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Developement and application of spatio-time-resolved cathodoluminescence for wide bandgap nanostructures

Research Project

Project/Area Number 17H02907
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Condensed matter physics I
Research InstitutionTohoku University

Principal Investigator

Chichibu Shigefusa  東北大学, 多元物質科学研究所, 教授 (80266907)

Co-Investigator(Kenkyū-buntansha) 小島 一信  東北大学, 多元物質科学研究所, 准教授 (30534250)
Project Period (FY) 2017-04-01 – 2020-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥19,370,000 (Direct Cost: ¥14,900,000、Indirect Cost: ¥4,470,000)
Fiscal Year 2019: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2018: ¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000)
Fiscal Year 2017: ¥9,490,000 (Direct Cost: ¥7,300,000、Indirect Cost: ¥2,190,000)
Keywords時間空間同時分解分光 / フェムト秒電子線 / 電子顕微鏡 / カソードルミネッセンス
Outline of Final Research Achievements

Spatio-time-resolved cathodoluminescence (STRCL), which uses a femtosecond-laser-driven pulsed photoelectron gun instead of the cw electron gun of spatially resolved cathodoluminescence (CL) combined with scanning electron microscopy (SEM), is an attractive tool for probing local luminescence dynamics in quantum structures and nanostructures of wide-bandgap (WBG) semiconductors. As STRCL is based on SEM, multiscale characterization of a structure with high spatial definition is possible, and the use of pulsed electron-beams allows the sub-picosecond excitation of any WBG semiconductor. In this work, we improved the spatial resolution by introducing a high efficiency photoelectron source made of Au and adding a retarding sysytem around the sample stage. Also we improved the sensitivity and temporal resolution of the detection system. Then we characterized WBG semiconductors such as AlN, AlGaN, AlInN, BN, ZnO to clarify their emission mechanisms.

Academic Significance and Societal Importance of the Research Achievements

サブマイクロメートル台の空間分解能とピコ秒台の時間分解能を併せ持ち、かつ光励起が困難な禁制帯幅が広い半導体物質に対しても使用できるSTRCL計測系は、新奇光デバイスを実現するための光物性研究に必須といえる。本研究で構築した、表面敏感にもできるリターディング機構付きSTRCL装置は、AlNやAlGaN混晶、h-BN等の深紫外波長領域で発光する材料やZnOをはじめとするナノ構造等の、微小領域における再結合寿命の計測を可能とする。
本装置を用いた光物性研究によって新奇発光素子用材料の発光機構の理解が進むことが期待される。

Report

(4 results)
  • 2019 Annual Research Report   Final Research Report ( PDF )
  • 2018 Annual Research Report
  • 2017 Annual Research Report
  • Research Products

    (51 results)

All 2020 2019 2018 2017 Other

All Int'l Joint Research (1 results) Journal Article (6 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 6 results,  Open Access: 3 results) Presentation (42 results) (of which Int'l Joint Research: 16 results,  Invited: 20 results) Book (1 results) Remarks (1 results)

  • [Int'l Joint Research] North Carolina State University/Adroit Materials Inc.(米国)

    • Related Report
      2019 Annual Research Report
  • [Journal Article] Spatio-time-resolved cathodoluminescence studies of wide-bandgap group-III nitride semiconductors2020

    • Author(s)
      S. F. Chichibu, Y. Ishikawa, K. Hazu, and K. Furusawa
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 59 (2) Issue: 2 Pages: 0205011-17

    • DOI

      10.7567/1347-4065/ab5ef4

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Internal quantum efficiency of radiation in a bulk CH3NH3PbBr3 perovskite crystal quantified by using the omnidirectional photoluminescence spectroscopy2019

    • Author(s)
      K. Kojima, K. Ikemura, K. Matsumori, Y. Yamada, Y. Kanemitsu, and S. F. Chichibu
    • Journal Title

      APL Materials

      Volume: 7 Issue: 7 Pages: 0711161-6

    • DOI

      10.1063/1.5110652

    • NAID

      120006712292

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] In-plane optical polarization and dynamic properties of the near-band-edge emission of an m-plane freestanding AlN substrate and a homoepitaxial film2019

