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Development of next-generation full-field X-ray microscope based on X-ray mirrors

Research Project

Project/Area Number 17H01073
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Quantum beam science
Research InstitutionNagoya University (2021)
Osaka University (2017-2020)

Principal Investigator

Matsuyama Satoshi  名古屋大学, 工学研究科, 准教授 (10423196)

Project Period (FY) 2017-04-01 – 2022-03-31
Project Status Completed (Fiscal Year 2021)
Budget Amount *help
¥41,860,000 (Direct Cost: ¥32,200,000、Indirect Cost: ¥9,660,000)
Fiscal Year 2021: ¥3,380,000 (Direct Cost: ¥2,600,000、Indirect Cost: ¥780,000)
Fiscal Year 2020: ¥7,540,000 (Direct Cost: ¥5,800,000、Indirect Cost: ¥1,740,000)
Fiscal Year 2019: ¥11,050,000 (Direct Cost: ¥8,500,000、Indirect Cost: ¥2,550,000)
Fiscal Year 2018: ¥10,660,000 (Direct Cost: ¥8,200,000、Indirect Cost: ¥2,460,000)
Fiscal Year 2017: ¥9,230,000 (Direct Cost: ¥7,100,000、Indirect Cost: ¥2,130,000)
KeywordsX線 / X線顕微鏡 / X線結像ミラー / X線ミラー / X線結像
Outline of Final Research Achievements

In this study, we aimed to realize a high-performance full-field X-ray microscope by developing the world's first reflective X-ray lens (Advanced Kirkpatrick-Baez imaging mirror), which is a key device to improve efficiency and spatial resolution.
The reflective lens was designed and simulated from various perspectives, and an optimized prototype was fabricated. The reflective lens was developed by coating it with multilayer for 8 keV X-rays. Its performance was evaluated by constructing an X-ray microscope at SPring-8, and it could resolve a 20 nm structure. The world's smallest resolution was achieved in an X-ray microscope using a reflective lens.

Academic Significance and Societal Importance of the Research Achievements

高分解能なX線顕微鏡を開発できた点と,さらなる高分解能化のための足掛かりを得ることができた点が,本研究の主要な成果である.本研究がさらに進むことで,これまでは見ることができなかった試料や現象を高精細に可視化・分析し,その理解を深めることで新しい科学を拓くことが可能となる.例えば,昨今注目されている電池や触媒の挙動を詳細に可視化・分析することで,その性能を飛躍的に高めるなどが期待される.

Report

(6 results)
  • 2021 Annual Research Report   Final Research Report ( PDF )
  • 2020 Annual Research Report
  • 2019 Annual Research Report
  • 2018 Annual Research Report
  • 2017 Annual Research Report
  • Research Products

    (102 results)

All 2022 2021 2020 2019 2018 2017 Other

All Journal Article (15 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 15 results,  Open Access: 12 results) Presentation (81 results) (of which Int'l Joint Research: 41 results,  Invited: 13 results) Book (1 results) Remarks (4 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] X-ray adaptive zoom condenser utilizing an intermediate virtual focus2021

    • Author(s)
      Matsuyama Satoshi、Yamaguchi Hiroyuki、Inoue Takato、Nishioka Yuka、Yamada Jumpei、Sano Yasuhisa、Kohmura Yoshiki、Yabashi Makina、Ishikawa Tetsuya、Yamauchi Kazuto
    • Journal Title

      Optics Express

      Volume: 29 Issue: 10 Pages: 15604-15604

    • DOI

      10.1364/oe.422723

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Optimal deformation procedure for hybrid adaptive x-ray mirror based on mechanical and piezo-driven bending system2021

    • Author(s)
      Inoue Takato、Nishioka Yuka、Matsuyama Satoshi、Sonoyama Junki、Akiyama Kazuteru、Nakamori Hiroki、Ichii Yoshio、Sano Yasuhisa、Shi Xianbo、Shu Deming、Wyman Max D.、Harder Ross、Kohmura Yoshiki、Yabashi Makina、Assoufid Lahsen、Ishikawa Tetsuya、Yamauchi Kazuto
    • Journal Title

      Review of Scientific Instruments

      Volume: 92 Issue: 12 Pages: 123706-123706

    • DOI

      10.1063/5.0070465

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Hard X-ray nanoprobe scanner2021

    • Author(s)
      Yamada Jumpei、Inoue Ichiro、Osaka Taito、Inoue Takato、Matsuyama Satoshi、Yamauchi Kazuto、Yabashi Makina
    • Journal Title

      IUCrJ

      Volume: 8 Issue: 5 Pages: 713-718

    • DOI

      10.1107/s2052252521007004

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] X-Ray Single-Grating Interferometry for Wavefront Measurement and Correction of Hard X-Ray Nanofocusing Mirrors2020

