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Ambient SIMS Technique for Liquid-Solid Interface Analysis

Research Project

Project/Area Number 17H01058
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionKyoto University

Principal Investigator

MATSUO Jiro  京都大学, 工学研究科, 准教授 (40263123)

Co-Investigator(Kenkyū-buntansha) 瀬木 利夫  京都大学, 工学研究科, 講師 (00402975)
青木 学聡  京都大学, 学術情報メディアセンター, 准教授 (90402974)
Project Period (FY) 2017-04-01 – 2021-03-31
Project Status Completed (Fiscal Year 2020)
Budget Amount *help
¥42,770,000 (Direct Cost: ¥32,900,000、Indirect Cost: ¥9,870,000)
Fiscal Year 2020: ¥6,110,000 (Direct Cost: ¥4,700,000、Indirect Cost: ¥1,410,000)
Fiscal Year 2019: ¥8,710,000 (Direct Cost: ¥6,700,000、Indirect Cost: ¥2,010,000)
Fiscal Year 2018: ¥11,960,000 (Direct Cost: ¥9,200,000、Indirect Cost: ¥2,760,000)
Fiscal Year 2017: ¥15,990,000 (Direct Cost: ¥12,300,000、Indirect Cost: ¥3,690,000)
Keywords固液 / 2次イオン / 高速重イオン / クラスター / 大気圧SIMS法 / SIMS / イオン / 表面分析 / 固液界面 / 二次イオン / 大気圧分析 / 質量分析
Outline of Final Research Achievements

Observation of surface/interface, where functions are expressed, is indispensable for elucidation of the mechanism. However, most of the surface/interface analysis techniques that have been developed require ultrahigh vacuum or high vacuum, and thus are not suitable for interface evaluation with liquid phase or high pressure gas phase.
In order to overcome the limitations of conventional analysis techniques, we have developed a completely new and innovative analysis technique that enables direct observation of the interface between solid and liquid using secondary ion mass spectrometry (SIMS), which uses fast heavy ions (about MeV) as incident ions. Using this technique, the solid/liquid interface of water, which is the most familiar liquid, and electrolyte of Li ion battery was evaluated.

Academic Significance and Societal Importance of the Research Achievements

固液界面を観察できる全く新しい評価手法であるMeV-SIMS法を開発した。この手法は、大気圧下で高感度に分子状態の情報が取得可能というこれまでにはない特徴を持っている。この手法を使って、2次電池として今や欠かせないLiイオン電池(LIB)の電解液の評価を行った。LIBは、高エネルギー密度かつ長寿命という特徴を持ち脱炭素社会実現のための2次電池としての役割も期待され、社会インフラとしても極めて重要な技術となっている。電解質として液体を使うLIBの性能向上のためには、電荷を受け渡す電極と電解液の界面の制御が重要であり、固液界面での評価手法として適用できることを実証した。

Report

(5 results)
  • 2020 Annual Research Report   Final Research Report ( PDF )
  • 2019 Annual Research Report
  • 2018 Annual Research Report
  • 2017 Annual Research Report
  • Research Products

    (100 results)

All 2021 2020 2019 2018 2017 Other

All Int'l Joint Research (6 results) Journal Article (15 results) (of which Int'l Joint Research: 8 results,  Peer Reviewed: 14 results,  Open Access: 9 results) Presentation (78 results) (of which Int'l Joint Research: 39 results,  Invited: 11 results) Book (1 results)

  • [Int'l Joint Research] Kaiserlautern大学(ドイツ)

    • Related Report
      2018 Annual Research Report
  • [Int'l Joint Research] Namur大学(ベルギー)

    • Related Report
      2018 Annual Research Report
  • [Int'l Joint Research] Chiang Mai大学/Kaiserlautern大学(タイ)

    • Related Report
      2018 Annual Research Report
  • [Int'l Joint Research] Kaiserlautern大学(ドイツ)

    • Related Report
      2017 Annual Research Report
  • [Int'l Joint Research] Namur大学(ベルギー)

    • Related Report
      2017 Annual Research Report
  • [Int'l Joint Research] Chiang Mai大学(タイ)

    • Related Report
      2017 Annual Research Report
  • [Journal Article] Phonon transport probed at carbon nanotube yarn/sheet boundaries by ultrafast structural dynamics2020

