Silicon CMOS Photonics

• Project/Area Number: 17GS0205
• Research Category: Grant-in-Aid for Creative Scientific Research
• Allocation Type: Single-year Grants
• Research Institution: The University of Tokyo
• Principal Investigator: WADA Kazumi The University of Tokyo, 大学院・工学系研究科, 教授 (30376511)
• Project Period (FY): 2005 – 2009
• Project Status: Completed (Fiscal Year 2009)
• Budget Amount: ¥425,360,000 (Direct Cost: ¥327,200,000、Indirect Cost: ¥98,160,000); Fiscal Year 2009: ¥56,940,000 (Direct Cost: ¥43,800,000、Indirect Cost: ¥13,140,000); Fiscal Year 2008: ¥40,040,000 (Direct Cost: ¥30,800,000、Indirect Cost: ¥9,240,000); Fiscal Year 2007: ¥97,240,000 (Direct Cost: ¥74,800,000、Indirect Cost: ¥22,440,000); Fiscal Year 2006: ¥116,090,000 (Direct Cost: ¥89,300,000、Indirect Cost: ¥26,790,000); Fiscal Year 2005: ¥115,050,000 (Direct Cost: ¥88,500,000、Indirect Cost: ¥26,550,000)
• Keywords: フォトニクス / シリコン / CMOS / 新原理素子 / ナノ集積 / シリコンフォトニクス / Ge / エピ成長装置 / シミュレータ / 微小リング共振器 / 品質因子 / フランツケルディシュ効果

Research Abstract

The current Si photonics aims to reduce the material diversity of photonic devices for electronic-photonic integration. In contrast the present research focuses reducing the device diversity in Si photonics in terms of unifying fundamental functions of photonic devices. Based on the design and prototype of a function-unified device and application of the fundamental device to an optical computing architecture, we have demonstrated orders-magnitude higher performances than conventional 2-bit adders. This has suggested our new approach has a significant impact not only on a new generation of Si photonics but also future computation.

Research Products

• [Journal Article] Monolithic Integration and Synchronous Operation of Germanium Photodetectors and Silicon Variable Optical Attenuators (2010)
  • Author(s): S. B. Park, Tai Tsuchizawa, Toshifumi Watanabe, Hiroyuki Shinojima, Hidetaka Nishi, Koji Yamada, Yasuhiko Ishikawa, K. Wada, Seiichi Itabashil
  • Journal Title: OPTICS EXPRESS 8412 Pages: 18-8
• [Journal Article] Monolithic integration and synchronous operation of germanium photodetectors silicon variable optical attenuators (2010)
  • Author(s): Kazumi Wada, Sungbong Park, taisuchizawa, Toshifumi Watanabe, Hiroyuki Shinojima, Hidetaka Nishi
  • Journal Title: OPTICS EXPRESS 8412 Vol.18
  • Peer Reviewed
• [Journal Article] Si Photonics and Fiber to the Home (2009)
  • Author(s): K. Wada, S. B. Park, Yasuhiko Ishikawa
  • Journal Title: IEEE Pages: 97-7
• [Journal Article] Enhanced direct bandgap emission in germanium by micromechanical strain engineering (2009)
  • Author(s): Peng Huei Lim, S. B. Park, Yasuhiko Ishikawa, K. Wada
  • Journal Title: OPTICS EXPRESS 16358 Pages: 17-8
• [Journal Article] Si Photonics and Fiber to the Home (2009)
  • Author(s): Kazumi Wada, S.Park, Y.Ishikawa
  • Journal Title: Proceedings of the IEEE Vol.97 Pages: 1329-1336
  • Peer Reviewed
• [Journal Article] Strain and Absorption Coefficient of Finite Ge Structures on Si (2009)
  • Author(s): Kazumi Wada, Sungbong Park, Yasuhiko Ishikawa, Yoshiyuki Tsusaka, Junji Matsui
  • Journal Title: Japanese Journal of Applied Physics 48
