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超音速分子ビームによる機能性極薄膜作成プロセスの研究

Research Project

Project/Area Number 17656239
Research Category

Grant-in-Aid for Exploratory Research

Allocation TypeSingle-year Grants
Research Field Material processing/treatments
Research InstitutionJapan Atomic Energy Agency

Principal Investigator

吉越 章隆  Japan Atomic Energy Agency, 量子ビーム応用研究部門, 研究副主幹 (00283490)

Co-Investigator(Kenkyū-buntansha) 寺岡 有殿  独立行政法人日本原子力研究開発機構, 量子ビーム応用研究部門, 研究主幹 (10343922)
盛谷 浩右  独立行政法人日本原子力研究開発機構, 量子ビーム応用研究部門, 博士研究員 (20391279)
Project Period (FY) 2005 – 2007
Project Status Completed (Fiscal Year 2007)
Budget Amount *help
¥3,300,000 (Direct Cost: ¥3,300,000)
Fiscal Year 2007: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 2006: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 2005: ¥1,500,000 (Direct Cost: ¥1,500,000)
Keywords超音速分子線 / 表面ナノ薄膜形成プロセス / 放射光リアルタイム光電子分光 / 吸着過程 / 並進運動エネルギー / 表面反応ダイナミクス / Si / その場観察 / 固体表面 / 放射光 / リアルタイム光電子分光 / "その場"観察 / 表面反応ダイナミクス&キネティクス / 極薄膜形成 / 表面反応ダイナミクス&キネティクス / 極薄膜創製
Research Abstract

本研究の目的は、超音速分子ビームを固体表面に照射して熱反応等では不可能な化学反応を誘起し、機能性極薄膜を形成する方法を探索するとともにその反応機構を解明することにある。多くの研究成果が得られたがその中で平成19年度においては、(i)Si(111)-7x7表面、(ii)Ge(001)-2x1表面の酸素吸着過程における酸素分子の並進運動エネルギーの効果を中心に調べた。Si(111)-7x7表面の室温、ガス吸着条件における酸化反応の01sおよびSi 2pリアルタイム光電子分光スペクトルの詳細な解析から、酸素結合

Report

(3 results)
  • 2007 Annual Research Report
  • 2006 Annual Research Report
  • 2005 Annual Research Report
  • Research Products

    (65 results)

All 2008 2007 2006 2005 Other

All Journal Article (23 results) (of which Peer Reviewed: 8 results) Presentation (42 results)

  • [Journal Article] SR-PES and STM observation of metastable chgmisorption state of oxygen on Si(110)-16x2 surface2008

    • Author(s)
      Y. Yamamoto
    • Journal Title

      Applied Surface Science (印刷中)

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Vibratianally-assisted dissociative adsorption of oxygen on Ru(0001)-p(2x)-O2007

    • Author(s)
      S. Takahashi
    • Journal Title

      Japanese Journal Applied Physics Vol.146,No.4B

      Pages: 1888-1890

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effects of vibrational and rotational exciation on the dissociative adsorption of O_2 on Cu surfaces2007

    • Author(s)
      K. Moritani
    • Journal Title

      Journal Physical Chemistry 111

      Pages: 9961-9967

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Direct hsertion of oxygen atoms into the backbonds of subsurace Si at oms using translational energies of oxygen atom beams2007

    • Author(s)
      M. Tagawa
    • Journal Title

      Applied Physicsl etters 91

      Pages: 33504-33506

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Real-time observation of initial thermal oxidation on Si(110)-16x2 surfaces by 01s photoemission spectroscopy using synchrotron radiation2007

    • Author(s)
      S. Suemitsu
    • Journal Title

      Japanese Journal Applied Physics Vol.46,No4B

      Pages: 1888-1890

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Si(001)surface layer-by-layer oxidation studied by real-time photoelectron spectroscopy using synchrotron radiation2007

    • Author(s)
      S. Ogawa
    • Journal Title

      Japanese Journal Applied Physics Vol.46,No.5B

      Pages: 3244-3254

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Si(001)表面における酸化膜形成過程とSiO脱離の共存機構2007

    • Author(s)
      寺岡 有殿
    • Journal Title

      電気学会論文誌C 127

      Pages: 133-139

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 超音速酸素分子ビームによる並進運動エネルギー誘起Ti(0001)表面酸化反応2007