    • Author(s)
      Hada Masaki、Makino Kotaro、Inoue Hirotaka、Hasegawa Taisuke、Masuda Hideki、Suzuki Hiroo、Shirasu Keiichi、Nakagawa Tomohiro、Seki Toshio、Matsuo Jiro、Nishikawa Takeshi、Yamashita Yoshifumi、Koshihara Shin-ya、Stolojan Vlad、Silva S. Ravi P.、Fujita Jun-ichi、Hayashi Yasuhiko、Maeda Satoshi、Hase Muneaki
    • Journal Title

      Carbon

      Volume: 170 Pages: 165-173

    • DOI

      10.1016/j.carbon.2020.08.026

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] MeV-SIMS measurement of lithium-containing electrolyte2020

    • Author(s)
      Toshio Seki,Tomoya Nonomura, Takaaki Aoki, Jiro Matsuo
    • Journal Title

      Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

      Volume: 479(15) Pages: 229-232

    • DOI

      10.1016/j.nimb.2020.07.007

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Secondary ion mass spectrometry measurements under ambient and humid conditions using MeV ions2020

    • Author(s)
      Toshio Seki, Kenta Ishii, Takaaki Aoki, Jiro Matsuo
    • Journal Title

      Journal of Vacuum Science & Technology B

      Volume: 38(3) Issue: 3 Pages: 034014-034014

    • DOI

      10.1116/1.5145014

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Development of Atmospheric Pressure MeV-SIMS and Solid–Liquid Interface Analysis2020

    • Author(s)
      瀬木 利夫
    • Journal Title

      Journal of Surface Analysis

      Volume: 26 Issue: 3 Pages: 254-259

    • DOI

      10.1384/jsa.26.254

    • NAID

      130008022204

    • ISSN
      1341-1756, 1347-8400
    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Optimized Alkali-Metal Cationization in Secondary Ion Mass Spectrometry of Polyethylene Glycol Oligomers with up to m/ z 10000: Dependence on Cation Species and Concentration2019

    • Author(s)
      Hubert Gnaser, Rika Oki, Takaaki Aoki, Toshio Seki, Jiro Matsuo
    • Journal Title

      Analytical Chemistry 2020

      Volume: 92(1) Issue: 1 Pages: 1511-1517

    • DOI

      10.1021/acs.analchem.9b04770

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Effect of ramping up rate on end of range defect in multielement molecular-ion (CH3O)-implanted silicon wafers2019

    • Author(s)
      Hirose Ryo, Onaka-Masada Ayumi, Okuyama Ryosuke, Kadono Takeshi, Shigematsu Satoshi, Kobayashi Kouji, Suzuki Akihiro, Koga Yoshihiro, Matsuo Jiro, Kurita Kazunari
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 58(12) Issue: 12 Pages: 121002-121002

    • DOI

      10.7567/1347-4065/ab4fc9

    • NAID

      210000157404

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Selective Reduction Mechanism of Graphene Oxide Driven by the Photon Mode versus the Thermal Mode2019

    • Author(s)
      M. Hada, K. Miyata, S. Ohmura, Y. Arashida, K. Ichiyanagi, I. Katayama, T. Suzuki, W. Chen, S. Mizote, T. Sawa, T. Yokoya, T. Seki, J. Matsuo, T. Tokunaga, C. Itoh, K. Tsuruta, R. Fukaya, S. Nozawa, S. Adachi, J. Takeda, K. Onda, S. Koshihara, Y. Hayashi, Y. Nishina
    • Journal Title

      ACS Nano

      Volume: 13 Issue: 9 Pages: 10103-10112

    • DOI

      10.1021/acsnano.9b03060

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Gas cooling secondary ions emitted by gas cluster ion beam at the travelling-wave ion guide of a Q-ToF-SIMS system2019

    • Author(s)
      P.Thopan, T.Seki, L.D.Yu, U.Tippawan, J.Matsuo
    • Journal Title

      Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

      Volume: 450 Pages: 139-143

    • DOI

      10.1016/j.nimb.2018.07.024

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Cluster ion beam bombardment and Q-ToF-SIMS analysis of large biomolecules2019

    • Author(s)
      P.Thopan, T.Seki, L.D.Yu, U.Tippawan, J.Matsuo
    • Journal Title

      Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

      Volume: 448 Pages: 11-18

    • DOI

      10.1016/j.nimb.2019.04.001

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Recent Progress of SIMS Technique : from Novel Primary Beams to Advanced Mass Spectrometers2018

    • Author(s)
      松尾 二郎, 瀬木 利夫, 青木 学聡
    • Journal Title

      Vacuum and Surface Science

      Volume: 61 Issue: 7 Pages: 426-434

    • DOI

      10.1380/vss.61.426

    • NAID

      130007403877

    • ISSN
      2433-5835, 2433-5843
    • Year and Date
      2018-07-10
    • Related Report
      2018 Annual Research Report
  • [Journal Article] Cationization and fragmentation of molecular ions sputtered from polyethylene glycol under gas cluster bombardment: An analysis by MS and MS/MS2018

    • Author(s)
      Pruchayawoot Thopan, Hubert Gnaser, Rika Oki, Takaaki Aoki, Toshio Seki, Jiro Matsuo
    • Journal Title

      INTERNATIONAL JOURNAL OF MASS SPECTROMETRY

      Volume: 430 Pages: 149-157

    • DOI

      10.1016/j.ijms.2018.05.012

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] In situ cationization of molecular ions sputtered from organic specimens under cluster bombardment2018

    • Author(s)
      Hubert Gnaser, Wolfgang Bock, Jiro Matsuo
    • Journal Title

      JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

      Volume: 36(3) Issue: 3

    • DOI

      10.1116/1.5009781

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Molecular imaging of alkaloids in khat (Catha edulis) leaves with MeV-SIMS2017

    • Author(s)
      Bostjan Jencic, Luka Jeromel, Nina Ogrinc Potocnik, Katarina Vogel-Mikus, Primoz Vavpetic, Zdravko Rupnik, Klemen Bucar, Matjaz Vencelj, Mitja Kelemen, Jiro Matsuo, Masakazu Kusakari, Zdravko Siketic, Muhammad A. Al-Jalali, Abdallah Shaltout, Primoz Pelicon
    • Journal Title

      NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

      Volume: 404 Pages: 140-145

    • DOI

      10.1016/j.nimb.2017.01.063

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Angled etching of Si by ClF3-Ar gas cluster injection2017

    • Author(s)
      Toshio Seki, Hiroki Yamamoto, Takahiro Kozawa, Tadashi Shojo, Kunihiko Koike, Takaaki Aoki, Jiro Matsuo
    • Journal Title

      JAPANESE JOURNAL OF APPLIED PHYSICS

      Volume: 56(6) Issue: 6S2 Pages: 06HB02-06HB02

    • DOI

      10.7567/jjap.56.06hb02

    • NAID

      210000147949

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of a Si lever structure made by double-angled etching with reactive gas cluster injection2017

    • Author(s)
      T. Seki, H. Yamamoto, T. Kozawa, K. Koike, T. Aoki, J. Matsuo
    • Journal Title

      APPLIED PHYSICS LETTERS

      Volume: 110(18) Issue: 18 Pages: 182105-182105

    • DOI

      10.1063/1.4982970

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Presentation] 大気圧MeV-SIMSによる固液界面分析に向けた研究2021

    • Author(s)
      野々村知也, 瀬木 利夫, 松尾 二郎
    • Organizer
      The 68th JSAP Spring Meeting,2021
    • Related Report
      2020 Annual Research Report
  • [Presentation] ESI法によるグリセロールクラスターのSIMS応用2021

    • Author(s)
      河野 建太, 瀬木 利夫, 松尾 二郎
    • Organizer
      The 68th JSAP Spring Meeting,2021
    • Related Report
      2020 Annual Research Report
  • [Presentation] Ambient SIMS with Swift Heavy Ions2020

    • Author(s)
      J. Matsuo
    • Organizer
      the 17th International Conference on Nuclear Microprobe Technology and Applications
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] MeV-SIMS measurement of electrolyte dissolved lithium compound at atmospheric pressure2020

    • Author(s)
      T. Seki
    • Organizer
      The 21th Workshop on Surface and Interface Analysis
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 飛躍的な発展を遂げるSIMS法の展望 有機・生体高分子2020

    • Author(s)
      松尾 二郎
    • Organizer
      2020年日本表面真空学会学術講演会
    • Related Report
      2020 Annual Research Report
    • Invited
  • [Presentation] SIMS応用に向けたNano-ESI法によるクラスターイオン2020