  • NAID: 40016627190
  • Peer Reviewed
• [Journal Article] Reverse current reduction of Ge photodiodes on Si without post-growth aneealing (2009)
  • Author(s): Kazumi Wada, Sugbong Park, Shinya Takita, Yasuhiko Ishikawa, Jiro Osaka
  • Journal Title: Chinese Optics Letters Vol.7
  • Peer Reviewed
• [Journal Article] Enchanced direct bandgap emission in germaniumby micromechanical strain engineering (2009)
  • Author(s): Kazumi Wada, Peng Huei Lim, Sungbong Park, Yasuhiko Ishikawa
  • Journal Title: Optical Society of America OCIS ntegrated opticsdevices.Optoel ectronics
  • Peer Reviewed
• [Journal Article] Enhanced photoluminescence from germanium-based ring resonators (2008)
  • Author(s): Peng Huei Lim, Y. Kobayashi, S Takita, Y Ishikwa, K. Wada
  • Journal Title: Appl.Phys.Lett. 93 Pages: 0411031-3
• [Journal Article] A New Approach of Electronics and Photonics Convergence on Si CMOS Platform : How to Reduce Device Diversity of Photonics for Integration (2008)
  • Author(s): K. Wada
  • Journal Title: Hindawi Publishing Corporation Advances in Optical Technologies Volume 2008 Article ID 807457 Volume
• [Journal Article] Enhanced photoluminescence from germanium-based ring resonators (2008)
  • Author(s): Peng Huei Lim, Y. Kobayashi, S Takita, Y Ishikwa, K. Wada
  • Journal Title: Appl. Phys. Lett. 93 Pages: 411031-3
  • Peer Reviewed
• [Journal Article] Effect of Post-Growth Annealing on Morphology of Ge Mesa Selectively Grown on Si (2008)
  • Author(s): K. Wada, Y. Ishikawa, Sungbong Park, T. tsuichizawa, T. Watanabe, K. Yamada, S. Itabashi
  • Journal Title: IEICE Transactions on Electronics E91-C
  • NAID: 10026816686
  • Peer Reviewed
• [Journal Article] A New Approach of Electronics and Photonics Convergence on Si CMOS Platform: How to Reduce Device Diversity of Photonics for Integration (2008)
  • Author(s): Kazumi Wada
  • Journal Title: Hindawi Publishing Corporation Advances in Optical Technologies Vol. 2008 Article ID807457
  • Peer Reviewed
• [Journal Article] シリコンフォトニクス (2008)
  • Author(s): 和田一実
  • Journal Title: 電子情報通信学会 91、NO. 3 Pages: 194-200
  • NAID: 110006623870
  • Peer Reviewed
• [Journal Article] シリコンフォトニクスの基礎と応用 (2008)
  • Author(s): 和田一実
  • Journal Title: 光学 37 Pages: 2-6
  • NAID: 10020124146
  • Peer Reviewed
• [Journal Article] ライオネルC. キマリング,「高度情報化社会とSiフォトニクスの将来展望」 (2007)
  • Author(s): 和田一実
  • Journal Title: 応用物理 76 Pages: 141-141
• [Journal Article] Design of monolithically integrated GeSi electro-absorption modulators and photodetectors on an SOI platform (2007)
  • Author(s): J. -F. Liu, D. Pan, S. Jongthammanurak, K. Wada, L. C. Kimerling, I. Michel
  • Journal Title: Optics Express 15 Pages: 623-628
  • Peer Reviewed
• [Journal Article] 高度情報化社会とSiフォトニクスの将来展望 (2007)
  • Author(s): 和田一実, ライオネルC. キマリング
  • Journal Title: 応用物理 76 Pages: 141-147
  • Peer Reviewed
• [Journal Article] Germanium-rich Silicon-germanium films epitaxially grown by ultrahigh vacuum chemical-vapor deposition directly on silicon substrates (2007)
  • Author(s): D. D. Cannon, J. -F. Liu, D. T. Danielson, S. Jongthammanurak, U. U. Enuha, K. Wada, I. Michel. L. C.