    • Author(s)
      小川 修一
    • Journal Title

      電気学会論文誌C 127

      Pages: 140-145

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Vibrationally assisted dissociative adsorption of oxygen on Ru(0001)2006

    • Author(s)
      S.Takahashi, Y.Fujimoto, Y.Teraoka, A.Yoshigoe, T.Aruga
    • Journal Title

      Chemical Physcs Letters 433

      Pages: 58-58

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Real-time observation of inibial thermal oxidation on Si(110)-16x2 surface by photoemission spectroscopy2006

    • Author(s)
      M.Suemitsu, A.Kato, H.Togashi, A.Konno, Y.Yamamoto, Y.Teraoka, A.Yoshigoe, Y.Enta, Y.Narita
    • Journal Title

      ECS Transactions 3

      Pages: 311-311

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Comparative study of oxidation on Cu and Cu_3Au surfaces with a hypertermal O_2 molecular beam2006

    • Author(s)
      M.Okada, K.Moritani, T.Fukuyama, K.Mizutani, A.Yoshigoe, Y.Teraoka, T.Kasai
    • Journal Title

      Surface Science 600

      Pages: 4228-4228

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Oxidation of Si(001) with a hyperthermal O-atom beam at room temperature : Suboxide distribution and residual order structure2006

    • Author(s)
      M.Tagawa, C.Sogo, K.Yokota, A.Yoshigoe, Y.Teraoka, T.Shimura
    • Journal Title

      Applied Physics Letters 88

      Pages: 133512-133512

    • NAID

      120000944618

    • Related Report
      2006 Annual Research Report
  • [Journal Article] The azimuthal dependent oxidation process on Cu(110) by energetic oxygen molecules2006

    • Author(s)
      K.Moritani, M.Okada, T.Fukuyama, Y.Teraoka, A.Yoshigoe, T.Kasai
    • Journal Title

      Physical Journal D 38

      Pages: 111-111

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Consumption kinetics of Si atoms during growth and decomposition of very thin oxide on Si(001) surfaces2006

    • Author(s)
      S.Ogawa, A Yoshigoe, S Ishizuka, Y Teraoka, Y Takakuwa
    • Journal Title

      Thin Solid Films 508

      Pages: 169-169

    • Related Report
      2006 Annual Research Report
  • [Journal Article] 超音速窒素分子ビームを用いた Ti(0001)表面の窒素吸着反応モデルの解明2006

    • Author(s)
      小川修一, 高桑雄二, 石塚眞治, 吉越章隆, 寺岡有殿, 水野善之
    • Journal Title

      真空 49

      Pages: 775-775

    • Related Report
      2006 Annual Research Report
  • [Journal Article] 室温における酸素分子のSi(111)-7x7 表面での初期吸着ダイナミクス2006

    • Author(s)
      吉越章隆, 成廣英介, 盛谷浩右, 寺岡有殿
    • Journal Title

      表面科学 27

      Pages: 449-449

    • Related Report
      2006 Annual Research Report
  • [Journal Article] SiとTi表面での極薄酸化膜形成のリアルタイム表面分析2006

    • Author(s)
      高桑雄二, 小川修一, 石塚眞治, 吉越章隆, 寺岡有殿
    • Journal Title

      Journal of Surface Analysis 13

      Pages: 36-36

    • Related Report
      2006 Annual Research Report
  • [Journal Article] The azimuthal dependent oxidation process on Cu(110) by energetic oxygen molecules2006

    • Author(s)
      K.Moritani, M.Okada, T.Fukuyama, Y.Teraoka, Akitaka Yoshigoe, Toshio Kasai
    • Journal Title

      Eur.Phys.J. D38

      Pages: 111-111

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Synchrotron Radiation Photoelectron Emission Study of SiO_2 Film Formed by Hyperthermal O-Atom Beam at Room Temperature2005

    • Author(s)
      M.Tagawa, C.Sogo, K.Yokota, S.Hachiue, A.Yoshigoe, Y.Teraoka
    • Journal Title

      Jpn.J.Appl.Phys. Vol.44

      Pages: 8300-8300

    • NAID

      10016958289

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Characterization of interface defects related to negative-bias temperature instability in ultrathin plasma-nitrided SiON/Si<100>systems2005