    • Author(s)
      河野 建太, 瀬木 利夫, 松尾 二郎
    • Organizer
      第21回QSEC公開シンポジウム
    • Related Report
      2020 Annual Research Report
  • [Presentation] リチウムイオン電池電解液のMeV-SIMS測定2020

    • Author(s)
      野々村 知也, 瀬木 利夫, 松尾 二郎
    • Organizer
      第21回QSEC公開シンポジウム
    • Related Report
      2020 Annual Research Report
  • [Presentation] SIMS 応用に向けたNano-ESI 法によるクラスターイオンビームの生成2020

    • Author(s)
      河野 健太
    • Organizer
      SIMS研究会13
    • Related Report
      2020 Annual Research Report
  • [Presentation] リチウムイオン電池電解液のMeV-SIMS 測定2020

    • Author(s)
      野々村 知也
    • Organizer
      SIMS研究会13
    • Related Report
      2020 Annual Research Report
  • [Presentation] スパッタリングされた有機分子の分子構造2020

    • Author(s)
      松尾 二郎
    • Organizer
      SIMS研究会13
    • Related Report
      2020 Annual Research Report
  • [Presentation] MeV-SIMSにおける二次イオン軌道シミュレーション2020

    • Author(s)
      瀬木 利夫, 松尾 二郎
    • Organizer
      The 81th JSAP Autumn Meeting
    • Related Report
      2020 Annual Research Report
  • [Presentation] リチウム化合物を混合させた電解液の大気圧MeV-SIMS 測定(2)2020

    • Author(s)
      野々村 知也, 瀬木 利夫, 松尾 二郎
    • Organizer
      The 81th JSAP Autumn Meeting
    • Related Report
      2020 Annual Research Report
  • [Presentation] リチウムイオン電池電解質から放出される二次イオンの大気圧下での測定2020

    • Author(s)
      野々村知也, 瀬木 利夫, 青木 学聡, 松尾 二郎
    • Organizer
      フォーラム21「イオンビームを用いた物理とその応用」研究会(第25回)
    • Related Report
      2019 Annual Research Report
  • [Presentation] Ambient Secondary Ion Mass Analysis of Electrolyte of Lithium Ion Battery with MeV-Energy Heavy Ion2019

    • Author(s)
      T. Seki, T. Nonomura, T. Aoki, J. Matsuo
    • Organizer
      23rd International Workshop on Inelastic Ion-Surface Collisions
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Etching by Massive Cluster Ions from Electrospray Ion Source2019

    • Author(s)
      T. Matsuda, T. Seki, T. Aoki, J. Matsuo
    • Organizer
      23rd International Workshop on Inelastic Ion-Surface Collisions
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] MeV-SIMS Measurements under Ambient and Humid Conditions2019

    • Author(s)
      T. Seki
    • Organizer
      The 22st International Conference on Secondary Ion Mass Spectrometry
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Development of a high energy cluster SIMS system with 50keV GCIB source2019

    • Author(s)
      K. Hirata, T. Seki, T. Aoki, J. Matsuo
    • Organizer
      The 22st International Conference on Secondary Ion Mass Spectrometry
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] MeV-SIMS Measurement of Electrolyte of Lithium Ion Battery2019

    • Author(s)
      T. Nonomura, T. Seki, T. Aoki, J. Matsuo
    • Organizer
      The 22st International Conference on Secondary Ion Mass Spectrometry
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Enhancement of ionization probability of Polymers with cation deposition method2019

    • Author(s)
      T. Matsuda, T. Seki, T. Aoki, J. Matsuo
    • Organizer
      The 22st International Conference on Secondary Ion Mass Spectrometry
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Angular Distribution of Neutral Species from Rhodamine 6G Sputtered with Cluster Ion Bombardment2019

    • Author(s)
      7. R. Oki, N. Sano, T. Seki, T. Aoki, J. Matsuo
    • Organizer
      The 22st International Conference on Secondary Ion Mass Spectrometry
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Optimized alkali-metal cationization in secondary ion mass spectrometry of polyethylene glycol oligomers with up to m/z 10000: Dependence on cation species and concentration2019

