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Development of efficient manufacturing process of nano/micro metal resonators and application for development of optical fuctional devices

Research Project

Project/Area Number 17H01240
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionTokyo Institute of Technology

Principal Investigator

Yoshino Masahiko  東京工業大学, 工学院, 教授 (40201032)

Co-Investigator(Kenkyū-buntansha) 松村 隆  東京電機大学, 工学部, 教授 (20199855)
長尾 忠昭  国立研究開発法人物質・材料研究機構, 国際ナノアーキテクトニクス研究拠点, MANA主任研究者 (40267456)
山中 晃徳  東京農工大学, 工学(系)研究科(研究院), 准教授 (50542198)
梅原 徳次  名古屋大学, 工学研究科, 教授 (70203586)
寺野 元規  岡山理科大学, 工学部, 講師 (90708554)
Project Period (FY) 2017-04-01 – 2021-03-31
Project Status Completed (Fiscal Year 2020)
Budget Amount *help
¥43,810,000 (Direct Cost: ¥33,700,000、Indirect Cost: ¥10,110,000)
Fiscal Year 2020: ¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
Fiscal Year 2019: ¥9,360,000 (Direct Cost: ¥7,200,000、Indirect Cost: ¥2,160,000)
Fiscal Year 2018: ¥15,210,000 (Direct Cost: ¥11,700,000、Indirect Cost: ¥3,510,000)
Fiscal Year 2017: ¥13,910,000 (Direct Cost: ¥10,700,000、Indirect Cost: ¥3,210,000)
Keywords微細塑性加工 / 微細切削加工 / 微細金型 / ホットプレス / トランスファープリンティング / 金微細構造 / 光学機能 / SERS / リフトオフ / SERS基板 / 電磁場解析 / ラマン分析 / 超微細加工 / インプリント法 / 微細金属素子 / 自己組織化 / 光学特性 / 微細エンボス加工 / リフトオフ法 / 分子センサー / ナノインプリント法 / 赤外プラズモンセンサー / SERS効果 / 超微細塑性加工 / インプリント / 冷間接合 / 微細共振素子 / 吸収スペクトル / センサー
Outline of Final Research Achievements

In this project, we developed nano plastic forming method and micro machining method for machining of molds with sub-micrometer size microstructures, and produced plastic molds by hot pressing using these molds. Then, we demonstrated that ultrafine metallic elements of sub-micrometer size can be fabricated from the plastic mold at high efficiency and low cost by means of the transfer printing method. In addition, we investigated the SERS effect of the micro-rhombic Au thin film structures by numerical analysis and experiments in order to clarify the optical functions of ultrafine metallic structures. Through these studies, we had shown the possibility of nano/micro machining technologies to the development of optical functional devices.

Academic Significance and Societal Importance of the Research Achievements

多様な素材に適用できる機械的加工法による超微細加工特性を明らかにし、加工学に関わる多くの学術的、実用的知見を得た。特に硬脆材料の延性モード切削加工や微細金属接合に関する様々な知見は精密加工技術の発展に寄与すると期待される。またガラスや金属に機械的微細加工を施すことにより光学機能性を創出出来ることを実証した。これらの微細加工技術は一般的な精密加工技術の延長にあるため、比較的少ない投資で導入可能と考えられる。また低コストで安定的に供給される汎用素材から高機能材料や高機能デバイスなど付加価値の高い製品を製造できるため、新たなビジネスモデルの開発や異業種交流に繋がることが期待される。

Report

(5 results)
  • 2020 Annual Research Report   Final Research Report ( PDF )
  • 2019 Annual Research Report
  • 2018 Annual Research Report
  • 2017 Annual Research Report
  • Research Products

    (24 results)

All 2020 2019 2018 2017 Other

All Int'l Joint Research (1 results) Journal Article (6 results) (of which Int'l Joint Research: 2 results,  Peer Reviewed: 6 results,  Open Access: 3 results) Presentation (17 results) (of which Int'l Joint Research: 6 results)

  • [Int'l Joint Research] インド工科大学デリー校(インド)

    • Related Report
      2017 Annual Research Report
  • [Journal Article] Effect of Tool Rake Angle and Crystal Orientation on Ductile Mode Cutting of Hard/Brittle Materials2020

    • Author(s)
      Abdallah ABDELKAWY, Masahiko YOSHINO,Yuki NAKAGAWA
    • Journal Title

      International Journal of Automation Technology

      Volume: 14 Issue: 2 Pages: 253-259

    • DOI

      10.20965/ijat.2020.p0253

    • NAID

      130007806076

    • ISSN
      1881-7629, 1883-8022
    • Year and Date
      2020-03-05
    • Related Report
      2020 Annual Research Report 2019 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Chemical Lift-Off Process Using Acetone Ink for Easy Fabrication of Metallic Nano/Microstructures2020

    • Author(s)
      Potejana Potejanasak, Truong Duc Phuc, Motoki Terano, Masahiko Yoshino
    • Journal Title

      International Journal of Automation Technology

      Volume: 14 Issue: 2 Pages: 229-237

    • DOI

      10.20965/ijat.2020.p0229

    • NAID

      130007806079

    • ISSN
      1881-7629, 1883-8022
    • Year and Date
      2020-03-05
    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Subtractive transfer printing process for rapid fabrication of Au nano/micro structures on a polymer substrate2020

    • Author(s)
      Hao Shen, Yuki Nakagawa, Masahiko Yoshino
    • Journal Title

      Journal of Micromechanics and Microengineering

      Volume: 30 Issue: 11 Pages: 115006-115006

    • DOI

      10.1088/1361-6439/aba5dc

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Efficient fabrication process for metallic structures of submicrometer size2020