    • Author(s)
      S.Fujieda, Y.Miura, M.Saitoh, Y.Teraoka, A.Yoshigoe
    • Journal Title

      Microelectronics Reliability 45

      Pages: 57-57

    • Related Report
      2005 Annual Research Report
  • [Journal Article] 室温における酸素分子のSi(111)-7x7表面での初期吸着ダイナミクス

    • Author(s)
      吉越章隆, 成廣英介, 盛谷浩右, 寺岡有殿
    • Journal Title

      表面科学 (投稿中)

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Comparative study of oxidation on Cu and Cu_3Au surfaces with a hyperthermal O_2 molecular beam

    • Author(s)
      M.Okada, K.Moritani, T.Fukuyama, H.Mizutani, A.Yoshigoe, Y.Teraoka.T.Kasai
    • Journal Title

      Surf.Sci. (in press)

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Consumption kinetics of Si atoms during growth and decomposition of very thin oxide on Si(001) surfaces

    • Author(s)
      S.Ogawa, A.Yoshigoe, S.Ishizuka, Y.Teraoka, Y.Takakuwa
    • Journal Title

      Thin Solid Films (in press)

    • Related Report
      2005 Annual Research Report
  • [Presentation] 酸素分子によるSi(111)-7x7の酸化反応ダイナミクスと初期吸着確率の表面温度依存性2008

    • Author(s)
      吉越 章隆
    • Organizer
      第55回応用物理学学術講演会
    • Place of Presentation
      日大理工、千葉
    • Year and Date
      2008-03-27
    • Related Report
      2007 Annual Research Report
  • [Presentation] Si(111)-7x7表面の室温酸化におけるレストアトムの放射光xpsによるリアルタイム観察2008

    • Author(s)
      吉越 章隆
    • Organizer
      第55回応用物理学学術講演会
    • Place of Presentation
      日大理工、千葉
    • Year and Date
      2008-03-27
    • Related Report
      2007 Annual Research Report
  • [Presentation] Si(110)面上1原子層酸化膜の形成過程とその界面結合状態2008

    • Author(s)
      山本 喜久
    • Organizer
      第55回応用物理学学術講演会
    • Place of Presentation
      日大理工、千葉
    • Year and Date
      2008-03-27
    • Related Report
      2007 Annual Research Report
  • [Presentation] 水素終端Si(110)表面UV/O_3酸化過程のXPS解析2008

    • Author(s)
      中野 卓哉
    • Organizer
      第55回応用物理学学術講演会
    • Place of Presentation
      日大理工、千葉
    • Year and Date
      2008-03-27
    • Related Report
      2007 Annual Research Report
  • [Presentation] 超熱酸素分子線によるCu(410)表面の酸化物生成の表面温度依存性2008

    • Author(s)
      岡田 美智雄
    • Organizer
      第55回応用物理学学術講演会
    • Place of Presentation
      日大理工、千葉
    • Year and Date
      2008-03-27
    • Related Report
      2007 Annual Research Report
  • [Presentation] SR-PESとSTMによるSi(110)-16x2室温酸化表面上の準安定状態の観察2008

    • Author(s)
      富樫 秀晃
    • Organizer
      第55回応用物理学学術講演会
    • Place of Presentation
      日大理工、千葉
    • Year and Date
      2008-03-27
    • Related Report
      2007 Annual Research Report
  • [Presentation] タングステン表面に注入された不純物元素の深さ分布と化学結合状態に関する研究2008

    • Author(s)
      上浦 良文
    • Organizer
      第55回応用物理学学術講演会
    • Place of Presentation
      日大理工、千葉
    • Year and Date
      2008-03-27
    • Related Report
      2007 Annual Research Report
  • [Presentation] Bonding structure of ultarthin oxides on Si(110)surface2008

    • Author(s)
      山本 喜久
    • Organizer
      MRS spring meeting 2008
    • Place of Presentation
      San Francisco
    • Year and Date
      2008-03-27
    • Related Report
      2007 Annual Research Report
  • [Presentation] Real time observation of O_2 adsorption on SI(111)-7x7 at 300K by use of synchrotron radiation O1s and Si2p XPS2008

