| Budget Amount *help |
¥18,200,000 (Direct Cost: ¥14,000,000、Indirect Cost: ¥4,200,000)
Fiscal Year 2019: ¥5,590,000 (Direct Cost: ¥4,300,000、Indirect Cost: ¥1,290,000)
Fiscal Year 2018: ¥6,240,000 (Direct Cost: ¥4,800,000、Indirect Cost: ¥1,440,000)
Fiscal Year 2017: ¥6,370,000 (Direct Cost: ¥4,900,000、Indirect Cost: ¥1,470,000)
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| Outline of Final Research Achievements |
We developed advanced thermal conduction control in semiconductor thin films and application to thermoelectric devices. Phononic nanostructures are designed and formed in Si thin films on an SOI wafer. We demonstrated directional heat flux and heat focusing for the first time. On the topic of the development of thermoelectric devices, we adopted nanoimprint technology to form phononic nanostructures in 1 cm square area at low-cost and high-through put. The nanostructuring enables lower thermal conductivity, which leads to a higher thermoelectric performance. As the result, we achieved a 10 times enhancement in the power generation density compared with an unpatterned thin film.
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