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Open Defect Detection at Interconnects among IC Chips with Relaxation Oscilators

Research Project

Project/Area Number 17H01715
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Computer system
Research InstitutionThe University of Tokushima

Principal Investigator

HASHIZUME Masaki  徳島大学, 大学院社会産業理工学研究部(理工学域), 教授 (40164777)

Co-Investigator(Kenkyū-buntansha) 四柳 浩之  徳島大学, 大学院社会産業理工学研究部(理工学域), 准教授 (90304550)
横山 洋之  秋田大学, 情報統括センター, 准教授 (80250900)
多田 哲生  徳島文理大学, 理工学部, 教授 (40368832)
Project Period (FY) 2017-04-01 – 2021-03-31
Project Status Completed (Fiscal Year 2021)
Budget Amount *help
¥16,900,000 (Direct Cost: ¥13,000,000、Indirect Cost: ¥3,900,000)
Fiscal Year 2020: ¥6,890,000 (Direct Cost: ¥5,300,000、Indirect Cost: ¥1,590,000)
Fiscal Year 2019: ¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
Fiscal Year 2018: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2017: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Keywords電気検査法 / 断線 / 電流テスト / 3次元積層IC / アセンブリ基板 / インターコネクトテスト / 実装基板回路 / 欠陥検出法 / 電気的検査法 / 計算機システム / ディペンダブル・コンピューティング / 電子デバイス・機器 / 予兆検出 / 抵抗断線 / 破断検出
Outline of Final Research Achievements

We have developed an interconnect test method and a test circuit to detect open defects between ICs and printed circuit boards. The test method is based on oscillation frequency of a relaxation oscillator embedded inside ICs. When an interconnect is tested, a supply current is made flow through it and the oscillator begins to oscillate. When a defect occurs at the interconnect, the oscillation frequency becomes smaller than the defect-free one. Also, we have developed an interconnect test method based on the quiescent supply current and a test circuit for the tests. We reveals that interconnects between dies in 3D stacked ICs are tested in both production tests and field ones by the test methods. Furthermore, we have proposed a recovery method by which defective interconnects are replaced to redundant ones after 3D stacked IC tests. It is expected that high reliability of electronic equipment is realized by the test methods and the recovery one.

Academic Significance and Societal Importance of the Research Achievements

電子機器の小型化要求により、狭ピッチICを用いた実装基板回路やICチップを積層して作る3次元積層ICが作られるようになってきた。その回路ではICチップ間に発生した断線の発見がその回路を用いた電子機器の信頼性低下を招き問題となっている。特に自動車や電車等、長期に亘って高信頼性が求められる場合にその断線を確実に発見することが求められているが、既存の検査法ではそれが行えない。本研究で開発した検査回路ならびにそれを用いた検査法では破断し信号伝搬できない配線の検出だけでなく、一部破断し信号が伝搬する配線までも検出できる能力を有しており、社会が求める高信頼性の実現への寄与が期待できる。

Report

(5 results)
  • 2021 Final Research Report ( PDF )
  • 2020 Annual Research Report
  • 2019 Annual Research Report
  • 2018 Annual Research Report
  • 2017 Annual Research Report
  • Research Products

    (29 results)

All 2021 2020 2019 2018 2017 Other

All Int'l Joint Research (8 results) Journal Article (7 results) (of which Int'l Joint Research: 7 results,  Peer Reviewed: 7 results,  Open Access: 3 results) Presentation (14 results) (of which Int'l Joint Research: 4 results,  Invited: 1 results)

  • [Int'l Joint Research] NTUST(その他の国・地域(台湾))

    • Related Report
      2020 Annual Research Report
  • [Int'l Joint Research] UTeM(マレーシア)

    • Related Report
      2020 Annual Research Report
  • [Int'l Joint Research] 台湾科技大学(中華民国)

    • Related Report
      2019 Annual Research Report
  • [Int'l Joint Research] マラッカ技術大学(マレーシア)

    • Related Report
      2019 Annual Research Report
  • [Int'l Joint Research] 台湾科技大学(中華民国)

    • Related Report
      2018 Annual Research Report
  • [Int'l Joint Research] フロリダアトランティック大学(米国)

    • Related Report
      2018 Annual Research Report
  • [Int'l Joint Research] マラッカ技術大学(マレーシア)

