Layer Formation on Multicrystalline Silicon by Metal Particle Enhanced HF Etching2006

    • Author(s)
      S.Yae, N.Fukumuro, H.Matsuda他2名
    • Journal Title

      Sol. Energy 80・6

      Pages: 701-706

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Structural Change in Porous Si by Photoillumination During Metal Particle Enhanced Etching2006

    • Author(s)
      S.Yae, N.Fukumuro, H.Matsuda他2名
    • Journal Title

      ECS Proceedings Vol. 2004-19

      Pages: 141-146

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Solar water splitting using photoelectrochemical solar cells2006

    • Author(s)
      Shinji Yae, Naoki Fukumuro, Hitoshi Matsuda
    • Journal Title

      Material Integration 19-2

      Pages: 21-25

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Antireflective Porous Layer Formation on Multicrystalline Silicon by Metal Particle Enhanced HF Etching2006

    • Author(s)
      S.Yae, N.Fukumuro, H.Matsuda et al.
    • Journal Title

      Sol. Energy 80-6

      Pages: 701-706

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Structural Change in Porous Si by Photoillumination During Metal Particle Enhanced Etching2006

    • Author(s)
      S.Yae, N.Fukumuro, H.Matsuda et al.
    • Journal Title

      ECS Proceedings Vol., 2004-19

      Pages: 141-146

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Antireflective Porous Layer Formation on Multicrystalline Silicon by Metal Particle Enhanced HF Etching2006

    • Author(s)
      S.Yae, T.Kobayashi, T.Kawagishi, N.Fukumuro, H.Matsuda
    • Journal Title

      Sol. Energy 80・6

      Pages: 701-706

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Structural Change in Porous Si by Photoillumination During Metal Particle Enhanced Etching2006

    • Author(s)
      S.Yae, T.Kobayashi, T.Kawagishi, N.Fukumuro, H.Matsuda
    • Journal Title

      ECS Proceedings Vol. 2004-19

      Pages: 141-146

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Porous Silicon Formation by HF Chemical Etching for Antireflection of Solar Cells2005

    • Author(s)
      S.Yae, H.Tanaka, T.Kobayashi, N.Fukumuro, H.Matsuda
    • Journal Title

      Phys. Stat. Sol. (c) 2・9

      Pages: 3476-3480

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary 2005 Annual Research Report
  • [Journal Article] Electroless Deposition of Pure Nickel Films from a Simple Solution Consisting of Nickel Acetate and Hydrazine2005

    • Author(s)
      S.Yae, K.Ito, T.Hamada, N.Fukumuro, H.Matsuda
    • Journal Title

      Plat. Surf. Finish. 92・4

      Pages: 58-62

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Porous Silicon Formation by HF Chemical Etching for Antireflection of Solar Cells2005

    • Author(s)
      S.Yae, H.Tanaka, T.Kobayashi, N.Fukumuro, H.Matsuda
    • Journal Title

      Phys. Stat. Sol. (c) 2-9

      Pages: 3476-3480

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Electroless Deposition of Pure Nickel Films from a Simple Solution Consisting of Nickel Acetate and Hydrazine Plat.2005

    • Author(s)
      S.Yae, K.Ito, T.Hamada, N.Fukumuro, H.Matsuda
    • Journal Title

      Surf. Finish. 92-4

      Pages: 58-62

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Electroless Deposition of Pure Nickel Films from a Simple Solution Consisting of Nickel Acetate and Hydrazine2005

    • Author(s)
      S.Yae, K.Ito, T.Hamada, N.Fukumuro, H.Matsuda
    • Journal Title

      Plat. Surf. Finish 92・4

      Pages: 58-62

    • Related Report
      2005 Annual Research Report

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Published: 2005-04-01   Modified: 2016-04-21  

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