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Development of energetic cluster ion beam manipulation techniques for highly sensitive imaging secondary ion mass spectrometry

Research Project

Project/Area Number 17H02819
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Quantum beam science
Research InstitutionNational Institute of Advanced Industrial Science and Technology

Principal Investigator

Hirata Kouichi  国立研究開発法人産業技術総合研究所, 計量標準総合センター, 上級主任研究員 (80357855)

Co-Investigator(Kenkyū-buntansha) 山田 圭介  国立研究開発法人量子科学技術研究開発機構, 高崎量子応用研究所 放射線高度利用施設部, 研究員(定常) (10414567)
笹 公和  筑波大学, 数理物質系, 准教授 (20312796)
冨田 成夫  筑波大学, 数理物質系, 准教授 (30375406)
斎藤 勇一  国立研究開発法人量子科学技術研究開発機構, 高崎量子応用研究所 放射線高度利用施設部, 部長(定常) (40360424)
Project Period (FY) 2017-04-01 – 2020-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥17,290,000 (Direct Cost: ¥13,300,000、Indirect Cost: ¥3,990,000)
Fiscal Year 2019: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2018: ¥7,410,000 (Direct Cost: ¥5,700,000、Indirect Cost: ¥1,710,000)
Fiscal Year 2017: ¥8,320,000 (Direct Cost: ¥6,400,000、Indirect Cost: ¥1,920,000)
Keywords2次イオン質量分析 / クラスターイオンビーム / 量子ビーム / 2次イオン / 加速器
Outline of Final Research Achievements

Secondary ion (SI) mass spectrometry using energetic cluster ions (ECIs) as primary ions is one of the promising methods to realize mass spectrometry that can analyze the molecular structure and elemental composition of the target surface in micro area with high sensitivity. In this study, to develop ECI beam manipulation techniques for the mass spectrometry, we carried out the following researches: (1) development of short pulse ECI beams, (2) development of focused ECI beams, (3) characterization of SI emission phenomena induced by ECI impacts, and (4) optimization of ECI beam control. We successfully developed an energetic C60 ion beam with a pulse width of 7 ns and a focused scanning energetic C60 ion beam with a diameter of less than 10 μm. In addition, we experimentally characterized ultrafast phenomenon of SI emission induced by energetic C60 impacts, which is difficult to observe in situ.

Academic Significance and Societal Importance of the Research Achievements

先端機能材料の開発、有機・生体試料分析等の多くの研究開発分野で、微小領域での物質の分子構造や元素の分布を高感度で分析可能な高感度顕微質量分析法が必要とされている。この分析を実現する方法として、高速に加速した多原子イオンを試料に照射し、生成した2次イオンを質量分析する分析法が検討されている。本研究では、この分析を実現するための照射基盤技術の開発を行い、高速フラーレンビームに関して、パルス幅10ns以下の短パルス化とビーム径10μm以下のマイクロビーム化に成功した。さらに微小領域かつ超高速で起こるため直接観察が難しい2次イオンの放出現象の解明も行い、高感度顕微質量分析の実現に大きく近づいた。

Report

(4 results)
  • 2019 Annual Research Report   Final Research Report ( PDF )
  • 2018 Annual Research Report
  • 2017 Annual Research Report
  • Research Products

    (14 results)

All 2020 2019 2018 2017

All Journal Article (3 results) (of which Peer Reviewed: 3 results) Presentation (11 results) (of which Int'l Joint Research: 4 results,  Invited: 2 results)

  • [Journal Article] Experimental characterization of ultrafast phenomena of secondary-ion emission induced by nanoscale energy deposition processes of energetic C60 impacts2020

    • Author(s)
      K. Hirata, K. Yamada, A. Chiba, Y. Hirano, K. Narumi, Y. Saitoh
    • Journal Title

