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Development of basic science and technology for nitride semiconductor optical devices by controlling phonon functions

Research Project

Project/Area Number 17H02772
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Crystal engineering
Research InstitutionChiba University

Principal Investigator

Ishitani Yoshihiro  千葉大学, 大学院工学研究院, 教授 (60291481)

Co-Investigator(Kenkyū-buntansha) 三宅 秀人  三重大学, 地域イノベーション学研究科, 教授 (70209881)
Project Period (FY) 2017-04-01 – 2020-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥17,940,000 (Direct Cost: ¥13,800,000、Indirect Cost: ¥4,140,000)
Fiscal Year 2019: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
Fiscal Year 2018: ¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2017: ¥9,620,000 (Direct Cost: ¥7,400,000、Indirect Cost: ¥2,220,000)
Keywordsフォノン / 励起子ダイダイナミクス / 顕微ラマン分光 / THz輻射 / 縦光学モード / フォノン輸送 / 2波長ラマン分光 / 表面マイクロ構造 / 励起子ダイナミクス / フォノン制御 / 窒化物半導体 / 励起子 / THz波 / フォノン輸送制御 / 励起子輻射 / 局所フォノン場 / フォノン系量子干渉 / PXRモデル / 深い準位 / エネルギー局在 / GaN
Outline of Final Research Achievements

The operating characteristics of optical devices deteriorate owing to temperature rise. It was shown that phonon transport, which is the essence of heat, can be characterized by Raman imaging by simultaneous irradiation of two lasers. In particular, heat transport was found to be blocked by the misfit dislocations located in the vicinity of interface. Although the occupation factor of longitudinal optical (LO) phonon is low, the control of this phonon is the most important factor. It was also found that the increase in residual electrons can suppress the influence of the phonon process to a certain extent. We have observed LO phonon resonant THz-IR radiation from surface metal stripe structures, which indicates that there is a possibility of cooling for LO phonon. These results are thought to be the basis of future phonon transport control and its characterization methods.

Academic Significance and Societal Importance of the Research Achievements

光・電子デバイスの熱制御ではモードを区別したフォノン輸送解析が必要であり,本研究で構築した2波長レーザ同時照射ラマンイメージングは重要な制御対象である縦光学(LO)フォノンを区別した熱輸送評価が可能である。本研究で構築した励起子解析コードは励起空間の全エネルギー収支を取り入れたダイナミクス解析コードで,新たな発光効率解析手法の基盤となる。表面マイクロ構造によるLOフォノン共鳴赤外輻射の観測はフォノンによる新規赤外-THz輻射デバイスの構築の他,LOフォノンに特化した冷却の可能性を示し,デバイス冷却機構の方式に多様性をもたせる。本研究は,デバイスの省エネ化や高機能化の基礎物理開拓に資する。

Report

(4 results)
  • 2019 Annual Research Report   Final Research Report ( PDF )
  • 2018 Annual Research Report
  • 2017 Annual Research Report
  • Research Products

    (92 results)

All 2020 2019 2018 2017 Other

All Int'l Joint Research (1 results) Journal Article (11 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 11 results,  Open Access: 2 results) Presentation (77 results) (of which Int'l Joint Research: 34 results,  Invited: 14 results) Book (1 results) Remarks (2 results)

  • [Int'l Joint Research] Yangon Technological University(ミャンマー)

    • Related Report
      2018 Annual Research Report
  • [Journal Article] Energy transport analysis in a Ga0.84In0.16N/GaN heterostructure using microscopic Raman images employing simultaneous coaxial irradiation of two lasers2020

    • Author(s)
      Shungo Okamoto, Naomichi Saito, Kotaro Ito, Bei Ma, Ken Morita , Daisuke Iida, Kazuhiro Ohkawa, and Yoshihiro Ishitani,
    • Journal Title

      Applied Physics Letters,

      Volume: 116 Issue: 14 Pages: 142107-142107

    • DOI

      10.1063/5.0003491

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Charge transfer processes related to deep levels in free standing n-GaN layer analyzed by above and sub-bandgap energy excitation2020