    • Author(s)
      Akitaka Yoshigoe
    • Organizer
      Symposium on Surface and Nano Science 2008(SSNS08)
    • Place of Presentation
      Appi,Iwate
    • Year and Date
      2008-01-22
    • Related Report
      2007 Annual Research Report
  • [Presentation] SiO_2/Si(001)界面における酸化誘起欠陥と酸素分子の反応過程2008

    • Author(s)
      小川 修一
    • Organizer
      第13回ゲートスタック研究会
    • Place of Presentation
      三島市
    • Year and Date
      2008-01-14
    • Related Report
      2007 Annual Research Report
  • [Presentation] SR-PESとSTMによるSi(110)-16x2表面上準安定酸化状態の観察2008

    • Author(s)
      山本 喜久
    • Organizer
      第13回ゲートスタック研究会
    • Place of Presentation
      三島市
    • Year and Date
      2008-01-14
    • Related Report
      2007 Annual Research Report
  • [Presentation] Si(110)-16x2面上極薄酸化膜形成過程とその界面構造2008

    • Author(s)
      山本 喜久
    • Organizer
      第13回ゲートスタック研究会
    • Place of Presentation
      三島市
    • Year and Date
      2008-01-14
    • Related Report
      2007 Annual Research Report
  • [Presentation] Si(111)表面の酸化反応ダイナミクスと初期吸着確率の表面温度依存性の関係2008

    • Author(s)
      吉越 章隆
    • Organizer
      第21回日本放射光学会・放射光科学合同シンポジウム
    • Place of Presentation
      立命館大学草津キャンパス
    • Year and Date
      2008-01-12
    • Related Report
      2007 Annual Research Report
  • [Presentation] 放射光リアルタイム01sおよびSi2p光電子分光で観た酸素ガスによるSi(111)表面の室温酸化反応2008

    • Author(s)
      吉越 章隆
    • Organizer
      第21回日本放射光学会・放射光科学合同シンポジウム
    • Place of Presentation
      立命館大学草津キャンパス
    • Year and Date
      2008-01-12
    • Related Report
      2007 Annual Research Report
  • [Presentation] Incident kinetic energy of O_2 and surface temperature dependence of inihal sticking probabihty for Si(111)-7×7 investigated by real-time XPS combined with supersonic molecular beam2007

    • Author(s)
      Akitaka Yoshigoe
    • Organizer
      4th International Symposium on Practical Surface Analysis and 6th Klorea-Japan Internatlonal Symposium on Surface Analysis
    • Place of Presentation
      金沢音楽堂
    • Year and Date
      2007-11-25
    • Related Report
      2007 Annual Research Report
  • [Presentation] SR-PES and STM observation of metastable chemisorption state of oxygenon Si(110)-16x22007

    • Author(s)
      Y. Yamamoto
    • Organizer
      International Symposium on control of semiconductor interface
    • Place of Presentation
      Sendai in Japan
    • Year and Date
      2007-11-12
    • Related Report
      2007 Annual Research Report
  • [Presentation] Time resolved 01s&Si2p XIPS for oxidation of Si(111)-7x7 at 300K2007

    • Author(s)
      Akitaka Yoshigoe
    • Organizer
      9th International Confbrence on Atomicany controlled Syrfaces, Interfaces and Nanostructures
    • Place of Presentation
      東大生産技術研究所
    • Year and Date
      2007-11-11
    • Related Report
      2007 Annual Research Report
  • [Presentation] Diameter dependence of hydrogen adsorption on single-walled carbon nanotubes2007

    • Author(s)
      A. Tokura
    • Organizer
      9th International Conerence on Atomically controlled Syrfaces, Interfaces and Nanostructures
    • Place of Presentation
      Sendai in Japan
    • Year and Date
      2007-11-11
    • Related Report
      2007 Annual Research Report
  • [Presentation] Temperature dependence of the oxidation-induced strain at SiO_2/Si(001)interface studied by XPS synchrotron radiation2007

    • Author(s)
      S. Ogawa
    • Organizer
      9th International Conference on Atomically controlled Syrfaces, Interfaces and Nanostructures
    • Place of Presentation
      Sendai in Japan
    • Year and Date
      2007-11-11
    • Related Report
      2007 Annual Research Report
  • [Presentation] Metastable chemisorption state of oxygen on Si(110)-16x2 surface observedby SR-PES2007