    • Author(s)
      S. F. Chichibu, K. Kojima, K. Hazu, Y. Ishikawa, K. Furusawa, S. Mita, R. Collazo, Z. Sitar, and A. Uedono
    • Journal Title

      Applied Physics Letters

      Volume: 115 (15) Issue: 15 Pages: 1519031-5

    • DOI

      10.1063/1.5116900

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Carrier localization structure combined with current micropaths in AlGaN quantum wells grown on an AlN template with macrosteps2019

    • Author(s)
      K. Kojima, Y. Nagasawa, A. Hirano, M. Ippommatsu, Y. Honda, H. Amano, I. Akasaki, and S. F. Chichibu
    • Journal Title

      Applied Physics Letters

      Volume: 114 Issue: 1 Pages: 0111021-5

    • DOI

      10.1063/1.5063735

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Nearly temperature-independent ultraviolet light emission intensity of indirect excitons in hexagonal BN microcrystals2018

    • Author(s)
      Chichibu Shigefusa F.、Ishikawa Youichi、Kominami Hiroko、Hara Kazuhiko
    • Journal Title

      Journal of Applied Physics

      Volume: 123 Issue: 6 Pages: 065104-065104

    • DOI

      10.1063/1.5021788

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] The origins and properties of intrinsic nonradiative recombination centers in wide bandgap GaN and AlGaN2018

    • Author(s)
      Chichibu S. F.、Uedono A.、Kojima K.、Ikeda H.、Fujito K.、Takashima S.、Edo M.、Ueno K.、Ishibashi S.
    • Journal Title

      Journal of Applied Physics

      Volume: 123 Issue: 16 Pages: 161413-161413

    • DOI

      10.1063/1.5012994

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Presentation] MOVPE成長m面AlInN/GaNヘテロ構造における特異構造(3)-断面CL-2020

    • Author(s)
      秩父重英,嶋紘平,小島一信
    • Organizer
      2020年春季応用物理学会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 高温アニールしたスパッタAlN上に成長させたAlNの陰極線蛍光評価(1)2020

    • Author(s)
      嶋紘平,中須大蔵,正直花奈子,上杉謙次郎,小島一信,上殿明良,三宅秀人,秩父重英
    • Organizer
      2020年春季応用物理学会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 高温アニールしたスパッタAlN上に成長させたAlNの陰極線蛍光評価(2)2020

    • Author(s)
      中須大蔵,嶋紘平,正直花奈子,上杉謙次郎,小島一信,上殿明良,三宅秀人,秩父重英
    • Organizer
      2020年春季応用物理学会
    • Related Report
      2019 Annual Research Report
  • [Presentation] PVT成長AlN上にHVPE成長させたSi添加AlN基板の陰極線蛍光評価2020

    • Author(s)
      秩父重英,嶋紘平,小島一信,Baxter Moody,三田清二,Ramon Collazo,Zlatko Sitar,熊谷義直,上殿明良
    • Organizer
      2020年春季応用物理学会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Improvement in the luminescence property of hexagonal boron nitride grown by CVD on a c-plane sapphire substrate2019

    • Author(s)
      K.Hara, N. Umehara, K. Shima, K. Kojima, and S. F. Chichibu
    • Organizer
      The 4th International Conference on Physics of 2D Crystals (ICP2C4)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Impact of vacancy complexes on the nonradiative recombination processes in III-N devices2019

    • Author(s)
      S. F. Chichibu, K. Shima, K. Kojima, S. Ishibashi, and A. Uedono
    • Organizer
      The 13th International Conference on Nitride Semiconductors (ICNS-13)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Role of Al-vacancy complexes in AlN and high AlN mole fraction AlGaN alloys2019

    • Author(s)
      S. F. Chichibu, H. Miyake, and A. Uedono
    • Organizer
      th International Workshop on UV Materials and Devices (IWUMD-IV)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Quantification of external quantum efficiency for near-band-edge emission of freestanding h-BN crystals under photo-excitation2019

