| Budget Amount *help |
¥43,940,000 (Direct Cost: ¥33,800,000、Indirect Cost: ¥10,140,000)
Fiscal Year 2019: ¥10,790,000 (Direct Cost: ¥8,300,000、Indirect Cost: ¥2,490,000)
Fiscal Year 2018: ¥11,440,000 (Direct Cost: ¥8,800,000、Indirect Cost: ¥2,640,000)
Fiscal Year 2017: ¥21,710,000 (Direct Cost: ¥16,700,000、Indirect Cost: ¥5,010,000)
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| Outline of Final Research Achievements |
We integrated custom-designed sensors and actuators in order to perform in-situ TEM observation such as mechanical, electrical and thermal experiments. Several tens micro newton is required to break the thin film specimen, however a conventional micro machine cannot generate such a strong force. Therefore we have developed novel MEMS device which utilizes Rolenz force generating by TEM to make the strong force which is enough to break the specimen. The device enables us to break the specimen inside the TEM. Furthermore a heater and a thermal sensor were integrated to perform a heat transfer though nano-scaled specimen.
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