| Budget Amount *help |
¥43,030,000 (Direct Cost: ¥33,100,000、Indirect Cost: ¥9,930,000)
Fiscal Year 2020: ¥8,580,000 (Direct Cost: ¥6,600,000、Indirect Cost: ¥1,980,000)
Fiscal Year 2019: ¥10,400,000 (Direct Cost: ¥8,000,000、Indirect Cost: ¥2,400,000)
Fiscal Year 2018: ¥10,400,000 (Direct Cost: ¥8,000,000、Indirect Cost: ¥2,400,000)
Fiscal Year 2017: ¥13,650,000 (Direct Cost: ¥10,500,000、Indirect Cost: ¥3,150,000)
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| Outline of Final Research Achievements |
Laser scanning MEMS micromirrors are promising for the ranging of self-driving car and the retinal display of virtual reality. For widening the scan angle and improving the durability, we studied the methods of suppressing the nonlinearities at wide angles and increasing the fracture limit of springs. Adding the electrostatic springs, the nonlinearity of the torsional springs was partially cancelled. Studying the nonlinearity of Coriolis-like motion in 2D scanning, a mirror design method for suppressing the nonlinearity was found. About the extension of the lifetime of torsion springs, it was shown that the lifetime was extended by approximately two orders of magnitude in the practical stress region by coating an atomic layer deposited alumina film of a few nanometers in thickness on the torsion springs.
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