    • Author(s)
      山本 喜久
    • Organizer
      Third International Workshop on New Group IV Semiconductor Nanoelectronics
    • Place of Presentation
      Sendai in Japan
    • Year and Date
      2007-11-08
    • Related Report
      2007 Annual Research Report
  • [Presentation] SR-XPS analysis for AIN layer formed on Al(111) at 473K by supersonic N_2 molecular beams2007

    • Author(s)
      Yuden Teraoka
    • Organizer
      4th International Symposium on Practical Surface Analysis and 6th Korea-Japan International Symposium on Surface Analysis
    • Place of Presentation
      Sendai in Japan
    • Year and Date
      2007-11-08
    • Related Report
      2007 Annual Research Report
  • [Presentation] 初期吸着確率の入射運動エネルギーおよびその表面温度依存性にみるSi(111)-7×7表面への酸素分子の吸着ダイナミクス2007

    • Author(s)
      吉越 章隆、寺岡 有殿
    • Organizer
      第27回表面科学講演大会
    • Place of Presentation
      東大生産技術研究所
    • Year and Date
      2007-11-01
    • Related Report
      2007 Annual Research Report
  • [Presentation] Si(111)-7×7表面への酸素分子の室温吸着過程の放射光光電子分光によるリアルタイム観察-01sおよびSi2pの時間変化およびその相関-2007

    • Author(s)
      吉越 章隆
    • Organizer
      第27回表面科学講演大会
    • Place of Presentation
      東大生産技術研究所
    • Year and Date
      2007-11-01
    • Related Report
      2007 Annual Research Report
  • [Presentation] Chemical reactions of hydrogenated diamond-like carbon thin films withoxygen atoms2007

    • Author(s)
      田川 雅人
    • Organizer
      第51回宇宙科学技術連合講演会
    • Place of Presentation
      札幌コンベンションセンター
    • Year and Date
      2007-10-29
    • Related Report
      2007 Annual Research Report
  • [Presentation] Oxidation of Pt(111)surface by hyperthermal oxygen molecular beam2007

    • Author(s)
      松本 祥志
    • Organizer
      Second International Symposium on Atomic Technology
    • Place of Presentation
      Awaji in Japan
    • Year and Date
      2007-10-01
    • Related Report
      2007 Annual Research Report
  • [Presentation] 高分解能XPSおよび超音速分子線法による4H-SiC(0001)表面の酸化過程の研究2007

    • Author(s)
      高橋 真
    • Organizer
      日本物理学会第62回年次大会
    • Place of Presentation
      北海道大学
    • Year and Date
      2007-09-21
    • Related Report
      2007 Annual Research Report
  • [Presentation] Real-time monitoring of initial oxidation of Si(110)-16x2 surface by Si2p photoemission spectroscopy2007

    • Author(s)
      山本 喜久
    • Organizer
      The 2007 International Conference on Solid StateDevices and Materials(SSDM)
    • Place of Presentation
      Tsukuba International Congress Center(EPOCHALTSUKUBA)
    • Year and Date
      2007-09-18
    • Related Report
      2007 Annual Research Report
  • [Presentation] Nitridation of Al(111)Surface induced by supersonic Nitrogen Molecular Beams as observed by in-situ photoemission spectroscopy with synchrotronradiation2007

    • Author(s)
      Yuden Teraoka
    • Organizer
      12th European Conference on Applications of Surface and Interace Analysis(ECASIA'O7)
    • Place of Presentation
      Brussels-Flagey
    • Year and Date
      2007-09-09
    • Related Report
      2007 Annual Research Report
  • [Presentation] Observation of metasgable O_2 adsorption structure on Si(111)-7x7 at room temperature by real-time 01s&Si2p XPS using synchrotron radiation2007

    • Author(s)
      Akitaka Yoshigoe
    • Organizer
      12th European Conference on Applications of Surface and Interace Analysis(ECASIA'O7)
    • Place of Presentation
      Brussels-Flagey
    • Year and Date
      2007-09-09
    • Related Report
      2007 Annual Research Report
  • [Presentation] Si(111)-7x7表面の室温酸化における01sおよびSi2p光電子スペクトルの時間変化2007

    • Author(s)
      吉越 章隆
    • Organizer
      第68回応用物理学学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-04
    • Related Report
      2007 Annual Research Report
  • [Presentation] 統合Si酸化反応モデルの実験的検証(2):界面酸化速度のO_2圧力依存性2007