    • Author(s)
      H. Gnaser, R. Oki, T. Aoki, T. Seki and J. Matsuo
    • Organizer
      The 22st International Conference on Secondary Ion Mass Spectrometry
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Study on ionization process and quantitative analysis of organic molecules with cluster ion beam irradiation2019

    • Author(s)
      M. Fujii, Y. Ishii, E. Hasegawa, R. Shishido and J. Matsuo
    • Organizer
      The 22st International Conference on Secondary Ion Mass Spectrometry
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] To be fragmented or not to be, that is the question in organic sputtering2019

    • Author(s)
      N. Sano, R. Oki and J. Matsuo
    • Organizer
      The 22st International Conference on Secondary Ion Mass Spectrometry
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Generation of massive cluster ions with electrospray ion source2019

    • Author(s)
      T. Matsuda, T. Seki, T. Aoki, J. Matsuo
    • Organizer
      The 22st International Conference on Secondary Ion Mass Spectrometry
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Effects of organic acid on polymer ionization process with various cluster ion beam irradiation2019

    • Author(s)
      Y. Ishii, R. Shishido, J. Matsuo and M. Fujii
    • Organizer
      The 22st International Conference on Secondary Ion Mass Spectrometry
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ionisation behaviours of high affinity molecules on the silk fibroin substrate using Ar GCIB2019

    • Author(s)
      N. Sano, T. Hashimoto and J. Matsuo
    • Organizer
      The 22st International Conference on Secondary Ion Mass Spectrometry
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] OBSERVATION OF LIQUID MOLECULES WITH AMBIENT SIMS USING SWIFT HEAVY IONS2019

    • Author(s)
      J. Matsuo, S. Toshio, A. Takaaki
    • Organizer
      The 24th International Conference on Ion Beam Analysis
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Sputtering of biomaterials with large cluster ion beams2019

    • Author(s)
      J. Matsuo
    • Organizer
      The 15th International Symposium on Sputtering & Plasma Processes
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] エレクトロスプレーイオン源を用いた巨大クラスターイオンの生成2019

    • Author(s)
      松田大輝, 瀬木利夫, 青木学聡, 松尾二郎
    • Organizer
      第20回QSEC公開シンポジウム
    • Related Report
      2019 Annual Research Report
  • [Presentation] 高エネルギークラスターイオン源を用いたSIMS測定2019

    • Author(s)
      平田健太郎, 瀬木利夫, 青木学聡, 松尾二郎
    • Organizer
      第20回QSEC公開シンポジウム
    • Related Report
      2019 Annual Research Report
  • [Presentation] 反応性ガスクラスターインジェクションによる高アスペクト比エッチングに向けた研究2019

    • Author(s)
      瀬木 利夫, 荘所 正, 小池国彦, 青木 学聡, 松尾 二郎
    • Organizer
      The 80th JSAP Spring Meeting
    • Related Report
      2019 Annual Research Report
  • [Presentation] エレクトロスプレーイオン源を用いた巨大クラスターイオンの生成2019

    • Author(s)
      松田大輝, 瀬木 利夫, 青木 学聡, 松尾 二郎
    • Organizer
      The 80th JSAP Spring Meeting
    • Related Report
      2019 Annual Research Report
  • [Presentation] リチウムイオン電池の電解質の大気圧 MeV-SIMS測定2019

    • Author(s)
      野々村知也, 瀬木 利夫, 青木 学聡, 松尾 二郎
    • Organizer
      The 80th JSAP Spring Meeting
    • Related Report
      2019 Annual Research Report
  • [Presentation] 大気圧MeV-SIMSの開発と固液界面分析2019

    • Author(s)
      瀬木利夫
    • Organizer
      第53回表面分析研究会
    • Related Report
      2019 Annual Research Report
    • Invited
  • [Presentation] Liquid Adsorption and Desorption measured with Ambient ?SIMS2019

    • Author(s)
      J. Matsuo, T. Seki, T. Aoki
    • Organizer
      Symposium on Surface and Nano Science 2019
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 巨大ガスクラスタービームによる表面クリーニングと加工2019

    • Author(s)
      瀬木 利夫
    • Organizer
      シリコンテクノロジー分科会第216回研究集会
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] 伝統的イオン衝突シミュレーションプログラムの改善手法の検討2019