    • Author(s)
      K. Kojima, K. Watanabe, T. Taniguchi, and S. F. Chichibu
    • Organizer
      Compound Semiconductor Week 2019 (CSW 2019), Spectroscopy & growth of h-BN II
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Photoluminescence studies of sequentially Mg and H ion-implanted GaN with various implantation depths and crystallographic planes2019

    • Author(s)
      K. Shima, H. Iguchi, T. Narita, K. Kataoka, K. Kojima, A. Uedono, and S. F. Chichibu
    • Organizer
      The 13th International Conference on Nitride Semiconductors (ICNS-13)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Time-resolved luminescence studies of indirect excitons in h-BN epitaxial films grown by chemical vapor deposition using carbon-free precursors2019

    • Author(s)
      S. F. Chichibu, N. Umehara, K. Takiguchi, K. Shima, K. Kojima, Y. Ishitani, and K. Hara
    • Organizer
      The 13th International Conference on Nitride Semiconductors (ICNS-13)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 時間空間分解カソードルミネッセンスによるワイドバンドギャップ半導体の所発光ダイナミクス評価2019

    • Author(s)
      秩父重英
    • Organizer
      日本表面真空学会 2019年6月研究例会「電子ビーム技術の新展開」
    • Related Report
      2019 Annual Research Report
    • Invited
  • [Presentation] 窒化物半導体の時間空間分解カソードルミネッセンス評価2019

    • Author(s)
      秩父重英
    • Organizer
      応用物理学会薄膜・表面物理研究会 第47回薄膜・表面物理セミナー 「半導体GaNの基礎と応用」
    • Related Report
      2019 Annual Research Report
    • Invited
  • [Presentation] 全方位フォトルミネセンス(ODPL)法を用いた半導体結晶の光物性評価2019

    • Author(s)
      小島一信,秩父重英
    • Organizer
      ナノテスティング学会「第25回P&A解析研究会」
    • Related Report
      2019 Annual Research Report
    • Invited
  • [Presentation] 気相成長m面自立AlN基板およびホモエピタキシャル層の偏光特性と発光ダイナミクス2019

    • Author(s)
      秩父重英,小島一信,羽豆耕治,石川陽一,古澤健太郎,三田清二,R.Collazo,Z.Sitar,上殿明良
    • Organizer
      2019年秋季応用物理学会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 窒化物半導体特異構造の時間空間分解カソードルミネッセンス評価2019

    • Author(s)
      秩父重英,嶋紘平,小島一信
    • Organizer
      窒化物半導体特異構造の科学-ナノ物性評価技術の進展と物性制御 2019年春季応用物理学会シンポジウム
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] マクロステップを持つc面AlN/サファイアテンプレート上に成長させたAlGaN量子井戸の構造解析(1)2019

    • Author(s)
      小島一信,長澤陽祐,平野光,一本松正道,本田善央,天野浩,赤崎勇,秩父重英,
    • Organizer
      2019年春季応用物理学会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Luminescence spectra of hexagonal BN thin films grown by chemical vapor deposition on a c-plane sapphire substrate2018

    • Author(s)
      S. F. Chichibu, N. Umehara, K. Shima, K. Kojima, and K. Hara
    • Organizer
      The 3rd International Conference on Physics of 2D Crystals (ICP2C3)
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] Current localization structure observed in AlGaN-based deep-ultraviolet light-emitting diodes grown on AlN templates with macrosteps2018

    • Author(s)
      K. Kojima, Y. Nagasawa, A. Hirano, M. Ipponmatsu, Y. Honda, H. Amano, I. Akasaki, and S. F. Chichibu
    • Organizer
      International Workshop on Nitride Semiconductors 2018 (IWN2018)
    • Related Report
      2018 Annual Research Report
  • [Presentation] Luminescence dynamics of indirect excitons in h-BN epitaxial films grown by BCl3-NH3 chemical vapor deposition on a c-plane sapphire substrate2018