  • Journal Title: Appl. Physi. Lett., v91 91 Pages: 252111-3
  • Peer Reviewed
• [Journal Article] シリコンフォトニクスの光インターコネクションへの応用 (2007)
  • Author(s): 和田一実
  • Journal Title: レーザー研究 35 No. 9 Pages: 586-590
  • NAID: 10019843897
  • Peer Reviewed
• [Journal Article] シリコンフォトニクスの光インターコネクションへの応用 (2007)
  • Author(s): 和田一実
  • Journal Title: レーザー研究 (印刷中)
  • NAID: 10019843897
• [Journal Article] 高度情報化社会とSiフォトニクスの将来展望 (2007)
  • Author(s): 和田 一実、ライオネルC.キマリング
  • Journal Title: 応用物理 78 Pages: 141-141
• [Journal Article] Design of monolithically integrated GeSi electro-absorption modulators and photodetectors on an SOI platform (2007)
  • Author(s): J.-F. Liu, D. Pan, S., K. Wada, 他
  • Journal Title: Optics Express 15 Pages: 623-628
• [Journal Article] Large electro-optic effect in tensile strained Ge-on-Si films (2006)
  • Author(s): S. Jongthammanurak, J.-F. Liu, K. Wada, D. D. Cannon, D. T. Danielson, D. Pan, J. Michel, L. C. Kimerling
  • Journal Title: Appl.Phys.Lett. 89
• [Journal Article] Large electro-optic effect in tensile strained Ge-on-Si films (2006)
  • Author(s): S. Jongthammanurak, J.-F. Liu, K. Wada, 他
  • Journal Title: Applied Physics Letters 89
• [Journal Article] Design of all-optical switches based on carrier injection in Si/SiO2 split-ridge waveguides (SRWs) (2006)
  • Author(s): F. Gan, F.J. Grawert, , K. Wada, 他
  • Journal Title: Journal of Lightwave Technology 24 Pages: 3454-63
• [Journal Article] Si Microphotonics for Optical Interconnection (2006)
  • Author(s): K. Wada, D.H. Ahn, 他
  • Journal Title: Thin Solid Film 508 Pages: 418-21
• [Journal Article] Si Microphotonics for optical interconnection
  • Author(s): K.Wada, D.H.Ahn, D.R.Lim, J.Michel, L.C.Kimerling
  • Journal Title: Thin Film Solids 未定
• [Presentation] Si Photonics-Past, Present, and Future (2009)
  • Author(s): 和田一実
  • Organizer: The 1st Symposium on Silicon Nanoelectronic, Photonic, and Spintronic devices
  • Place of Presentation: 東京都市大学
  • Year and Date: 2009-10-13
• [Presentation] The Challenge of Silicon Photonics for On-chip Integration (2009)
  • Author(s): 和田一実
  • Organizer: ECOC 2009
  • Place of Presentation: Wiena, Austria
  • Year and Date: 2009-09-21
• [Presentation] Photovoltaics and Si Photonics (2009)
  • Author(s): Halle, Germany
  • Organizer: The 2nd NSC-JST Nano Device Workshop
  • Place of Presentation: Hsinchu, Taiwan
  • Year and Date: 2009-07-24
• [Presentation] New Approach for High Efficiency Thin Film Si Solarcells (2009)
  • Author(s): 和田一実
  • Organizer: 第14回変調半導体構造国際会議
  • Place of Presentation: 神戸
  • Year and Date: 2009-07-21
• [Presentation] Silicon Photonics Challenges and Future (2009)
  • Author(s): 和田一実
  • Organizer: Nanophotonics open seminar at University of Tokyo
  • Place of Presentation: 東京
  • Year and Date: 2009-06-18
• [Presentation] Si Photonics (2009)
  • Author(s): 和田一実
  • Organizer: Colloquium in honor of Professor Dr.rer.Nat.Ulrich Goesele
  • Place of Presentation: Halle, Germany
  • Year and Date: 2009-05-15
• [Presentation] Characteristics of Ge and SiGe pin Photodiodes Without Post-growth Annealing (2008)
  • Author(s): K. Wada, S. Takita, S. Park, R. Ichikawa, Y. Ishikawa
  • Organizer: The Electro Chemical Society
  • Place of Presentation: ハワイ、ホノルル
  • Year and Date: 2008-10-15
• [Presentation] Strain and absorption coefficient of finite Ge structures on Si (2008)
