新規193nm用フォトレジスト材料の開発

• Project/Area Number: 17750103
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Polymer chemistry
• Research Institution: Tokyo Institute of Technology
• Principal Investigator: 芝崎 祐二 東工大, 理工学研究科, 助手 (90323790)
• Project Period (FY): 2005
• Project Status: Completed (Fiscal Year 2005)
• Budget Amount: ¥1,900,000 (Direct Cost: ¥1,900,000); Fiscal Year 2005: ¥1,900,000 (Direct Cost: ¥1,900,000)