    • Author(s)
      Yamada Jumpei、Inoue Takato、Nakamura Nami、Kameshima Takashi、Yamauchi Kazuto、Matsuyama Satoshi、Yabashi Makina
    • Journal Title

      Sensors

      Volume: 20 Issue: 24 Pages: 7356-7356

    • DOI

      10.3390/s20247356

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Compact full-field hard x-ray microscope based on advanced Kirkpatrick?Baez mirrors2020

    • Author(s)
      Yamada Jumpei、Matsuyama Satoshi、Hirose Raita、Takeda Yoshihiro、Kohmura Yoshiki、Yabashi Makina、Omote Kazuhiko、Ishikawa Tetsuya、Yamauchi Kazuto
    • Journal Title

      Optica

      Volume: 7 Issue: 4 Pages: 367-367

    • DOI

      10.1364/optica.386012

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Generation of an X-ray nanobeam of a free-electron laser using reflective optics with speckle interferometry2020

    • Author(s)
      Inoue Takato、Matsuyama Satoshi、Yamada Jumpei、Nakamura Nami、Osaka Taito、Inoue Ichiro、Inubushi Yuichi、Tono Kensuke、Yumoto Hirokatsu、Koyama Takahisa、Ohashi Haruhiko、Yabashi Makina、Ishikawa Tetsuya、Yamauchi Kazuto
    • Journal Title

      Journal of Synchrotron Radiation

      Volume: 27 Issue: 4 Pages: 883-889

    • DOI

      10.1107/s1600577520006980

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Development of X-ray imaging of intracellular elements and structure2020

    • Author(s)
      Matsuyama S, Maeshima K, and Shimura M
    • Journal Title

      JAAS

      Volume: - Issue: 7 Pages: 1279-1294

    • DOI

      10.1039/d0ja00128g

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Focus characterization of an X-ray free-electron laser by intensity correlation measurement of X-ray fluorescence2020

    • Author(s)
      Nakamura Nami、Matsuyama Satoshi、Inoue Takato、Inoue Ichiro、Yamada Jumpei、Osaka Taito、Yabashi Makina、Ishikawa Tetsuya、Yamauchi Kazuto
    • Journal Title

      Journal of Synchrotron Radiation

      Volume: 27 Issue: 5 Pages: 1366-1371

    • DOI

      10.1107/s1600577520009868

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Full-field X-ray fluorescence microscope based on total-reflection advanced Kirkpatrick-Baez mirror optics2019

    • Author(s)
      S. Matsuyama, J. Yamada, Y. Kohmura, M. Yambashi, T. Ishikawa, and K. Yamauchi
    • Journal Title

      Optics Express

      Volume: 27(13) Issue: 13 Pages: 18318-18328

    • DOI

      10.1364/oe.27.018318

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Compact reflective imaging optics in hard X-ray region based on concave and convex mirrors2019

    • Author(s)
      Yamada Jumpei、Matsuyama Satoshi、Sano Yasuhisa、Kohmura Yoshiki、Yabashi Makina、Ishikawa Tetsuya、Yamauchi Kazuto
    • Journal Title

      Optics Express

      Volume: 27 Issue: 3 Pages: 3429-3429

    • DOI

      10.1364/oe.27.003429

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Systematic-error-free wavefront measurement using an X-ray single-grating interferometer2018

    • Author(s)
      Inoue Takato、Matsuyama Satoshi、Kawai Shogo、Yumoto Hirokatsu、Inubushi Yuichi、Osaka Taito、Inoue Ichiro、Koyama Takahisa、Tono Kensuke、Ohashi Haruhiko、Yabashi Makina、Ishikawa Tetsuya、Yamauchi Kazuto
    • Journal Title

      Review of Scientific Instruments

      Volume: 89 Issue: 4 Pages: 043106-043106

    • DOI

      10.1063/1.5026440

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] High-Resolution Full-Field X-ray Microscope for 20-keV X-rays with Multilayer Imaging Mirrors2018

    • Author(s)
      Matsuyama Satoshi、Yamada Jumpei、Hata Kentaro、Kohmura Yoshiki、Yabashi Makina、Ishikawa Tetsuya、Yamauchi Kazuto
    • Journal Title

      Microscopy and Microanalysis

      Volume: 24 Issue: S2 Pages: 288-289

    • DOI

      10.1017/s1431927618013764

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Reflective Imaging Optics Using Concave and Convex Mirrors for a Compact and Achromatic Full-field X-ray Microscope.2018

    • Author(s)
      Yamada Jumpei、Matsuyama Satoshi、Hata Kentaro、Hirose Raita、Takeda Yoshihiro、Kohmura Yoshiki、Yabashi Makina、Omote Kazuhiko、Ishikawa Tetsuya、Yamauchi Kazuto
    • Journal Title