  • Author(s): Sungbong Park, Yasuhiko Ishikawa, Kazumi Wada
  • Organizer: 2008 International Conference on Solid State Devices and Materials (SSDM 2008)
  • Place of Presentation: 筑波
  • Year and Date: 2008-09-24
• [Presentation] Characteristics of Geand SiGe pin Photodiodes Without PostBgrowth Annealing (2008)
  • Author(s): K. Wada, S. Takita, S. B. Park, R. Ichikawa, Y. Ishikawa
  • Organizer: The Electro Chemical Society
• [Presentation] Low dark current Ge photodiodes on Si with intrinsic Si-layer insertion (2008)
  • Author(s): Honolulu, Hawaii S. B. Park, Shinya Takita, Yasuhiko Ishikawa, Jiro Osaka, K. Wada
  • Organizer: 2008 5^<th> International Conference on Group IV Photonics (GFP2008)
  • Place of Presentation: Sorrento, Italy
• [Presentation] Enhanced Photoluminescence from Germanium Based Ring Resonators (2008)
  • Author(s): Peng Huei lim, Yosuke Kobayashi, Shinya Takita, Yasuhiko Ishikawa, Kazumi. Wada
  • Organizer: 2008 5^<th> International Conference on Group IV Photonics (GFP2008)
  • Place of Presentation: Sorrento,Italy
• [Presentation] Low dark-current Ge photodiodes on Si with intrinsic-Si-layer insertion (2008)
  • Author(s): Sungbong Park, Shinya Takita, Yasuhiko Ishikawa, Jiro Osaka, Kazumi Wada
  • Organizer: 2008 5th International Conference on Group IV Photonics (GFP2008)
  • Place of Presentation: Sorrento, Italy
• [Presentation] Enhanced Photoluminescence from Germanium-Based Ring Resonators (2008)
  • Author(s): Peng Huei Lim, Yosuke Kobayashi, Shinya Takita, Yasuhiko Ishikawa, Kazumi Wada
  • Organizer: 2008 5th International Conference on Group IV Photonics (GFP2008)
  • Place of Presentation: Sorrento, Italy
• [Presentation] Fabrication and Responsivity Spectra of p-Ge/i-Si/n-Si Near-Infrared Photodiodes (2008)
  • Author(s): Yasuhiko Ishikawa, Sungbong Park, Jiro Osaka, Kazumi Wada
  • Organizer: 2008 5th International Conference on Group IV Photonics (GFP2008)
  • Place of Presentation: Sorrento, Italy
• [Presentation] Absorption Blue Shift in Thin-Film Ge-on-Si Photodiodes Induced by Post-Growth Annealing (2008)
  • Author(s): Yasuhiko Ishikawa, Sungbong Park, Jiro Osaka, Kazumi Wada
  • Organizer: The 5th International Symposium on Advanced Science and Technology of Silicon Materials
  • Place of Presentation: Kona, Hawaii, USA
• [Presentation] As-grown Geを用いたpin diodeの逆方向電流の低減 (2008)
  • Author(s): 朴成鳳、滝田真也、市川竜三、石川靖彦、大坂次郎、和田一実
  • Organizer: 第69回応用物理学会学術講演会
  • Place of Presentation: 愛知、春日井
• [Presentation] Spectral Responsivity of Vertical p-i-n Photodiode of Selectively Grown Ge on Silicon-on-Insulator (SOI) Platform" (2007)
  • Author(s): Sungbong Park, Yasuhiko Ishikawa, K. Wada
  • Organizer: 2007 4th International Conference on Group IV Photonics (GFP2007)
  • Place of Presentation: 東京
  • Year and Date: 2007-09-10
• [Presentation] Selective epitaxial growth of Germanium on Silicon via ultra-high vacuum chemical vapor depos (2007)
  • Author(s): Sungbong Park, Y. Ishikawa, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, K. Wada
  • Organizer: International Conference on Si
  • Place of Presentation: マルセイユ、フランス
  • Year and Date: 2007-05-01
• [Presentation] Responsivity of Vertical p-i-n Photodiode of Selectively lGrown Ge on Silicon-on-Insulator (SOI) Platform (2007)
  • Author(s): S. B. Park, Yasuhiko, Ishikawa, K. Wada
