| Budget Amount *help |
¥44,070,000 (Direct Cost: ¥33,900,000、Indirect Cost: ¥10,170,000)
Fiscal Year 2019: ¥11,310,000 (Direct Cost: ¥8,700,000、Indirect Cost: ¥2,610,000)
Fiscal Year 2018: ¥16,770,000 (Direct Cost: ¥12,900,000、Indirect Cost: ¥3,870,000)
Fiscal Year 2017: ¥15,990,000 (Direct Cost: ¥12,300,000、Indirect Cost: ¥3,690,000)
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| Outline of Final Research Achievements |
We developed an ultra-wide bandgap oxide semiconductor MgZnO and obtained deep ultraviolet cathodoluminescence covering the wavelengths below 200 nm. An environmental-friendly Mist CVD method was used for the growth, and appropriate choice of source materials allowed high-quality crystals. Internal quantum efficiency at room temperature was about 3% for MgZnO thin films with Mg composition of 0.92 emitting at 217 nm while was increased to about 13% with multiple quantum-well structure. The emission peak from the latter was 212 nm, which was shorter than that from the former, suggesting increased emission efficiency by quantum effect.
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