      Microscopy and Microanalysis

      Volume: 24 Issue: S2 Pages: 276-277

    • DOI

      10.1017/s1431927618013715

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Nanofocusing of X-ray free-electron laser using wavefront-corrected multilayer focusing mirrors2018

    • Author(s)
      Matsuyama S.、Inoue T.、Yamada J.、Kim J.、Yumoto H.、Inubushi Y.、Osaka T.、Inoue I.、Koyama T.、Tono K.、Ohashi H.、Yabashi M.、Ishikawa T.、Yamauchi K.
    • Journal Title

      Scientific Reports

      Volume: 8 Issue: 1 Pages: 1-10

    • DOI

      10.1038/s41598-018-35611-0

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Development of concave-convex imaging mirror system for a compact and achromatic full-field x-ray microscope2017

    • Author(s)
      J. Yamada*, S. Matsuyama, S. Yasuda, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi
    • Journal Title

      Proceedings of SPIE

      Volume: 10386 Pages: 12-12

    • DOI

      10.1117/12.2272904

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Presentation] Development of hard X-ray sub-5-nm focusing system with an adaptive multilayer focusing mirror2022

    • Author(s)
      T. Inoue, S. Matsuyama, Y. Tanaka, Y. Ichii, J. Yamada, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi
    • Organizer
      14th International Conference on Synchrotron Radiation Instrumentation (SRI2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of image-based wavefront measurement for adaptive full-field X-ray microscopy2022

    • Author(s)
      Y. Tanaka, S. Matsuyama, T. Inoue, N. Nakamura, J. Yamada, Y. Kohmura, M. Yabashi, K. Omote, T. Ishikawa, and K. Yamauchi
    • Organizer
      14th International Conference on Synchrotron Radiation Instrumentation (SRI2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 形状可変ミラーを用いたX線sub-5 nm集光システムの開発2022

    • Author(s)
      井上陽登,松山智至,田中優人,伊藤篤輝,一井愛雄,山田純平,佐野泰久,香村芳樹,矢橋牧名,石川哲也,山内和人
    • Organizer
      第35回日本放射光学会年会・放射光科学合同シンポジウム
    • Related Report
      2021 Annual Research Report
  • [Presentation] 結像型 X 線顕微鏡を用いた波動伝搬ベースの位相イメージング2022

    • Author(s)
      田中優人,松山智至,井上陽登,山田純平,木村隆志,志村まり,香村芳樹,矢橋牧名,石川哲也,山内和人
    • Organizer
      第35回日本放射光学会年会・放射光科学合同シンポジウム
    • Related Report
      2021 Annual Research Report
  • [Presentation] 高空間分解能な結像型X線顕微鏡のためのin-situ波面計測法の開発2022

    • Author(s)
      田中優人,松山智至,井上陽登,山田純平,香村芳樹,矢橋牧名,表和彦,石川哲也,山内和人
    • Organizer
      2022年度精密工学会春季大会学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 機械学習を用いたX線顕微鏡像からの波面推定2022

    • Author(s)
      青戸仁志,田中優人,松山智至
    • Organizer
      第35回日本放射光学会年会・放射光科学合同シンポジウム
    • Related Report
      2021 Annual Research Report
  • [Presentation] 単結晶圧電素子を用いた形状可変ミラーの開発2022

    • Author(s)
      上松航太、中林荘太、松山智至
    • Organizer
      第35回日本放射光学会年会・放射光科学合同シンポジウム
    • Related Report
      2021 Annual Research Report
  • [Presentation] 単結晶圧電素子を用いた形状可変ミラーの開発2022

    • Author(s)
      上松航太、中林荘太、井上陽登、松山智至
    • Organizer
      2022精密工学会春季大会学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 機械学習を用いたX線顕微鏡像からの波面推定2022

    • Author(s)
      青戸仁志,田中優人,松山智至
    • Organizer
      2022精密工学会春季大会学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 単結晶圧電素子を用いたX線用形状可変ミラーの開発2022

    • Author(s)
      中林荘太,上松航太,松山智至
    • Organizer
      2022精密工学会春季大会学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Development of sub-5 nm focusing system based on precise deformable mirrors2021

    • Author(s)
      T. Inoue, S. Matsuyama, Y. Tanaka, K. Futamura, Y. Ichii, J. Yamada, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi
    • Organizer
      6th International Conference on X-ray Optics and Applications 2021 (XOPT2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Image-based wavefront measurement for full-field X-ray microscopy2021

    • Author(s)
      Y. Tanaka, S. Matsuyama, T. Inoue, N. Nakamura, J. Yamada, Y. Kohmura, M. Yabashi, K. Omote, T. Ishikawa, K. Yamauchi
    • Organizer
      SPIE Optics+Photonics2021
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] ミラー光学系を用いた結像型X線顕微鏡の開発2021