    • Author(s)
      Daisuke Uehara, Moe Kikuchi, Bei Ma, Hideto Miyake, Yoshihiro Ishitani
    • Journal Title

      Applied Physics Express

      Volume: Undecided

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Temperature and laser energy dependence of the electron g-factor in intrinsic InGaAs/InAlAs multiple quantum wells2019

    • Author(s)
      K. Morita, A. Okumura, H. Takaiwa, I. Takazawa, T. Oda, T. Kitada, M. Kohda, and Y. Ishitani
    • Journal Title

      Applied Physics Letters,

      Volume: 115 Issue: 1 Pages: 012404-012404

    • DOI

      10.1063/1.5100343

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Influence of LO and LA phonon processes on thermal-nonequilibrium excitation and deexcitation dynamics of excitons in GaN, AlN, and ZnO2019

    • Author(s)
      Kensuke Oki and Yoshihiro Ishitani
    • Journal Title

      Journal of Applied Physics

      Volume: 125 Issue: 20 Pages: 205705-205705

    • DOI

      10.1063/1.5092620

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Statistics of excitonic energy states based on phononic-excitonic-radiative model2019

    • Author(s)
      Yoshihiro Ishitani, kensuke Oki, and Hideto Miyake
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 未定 Issue: SC Pages: SCCB34-SCCB34

    • DOI

      10.7567/1347-4065/ab09e2

    • NAID

      210000156204

    • Related Report
      2019 Annual Research Report 2018 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Quantitative evaluation of strain relaxation in annealed sputter-deposited AlN film2019

    • Author(s)
      S. Tanaka, K. Shojiki, K. Uesugi, Y. Hayashi, H. Miyake
    • Journal Title

      Journal of Crystal Growth

      Volume: 512 Pages: 16-19

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of AlN templates on SiC substrates by sputtering-deposition and high-temperature annealing2019

    • Author(s)
      K. Uesugi, Y. Hayashi, K. Shojiki, S. Xiao, K. Nagamatsu, H. Yoshida, H. Miyake
    • Journal Title

      Journal of Crystal Growth

      Volume: 510 Pages: 13-17

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Curvature-controllable and crack-free AlN/sapphire templates fabricated by sputtering and high-temperature annealing2019

    • Author(s)
      Y. Hayashi, K. Tanigawa, K. Uesugi, K. Shojiki, H. Miyake
    • Journal Title

      Journal of Crystal Growth

      Volume: 512 Pages: 131-135

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Selective thermal radiation at the longitudinal optical phonon energy under geometric condition of metal-semiconductor mesa stripe structures2018

    • Author(s)
      Yoshihiro Ishitani, Tomoyuki Aoki, Hidenori Funabashi, and Ken Morita
    • Journal Title

      Applied Physics Letters

      Volume: 113 Issue: 19 Pages: 192105-192105

    • DOI

      10.1063/1.5047458

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electric-dipole absorption resonating with longitudinal optical phonon-plasmon system and its effect on dispersion relations of interface phonon polariton modes in metal/semiconductor-stripe structures2017

    • Author(s)
      Hironori Sakamoto, Eito Takeuchi, Kouki Yoshida, Ken Morita, Bei Ma, and Yoshihiro Ishitani
    • Journal Title

      Journal of Physics D

      Volume: 51

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Population decay and distribution of exciton states analyzed by rate equations based on theoretical phononic and electron-collisional rate coefficients2017

    • Author(s)
      Kensuke Oki, Bei Ma, and Yoshihiro Ishitani
    • Journal Title

      Physical Review B

      Volume: 96 Issue: 20

    • DOI

      10.1103/physrevb.96.205204

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Presentation] 電子‐フォノン相互作用およびフォノン輸送のミクロ評価2020

    • Author(s)
      石谷善博
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Annual Research Report
    • Invited
  • [Presentation] 輻射性励起子減衰寿命の温度依存性への非輻射再結合の影響2020

    • Author(s)
      地﨑 匡哉,大木 健輔,馬ベイ,森田 健,石谷 善博
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] n型間接遷移半導体GaP表面マイクロストライプ構造による中赤外輻射2020