    • Related Report
      2018 Annual Research Report
  • [Int'l Joint Research] NTUST(Taiwan)

    • Related Report
      2017 Annual Research Report
  • [Journal Article] Open Defect Detection in Assembled Circuit Boards with Built-In Relaxation Oscillators2021

    • Author(s)
      Ikiri Yuki, Fumiya Sako, Hashizume Masaki, Yotsuyanagi Hiroyuki, Shyue-Kung Lu, Toru Yazaki, Yasuhiro Ikeda and Yutaka Uematsu
    • Journal Title

      IEEE Transactions on Components, Packaging and Manufacturing Technology

      Volume: 11 Issue: 6 Pages: 931-943

    • DOI

      10.1109/tcpmt.2021.3079159

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Detectable Resistance Increase of Open Defects in Assembled PCBs by Quiescent Currents through Embedded Diodes2021

    • Author(s)
      Yuya Okumoto, Hiroyuki Yotsuyanagi, Masaki Hashizume and Shyue-Kung Lu
    • Journal Title

      Proc. of 2021 International Conference on Electronics Packaging (ICEP)

      Volume: -

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Temperature Sensing with a Relaxation Oscillator in CMOS ICs2020

    • Author(s)
      Fumiya Sako, Yuki Ikiri, Masaki Hashizume, Hiroyuki Yotsuyanagi, Hiroshi Yokoyama and Shyue-Kung Lu
    • Journal Title

      Proc. of The 35th International Technical Conference on Circuits/Systems, Computers and Communications

      Volume: - Pages: 141-144

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Open Defect Detection Not Utilizing Boundary Scan Flip-Flops in Assembled Circuit Boards2020

    • Author(s)
      Michiya Kanda, Masaki Hashizume, Binti ALI Fara Ashikin, Hiroyuki Yotsuyanagi, Shyue-Kung Lu
    • Journal Title

      IEEE Transactions on Components, Packaging and Manufacturing Technology

      Volume: 10 Issue: 5 Pages: 895-907

    • DOI

      10.1109/tcpmt.2020.2973182

    • Related Report
      2020 Annual Research Report 2019 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Electrical Field Test Method of Resistive Open Defects between Dies by Quiescent Currents through Embedded Diodes2019

    • Author(s)
      Soneda Hanna、Hashizume Masaki、Yotsuyanagi Hiroyuki、Lu Shyue-Kung
    • Journal Title

      Proc. of The IEEE 2019 International 3D Systems Integration Conference

      Volume: 1 Pages: 1-5

    • DOI

      10.1109/3dic48104.2019.9058777

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] A Design for Testability of Open Defects at Interconnects in 3D Stacked ICs2018

    • Author(s)
      ASHIKIN Fara、HASHIZUME Masaki、YOTSUYANAGI Hiroyuki、LU Shyue-Kung、ROTH Zvi
    • Journal Title

      IEICE Transactions on Information and Systems

      Volume: E101.D Issue: 8 Pages: 2053-2063

    • DOI

      10.1587/transinf.2018EDP7093

    • NAID

      130007429462

    • ISSN
      0916-8532, 1745-1361
    • Year and Date
      2018-08-01
    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Stand-by Mode Test Method of Interconnects between Dies in 3D ICs with IEEE 1149.1 Test Circuits2018

    • Author(s)
      Kanda Michiya、Yabui Daisuke、Hashizume Masaki、Yotsuyanagi Hiroyuki、Lu Shyue-Kung
    • Journal Title

      Proc. of IEEE CPMT Symposium Japan 2018

      Volume: 1 Pages: 189-192

    • DOI

      10.1109/icsj.2018.8602560

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Presentation] Recovery of Defective TSVs with A Small Number of Redundant TSVs in 3D Stacked ICs2021

    • Author(s)
      Yuki Ikiri, Masaki Hashizume, Hiroyuki Yotsuyanagi, Hiroshi Yokoyama and Shyue-Kung Lu
    • Organizer
      The 21st IEEE Workshop on RTL and High Level Testing
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 弛緩発振器を用いた組込み型温度センサによる温度推定の可能性2020