    • Author(s)
      松山智至
    • Organizer
      Optics & Photonics Japan 2021
    • Related Report
      2021 Annual Research Report
    • Invited
  • [Presentation] ミラーベースのX線結像光学システム2021

    • Author(s)
      松山智至
    • Organizer
      SAGA-LSセミナー
    • Related Report
      2021 Annual Research Report
    • Invited
  • [Presentation] 結像型 X 線顕微鏡における in-situ 波面計測手法の開発2021

    • Author(s)
      田中優人,松山智至,井上陽登,中村南美,山田純平,香村芳樹,矢橋牧名,表和彦,石川哲也,山内和人
    • Organizer
      第34回日本放射光学会年会・放射光科学合同シンポジウム
    • Related Report
      2020 Annual Research Report
  • [Presentation] Wolter III 型 advanced KBミラーによる XFEL sub-10 nm 集光光学系の開発2021

    • Author(s)
      山田純平,松山智至,井上陽登,中村南美,田中優人,大坂泰斗,井上伊知郎,犬伏雄一,湯本博勝,小山貴久,大橋治彦,山内和人,矢橋牧名
    • Organizer
      第34回日本放射光学会年会・放射光科学合同シンポジウム
    • Related Report
      2020 Annual Research Report
  • [Presentation] X線ミラーを用いたsub-5nm集光システムの開発2021

    • Author(s)
      井上陽登,松山智至,一井愛雄,山田純平,佐野泰久,山内和人
    • Organizer
      第34回日本放射光学会年会・放射光科学合同シンポジウム
    • Related Report
      2020 Annual Research Report
  • [Presentation] コヒーレントX線散乱を用いたXFELナノビーム強度プロファイルの再構成2021

    • Author(s)
      中村南美,松山智至,山田純平,井上陽登,井上伊知郎,矢橋牧名,石川哲也,山内和人
    • Organizer
      第34回日本放射光学会年会・放射光科学合同シンポジウム
    • Related Report
      2020 Annual Research Report
  • [Presentation] 圧電素子駆動型形状可変ミラーを用いたX線sub-5nm集光システムの開発2021

    • Author(s)
      井上陽登,松山智至,田中優人,二村浩平,一井愛雄,山田純平,佐野泰久,香村芳樹,矢橋牧名,石川哲也,山内和人
    • Organizer
      2021年度精密工学会春季大会学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] 像型X線顕微鏡における波面計測手法の開発2021

    • Author(s)
      田中優人,松山智至,井上陽登,中村南美,山田純平,香村芳樹,矢橋牧名,表和彦,石川哲也,山内和人
    • Organizer
      2021年度精密工学会春季大会学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] 複数の凸面鏡を持つ?度な硬 X 線結像光学系の開発(第?報)2021

    • Author(s)
      松山智至,波多健太郎,山内和人
    • Organizer
      2021年度精密工学会春季大会学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Precise wavefront measurement using grating interferometer for sub-10 nm focusing system2020

    • Author(s)
      N. Nakamura, J. Yamada, S. Matsuyama, T. Inoue, T. Osaka, H. Yumoto, T. Koyama, H. Ohashi, M. Yabashi, T. Ishikawa, and K. Yamauchi
    • Organizer
      5th International Conference on X-ray Optics and Applications 2020
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ultraprecise fabrication of X-ray mirrors for XFEL sub-10 nm focusing system based on Wolter type III geometry2020

    • Author(s)
      T. Inoue, J. Yamada, S. Matsuyama, N. Nakamura, T. Osaka, H. Yumoto, T. Koyama, H. Ohashi, M. Yabashi, T. Ishikawa, and K. Yamauchi
    • Organizer
      5th International Conference on X-ray Optics and Applications 2020
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Adaptive x-ray zoom condenser system based on concave and convex mirrors2020

    • Author(s)
      Y. Nishioka, H. Yamaguchi, S. Matsuyama, J. Sonoyama, K. Akiyama, H. Nakamori, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, L. Assoufid, K. Yamauchi
    • Organizer
      5th International Conference on X-ray Optics and Applications 2020
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of x-ray mirrors for XFEL sub-10 nm focusing system based on Wolter type III geometry2020

    • Author(s)
      T. Inoue, J. Yamada, S. Matsuyama, N. Nakamura, T. Osaka, H. Yumoto, T. Koyama, H. Ohashi, M. Yabashi, T. Ishikawa, and K. Yamauchi
    • Organizer
      SPIE Optics+Photonics2020
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of ultraprecise X-ray focusing mirrors based on Wolter geometry2020

