超GHz帯域用伝導ノイズ抑制体の創成

• Project/Area Number: 17686027
• Research Category: Grant-in-Aid for Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: Electronic materials/Electric materials
• Research Institution: Tokyo Institute of Technology
• Principal Investigator: 松下 伸広 Tokyo Institute of Technology, 応用セラミックス研究所, 准教授 (90229469)
• Project Period (FY): 2005 – 2007
• Project Status: Completed (Fiscal Year 2007)
• Budget Amount: ¥29,900,000 (Direct Cost: ¥23,000,000、Indirect Cost: ¥6,900,000); Fiscal Year 2007: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000); Fiscal Year 2006: ¥9,230,000 (Direct Cost: ¥7,100,000、Indirect Cost: ¥2,130,000); Fiscal Year 2005: ¥16,120,000 (Direct Cost: ¥12,400,000、Indirect Cost: ¥3,720,000)
• Keywords: FeCoB層 / NiO層 / バイアス磁界 / 異方性磁界 / 共鳴周波数 / エピタキシャル成長 / 伝導ノイズ抑制体 / 逆磁気歪み / NiO膜 / FeCoB膜 / スパッタ堆積 / RF放電 / ノイズ抑制体 / Ni-Znフェライト膜 / 伝道ノイズ抑制体 / 磁気特性制御 / 高周波透磁率特性 / 結晶配向性制御

Research Abstract

本研究は金属磁性層と酸化物反強磁性層からなる積層膜をGHzを超える帯域用の伝導ノイズ抑制体として応用することを目的としている。高周波領域で優れた特性を得るためには磁性層の異方性を高める必要があるが、平成19年度はNiO/FeCoB積層膜のバイアス磁界を100 0e以上、異方性磁界は2500e以上とすることを目標とした。 NiO反強磁性層とFeCoB層との間で効果的にバイアス磁界を発生するために必要な(111)面を得るために、Ti下地層を用いた。NiO層作製時の基板温度が300℃と高い場合に良好な(111)配向を示し、フィールドクールしたTi/NiO(30 nm)/FeCoB(5 nm)膜において、FeCoB層はバイアス磁界119 0eを示した。これはNiO層を反強磁性層として用いた報告例の中では最高レべルである。一方、異方性磁界についてもTi/NiO(90 nm)/FeCoB(5 nm)膜において、300 0eと極めて高い値が得られた。異方性磁界については、NiO層の堆積温床が高い場合に膜内部の応力が高まる結果としてFeCoB層内部に発生した逆磁気歪み効果の影響で増加することを明らかとした。この300 0eという異方性磁界が飽和磁化18.5 kGのFeCoB層で得られたということは、約7 GHz という極めて高い共鳴周波数を示すことになり、超GHz帯域のノイズ抑制体としての応用が期待される。
また、今年度は高抵抗酸化物磁性膜であるフェライト膜を磁性層に適用する研究も行い、その結晶性、磁気特性の評価を行った。 NiZnフェライト/NiO積層膜において、NiO層とNiZnフェライト層との間でエピタキシャル的な(111)配向成長が見られ、Ti(30 nm)/NIO(30 nm)/NiZnフェライト(60nm)/NIO(30nm)においてヽ134Oeのバイアス磁界が得られた。