    • Author(s)
      硲 文弥, 伊喜利 勇貴, 橋爪 正樹, 四柳 浩之, 横山 洋之, Shyue-Kung Lu
    • Organizer
      電気・電子・情報関係学会四国支部連合大会
    • Related Report
      2020 Annual Research Report
  • [Presentation] アナログ素子で構成する弛緩発振器によるCMOS IC内温度測定2020

    • Author(s)
      大寺 佑都, 硲 文弥, 伊喜利 勇貴, 四柳 浩之, 橋爪 正樹, Shyue-Kung Lu
    • Organizer
      電子情報通信学会ソサイエティ大会
    • Related Report
      2020 Annual Research Report
  • [Presentation] 電流テストによるダイ間断線検出のためのpMOSのオン抵抗値を用いた断線抵抗値の推定2020

    • Author(s)
      奥本 裕也, 曽根田 伴奈, 橋爪 正樹, 四柳 浩之, Shyue-Kung Lu
    • Organizer
      電子情報通信学会ソサイエティ大会
    • Related Report
      2020 Annual Research Report
  • [Presentation] 電気試験法による実装基板内抵抗断線の出荷後検出法2019

    • Author(s)
      曽根田 伴奈, 神田 道也, 四柳 浩之, 橋爪 正樹, Shyue-Kung Lu
    • Organizer
      第29回マイクロエレクトロニクスシンポジウム
    • Related Report
      2019 Annual Research Report
  • [Presentation] バウンダリスキャンテストによる3D IC内ダイ間抵抗断線検出可能性調査2019

    • Author(s)
      池内 康祐, 神田 道也, 四柳 浩之, 橋爪 正樹, Shyue-Kung Lu
    • Organizer
      第29回マイクロエレクトロニクスシンポジウム
    • Related Report
      2019 Annual Research Report
  • [Presentation] バウンダリスキャンテスト回路を用いた待機モード時電気試験を可能にするTAPCの開発2019

    • Author(s)
      池内 康祐, 神田 道也, 平井 智士, 四柳 浩之, 橋爪 正樹
    • Organizer
      第33回エレクトロニクス実装学会春季講演大会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Health Monitoring of Electronic Circuits in IoT Systems2019

    • Author(s)
      Masaki Hashizume
    • Organizer
      The 5-th International Forum on Advanced Technologies
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] リングオシレータを用いた3D IC内ダイ間断線検出のMOS製造ばらつきによる影響2018

    • Author(s)
      宮武 典子, 四柳 浩之, 横山 洋之, 橋爪 正樹, 多田 哲生
    • Organizer
      電気関係学会四国支部連合大会
    • Related Report
      2018 Annual Research Report
  • [Presentation] MOS製造ばらつきに対するダイオード組込型検査用回路を用いた検査法の抵抗断線検出能力2018

    • Author(s)
      曽根田 伴奈, 神田 道也, 橋爪 正樹, 四柳 浩之, Shyue-Kung Lu
    • Organizer
      電気関係学会四国支部連合大会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Oscillation Frequency Estimation of Ring Oscillator for Interconnect Tests in 3D Stacked ICs2018

    • Author(s)
      Miyatake Noriko, Masaki Hashizume, Hiroyuki Yotsuyanagi, Hiroshi Yokoyama and Tetsuo Tada
    • Organizer
      2018 RISP International Workshop on Nonlinear Circuits, Communications
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] リングオシレータを用いた3D IC内ダイ間配線検査法の発振周波数の温度依存性調査2017

    • Author(s)
      宮武 典子, 四柳 浩之, 横山 洋之, 橋爪 正樹, 多田 哲生
    • Organizer
      電気関係学会四国支部連合大会
    • Related Report
      2017 Annual Research Report
  • [Presentation] BC1タイプのバウンダリスキャンテスト回路を用いた実装基板のオンライン配線検査法2017

    • Author(s)
      薮井 大輔, 四柳 浩之, 橋爪 正樹
    • Organizer
      第27回マイクロエレクトロニクスシンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] A Defective Level Monitor of Open Defects in 3D ICs with a Comparator of Offset Cancellation Type2017

    • Author(s)
      Michiya Kanda, Masaki Hashizume, Hiroyuki Yotsuyanagi and Shyue-Kung Lu
    • Organizer
      2017 IEEE Int. Symposium on Defect and Fault Tolerance in VLSI and Nanotechnology Systems
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research

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Published: 2017-04-28   Modified: 2023-01-30  

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