    • Author(s)
      T. Inoue, J. Yamada, S. Matsuyama, N. Nakamura, T. Osaka, H. Yumoto, T. Koyama, H. Ohashi, M. Yabashi, T. Ishikawa, and K. Yamauchi
    • Organizer
      SPIE Optics+Photonics2020
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Precise wavefront measurement using grating interferometer for sub-10 nm XFEL focusing system2020

    • Author(s)
      N. Nakamura, J. Yamada, S. Matsuyama, T. Inoue, T. Osaka, H. Yumoto, T. Koyama, H. Ohashi, M. Yabashi, T. Ishikawa, and K. Yamauchi
    • Organizer
      5th International Conference on X-ray Optics and Applications 2020
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of X-ray adaptive focusing optics with four mirrors deformable between concave and convex shapes2020

    • Author(s)
      Y. Nishioka, H. Yamaguchi, S. Matsuyama, J. Sonoyama, K. Akiyama, H. Nakamori, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi
    • Organizer
      5th International Conference on X-ray Optics and Applications 2020
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] WolterⅢ型Advanced KBミラーを用いたX線自由電子レーザーsub-10 nm集光システムの開発(第3報)2020

    • Author(s)
      井上陽登,山田純平,松山智至,中村南美,田中優人,大坂泰斗,湯本博勝,小山貴久,大橋治彦,矢橋牧名,石川哲也,山内和人
    • Organizer
      2020年度精密工学会秋季大会学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] 多層膜結像ミラーを用いた高分解能結像型X線顕微鏡の開発2020

    • Author(s)
      松山智至,山田純平,井上陽登,表和彦,廣瀬雷太,武田佳彦,香村芳樹,矢橋牧名,石川哲也,山内和人
    • Organizer
      第33回日本放射光学会年会・放射光科学合同シンポジウム
    • Related Report
      2019 Annual Research Report
  • [Presentation] WolterⅢ型AdvancedKBミラーを用いたX線自由電子レーザーsub-10nm集光システムの開発(第2報)高反射率多層膜の作製と差分成膜による形状修正2020

    • Author(s)
      井上陽登,松山智至,山田純平,中村南美,大坂泰斗,湯本博勝,小山貴久,大橋治彦,矢橋牧名,石川哲也,山内和人
    • Organizer
      2020年度精密工学会春季大会学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] High-Resolution Full-Field X-Ray Microscope Based on Multilayer Advanced Kirkpatrick-Baez Mirror Optics2019

    • Author(s)
      S. Matsuyama
    • Organizer
      XOPT2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Precision KB mirror alignment using new nanobeam diagnosis2019

    • Author(s)
      T. Inoue, S. Matsuyama, N. Nakamura, H. Yumoto, Y. Inubushi, T. Koyama, T. Osaka, I. Inoue, K. Tono, H. Ohashi, M. Yabashi, T. Ishikawa, and K. Yamauchi
    • Organizer
      XOPT2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of XFEL sub-10 nm focusing system based on Wolter III-advanced KB optics2019

    • Author(s)
      J. Yamada, S. Matsuyama, T. Inoue, N, Nakamura, T. Osaka, I. Inoue, Y. Inubushi, K. Tono, H. Yumoto, T. Koyama, H. Ohashi, T. Ishikawa, K. Yamauchi, and M. Yabashi
    • Organizer
      XOPT2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Reflective imaging device using concave-convex mirrors for compact full-field X-ray microscope2019

    • Author(s)
      T. Hagiwara, J. Yamada, S. Matsuyama, Y. Sano, R. Hirose, Y. Takeda, Y. Kohmura, M. Yabashi, K. Omote, T. Ishikawa, and K. Yamauchi
    • Organizer
      XOPT2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Nanobeam diagnosis for XFEL sub-10nm focusing system2019

    • Author(s)
      N. Nakamura, S. Matsuyama, T. Inoue, H. Yumoto, Y. Inubushi, T. Koyama, T. Osaka, I. Inoue, K. Tono, H. Ohashi, M. Yabashi, T. Ishikawa, and K. Yamauchi
    • Organizer
      XOPT2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Precision focusing mirror alignment at SACLA using new nanobeam diagnosis2019

    • Author(s)
      T. Inoue, S. Matsuyama, N. Nakamura, H. Yumoto, Y. Inubushi, T. Koyama, T. Osaka, I. Inoue, K. Tono, H. Ohashi, M. Yabashi, T. Ishikawa, and K. Yamauchi
    • Organizer
      SPIE Optics+Photonics2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of high-resolution full-field X-ray microscope based on multilayer advanced Kirkpatrick-Baez mirrors2019

    • Author(s)
      S. Matsuyama
    • Organizer
      SPIE Optics+Photonics2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Beam size measurement for XFEL nanobeam using intensity interferometer of X-ray fluorescence2019