    • Author(s)
      林鴻太朗, 田中大智, 海老澤啓介, 相原 望, 米本拓郎,Hnin Lai Lai Aye, 森田 健, 馬 ベイ, 石谷善博
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Microscopic analysis of heat transport at GaInN/GaN heterointerface with misfit dislocations by two-wavelength Raman measurements2019

    • Author(s)
      Shungo Okamoto, Bei Ma, Ken Morita, Daisuke Iida, Kazuhiro Ohkawa, and Yoshihiro Ishitani
    • Organizer
      The 9th Asia-Pacific Workshop on Widegap Semiconductors
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Longitudinal Optical Phonon Resonating Dipole Radiation from Metal- Semiconductor Composite Structures and Quantum Interference2019

    • Author(s)
      Yoshihiro Ishitani, Keisuke Ebisawa, Daichi Tanaka, Nozomi Aihara, Bei Ma, and Ken Morita
    • Organizer
      IRMMW-THz 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Deep level luminescence of HVPE grown GaN by below-bandgap photo-excitation2019

    • Author(s)
      Daisuke Uehara, Moe Kikuchi, Bei Ma, Ken Morita, Hideto Miyake, and Yoshihiro Ishitan
    • Organizer
      ICNS-13
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Functional metal-GaN micro-stripe structures for infrared and ultraviolet regions2019

    • Author(s)
      Tsubasa Yamakawa, Bojin Lin, Kensuke Oki, Bei Ma, Ken Morita, Yusuke Hayashi, Hideto Miyake, Kazuhiro Ohkawa
    • Organizer
      ICNS-13
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Analysis of highly Si-doped GaN using various lattice vibration modes observed by infrared and Raman spectroscopy2019

    • Author(s)
      Bei Ma, Ming Chuan Tang, Ken Morita, Yoshihiro Ishitani, Kohei Ueno, Atsushi Kobayashi, Hiroshi Fujioka
    • Organizer
      ICNS-13
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Local phonon analysis in InGaN film by mapping of Raman spectroscopy2019

    • Author(s)
      Shungo Okamoto, Naomichi Saito, Bei Ma, Kensuke Oki, and Ken Morita, Kazuhiro Ohkawa, and Yoshihiro Ishitani
    • Organizer
      Compound Semiconductor Week
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Analysis of emission characteristics of deep levels in GaN by direct photo excitation2019

    • Author(s)
      Moe Kikuchi, Daisuke Uehara, Bei Ma, Ken Morita, Hideto Miyake, and Yoshihiro Ishitani
    • Organizer
      Compound Semiconductor Week
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 2LOフォノン-価電子帯間電子遷移系量子干渉の理論解析2019

    • Author(s)
      相原 望,田中大智,馬 ベイ,森田 健,石谷善博
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] GaAs-金属ストライプ構造からのLOフォノン共鳴赤外輻射特性の構造依存性2019

    • Author(s)
      海老澤 啓介,馬 ベイ,森田 健,大木 健輔,石谷 善博
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 2波長ラマン分光を用いたフォノン輸送評価における測定モード依存性2019

    • Author(s)
      岡本 駿吾,伊藤航太郎,馬 ベイ, 森田 健,飯田 大輔, 大川 和宏,石谷 善博
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 価電子帯間遷移-2種LOフォノン系における量子干渉の理論解析2019

    • Author(s)
      原 望,田中大智,森田 健,馬 ベイ,石谷善博
    • Organizer
      第3回フォノンエンジニアリング研究会
    • Related Report
      2019 Annual Research Report
  • [Presentation] GaAs-金属ストライプ構造からのLOフォノン共鳴赤外輻射特性の構造依存性2019

    • Author(s)
      海老澤 啓介,田中 大智,森田 健,馬 ベイ,石谷善博
    • Organizer
      第3回フォノンエンジニアリング研究会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 赤外及びラマン分光法による高密度SiドープGaN薄膜の評価2019

    • Author(s)
      馬ベイ, 湯明川, 上野耕平, 小林篤, 藤岡洋, 石谷善博
    • Organizer
      第11回 ナノ構造・エピタキシャル成長講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] LOフォノン-価電子帯間遷移の量子干渉による結晶評価2019

