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柔軟性と高分解能を両立する多機能集積型シリコン触覚イメージセンサ

Research Project

Project/Area Number 17760277
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Electron device/Electronic equipment
Research InstitutionToyohashi University of Technology

Principal Investigator

高尾 英邦  Toyohashi University of Technology, 工学部, 准教授 (40314091)

Project Period (FY) 2005 – 2007
Project Status Completed (Fiscal Year 2007)
Budget Amount *help
¥3,300,000 (Direct Cost: ¥3,300,000)
Fiscal Year 2007: ¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 2006: ¥1,100,000 (Direct Cost: ¥1,100,000)
Fiscal Year 2005: ¥1,200,000 (Direct Cost: ¥1,200,000)
Keywords触覚センサ / 微小電子機械システム(MEMS) / マイクロマシン / ロボット / 感覚代行 / CMOS集積回路 / 半導体 / ピエゾ抵抗 / 人工皮膚
Research Abstract

1.シリコン触覚センサにおける素子実装技術の開発
実際の使用環境下においては,触覚センサの検出表面が対象物表面に最初に接触する必要があり,チップから取り出すリード配線も邪魔になってはならない。本年度においては,接触面となるLSI裏面が最前面となる新しい触覚センサのパッケージ構造を設計し,それをPCB作製装置によって製作した。新規のパッケージ構造により,ロボットフィンガへの実装を想定した測定実験を行うことができるようになった。その結果,高い空間分解能と検出感度を有しながらも,実際の触動作実験に耐えるロバスト性を両立することのできる新しいシリコン触覚センサの基本構造を完成することができた。
2.能動知覚(アクティブセンシング)特性の評価
触覚情報は空間内で局在的なものであり,三次元物体の表面形状を知覚するには,ロボットハンドやフィンガの移動と組み合わせた能動知覚が重要となる。本年度に開発した新しい素子実装方法を用いることで,能動触動作による物体表面の三次元計測を行なうことが可能となった。実際に,開発した触覚センサを用いて,アルミニウム板上の点字を直接接触しながら,正確にその三次元表面形状を読み取る実験に初めて成功することができた。従来からある点字凹凸の時間波形検知ではなく,本センサにおいては,二次元センサアレイによる点字表面形状の3次元画像化ができたことで,ヒ卜の指先機能を目指した触覚センサの機能・性能を大幅に向上させることに成功したといえる。

Report

(3 results)
  • 2007 Annual Research Report
  • 2006 Annual Research Report
  • 2005 Annual Research Report
  • Research Products

    (20 results)

All 2008 2007 2006 2005

All Journal Article (15 results) (of which Peer Reviewed: 3 results) Presentation (1 results) Book (1 results) Patent(Industrial Property Rights) (3 results)

  • [Journal Article] Low-Noise Fully Differential Amplifiers Using JFET-CMOS Integration Technology for Smart Sensors2008

    • Author(s)
      H. Takao, Radhakrishna V., Y. I to, F. Komakine, K. Serge, K. Sawada, M. Ishida
    • Journal Title

      IEEJ Transactions on Electrical and Electronic Engineering, (In press)

    • NAID

      10025772836

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of High Drain Voltage on Stress Sensitivity in nMOSFETs2007

    • Author(s)
      Radhakrishna V., H. Takao, K.Sawada, M. Ishida
    • Journal Title

      Sensors and Actuators A 140

      Pages: 89-93

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Wafer-level integration technique of surface mount devices on a Si-wafer with vibration energy and gravity force2007

    • Author(s)
      M. Sudou, H. Takao, K. Sawada, and M. Ishida
    • Journal Title

      IEEE Transactions on Components and Packaging Technologies 30-3

      Pages: 457-463

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Pneumatic MEMS In-Channel Microvalves with In-Plane Control Ports for Micro Fluidic Systems Integrated on a Chip Surface2007

    • Author(s)
      H.Takao, M.Ishida
    • Journal Title

      Sensors and Materials (In print)

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Wafer-level integration technique of surface mount devices on a Si-wafer with vibration energy and gravity force2007

    • Author(s)
      M.Sudou, H.Takao, K.Sawada, M.Ishida
    • Journal Title

      IEEE Transactions on Components and Packaging Technologies (In print)

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Monolithic Silicon Smart Tactile Image Sensor with Integrated Strain Sensor Array on Pneumatically Swollen Single Diaphragm Structure2006

    • Author(s)
      H.Takao, K.Sawada, M.Ishida
    • Journal Title

      IEEE Transactions on Electron Devices Vol. 53, No. 5

      Pages: 1250-1259

    • Related Report
      2006 Annual Research Report
  • [Journal Article] MEMS技術による柔軟型シリコン触覚イメージセンサ2006