    • Author(s)
      Hao Shen, Masahiko Yoshino
    • Journal Title

      Journal of Micromechanics and Microengineering

      Volume: 30

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] CHEMICAL STAMPING-COATING-PEELING PROCESS FOR EFFICIENT FABRICATION OF METALLIC NANO/MICROSTRUCTURES2020

    • Author(s)
      Potejana Potejanasak, Truong Duc Phuc, Motoki Terano, Masahiko Yoshino
    • Journal Title

      International Journal of Autometion Technology

      Volume: 14 Pages: 229-237

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Efficient Fabrication Process of Ordered Metal Nanodot Arrays for Infrared Plasmonic Sensor2019

    • Author(s)
      Masahiko Yoshino, Yusuke Kubota, Yuki Nakagawa, Motoki Terano
    • Journal Title

      Micromachines

      Volume: 10 Issue: 6 Pages: 385-385

    • DOI

      10.3390/mi10060385

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Presentation] Development of new type of SERS substrate fabricated by NPF method2020

    • Author(s)
      Kubota Yusuke, Nakagawa Yuki, Nagao Tadaaki, Yoshino Masahiko
    • Organizer
      18th International Conference on Precision Engineering (ICPE2020)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 微細エンボス加工による微細金属素子の作製法2020

    • Author(s)
      吉野 雅彦,青柳 友之,中川 佑貴
    • Organizer
      日本機械学会2020年度年次大会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Development of a Double Layer Metal Nano-structure for the SERS Substrate with NPF and Chemical Etching Process2019

    • Author(s)
      Chang Ye, Yuki Nakagawa, Takatoki Yamamoto, Masahiko Yoshino
    • Organizer
      The 8th International Conference of Asian Society for Precision Engineering and Nanotechnology
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Investigation of Fabrication Method for Micro/Nano Structure of Au Using Oily Ink Stamping2019

    • Author(s)
      Motoki Terano, Masahiko Yoshino, Yousuke Iwasa , Shintaro Chimura, Naoki Okada, Hikari Ikeda
    • Organizer
      The 8th International Conference of Asian Society for Precision Engineering and Nanotechnology
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 微細エンボス加工による金属薄膜の加工特性の検討2019

    • Author(s)
      青柳 友之,中川 佑貴,吉野 雅彦
    • Organizer
      日本機械学会、第13回生産加工・工作機械部門講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 超微細塑性加工と焼鈍を組み合わせた微細金属構造の作製と光機能デバイスへの応用2019

    • Author(s)
      久保田 雄介,吉野 雅彦,中川 佑貴
    • Organizer
      日本機械学会、第13回生産加工・工作機械部門講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 油性インクを用いた金微細構造作製法の検討2019

    • Author(s)
      219)岩佐洋祐,寺野元規,吉野雅彦
    • Organizer
      日本機械学会中国四国学生会第49回学生員卒業研究発表講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Efficient Fabrication Method Of Metallic Nano/Micro Structures For Nano Devices2018

    • Author(s)
      Masahiko Yoshino, Potejana Potejanasak, Duc Phuc Truong, Motoki Terano
    • Organizer
      Integrity/Reliability/Failure in automotive, locomotive, aerospace, civil engineering and biomechanics
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of efficient fabrication process of metallic nanostructures for optical functional surfaces2018

    • Author(s)
      Hao Shen, Masahiko Yoshino, Motoki Terano
    • Organizer
      ICPE2018
    • Related Report
      2018 Annual Research Report 2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Nano embossing for efficient fabrication of metallic nano structured elements2018

    • Author(s)
      Tomoyuki AOYAGI, Masahiko YOSHINO, Motoki TERANO, S. Aravindan, P.V. Rao
    • Organizer
      ICPE2018
    • Related Report
      2018 Annual Research Report 2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 超微細ライン&スペースモールド作製法の検討2018

    • Author(s)
      池田光輝, 岡田直樹, 寺野元規, 吉野雅彦
    • Organizer
      日本金属学会・日本鉄鋼協会 中国四国支部 第40回「若手フォーラム」
    • Related Report
      2018 Annual Research Report
  • [Presentation] Efficient Fabrication Process for Metallic Nanograting Combining Nanomachining and Cold Welding2018

    • Author(s)
      Hao Shen, Masahiko Yoshino
    • Organizer
      2018年精密工学会春季大会学術講演会
    • Related Report
      2018 Annual Research Report 2017 Annual Research Report
  • [Presentation] エンボス加工による微細金属素子の作製2018

    • Author(s)
      青柳友之、S.Aravindan、寺野元規、吉野 雅彦
    • Organizer
      平成30年度塑性加工春季講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] ケミカルスタンプによる金属膜微細構造の作製2018

    • Author(s)
      吉野 雅彦, Potejana Potejanasak, Truong Duc Phuc, 寺野 元規
    • Organizer
      日本機械学会2018年度年次大会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 硬脆材料の微細切削機構に及ぼす工具すくい角の影響2018

    • Author(s)
      吉野 雅彦, Abdallah Abdelfattah Mohamed Abdelkawy
    • Organizer
      第12回生産加工・工作機械部門講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 超微細押込み加工による金属材料の加工特性2018

    • Author(s)
      神藤 亮平,吉野 雅彦,寺野 元規
    • Organizer
      塑性加工連合講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] サブμmサイズの微細C型凸形状のホットエンボス加工2017

    • Author(s)
      神藤亮平、寺野元規、吉野雅彦
    • Organizer
      2017年度砥粒加工学会学術講演会
    • Related Report
      2017 Annual Research Report

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Published: 2017-04-28   Modified: 2022-01-27  

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