    • Author(s)
      相原望, 田中大智, 森田健, 馬ベイ, 石谷善博
    • Organizer
      第11回 ナノ構造・エピタキシャル成長講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] GaNの深い準位の直接光励起による発光特性の考察2019

    • Author(s)
      菊地 萌,上原大輔,馬 ベイ, 森田 健,三宅秀人,石谷善博
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 高濃度SiドープGaNの深さ方向結晶性の赤外およびラマン分光評価2019

    • Author(s)
      湯 明川,馬 ベイ, 森田 健,上野耕平,小林 篤,藤岡洋,石谷善博
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] GaN,AlN,ZnOにおける励起子の非熱平衡解析2019

    • Author(s)
      大木 健輔,野町 健太郎,西川 智秀,馬ベイ, 森田 健,石谷 善博
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 小型フーリエ変換赤外分光装置の製作と測定法の確立2019

    • Author(s)
      中山政裕,菅野裕吾,石谷善博,北田貴弘,森田健
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 高温アニールAlN/サファイア上へのAlGaN成長での歪み制御2019

    • Author(s)
      稲森 崇文、鈴木 涼矢、劉 小桐、上杉 謙次郎、正直 花奈子、三宅 秀人
    • Organizer
      第66 回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] ダイヤモンド基板上へのスパッタAlN成膜と高温アニール2019

    • Author(s)
      白土 達也、林 侑介、上杉 謙次郎、正直 花奈子、三宅 秀人
    • Organizer
      第66 回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 深紫外発光素子応用に向けたスパッタ成膜AlNテンプレートの転位密度低2019

    • Author(s)
      上杉 謙次郎、林 侑介、正直 花奈子、永松 謙太郎、三宅 秀人
    • Organizer
      第66 回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] ナノPSS上スパッタ堆積アニールAlN膜を基板に用いたホモエピ成長2019

    • Author(s)
      庭 由季乃、正直 花奈子、上杉 謙次郎、肖 世玉、三宅 秀人
    • Organizer
      第66 回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] スパッタ法と高温アニールによるa面サファイア上c面AlNの作製2019

    • Author(s)
      林 侑介、藤川 海人、上杉 謙次郎、正直 花奈子、三宅 秀人
    • Organizer
      第66 回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 高温アニールしたスパッタ成膜AlNテンプレート上のAlGaN成長2019

    • Author(s)
      上杉 謙次郎、正直 花奈子、林 侑介、三宅 秀人, “
    • Organizer
      第66 回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 窒化物半導体MOVPE成長における欠陥低減技術2019

    • Author(s)
      三宅秀人
    • Organizer
      応用物理学会東海支部基礎セミナー
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] 深紫外LED社会実装に向けた基板作製技術2019

    • Author(s)
      三宅秀人、正直花奈子、林侑介、 肖世玉、上杉謙次郎、永松謙太郎
    • Organizer
      結晶成長の科学と技術第161委員会第109回研究会
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] Interactions of phonon, electron, and photon in nitride semiconductors2018

    • Author(s)
      Yoshihiro Ishitani, Kensuke Oki, Naomichi Saito, Tsubasa Yamakawa, Daisuke Uehara, Shungo Okamoto, Moe Kikuchi, Keisuke Ebisawa, Bojin Lin, Bei Ma, and Ken Morita
    • Organizer
      Intensive Discussion on Growth of Nitride Semiconductors
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Statistics of excitonic energy states based on phonon-exciton-radiation model2018

    • Author(s)
      Yoshihiro Ishitani, Kensuke Oki, Tsubasa Yamakawa, Bojin Lin, Bei Ma, and Ken Morita
    • Organizer
      International Workshop on Nitride Semiconductors
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Optical absorption and emission in THz-mid infrared region of metal-semiconductor composites2018

    • Author(s)
      Yoshihiro Ishitani
    • Organizer
      Nano Science and Technolohy 2018
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Optical properties of metal-semiconductor composites in THz-mid infrared region2018