    • Author(s)
      N. Nakamura, S. Matsuyama, T. Inoue, I. Inoue, T. Osaka, Y. Inubushi, M. Yabashi, T. Ishikawa, and K. Yamauchi
    • Organizer
      SPIE Optics+Photonics2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of XFEL sub-10 nm focusing mirrors: wavefront-corrected multilayer KB system and upgrade to advanced KB system2019

    • Author(s)
      J. Yamada, S. Matsuyama, T. Inoue, N. Nakamura, T. Osaka, I. Inoue, Y. Inubushi, K. Tono, H. Yumoto, T. Koyama, H. Ohashi, T. Ishikawa, K. Yamauchi, and M. Yabashi
    • Organizer
      X RIAO-XIII OPTILAS-MOPM 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] High-resolution full-field X-ray microscope with multilayer advanced Kirkpatrick-Baez mirror optics2019

    • Author(s)
      S. Matsuyama
    • Organizer
      The 15th Symposium of Japanese Research Community on X-ray Imaging Optics
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Fabrication, metrology, and alignment of the newly-developed ML advanced KB mirror for sub-10 nm focusing2019

    • Author(s)
      S. Matsuyama
    • Organizer
      APS-U Metrology Workshop
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 多層膜結像ミラーを用いた高分解能 X 線顕微鏡の開発(第二報)2019

    • Author(s)
      松山智至,山田純平,井上陽登,表和彦,廣瀬雷太,武田佳彦,香村芳樹,矢橋牧名,石川哲也,山内和人
    • Organizer
      2019年度精密工学会秋季大会学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 凹・凸面形状可変ミラーを組み合わせたX線ズームコンデンサの開発2019

    • Author(s)
      山口浩之,松山智至,園山純生,秋山和輝,中森紘基,佐野泰久,香村芳樹,矢橋牧名,石川哲也,山内和人
    • Organizer
      2019年度精密工学会秋季大会学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] WolterⅢ型Advanced KBミラーを用いたX線自由電子レーザーsub-10 nm集光システムの開発2019

    • Author(s)
      井上陽登,松山智至,山田純平,中村南美,大坂泰斗,湯本博勝,小山貴久,大橋治彦,矢橋牧名,石川哲也,山内和人
    • Organizer
      2019年度精密工学会秋季大会学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] X 線自由電子レーザーナノ集光システムの開発 (第2報)-蛍光X線の強度干渉現象を利用したビーム径計測手法の実証-2019

    • Author(s)
      中村南美,松山智至,井上陽登,井上伊知郎,大坂泰斗,山田純平,湯本博勝,小山貴久,大橋治彦,矢橋牧名,石川哲也,山内和人
    • Organizer
      2019年度精密工学会秋季大会学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] AKBミラーこの10年―これから何をしなくてはならないか?―2019

    • Author(s)
      松山智至
    • Organizer
      X線ナノ集光技術研究会 10周年記念研究会
    • Related Report
      2019 Annual Research Report
    • Invited
  • [Presentation] 凹・凸面鏡を用いた結像型X線顕微鏡の開発2019

    • Author(s)
      山田純平,松山智至,佐野泰久,廣瀬雷太,武田佳彦,香村芳樹,矢橋牧名,表和彦,石川哲也,山内和人
    • Organizer
      第32回放射光学会年会・放射光科学合同シンポジウム
    • Related Report
      2018 Annual Research Report
  • [Presentation] X線波面計測法を用いた結像ミラーの評価2019

    • Author(s)
      萩原拓,山田純平,松山智至,佐野泰久,矢橋牧名,表和彦,石川哲也,山内和人
    • Organizer
      第32回放射光学会年会・放射光科学合同シンポジウム
    • Related Report
      2018 Annual Research Report
  • [Presentation] X線波面計測法を用いた結像ミラーの評価―タイコグラフィを用いたシングルグレーチング干渉計のクロスチェック―2019

    • Author(s)
      萩原拓,山田純平,松山智至,佐野泰久,香村芳樹,矢橋牧名,石川哲也,山内和人
    • Organizer
      2019年度精密工学会春季大会学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Hard-X-ray imaging mirrors for compact and high-resolution full-field microscopy2018

    • Author(s)
      J. Yamada
    • Organizer
      HeKKSaGOn WG5 one-day preconference discussion meeting
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Compact and large-magnification full-field X-ray microscope using concave-convex imaging mirrors2018

    • Author(s)
      J. Yamada, S. Matsuyama, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi
    • Organizer
      International Conference on X-ray Optics and Applications 2018 (XOPT2018) in OPIC2018
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of high-resolution X-ray imaging optical system using multilayer imaging mirrors2018

    • Author(s)
      K. Hata, J. Yamada, S. Matsuyama, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi
    • Organizer
      International Conference on X-ray Optics and Applications 2018 (XOPT2018) in OPIC2018
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of reflective imaging optics using concave and convex mirrors2018