      Journal of Applied Physics

      Volume: In press Issue: 21

    • DOI

      10.1063/5.0006152

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 0.12-0.54 MeV C60 ion impacts on a poly(methyl methacrylate) target: Characterization through emission properties of negative secondary ions2019

    • Author(s)
      K. Hirata, K. Yamada, A. Chiba, Y. Hirano, K. Narumi, Y. Saitoh
    • Journal Title

      Nuclear Instruments and Methods in Physics Research B

      Volume: in press Pages: 161-164

    • DOI

      10.1016/j.nimb.2019.02.001

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development of an electron-attachment-type negative fullerene ion source2018

    • Author(s)
      K. Yamada, A. Chiba, Y. Hirano, Y. Saitoh
    • Journal Title

      AIP Conference Proceedings

      Volume: 2011 Pages: 0500201-0500203

    • DOI

      10.1063/1.5053318

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Presentation] Secondary ion mass spectrometry using sub-MeV ~ MeV large cluster ion beams2019

    • Author(s)
      K. Hirata, K. Yamada, A. Chiba, Y. Hirano, K. Narumi, Y. Saitoh
    • Organizer
      24th International Conference on Ion Beam Analysis (IBA-2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] MeV級クラスターイオン生成技術の開発2019

    • Author(s)
      齋藤勇一, 千葉敦也, 山田圭介, 平野貴美, 鳴海一雅
    • Organizer
      第1回重・クラスターイオンビーム利用による微生物由来高生産性、エネルギー、環境シンポジウム
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] 高感度微小領域分析を目指した高速クラスターイオン照射の高度化2019

    • Author(s)
      平田浩一、山田圭介、斎藤勇一、鳴海一雅、千葉敦也、平野貴美、冨田成夫、笹公和
    • Organizer
      日本物理学会第74回年次大会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 高速クラスター照射における立体構造の効果:透過型二次イオン質量分析法の開発2019

    • Author(s)
      村瀬龍、波間悠紀、平田浩一、千葉敦也、中嶋薫、間嶋拓也、斉藤学、土田秀次
    • Organizer
      日本物理学会第74回年次大会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Highly-sensitive time-of-flight secondary ion mass spectrometry with high energy cluster ion beams2018

    • Author(s)
      K. Hirata, K. Yamada, A. Chiba, Y. Hirano, K. Narumi, Y. Saitoh
    • Organizer
      10th International Symposium on Swift Heavy Ions in Matter & 28th International Conference on Atomic Collisions in Solids (SHIM-ICACS 2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] タンデム・静電加速器を用いた先端研究の現状と将来展望‐第30回「タンデム加速器及びその周辺技術の研究会」を記念して‐2017

    • Author(s)
      笹 公和
    • Organizer
      第30回「タンデム加速器及びその周辺技術の研究会」
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] Performance of the 6 MV multi-nuclide AMS system at the University of Tsukuba2017

    • Author(s)
      K. Sasa, T. Takahashi, T. Matsunaka, S. Hosoya, M. Matsumura, S. Hangtao, M. Honda, A. Sakaguchi, K. Sueki, M. Stodola, M. Sundquist
    • Organizer
      The Fourteenth International AMS Conference
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 量研高崎におけるC60負イオン源の開発状況2017

    • Author(s)
      山田圭介
    • Organizer
      TIA連携プログラム探索推進事業シンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] 高速クラスターイオン照射による固体内電子の応答2017

    • Author(s)
      冨田成夫
    • Organizer
      TIA連携プログラム探索推進事業シンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] Development of an electron attachment type negative fullerene ion source2017

    • Author(s)
      山田圭介、千葉敦也、平野貴美、齋藤勇一
    • Organizer
      17th International Conference on Ion Sources
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 高速クラスターイオン入射による 固体内エネルギー付与過程2017

    • Author(s)
      冨田成夫
    • Organizer
      日本放射線影響学会 第60回大会
    • Related Report
      2017 Annual Research Report

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Published: 2017-04-28   Modified: 2021-02-19  

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