    • Author(s)
      Yoshihiro Ishitani, Hironori Sakamoto, Tomoyoki Aoki, Hidenori Funabashi, and Ken Morita
    • Organizer
      International Conference on Nanomaterials and Nanotechnology
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Control of THz emission and absorption resonating with LO phonon energy by meal/semiconductor-composite materials2018

    • Author(s)
      Yoshihiro Ishitani
    • Organizer
      International Symposium on Semiconductor Physics
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 赤外分光法によるGaNの高電子密度層の空間分布評価2018

    • Author(s)
      湯明川, 馬ベイ, 森田健, 石谷善博
    • Organizer
      テラヘルツ科学の最先端V
    • Related Report
      2018 Annual Research Report
  • [Presentation] ラマン散乱マッピングによるInGaNの局所フォノン場評価2018

    • Author(s)
      齋藤 直道, 瀧口 佳祐, 馬 ベイ, 森田 健, 飯田 大輔, 大川 和宏, 石谷 善博
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] ワイドギャップ半導体における 励起子-フォノン系の非熱平衡解析2018

    • Author(s)
      大木 健輔, 馬 ベイ, 森田 健, 石谷 善博
    • Organizer
      第2回フォノンエンジニアリング研究会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Plasma activated bonding of 2-inch sputtered AlN wafers2018

    • Author(s)
      Y. Hayashi, H. Miyake
    • Organizer
      MRS Spring Meeting
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of High-Quality AlN on Sapphire for Deep UV LED2018

    • Author(s)
      H. Miyake, S. Xiao, Y. Hayashi, K. Shojiki
    • Organizer
      Taiwan Solid State Lighting
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of High-Quality AlN Template on Sapphire Using High-Temperature Annealing2018

    • Author(s)
      K. Shojiki, X. Liu, S. Kawai, H. Miyake
    • Organizer
      Compound Semiconductor Week
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] haracterization of strain relaxation behavior of annealed sputter deposited AlN films on SiC substrates2018

    • Author(s)
      K. Uesugi, Y. Hayashi, K. Shojiki, S. Xiao, H. Yoshida, H. Miyake
    • Organizer
      ICMOVPE-XIX
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Bowing Control of Sputtered AlN Caused by High Temperature Annealing2018

    • Author(s)
      Y. Hayashi, K. Tanigawa, K. Shojiki, H. Miyake
    • Organizer
      ICMOVPE-XIX
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of High-quality AlN Template by High Temperature Annealing2018

    • Author(s)
      H. Miyake
    • Organizer
      InRel-NPower
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Homoepitaxy of AlN on annealed AlN/sapphire template2018

    • Author(s)
      H. Miyake, K. Shojiki, X. Liu, Y. Hayashi, X. Shiyu, K. Uesugi
    • Organizer
      The 7th International Symposium on Growth of III-Nitrides(ISGN-7)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Crystal quality improvement of sputter-deposited AlN films on SiC substrates by high temperature annealing2018

    • Author(s)
      K. Uesugi, Y. Hayashi, K. Shojiki, S. Xiao, K. Nagamatsu, H. Yoshida, H. Miyake,
    • Organizer
      he 7th International Symposium on Growth of III-Nitrides(ISGN-7)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] “Anisotropic strain in AlN film on sapphire substrate2018

    • Author(s)
      K. Shojiki, K. Uesugi, K. Fujikawa, Y. Hayashi, S. Xiao, H. Miyake
    • Organizer
      IWUMD2018
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Polarity Inversion of AlN by Sputtering Condition Control for DUV-SHG Devices2018

    • Author(s)
      Hayashi, K. Uesugi, K. Shojiki, H. Miyake
    • Organizer
      IWUMD2018
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Preparation of high-quality thick AlN on sputtered and annealed nano-patterned sapphire substrates by hydride vapor-phase epitaxy2018

    • Author(s)
      S. Xiao, N. Jiang, K. Shojiki, K. Uesugi, H. Miyake
    • Organizer
      IWUMD2018
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Crystalline quality improvement and suppression of cracking for sputter-deposited high-temperature annealed AlN films by stress control2018