    • Author(s)
      矢和田将貴, 高尾英邦, 澤田和明, 石田誠
    • Journal Title

      第10回システムLSIワークショップ,(06年11/27-11/29、北九州市)

      Pages: 283-286

    • Related Report
      2006 Annual Research Report
  • [Journal Article] A Self-Compensated Fully Differential SOI-CMOS Operational Amplifier for Wide Temperature Operation of Silicon Smart Sensors up to 275℃2006

    • Author(s)
      H.Takao, T.Douzaka, K.Sakurano, K.Sawada, M.Ishida
    • Journal Title

      Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2006), Singapore, 25-28 June Vol. 1

      Pages: 146-146

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Effect of High Drain Bias on Stress Sensitivity in MOSFETs2006

    • Author(s)
      R.Vatedka, H.Takao, K.Sawada, M.Ishida
    • Journal Title

      Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2006), Singapore, 25-28 June Vol. 1

      Pages: 145-145

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Monolithic Silicon Smart Tactile Image Sensor with Integrated Strain Sensor Array on Pneumatically Swollen Single Diaphragm Structure2006

    • Author(s)
      H.Takao, K.Sawada, M.Ishida
    • Journal Title

      IEEE Transactions on Electron Devices in print

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Improvement of MOS Interface Characteristics in CMOS on Si(111) by Combination of Fluorine Implantation and Long-Time Hydrogen Annealing2006

    • Author(s)
      Y.Kato, H.Takao, K.Sawada, M.Ishida
    • Journal Title

      Japanese Journal of Applied Physics Part 2 Letter Vol.45, No.4

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Two-Dimensional Silicon Smart Tactile Image-Sensor with Single Sensing Diaphragm Actuated by Vibrating Pressure for Simultaneous Detection of Force and Object Hardness Distributions2006

    • Author(s)
      H.Takao, M.Yawata, K.Sawada, M.Ishida
    • Journal Title

      Proceedings of The 19th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS2006)

      Pages: 602-605

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Fabrication of a High-Temperature Silicon Pressure Sensor Using SDB-SOI Technology2005

    • Author(s)
      Y.Lee, H.Takao, M.Ishida
    • Journal Title

      Sensors and Materials Vol.17, No.5

      Pages: 269-276

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Multifunctional Smart Tactile-Image Sensor with Integrated Arrays of Strain and Temperature Sensors on Single Air-Pressurized Silicon Diaphragm2005

    • Author(s)
      H.Takao, K.Sawada, M.Ishida
    • Journal Title

      Digest of Technical papers of the 13th International Conference on Sensors, Actuators, and Microsystems (Transducers'05) Vol.1

      Pages: 45-48

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Performance and Reliability Study of Si(111) CMOS Subjected to High Mechanical Stress for Smart Sensor Application2005

    • Author(s)
      F.Radhakrishna, Y.Kato, H.Takao, K.Sawada, M.Ishida
    • Journal Title

      Digest of Technical papers of the 13th International Conference on Sensors, Actuators, and Microsystems (Transducers'05) Vol.1

      Pages: 871-874

    • Related Report
      2005 Annual Research Report
  • [Presentation] Multi-functional Monolithic-MEMS Tactile Imager Using Flexible Deformation of Silicon IC2007

    • Author(s)
      H. Takao, M. Yawata, R. Kodama, K. Sawada, and M. Ishida
    • Organizer
      IEEE 2007 Custom Integrated Circuits Conference (IEEE CICC2007)
    • Place of Presentation
      San Jose, USA
    • Related Report
      2007 Annual Research Report
  • [Book] MEMS/NEMS Handbook : Techniques and Applications, Vol. 2, Chapter-4(Springer)2006

    • Author(s)
      H.Takao, M.Ishida
    • Total Pages
      29
    • Publisher
      Novel MEMS Fluidic Integrated Circuit Technology with 'MOSFET-Like Microvalve Elements
    • Related Report
      2006 Annual Research Report
  • [Patent(Industrial Property Rights)] シリコン触覚センサ装置2007

    • Inventor(s)
      高尾英邦石田誠
    • Industrial Property Rights Holder
      JST
    • Acquisition Date
      2007-11-16
    • Related Report
      2007 Annual Research Report
  • [Patent(Industrial Property Rights)] 触覚センサ装置2007

    • Inventor(s)
      高尾 英邦, 石田 誠
    • Industrial Property Rights Holder
      豊橋技術科学大学
    • Filing Date
      2007-01-10
    • Related Report
      2006 Annual Research Report
  • [Patent(Industrial Property Rights)] 触覚センサ装置2006

    • Inventor(s)
      高尾 英邦, 石田 誠
    • Industrial Property Rights Holder
      豊橋技術科学大学
    • Industrial Property Number
      2006-011182
    • Filing Date
      2006-01-19
    • Related Report
      2005 Annual Research Report

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Published: 2005-04-01   Modified: 2016-04-21  

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