Research Products

• [Journal Article] Spin-sprayed ferrite films with high resistivity and high-frequency magnetic loss for GHz conducted noise suppressors (2008)
  • Author(s): A. K. Subramani, N. Matsushita, T. Watanabe, M. Tada, M.Abe, K. Kondo, M. Yoshimura
  • Journal Title: Mater. Sci. and Eng. B 148[1-3] Pages: 136-140
  • Peer Reviewed
• [Journal Article] NiZnCo ferrite films by spin spray technique: morphology and magnetic properties (2008)
  • Author(s): A. K. Subramani, N. Matsushita, M. Tada, T. Watanabe, M.Abe, M. Yoshimura
  • Journal Title: J. Mater. Sci. In press
  • Peer Reviewed
• [Journal Article] A Simple Process for Ferrite Film Preparation from One Solution without Using Hazardous Oxidizing Agent (2007)
  • Author(s): A. K. Subramani, N. Matsushita, T.Watanabe, M.Tada, M. Abe, M.Yoshimura
  • Journal Title: J. Appl. Phys 101 Pages: 9504-9504
  • Peer Reviewed
• [Journal Article] A simple process for ferrite film preparation from one solution without using hazardous oxidizing agent (2007)
  • Author(s): A.K.Subramani, N.Matsushita, T.Watanabe, M.Tada, M.Abe, M.Yoshimura
  • Journal Title: Jounal of Applied Physics 101 [9]
• [Journal Article] Conducted noise suppression up to GHz range by spin-sprayed Ni_<0.2>Zn_xFe_<2.8-x>O_4(x=0.3, 0.6) films having different natural resonance frequencies (2006)
  • Author(s): K.KONDO, T.CHIBA, H.ONO, S, YOSHIDA, Y.SNIMADA, N.MATSUSHITA, M.ABE
  • Journal Title: Journal of Magnetism and Magnetic Materials 301 Pages: 107-111
• [Journal Article] High-Flux Density and Low-Core Losses Attained for Ferrite/Permalloy Composite Core (2006)
  • Author(s): Nobuhiro MATSUSHITA, D.KIM, Masanori ABE
  • Journal Title: IEEE Transactions on Magnetics 42 [10] Pages: 2824-2826
• [Journal Article] Fe_3O_<4+d> films prepared by "one-liquid" spin spray ferrite plating for gigahertz-range noise suppressors (2006)
  • Author(s): J.MIYASAKA, M.TADA, M.ABE, N.MATSUSHITA
  • Journal Title: Jounal of Applied Physics 99 [8]
• [Journal Article] Heating ability of magnetite nanobeads with various sizes for magnetic hyperthermia at 120 kHz (2006)
  • Author(s): K.OKAWA, M.SEKINE, M.MAEDA, M.TADA, M.ABE, N.MATSUSHITA, K.NISHIO, H.HANDA
  • Journal Title: Jounal of Applied Physics 99 [8]
• [Journal Article] フェライトめっき膜を用いたGHz帯域の電磁ノイズ抑制体 (2006)
  • Author(s): 松下伸広, 阿部正紀
  • Journal Title: セラミックス 41 [1] Pages: 20-24
  • NAID: 10017257057
• [Journal Article] Novel Type of Conducted Noise Suppressor in GHz Range Using Ferrite-plated Film (2005)
  • Author(s): Nobuhiro Matsushita, Koichi Kondo, Shigeyoshi Yoshida, Masanori Abe
  • Journal Title: IEEJ Trans.FM Vol.125,No.1 Pages: 22-24
  • NAID: 10014152771
• [Journal Article] Highly resistive Mn-Zn ferrite films prepared from aqueous solution for GHz conducted noise suppressors (2005)
  • Author(s): N.Matsushita, T.Abe, K.Kondo, S.Yoshida, M.Abe
  • Journal Title: Journal of Applied Physics vol.97
• [Journal Article] Crystallite size dependence of natural resonance frequency for spin-sprayed Fe_3O_4/γ-Fe_2O_3 films highly permeable up to gigahertz range (2005)
  • Author(s): Masaru Tada, Tatsunobu Abe, Jin Miyasaka, Nobuhiro Matsushita, Masanori Abe
  • Journal Title: Journal of Applied Physics vol.97
• [Journal Article] FMR Study on Spin-Sprayed Ni-Zn-Co Ferrite Films With High Permeability Usable for GHz Noise Suppressors (2005)
  • Author(s): K.Kondo, T.Chiba, S.Yoshida, S.Okamoto, N.Matsushita, M.Abe
  • Journal Title: IEEE Transaction on Magnetics 41[10] Pages: 3463-3465
• [Journal Article] Preparation of medical magnetic nanobeads with ferrite particles encapsulated in a polyglycidyl methacrylate (GMA) for bioscreening (2005)
  • Author(s): H.Nishibirari, C.S.kuroda, M.Maeda, N.Matsushita, M.Abe, H.Handa
  • Journal Title: Journal of Applied Physics vol.97
• [Journal Article] Expediting magnetic separation by using ni wires for robot-manipulated bio-sensing system (2005)
  • Author(s): Ryuichi Shimizu, Masaru Tada, Nobuhiro Matsushita, Hiroshi Handa, Masanori Abe
  • Journal Title: IEEE Transaction on Magnetics, 41[10] Pages: 4143-4145
• [Presentation] Spin-sprayed Ferrite Films with Excellent Heat Resistance by Microstructure Control (2007)
  • Author(s): A. K. Subramani
  • Organizer: STAC-JTMC
  • Place of Presentation: Kanagawa, Japan
• [Presentation] Oen Solution Process in Ferrite Plating-Ease and Advantage (2007)
  • Author(s): A. K. Subramani
  • Organizer: IGMAT 2007
  • Place of Presentation: Singapore, Singapore
• [Presentation] Orientation-controlled NiO Layers and Their Effects on Magnetic Property of FeCoB/NiO Bilayers (2007)
  • Author(s): Shizuma Kudo
  • Organizer: ICMAT2007
  • Place of Presentation: Singapore, Singapore
• [Presentation] MnZn Ferrite Film Preparation by Spin-Spray Ferrite Plating and Its Application as GHz Conducted Noise Suppressors (2007)
  • Author(s): A. K. Subramani
  • Organizer: IUMRS-ICAM 2007
  • Place of Presentation: Bangalore, India
• [Presentation] Excellent Noise Suppression Properties for Spin-Spray Plated MnxZnyFe3-x-yO4 Films Even After Heat Treatment (2007)
  • Author(s): A. K. Subramani
  • Organizer: MMM 2007
  • Place of Presentation: Tampa, USA
• [Presentation] Ferrite Films by a 'Low Temperature', 'Low COSt','No Post-Annealing' Spin-Spray Process for High Frequency Applications (2007)
  • Author(s): A. K. Subramani
  • Organizer: 2007 MRS Fall Meeting
  • Place of Presentation: Boston, USA