    • Author(s)
      S. F. Chichibu, N. Umehara, K. Shima, K. Kojima, and K. Hara
    • Organizer
      International Workshop on Nitride Semiconductors 2018 (IWN2018),
    • Related Report
      2018 Annual Research Report
  • [Presentation] Microscopic structure of boosting IQE for AlGaN-based UV-B (285 nm) LED grown on macrosteps2018

    • Author(s)
      Y. Nagasawa, K. Kojima, A. Hirano, M. Ipponmatsu, Y. Honda, H. Amano, I. Akasaki, and S. F. Chichibu
    • Organizer
      International Workshop on Nitride Semiconductors 2018 (IWN2018)
    • Related Report
      2018 Annual Research Report
  • [Presentation] Luminescence dynamics of indirect excitons in h-BN epitaxial films grown by BCl3-NH3 chemical vapor deposition on a c-plane sappire substrate2018

    • Author(s)
      S. F. Chichibu, N. Umehara, K. Shima, K. Kojima, and K. Hara
    • Organizer
      Materials Research Society, 2018 Fall Meeting
    • Related Report
      2018 Annual Research Report
  • [Presentation] Different nonradiative recombination between on the terraces and macrosteps of uneven QW for 285 nm-LED grown on AlN template with dense macrosteps2018

    • Author(s)
      Y. Nagasawa, K. Kojima, R. Sugie, A. Hirano, M. Ippommatsu, H. Amano, I. Akasaki, and S. F. Chichibu
    • Organizer
      The International Workshop on UV Materials and Devices (IWUMD)
    • Related Report
      2018 Annual Research Report
  • [Presentation] GaN結晶成長技術の進展と発光特性向上の現状2018

    • Author(s)
      秩父重英,上殿明良
    • Organizer
      日本結晶成長学会 ナノ構造エピタキシャル成長分科会, プレIWN2018第10回窒化物半導体結晶成長講演会
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] AlN,AlGaN薄膜および量子井戸の発光特性2018

    • Author(s)
      秩父重英,小島一信,三宅秀人,平松和正,上殿明良,
    • Organizer
      日本学術振興会ワイドギャップ半導体光・電子デバイス第162委員会 第110回研究会・特別公開シンポジウム
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] サファイア基板に気相成長させたh-BN薄膜の発光ダイナミクス2018

    • Author(s)
      秩父重英,嶋紘平,梅原直己,小島一信,原和彦
    • Organizer
      2018年秋季応用物理学会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 280nm帯深紫外AlGaN発光ダイオードを用いた日光下における1.6 Gbps光無線伝送2018

    • Author(s)
      小島一信,吉田悠来,白岩雅輝,淡路祥成,菅野敦史,山本直克,秩父重英
    • Organizer
      2018年秋季応用物理学会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Spatio-time-resolved cathodoluminescence of h-BN microcrystals2018

    • Author(s)
      S. F. Chichibu, Y. Ishikawa, H. Kominami, and K. Hara
    • Organizer
      The Society of Photo-Optical Instrumentation Engineers (SPIE) Photonics West 2018
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Luminescence spectra of hexagonal BN thin films grown by chemical vapor deposition on a c-plane sapphire substrate2018

    • Author(s)
      S. F. Chichibu, N. Umehara, K. Shima, K. Kojima, and K. Hara
    • Organizer
      The 3rd International Conference on Physics of 2D Crystals (ICP2C3)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] MOVPE成長m面AlInN/GaNヘテロ構造における特異構造(1)2018

    • Author(s)
      秩父重英,小島一信
    • Organizer
      2018年春季応用物理学会
    • Related Report
      2017 Annual Research Report
  • [Presentation] サファイア基板に気相成長させた六方晶BN薄膜の発光スペクトル2018

    • Author(s)
      秩父重英,梅原直己,小島一信,原和彦
    • Organizer
      2018年春季応用物理学会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Spatio-time-resolved cathodoluminescence studies on hexagonal BN microcrystals2017