    • Author(s)
      K. Uesugi1, Y. Hayashi, K. Shojiki, K. Nagamatsu, H. Yoshida, H. Miyake
    • Organizer
      IWUMD2018
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of high-quality AlN template by high-temperature annealing2018

    • Author(s)
      H. Miyake, K. Shojiki, Y. Hayashi, X. Shiyu, K. Uesugi, K. Nagamatsu
    • Organizer
      Japanese-Polish Workshop on Crystal Science
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] High-temperature annealing of sputter-deposited AlN films on sapphire2018

    • Author(s)
      H. Miyake, K. Shojiki, Y. Hayashi, S. Xiao, K. Uesugi, K. Nagamatsu
    • Organizer
      International Workshop on UV Materials and Devices
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Preparation of high-quality thick AlN layer on sputtered and annealed nano-patterned sapphire substrates by hydride vapor-phase epitaxy2018

    • Author(s)
      . Xiao, N. Jiang, K. Shojiki, K. Uesugi, H. Miyake
    • Organizer
      International Workshop on UV Materials and Devices
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Reduction of threading dislocation density and suppression of cracking for sputter-deposited high-temperature annealed AlN films2018

    • Author(s)
      . Uesugi, Y. Hayashi, K. Shojiki, K. Nagamatsu, H. Yoshida, H. Miyake
    • Organizer
      International Workshop on UV Materials and Devices
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 『AlNテンプレート高品質化の進展』~深紫外LED実用化の鍵となる基板作製技術~2018

    • Author(s)
      宅秀人・正直花奈子・林侑介・肖世玉・上杉謙次郎・永松謙太郎
    • Organizer
      学振第162委員会 第110回研究会・特別公開シンポジウム
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] 高温アニールしたAlNのクラック抑制と高品質化2018

    • Author(s)
      上杉 謙次郎、林 侑介、正直 花奈子、永松 謙太郎、吉田 治正、三宅 秀人
    • Organizer
      第79回応用物理学会秋季学術講演会シンポジウム
    • Related Report
      2018 Annual Research Report
  • [Presentation] 歪緩和による深紫外LEDの発光効率改善2018

    • Author(s)
      永松 謙太郎、上杉 謙次郎、三宅 秀人、吉田 治正
    • Organizer
      第79回応用物理学会秋季学術講演会シンポジウム
    • Related Report
      2018 Annual Research Report
  • [Presentation] スパッタ法AlN膜の高温アニールとその基板上へのAlGaN深紫外LED作製2018

    • Author(s)
      永松 謙太郎、上杉 謙次郎、正直 花奈子、吉田 治正、三宅 秀人
    • Organizer
      第79回応用物理学会秋季学術講演会シンポジウム
    • Related Report
      2018 Annual Research Report
  • [Presentation] スパッタ法AlN膜の高温アニールとその基盤上へのAlGaN深紫外LED作製2018

    • Author(s)
      永松謙太郎・上杉謙次郎・正直花奈子・吉田治正・三宅秀人
    • Organizer
      第79回応用物理学会秋季学術講演会シンポジウム
    • Related Report
      2018 Annual Research Report
  • [Presentation] スパッタ条件制御による-c/+c 極性反転AlN 構造の作製2018

    • Author(s)
      林 侑介、上杉 謙次郎、正直 花奈子、三宅 秀人
    • Organizer
      第79回応用物理学会秋季学術講演会シンポジウム
    • Related Report
      2018 Annual Research Report
  • [Presentation] 深紫外LED実用化の鍵となる基板作製技術2018

    • Author(s)
      三宅秀人、正直花奈子、林侑介、肖世玉、上杉謙次郎、永松謙太郎
    • Organizer
      電子情報通信学会ソサイエティ大会
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] 6H-SiC基板上におけるAlN周期構造の作製と評価2018

    • Author(s)
      上杉 謙次郎, 正直 花奈子, 林 侑介, 肖 世玉, 永松 謙太郎, 吉田 治正, 三宅 秀人
    • Organizer
      第10回ナノ構造・エピタキシャル成長講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Optical absorption and emission inTHz-mid infrared region of metal-semiconductor composites2018