    • Author(s)
      J. Yamada, S. Matsuyama, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi
    • Organizer
      The 6th International Workshop on X-ray Optics and Metrology Satellite Meeting of SRI 2018 (IWXM 2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Hard-x-ray imaging mirror optics using concave and convex mirrors2018

    • Author(s)
      J. Yamada, S. Matsuyama, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi
    • Organizer
      The 13th International Conference on Synchrotron Radiation Instrumentation (SRI 2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Full‐field imaging and focusing with advanced mirror‐based optics2018

    • Author(s)
      S. Matsuyama
    • Organizer
      The 13th International Conference on Synchrotron Radiation Instrumentation (SRI 2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Reflective Imaging Optics using Concave and Convex Mirrors for A Compact and Achromatic Full-field X-ray Microscope2018

    • Author(s)
      J. Yamada
    • Organizer
      14th International Conference on X-ray Microscopy (XRM2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High-resolution full-field X-ray microscope for 20-keV X-rays with multilayer imaging mirrors2018

    • Author(s)
      S. Matsuyama
    • Organizer
      14th International Conference on X-ray Microscopy (XRM2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 小型かつ色収差の無い高分解能結像型X線顕微鏡の開発2018

    • Author(s)
      山田純平,松山智至,波多健太郎,萩原拓,佐野泰久,香村芳樹,矢橋牧名,石川哲也,山内和人
    • Organizer
      2018年度精密工学会秋季大会学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 小型かつ大倍率が実現可能なX線結像ミラーの開発2018

    • Author(s)
      山田純平,松山智至,波多健太郎,佐野泰久,香村芳樹,矢橋牧名,石川哲也,山内和人
    • Organizer
      第31回放射光学会年会・放射光科学合同シンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] 大開口数多層膜集光ミラーを用いた sub-10nm 集光システムの開発2018

    • Author(s)
      川合蕉吾,松山智至,井上陽登,湯本博勝,犬伏雄一,小山貴久,大坂泰斗,大橋治彦,矢橋牧名,石川哲也,山内和人
    • Organizer
      第31回放射光学会年会・放射光科学合同シンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] 超精密X線ミラーが拓く次世代X線集光・結像2018

    • Author(s)
      松山智至
    • Organizer
      レーザー学会学術講演会 第38回年次大会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 多層膜結像ミラー光学系による高空間分解能なX線顕微鏡の開発2018

    • Author(s)
      波多健太郎,山田純平,松山智至,佐野泰久,香村芳樹,矢橋牧名,石川哲也,山内和人
    • Organizer
      2018年度精密工学会春季大会学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Achromatic and High-Resolution Full-Field X-ray Microscope and its Applicaiton2017

    • Author(s)
      S. Matsuyama, J. Yamada, S. Yasuda, Y. Kohmura, H. Okadam, Y. Sano, M. Yabashi, T. Ishikawa, and K. Yamauchi
    • Organizer
      International conference on X-ray optics and applications 2017 (XOPT'17) in OPIC2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of calibration method for X-ray single-grating interferometry2017

    • Author(s)
      T. Inoue, S. Matsuyama, S. Kawai, H. Yumoto, Y. Inubushi, T. Koyama, K. Tono, H. Ohashi, T. Katayama, S. Goto, T. Ishikawa, M. Yabashi, and K. Yamauchi
    • Organizer
      International conference on X-ray optics and applications 2017 (XOPT'17) in OPIC2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of a multilayer KB mirror system for sub-10nm XFEL focusing2017

    • Author(s)
      S. Kawai, S. Matsuyama, T. Inoue, H. Yumoto, Y. Inubushi, T. Osaka, T. Koyama, K. Tono, H. Ohashi, M. Yabashi, T. Ishikawa, and K. Yamauchi
    • Organizer
      International conference on X-ray optics and applications 2017 (XOPT'17) in OPIC2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High-magnification X-ray imaging mirror system consisting of elliptical concave and hyperbolic convex mirrors2017

    • Author(s)
      J. Yamada, S. Matsuyama, S. Yasuda, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi
    • Organizer
      International conference on X-ray optics and applications 2017 (XOPT'17) in OPIC2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of full-field x-ray fluorescence microscope using total-reflection mirrors2017

    • Author(s)
      S. Matsuyama, J. Yamada, S. Yasuda, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi
    • Organizer
      SPIE Optics+Photonics2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of concave-convex imaging mirror system for a compact and achromatic full-field x-ray microscope2017

    • Author(s)
      J. Yamada, S. Matsuyama, S. Yasuda, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi
    • Organizer
      SPIE Optics+Photonics2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of an X-ray imaging optical system consisting of concave and convex mirrors2017