  • Organizer: 4^<th> International Conference on Group IV Photonics (GFP2007)
• [Presentation] 「選択成長を用いたSi光導波路上Geフォトディテクタ」「シリオンフォトニクス技術への期待」 (2007)
  • Author(s): 朴成鳳, 石川靖彦, 和田一実
  • Organizer: 第68回応用物理学会学術講演会
  • Place of Presentation: 札幌
• [Presentation] Si photonics: past, present, and future (2007)
  • Author(s): K. Wada
  • Organizer: 2007 7th Asia-Pacific Optical Communications Conference (APOC 2007)
  • Place of Presentation: Wuhan, China
• [Presentation] Fabrication and Responsivity Spectra of p-Ge/i-Si/n-Si Near Infrared Photodiodes
  • Author(s): Yasuhiko Ishikawa, Sugbong Park, Jiro Osaka
  • Organizer: 2008 5^<th> International Conference on Group IV photonics (GFP2008)
• [Presentation] The Challenge of Silicon Photonics for On-chip Integration
  • Author(s): K. Wada
  • Organizer: ECOC2009
• [Book] ナノシリコンの最新技術と応用展開 (2010)
  • Author(s): 越田信義
  • Total Pages: 250
  • Publisher: (株)シーエムシー出版
• [Book] Silicon Photonics (2007)
  • Author(s): K.Wada, L.C.Kimerling
  • Total Pages: 20
  • Publisher: Springer-Verlag,
• [Book] Optical Interconnects, The Silicon Approach, eds L. Pavesi, G. Guillot (Springer, Berlin, Heidelberg, New Yok) (2006)
  • Author(s): K. Wada, J. F. Liu, S. Jongthammanurak, D. D. Cannon, D.T. Danielson, D. H. Ahn, S. Akiyama, M. Popovic, D. R Lim, K. K. Lee, H. -C Luan, Y. Ishikawa, J. Michel, H. A. Haus, L. C. Kimerling
  • Publisher: Si Microphotonics for optical interconnection
• [Book] Si Microphotnics for optical interconnection (2006)
  • Author(s): K. Wada, J. F. Liu, S. Jongthammanurak, 他
  • Publisher: Springer Berlin Heidelberg New York
• [Remarks]
  • URL: http://www.microphotonics.material.t.u-tokyo.ac.ip/LabHP/Microphotonics-U-Tokyo.html
• [Remarks]
  • URL: http://www.youtube.com/watch?v=I79Y7lx5rcQ&feature=channel_page
• [Remarks]
  • URL: http://www.microphotonics.material.t.u-tokyo.ac.jp/LabHP/Microphotonics-U-Tokyo.html
• [Patent(Industrial Property Rights)] ゲルマニウム受光器およびその製造方法 (2010)
  • Inventor(s): 和田一実, 石川靖彦, 板橋聖一, 土澤泰, 山田浩治, 渡辺俊文
  • Industrial Property Rights Holder: 東京大学、NTT
  • Filing Date: 2010-03-04
• [Patent(Industrial Property Rights)] 光検出器の製造方法 (2010)
  • Inventor(s): 和田一実, 石川靖彦, 山田浩治, 土澤泰, 渡辺俊文, パクソンボン, 板橋聖一
  • Industrial Property Rights Holder: 東京大学、NTT
  • Filing Date: 2010-03-04
• [Patent(Industrial Property Rights)] 光導波路共振器の製造方法及び共振器回路の製造方法 (2010)
  • Inventor(s): 和田一実, 滝田真也, 山添正裕
  • Industrial Property Rights Holder: 東京大学
  • Filing Date: 2010-02-08
• [Patent(Industrial Property Rights)] ゲルマニウム受光器およびその製造方法 (2010)
  • Inventor(s): 和田一実, 石川靖彦, 板橋聖一, 土澤泰, 山田浩治, 渡辺俊文
  • Industrial Property Rights Holder: 東京大学/NTT
  • Filing Date: 2010-03-04
• [Patent(Industrial Property Rights)] 光検出器の製造方法 (2010)
  • Inventor(s): 和田一実, 石川靖彦, 山田浩治, 土澤泰, 渡辺俊文, パクソンポン, 板橋聖一
  • Industrial Property Rights Holder: 東京大学/NTT
  • Filing Date: 2010-03-04
• [Patent(Industrial Property Rights)] 光導波路共振器の製造方法及び共振器回路の製造方法 (2010)
  • Inventor(s): 和田一実, 滝田真也, 山添正裕
  • Industrial Property Rights Holder: 東京大学
  • Filing Date: 2010-02-08
• [Patent(Industrial Property Rights)] シリコン太陽電池 (2009)
  • Inventor(s): 和田一実, 市川竜三
  • Industrial Property Rights Holder: 東京大学
  • Industrial Property Number: 2008-024227
  • Filing Date: 2009-02-03
• [Patent(Industrial Property Rights)] Ge素子製作方法 (2009)
  • Inventor(s): 和田一実, 大坂次郎, 石川靖彦, L. C. Kimerling