    • Author(s)
      Yoshihiro Ishitani
    • Organizer
      Nano ST 2018
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Statistics of excitonic energy states based on phonon-exciton-radiation model2018

    • Author(s)
      Yoshihiro Ishitani
    • Organizer
      International Workshop on Nitride Semiconductors
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] GaN,AlN,ZnOにおける励起子の非熱平衡解析2018

    • Author(s)
      大木 健輔、野町 健太郎、西川 智秀、馬 ベイ、森田 健、石谷 善博
    • Organizer
      65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] フォノンプロセスを考慮した励起子ダイナミクス解析(PXRモデル)2018

    • Author(s)
      石谷 善博、大木 健輔、野町 健太郎、馬 ベイ、森田 健
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 半導体/金属ストライプ構造における電気双極子形成に伴う誘電関数変化2018

    • Author(s)
      坂本 裕則、馬 ベイ、森田 健、石谷 善博
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] GaAs/Auストライプ構造を用いたLOフォノン共鳴の赤外光輻射2018

    • Author(s)
      青木 伴晋、花田 昂樹、坂本 裕則、馬ベイ、森田 健、石谷 善博
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] ワイドギャップ半導体キャリア・フォノンダイナミクス2018

    • Author(s)
      石谷善博,大木健輔,野町健太郎,馬ベイ,森田健
    • Organizer
      第13回励起ナノプロセス研究会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] Introduction of biexciton processes into exciton dynamics simulation for GaN based on the phononic-excitonic-radiative model2017

    • Author(s)
      Kentaro Nomachi, Ma Bei, Ken Morita, and Yoshihiro Ishitani
    • Organizer
      International Workshop on UV materials and devices (IWUMD) 2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 窒化物半導体における電子‐フォノン相互作用と結晶性2017

    • Author(s)
      石谷善博,坂本裕則,馬ベイ,森田健
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] p型GaNにおける深い準位を介した発光特性の解析2017

    • Author(s)
      庄司凌,上原大侑, 馬ベイ, 森田健, 石谷善博 , 塩島謙次
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] AlN 薄膜を用いたLO フォノン共鳴電気双極子形成および表面ポラリトン伝搬2017

    • Author(s)
      坂本裕則,森田健, 馬ベイ,石谷善博
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] フォノンによるGaN励起子ダイナミクス過程への影響2017

    • Author(s)
      馬ベイ, 石谷善博
    • Organizer
      第9 回ナノ構造・エピタキシャル成長講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] lN/金属ストライプ構造における表面、界面ポラリトンモード観測2017

    • Author(s)
      坂本裕則,馬ベイ,森田健, 石谷善博
    • Organizer
      第9 回ナノ構造・エピタキシャル成長講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Interface phonon polariton propagation and LO phonon-resonant absorption of infrared light in AlN/metal-composites2017

    • Author(s)
      H. Sakamoto Hironori Sakamoto, Bei Ma, Ken Morita and Yoshihiro Ishitani
    • Organizer
      12th International conference on nitride semiconductors
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Theoretical calculation of rate coefficients, densities, and decay time of excitons and free carriers in GaN2017

    • Author(s)
      Kensuke Oki, Kentaro Nomachi, Bei Ma, Ken Morita, and Yoshihiro Ishitani
    • Organizer
      12th International conference on nitride semiconductors
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Simulation of carrier-exciton-phonon energy transportation in GaN2017

    • Author(s)
      Bei Ma and Yoshihiro Ishitani
    • Organizer
      12th International conference on nitride semiconductors
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Book] 2020年度版 薄膜作製応用ハンドブック2020

    • Author(s)
      分担執筆 石谷善博
    • Publisher
      NTS
    • Related Report
      2019 Annual Research Report
  • [Remarks] 千葉大学量子物性デバイス研究室

    • URL

      http://photonics.te.chiba-u.jp/index.html

    • Related Report
      2019 Annual Research Report
  • [Remarks] 量子物性デバイス

    • URL

      http://photonics.te.chiba-u.jp/index.html

    • Related Report
      2017 Annual Research Report

URL: 

Published: 2017-04-28   Modified: 2021-02-19  

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