    • Author(s)
      J. Yamada, S. Matsuyama, S. Yasuda, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi
    • Organizer
      The 24th Congress of the International Commission for Optics, X-ray and High-energy Optics
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Full-field X-ray fluorescence imaging based on total-reflection imaging mirrors2017

    • Author(s)
      S. Matsuyama, S. Yasuda, J. Yamada, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi
    • Organizer
      The 24th Congress of the International Commission for Optics, X-ray and High-energy Optics
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of X-ray imaging mirror for an achromatic and high-resolution full-field X-ray microscope2017

    • Author(s)
      J. Yamada, S. Matsuyama, S. Yasuda, Y. Sano, and K. Yamauchi
    • Organizer
      The 32nd Annual Meeting of American Society for Precision Engineering (ASPE2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Wavefront sensing for nano-focusing characterization2017

    • Author(s)
      S. Matsuyama
    • Organizer
      9th Hard X-ray FEL Collaboration Meeting (5-way meeting 2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High performance X-ray focusing system using advanced KB mirror2017

    • Author(s)
      J. Yamada
    • Organizer
      9th Hard X-ray FEL Collaboration Meeting (5-way meeting 2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 多層膜結像ミラーを用いた高分解能X線顕微鏡の実現可能性の検討2017

    • Author(s)
      波多健太郎,山田純平,松山智至,佐野泰久,山内和人
    • Organizer
      精密工学会関西支部 2017年度関西地方定期学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 高分解能かつ色収差のないX線顕微鏡2017

    • Author(s)
      松山智至
    • Organizer
      学振145委員会 第154回研究会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] 多層膜結像ミラーを用いた高分解能X線結像光学系の開発2017

    • Author(s)
      波多健太郎, 山田純平, 松山智至, 佐野泰久, 香村芳樹, 矢橋牧名, 石川哲也, 山内和人
    • Organizer
      2017年度精密工学会秋季大会学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 小型かつ高拡大倍率が実現可能なX線結像光学系の開発(第3報)-凹・凸面鏡を用いた新規光学系の実証と一体型素子化の検討-2017

    • Author(s)
      山田純平,松山智至,波多健太郎,佐野泰久,香村芳樹,矢橋牧名,石川哲也,山内和人
    • Organizer
      2017年度精密工学会秋季大会学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 全反射ミラーを用いた色収差のない結像光学系の開発2017

    • Author(s)
      松山智至
    • Organizer
      第14回X線結像光学シンポジウム
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] 小型かつ高分解能な結像型 X 線顕微鏡の開発2017

    • Author(s)
      山田純平,松山智至,波多健太郎,佐野泰久,香村芳樹,矢橋牧名,石川哲也,山内和人
    • Organizer
      第14回X線結像光学シンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] 多層膜結像ミラーを用いた高分解能X線顕微鏡の実証2017

    • Author(s)
      波多健太郎, 山田純平, 松山智至, 佐野泰久, 香村芳樹, 矢橋牧名, 石川哲也, 山内和人
    • Organizer
      第14回X線結像光学シンポジウム
    • Related Report
      2017 Annual Research Report
  • [Book] 先端の分析法 第2版2022

    • Author(s)
      澤田 嗣郎、小澤 岳昌、北森 武彦、中村 洋(東京理科大学名誉教授)、藤浪 眞紀、宮村 一夫、石丸 洋一郎、浦野 泰照、加地 範匡、坂 真智子、鈴木 茂、瀬藤 光利、宗林 由樹、馬場 嘉信、船津 公人、本田 暁紀、末永 智一、宮野 博、本山 晃、他
    • Total Pages
      1072
    • Publisher
      エヌ・ティー・エス
    • ISBN
      4860437373
    • Related Report
      2021 Annual Research Report
  • [Remarks] 名古屋大学松山研究室

    • URL

      https://x-ray.mp.pse.nagoya-u.ac.jp/

    • Related Report
      2021 Annual Research Report 2020 Annual Research Report 2019 Annual Research Report
  • [Remarks] 大阪大学山内研X線顕微鏡チーム

    • URL

      http://www-up.prec.eng.osaka-u.ac.jp/matsuyama/index.html

    • Related Report
      2018 Annual Research Report
  • [Remarks] 大阪大学山内研究室

    • URL

      http://www-up.prec.eng.osaka-u.ac.jp/

    • Related Report
      2017 Annual Research Report
  • [Remarks] X-ray microscope team

    • URL

      http://www-up.prec.eng.osaka-u.ac.jp/matsuyama/index.html

    • Related Report
      2017 Annual Research Report
  • [Patent(Industrial Property Rights)] X線光学装置2020

    • Inventor(s)
      松山智至
    • Industrial Property Rights Holder
      松山智至
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2020-183795
    • Filing Date
      2020
    • Related Report
      2020 Annual Research Report

URL: 

Published: 2017-04-28   Modified: 2023-01-30  

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