    • Author(s)
      小川 修一
    • Organizer
      第68回応用物理学学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-04
    • Related Report
      2007 Annual Research Report
  • [Presentation] Si(110)-16x2表面の急速初期酸化現象と表面再配列2007

    • Author(s)
      富樫 秀晃
    • Organizer
      第68回応用物理学学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-04
    • Related Report
      2007 Annual Research Report
  • [Presentation] Si(110)-16x2面のリアルタイムSR-XPS観察と自己触媒反応モデル2007

    • Author(s)
      山本 喜久
    • Organizer
      第68回応用物理学学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-04
    • Related Report
      2007 Annual Research Report
  • [Presentation] 放射光XPSによるGe_3N_4膜の化学結合状態及び熱脱離過程のその場観察2007

    • Author(s)
      細井 卓治
    • Organizer
      第68回応用物理学学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-04
    • Related Report
      2007 Annual Research Report
  • [Presentation] Real-time photoelectron spectroscopy study on the oxidation-induced strained Si atom at SiO_2/Si(001) illterface:dependence on oxidation temperature2007

    • Author(s)
      S. Ogawa
    • Organizer
      17th international Vacuum Congress(IVC-17), 13th International Conferemce on Surface Science (ICSS-13), International Conerence on Nano Science and Technology(ICN+T2007)
    • Place of Presentation
      Stockholm
    • Year and Date
      2007-07-02
    • Related Report
      2007 Annual Research Report
  • [Presentation] In-situ observation of oxidation on Si(111)-7x7 surface at room temperatureby use of synchrotron radiation x-ray photoelectron spectroscopy2007

    • Author(s)
      Akitaka Yoshigoe
    • Organizer
      2nd Japan-Korea Symposium on Surface Nanostructure
    • Place of Presentation
      Matsushima,Miyagi
    • Year and Date
      2007-06-19
    • Related Report
      2007 Annual Research Report
  • [Presentation] Metastable moleculary chemisorbed oxygen adsorbate on Si(111)-7x7 sufaceo bserved by synchrotron radiation real-time photoelectron spectroscopy2007

    • Author(s)
      Akitaka Yoshigoe
    • Organizer
      The 3rd International Workshop on Oxidation Reactions
    • Place of Presentation
      Suita,Osaka
    • Year and Date
      2007-05-10
    • Related Report
      2007 Annual Research Report
  • [Presentation] Effects of vibrational and rotational excitations on the dissociative adsorption of O_2 on Cu surfaces2007

    • Author(s)
      Kousuke Moritani
    • Organizer
      The 3rd International Workshop on Oxidation Reactions
    • Place of Presentation
      Suita,Osaka
    • Year and Date
      2007-05-10
    • Related Report
      2007 Annual Research Report
  • [Presentation] Photoemission study of the oxidation process via hyperthermal O_2 adsorption at Cu and Cu_3Au2007

    • Author(s)
      M. Okada
    • Organizer
      The 3rd International Workshop on Oxidation Reactions
    • Place of Presentation
      Suita,Osaka
    • Year and Date
      2007-05-10
    • Related Report
      2007 Annual Research Report
  • [Presentation] Oxidation reaction-kinetics on Ti(0001) surface studied by real-time monitoring methods of XPS,UPS and RHEED combined with AES2007

    • Author(s)
      Y. Takakuwa
    • Organizer
      The 3rd International Workshop on Oxidation Reactions
    • Place of Presentation
      Suita,Osaka
    • Year and Date
      2007-05-10
    • Related Report
      2007 Annual Research Report
  • [Presentation] A study on the causes of bias temperature instability in advanced gate stacks2007

    • Author(s)
      S. Fujieda
    • Organizer
      211th Meeting of the Electrochemical Society
    • Place of Presentation
      Chicago,Illinois
    • Year and Date
      2007-05-06
    • Related Report
      2007 Annual Research Report
  • [Presentation] XPS and STM studies on initial oxidation of Si(110)-16x22007

    • Author(s)
      M. Suemitsu
    • Organizer
      2007MRS Spring Meeting
    • Place of Presentation
      San Francisco
    • Year and Date
      2007-04-09
    • Related Report
      2007 Annual Research Report

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Published: 2005-04-01   Modified: 2016-04-21  

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