    • Author(s)
      青木 学聡
    • Organizer
      The 66th JSAP Spring Meeting, 2019
    • Related Report
      2018 Annual Research Report
  • [Presentation] ミストの付加によるポリマーのイメージング分解能の向上2019

    • Author(s)
      松田 大輝, 瀬木 利夫, 青木 学聡, 松尾 二郎
    • Organizer
      The 66th JSAP Spring Meeting, 2019
    • Related Report
      2018 Annual Research Report
  • [Presentation] 高分子のSIMS分析に向けたエレクトロスプレーイオン源の開発2019

    • Author(s)
      山田 周平, 瀬木 利夫, 青木 学聡, 松尾 二郎
    • Organizer
      The 66th JSAP Spring Meeting, 2019
    • Related Report
      2018 Annual Research Report
  • [Presentation] 反応性ガスクラスターインジェクションを用いた斜め2方向エッチングによる3D構造の作成(II)2019

    • Author(s)
      瀬木 利夫, 山本 洋揮, 古澤 孝弘, 荘所 正, 小池国彦, 青木 学聡, 松尾 二郎
    • Organizer
      The 66th JSAP Spring Meeting, 2019
    • Related Report
      2018 Annual Research Report
  • [Presentation] Improvement in the Detection Sensitivity of Secondary Ions by Na Absorption with the Mist Deposition Method on a PEG Surface2018

    • Author(s)
      T. Matsuda, T. Seki, T. Aoki, J. Matsuo
    • Organizer
      The Scientific International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High-Speed SIMS Imaging Using a High Brightness Cluster Ion Source2018

    • Author(s)
      S. Yamada, T. Seki, T. Aoki, J. Matsuo
    • Organizer
      The Scientific International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Secondary Molecular Ion Emission of Polymers with Various Molecular Weights under Large Cluster Ion Bombardment: Enhancement with the Cationization Technique2018

    • Author(s)
      J. Matsuo, L. Houssiau, H. Gnaser, T. Satoh, M. Fujii, T. Seki, T. Aoki
    • Organizer
      The Scientific International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Adsorption of Liquids Measured with MeV-SIMS in Ambient2018

    • Author(s)
      J. Matsuo, T. Seki, T. Aoki
    • Organizer
      16th International Conference on Nuclear Microprobe Technology and Applications
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Low-energy Electron and Particle Microscopies in Liquid, Gaseous, and Frozen Conditions2018

    • Author(s)
      D. Muller, K. Molhave, S. Chikara, J. Matsuo, M. Willinger, A. Belianinov, H. Plank
    • Organizer
      Microscopy & MicroAnalysis 2018 Meeting
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] SIMS Analysis of Liquid Materials in Low Vacuum with Large Cluster Ion Beam2018

    • Author(s)
      T. Seki, K. Suzuki, T. Aoki, J. Matsuo
    • Organizer
      25th International Conference on Application of Accelerators in Research and Industry
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Chemical Analysis under Ambient Conditions using MeV-Energy Heavy Ion2018

    • Author(s)
      T. Seki
    • Organizer
      25th International Conference on Application of Accelerators in Research and Industry
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Cluster Ion Beams: History and Technology2018

    • Author(s)
      Yamada, J. Matsuo
    • Organizer
      22nd International Conference on Ion Implantation Technology
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 液体材料の大気圧MeV-SIMS測定2018

    • Author(s)
      瀬木 利夫, 石井 健太, 青木 学聡, 松尾 二郎
    • Organizer
      The 79th JSAP Autumn Meeting, 2018
    • Related Report
      2018 Annual Research Report
  • [Presentation] 画像分析技術のイメージングSIMS分析への応用2018

    • Author(s)
      青木 学聡, 瀬木 利夫, 松尾 二郎
    • Organizer
      The 79th JSAP Autumn Meeting, 2018
    • Related Report
      2018 Annual Research Report
  • [Presentation] ミスト法を用いたセシウム付加によるPEG表面の次イオン検出感度の向上2018

    • Author(s)
      松田 大輝, 松尾 二郎, 瀬木 利夫, 青木 学聡
    • Organizer
      The 79th JSAP Autumn Meeting, 2018
    • Related Report
      2018 Annual Research Report
  • [Presentation] Fabrication of multilayer lever structure by double-angled etching with reactive gas cluster injection2018