    • Author(s)
      S. F. Chichibu, Y. Ishikawa, Y. Kominami, and K. Hara
    • Organizer
      The 2nd International Conference on Physics of 2D Crystals (ICP2C2)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Origin and properties of intrinsic Shockley-Read-Hall nonradiative recombination centers in GaN2017

    • Author(s)
      S. F. Chichibu, K. Kojima, H. Ikeda, K. Fujito, S. Takashima, M. Edo, K. Ueno, M. Shimizu, T. Takahashi, S. Ishibashi, and A. Uedono
    • Organizer
      29th International Conference on Defects in Semiconductors (ICDS2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Periodic compositional undulation in the m-plane Al1-xInxN epilayers grown by metalorganic vapor phase epitaxy on a GaN substrate2017

    • Author(s)
      S. F. Chichibu and K. Kojima
    • Organizer
      European Materials Research Society, 2017 Fall Meeting
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Optical and defect characteristics of m-plane Al1-xInxN epitaxial nanostructures2017

    • Author(s)
      S. F. Chichibu, K. Kojima, and A. Uedono
    • Organizer
      8th Asia-Pacific Workshop on Widegap Semiconductors (APWS-2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Vacuum-fluorescent-display devices emitting polarized deep-ultraviolet and visible lights using m-plane Al1-xInxN epitaxial nanostructures2017

    • Author(s)
      S. F. Chichibu, K. Kojima, A. Uedono, and Y. Sato
    • Organizer
      11th International Symposium on Semiconductor Light Emitting Devices (ISSLED 2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Consideration of Shockley-Read-Hall nonradiative recombination centers in wide bandgap (Al,Ga)N and ZnO2017

    • Author(s)
      S. F. Chichibu, K. Kojima, K. Shima, A. Uedono, and S. Ishibashi
    • Organizer
      Materials Research Society, 2017 Fall Meeting
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Spatio-Time-Resolved Cathodoluminescence studies of h-BN microcrystals2017

    • Author(s)
      S. F. Chichibu, Y. Ishikawa, Y. Kominami, and K. Hara
    • Organizer
      The 12th International Conference on Nitride Semiconductors (ICNS-12)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Spatio-time-resolved cathodoluminescence studies of hexagonal BN microcrystals2017

    • Author(s)
      S. F. Chichibu, Y. Ishikawa, H. Kominami, and K. Hara
    • Organizer
      International Workshop on UV Materials and Devices (IWUMD) 2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] GaN中の非輻射再結合中心の正体とその特性2017

    • Author(s)
      秩父重英,小島一信,上殿明良
    • Organizer
      応用物理学会結晶工学分科会, 第147回結晶工学分科会研究会「ワイドバンドギャップ半導体デバイス~窒化物・SiCにおける成長・プロセス欠陥の評価と制御~」
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] GaNの低転位密度化・高純度化と主要な非輻射再結合中心2017

    • Author(s)
      秩父重英,上殿明良,嶋紘平,小島一信,石橋章司
    • Organizer
      応用物理学会 先進パワー半導体分科会 第3回個別討論会 「GaN縦型パワーデバイスのドリフト層成長技術」
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] 六方晶BN微結晶の発光ダイナミクス評価(3)2017

    • Author(s)
      秩父重英,石川陽一,小南裕子,原和彦
    • Organizer
      2017年秋季応用物理学会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 六方晶BN微結晶の発光ダイナミクス評価(4)2017

    • Author(s)
      秩父重英,石川陽一,小南裕子,原和彦
    • Organizer
      2017年秋季応用物理学会
    • Related Report
      2017 Annual Research Report
  • [Book] 2020版 薄膜作製応用ハンドブック2020

    • Author(s)
      秩父重英
    • Total Pages
      14
    • Publisher
      (株)エヌ・ティー・エス
    • ISBN
      9784860436315
    • Related Report
      2019 Annual Research Report
  • [Remarks] 研究内容紹介

    • URL

      http://www2.tagen.tohoku.ac.jp/lab/chichibu/html/research.html

    • Related Report
      2019 Annual Research Report

URL: 

Published: 2017-04-28   Modified: 2021-02-19  

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