  • Industrial Property Rights Holder: 東京大学, MIT
  • Filing Date: 2009-09-22
• [Patent(Industrial Property Rights)] 光半導体素子、光電変換素子及び光変調素子 (2009)
  • Inventor(s): 和田一実, 石川靖彦, SungbongPark
  • Industrial Property Rights Holder: 東京大学
  • Filing Date: 2009-07-28
• [Patent(Industrial Property Rights)] Ge素子制作方法 (2009)
  • Inventor(s): 和田一実, 大坂次郎, 石川靖彦, L.C.Kimerling
  • Industrial Property Rights Holder: 東京大学
  • Filing Date: 2009-09-22
• [Patent(Industrial Property Rights)] 光半導体素子、光電変換素子及び光変調素子 (2008)
  • Inventor(s): 和田一実, 石川靖彦, Sungbong Park
  • Industrial Property Rights Holder: 東京大学
  • Industrial Property Number: 2010-034226
  • Filing Date: 2008-07-28
• [Patent(Industrial Property Rights)] 半導体基板、半導体基板の製造方法および電子デバイス (2008)
  • Inventor(s): 和田一実, 秦雅彦, 高田朋幸, 山中貞則, 山本武継
  • Industrial Property Rights Holder: 東京大学、住友化学株式会社
  • Industrial Property Number: 2008-334830
  • Filing Date: 2008
• [Patent(Industrial Property Rights)] 半導体基板、半導体基板の製造方法および電子デバイス (2008)
  • Inventor(s): 和田一実, 秦雅彦, 高田朋幸, 山中貞則, 山本武継
  • Industrial Property Rights Holder: 東京大学、住友化学株式会社
  • Industrial Property Number: 2008-332613
  • Filing Date: 2008
• [Patent(Industrial Property Rights)] 半導体基板および半導体基板の製造方法 (2008)
  • Inventor(s): 和田一実, 秦雅彦, 高田朋幸, 山中貞則, 山本武継
  • Industrial Property Rights Holder: 東京大学、住友化学株式会社
  • Industrial Property Number: 2008-334962
  • Filing Date: 2008
• [Patent(Industrial Property Rights)] 光半導体素子、光電変換素子及び光変調素子 (2008)
  • Inventor(s): 和田一実, 石川靖彦, Sungbong Park
  • Industrial Property Rights Holder: 東京大学
  • Industrial Property Number: 2008-193799
  • Filing Date: 2008-07-28
• [Patent(Industrial Property Rights)] 発光素子 (2007)
  • Inventor(s): 和田一実, 林世云, 小林洋介, 林乗輝
  • Industrial Property Rights Holder: 東京大学
  • Industrial Property Number: 2009-076498
  • Filing Date: 2007-09-18
• [Patent(Industrial Property Rights)] 導波路共振器型光バッファ (2007)
  • Inventor(s): 和田一実, 林乗輝, デスモンドロドニーリム チョン ション
  • Industrial Property Rights Holder: 東京大学
  • Industrial Property Number: 2009-063673
  • Filing Date: 2007-09-04
• [Patent(Industrial Property Rights)] 光増幅器 (2007)
  • Inventor(s): 和田一実, 林世云
  • Industrial Property Rights Holder: 東京大学
  • Industrial Property Number: 2008-520153
  • Filing Date: 2007-04-11
• [Patent(Industrial Property Rights)] 導波路共振器型光バッファ (2007)
  • Inventor(s): 和田一実, 林乗輝, デズモンドロドニーリムチョンション
  • Industrial Property Rights Holder: 東京大学
  • Industrial Property Number: 2007-229435
  • Filing Date: 2007-09-04
• [Patent(Industrial Property Rights)] 発光素子 (2007)
  • Inventor(s): 和田一実, 林世云, 小林洋介, 林秉輝
  • Industrial Property Rights Holder: 東京大学
  • Industrial Property Number: 2007-241408
  • Filing Date: 2007-09-18
• [Patent(Industrial Property Rights)] 光検出器 (2006)
  • Inventor(s): 和田一実, 石川靖彦
  • Industrial Property Rights Holder: 東京大学
  • Industrial Property Number: 2006-322861
  • Filing Date: 2006-11-30
• [Patent(Industrial Property Rights)] アレイ導光路回折格子 (2006)
  • Inventor(s): 小林洋介, 和田一実
  • Industrial Property Rights Holder: 和田一実
  • Filing Date: 2006-02-09
• [Patent(Industrial Property Rights)] 光半導体素子および光変調器 (2005)
  • Inventor(s): 和田一実, 尾崎太亮
  • Industrial Property Rights Holder: 東京大学
  • Patent Publication Number: 2006-301379
  • Filing Date: 2005-04-21
• [Patent(Industrial Property Rights)] 光半導体素子および光変調器 (2005)
  • Inventor(s): 尾崎太亮, 和田一実
  • Industrial Property Rights Holder: 東京大学
  • Filing Date: 2005-04-21