    • Author(s)
      T. Seki, H. Yamamoto, T. Kozawa, T. Shojo, K. Koike, T. Aoki, J. Matsuo
    • Organizer
      40th International Symposium on Dry Process
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 大気圧SIMS法による固液界面の観察2018

    • Author(s)
      松尾 二郎
    • Organizer
      2018年日本表面真空学会学術講演会
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] Ambient Secondary Ion Mass Analysis of Fatty Acids with MeV-energy Heavy Ion2018

    • Author(s)
      T. Seki, T. Aoki, J. Matsuo
    • Organizer
      The 19th Workshop on Surface and Interface Analysis by Ion Beam
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Improvement in Detection Sensitivity of Secondary Ions by Na Absorption with Mist Deposition Method on a PEG Surface2018

    • Author(s)
      T. Matsuda, T. Seki, T. Aoki, J. Matsuo
    • Organizer
      The 28th Annual Meeting of MRS-J
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 新しいプローブイオンを用いたSIMSによる有機材料分析2018

    • Author(s)
      瀬木 利夫
    • Organizer
      量子ビームによるナノ構造形成とその医療・バイオ応用技術」調査専門委員会 公開研究会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] 固液界面分析に向けたAmbient SIMS法の開発2018

    • Author(s)
      石井 健太, 瀬木 利夫, 青木 学聡, 松尾 二 郎
    • Organizer
      The 65th JSAP Autumn Meeting, 2018
    • Related Report
      2017 Annual Research Report
  • [Presentation] Cationization Technique for Polyethylene glycol (PEG) with Argon Cluster Ion Beam connected with AccuToF Mass Analyzer2018

    • Author(s)
      Prutchayawoot Thopan, Rika Oki, Hubert Gnaser, Toshio Seki, Takaaki Aoki, Jiro Matsuo
    • Organizer
      The 65th JSAP Autumn Meeting, 2018
    • Related Report
      2017 Annual Research Report
  • [Presentation] ミスト法を用いたナトリウム付加によるPEG表面の2次 イオン検出感度の向上2018

    • Author(s)
      松田 大輝 , 瀬木 利夫 , 青木 学聡 , 松尾 二郎
    • Organizer
      The 65th JSAP Autumn Meeting, 2018
    • Related Report
      2017 Annual Research Report
  • [Presentation] 二次電子増倍管(CEM)を用いたビーム径測定システムの 開発2018

    • Author(s)
      山田 周平, 瀬木 利夫, 青木 学聡, 松尾 二郎
    • Organizer
      The 65th JSAP Autumn Meeting, 2018
    • Related Report
      2017 Annual Research Report
  • [Presentation] 反応性ガスクラスターインジェクションを用いた斜め2 方向エッチングによる3D構造の作成2018

    • Author(s)
      瀬木 利夫, 山本 洋揮, 古澤 孝弘, 荘所 正, 小池 国彦, 青木 学聡, 松尾 二郎
    • Organizer
      The 65th JSAP Autumn Meeting, 2018
    • Related Report
      2017 Annual Research Report
  • [Presentation] EuBaCo2O5.38の光励起酸素輸送ダイナミクス2018

    • Author(s)
      慶尾 直哉, 羽田 真毅, 西川 亘, 山下 善文, 林 靖彦, 横谷 尚睦, 松尾 二郎, 浅香 透, 鈴木 達也, 恩田 健, 西郷 将生, 阿部 伸行, 有馬 孝尚, 小沢 陽,沖本 洋一, 腰原 伸也
    • Organizer
      The 65th JSAP Autumn Meeting, 2018
    • Related Report
      2017 Annual Research Report
  • [Presentation] SIMS技術の飛躍的発展を支える新技術: 新奇なイオンビーム開発から先端質量分析法まで2018

    • Author(s)
      松尾 二郎
    • Organizer
      The 65th JSAP Autumn Meeting, 2018
    • Related Report
      2017 Annual Research Report
  • [Presentation] Ambient Secondary Ion Mass Analysis with MeV-energy Heavy Ion2017

    • Author(s)
      T. Seki, K. Ishii, M. Kusakari, T. Aoki, J. Matsuo
    • Organizer
      11th International Symposium on Atomic Level Characterizations for New Materials and Devices ’17
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Fabrication of 3D structure by double-angled etching with reactive gas cluster injection2017

    • Author(s)
      T. Seki, H. Yamamoto, T. Kozawa, T. Shojo, K. Koike, T. Aoki and J. Matsuo
    • Organizer
      39th International Smposium on Dry Process
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Characterization of Bio-Molecules with GCIBSIMS equipped with MS/MS SpectrometerSecondary Molecular Ion Emission of Polymers with Various Molecular Weights under Large Cluster Ion Bombardment: Enhancement with the Cationization Technique2017

    • Author(s)
      J. Matsuo, T. Seki, T. Aoki
    • Organizer
      AVS 64th International Symposium & Exhibition 2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Organic Material Analysis with a SIMS System with Q-TOF MS/MS Technique2017

    • Author(s)
      J. Matsuo, L. Houssiau, H. Gnaser, T. Seki1,T. Aoki
    • Organizer
      The 8th International Symposium on Surface Science
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ambient SIMS using MeV-Energy Heavy Ion2017

    • Author(s)
      T. Seki, K. Ishii, M. Kusakari, T. Aoki and J. Matsuo
    • Organizer
      The 23rd International Conference on Ion Beam Analysis
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ambient SIMS using swift heavy ions2017

    • Author(s)
      J. Matsuo
    • Organizer
      22nd International Workshop on Inelastic Ion-Surface Collisions
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Observation of Adsorption and Desorption of Water Molecules with Ambient SIMS2017

    • Author(s)
      J. Matsuo, T. Seki, T. Aoki
    • Organizer
      21st International Conference on Secondary Ion Mass Spectrometry
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] パイプ型ノズルを用いた湿潤環境下SIMS測定2017

    • Author(s)
      石井 健太, 瀬木 利夫, 青木 学聡, 松尾 二郎
    • Organizer
      The 78th JSAP Autumn Meeting, 2017
    • Related Report
      2017 Annual Research Report
  • [Presentation] PEG表面へのナトリウム付加による2次イオン検出感度向上2017

    • Author(s)
      松田 大輝, 瀬木 利夫, 青木 学聡, 松尾 二郎
    • Organizer
      The 78th JSAP Autumn Meeting, 2017
    • Related Report
      2017 Annual Research Report
  • [Presentation] ClF3中性クラスターエッチング表面の凹凸構造2017

    • Author(s)
      瀬木 利夫, 荘所 正, 小池 国彦, 青木 学聡, 松尾 二郎
    • Organizer
      The 78th JSAP Autumn Meeting, 2017
    • Related Report
      2017 Annual Research Report
  • [Presentation] 超高速時間分解電子線回折から見たEuBaCo2O5.38の構造ダイナミクス2017

    • Author(s)
      慶尾 直哉, 村上 寛虎, 羽田 真毅, 西川 亘, 山下 善文, 林 靖彦, 横谷 尚睦, 松尾 二郎, 浅香 透, 鈴木 達也, 阿部 伸行, 有馬 孝尚, 小沢 陽, 沖本 洋一, 腰原 伸也
    • Organizer
      The 78th JSAP Autumn Meeting, 2017
    • Related Report
      2017 Annual Research Report
  • [Presentation] SIMS Measurement in Ambient and Humid Condition2017

    • Author(s)
      K. Ishii, T. Seki, T. Aoki and J. Matsuo
    • Organizer
      The 15th International Conference on Advanced Materials
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Angled Etching by ClF3?Ar Gas Cluster Injection2017

    • Author(s)
      T. Seki, H. Yamamoto, T. Kozawa, T. Shojo, K. Koike, T. Aoki and J. Matsuo
    • Organizer
      The 15th International Conference on Advanced Materials
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] クラスターSIMS法によるポリマー材料の評価2017

    • Author(s)
      松尾 二郎
    • Organizer
      2017年真空・表面科学合同講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Organic Material Analysis with a SIMS System Equipped with a High-Current Gas Cluster Ion Source and Q-TOF MS/MS2017

    • Author(s)
      J. Mastuo
    • Organizer
      79th IUVSTA Workshop
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Book] 最新 実用真空技術総覧2019

    • Author(s)
      笠井 秀明 外157名
    • Total Pages
      1096
    • Publisher
      (株)エヌ・ティー・エス
    • Related Report
      2018 Annual Research Report

URL: 

Published: 2017-04-28   Modified: 2022-01-27  

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