Ultraprecision forming of hybrid Fresnel lenses using infrared-transparent polymer and single-crystal silicon

• Project/Area Number: 17H03159
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Production engineering/Processing studies
• Research Institution: Keio University
• Principal Investigator: YAN JIWANG 慶應義塾大学, 理工学部(矢上), 教授 (40323042)
• Project Period (FY): 2017-04-01 – 2020-03-31
• Project Status: Completed (Fiscal Year 2019)
• Budget Amount: ¥18,330,000 (Direct Cost: ¥14,100,000、Indirect Cost: ¥4,230,000); Fiscal Year 2019: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000); Fiscal Year 2018: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000); Fiscal Year 2017: ¥13,520,000 (Direct Cost: ¥10,400,000、Indirect Cost: ¥3,120,000)
• Keywords: プレス成形 / フレネルレンズ / 赤外線素子 / 光学部品 / 複合レンズ / 超精密切削 / マイクロ加工 / 超精密加工 / 赤外線光学部品 / 樹脂 / 微細加工 / 単結晶シリコン / レンズ / 赤外線 / シリコン / ポリマ / 赤外線レンズ

Outline of Final Research Achievements

A hybrid structure of single-crystal silicon (Si) and high-density polyethylene (HDPE) was developed for infrared lenses by using precision press molding. A thin HDPE film was used to laminate a silicon wafer and their interface was directly bonded by the silane cross-link. The HDPE film was hot-embossed to form three-dimensional surface microstructures and the silicon wafer provides a high stiffness for the hybrid substrate. The infrared (IR) optical properties of the hybrid substrate were examined and the imaging test result shows that the hybrid substrate was capable to produce practical image quality. These results strongly demonstrate that the developed Si-HDPE hybrid substrate is a promising alternative substrate material for IR lenses. The interface phenomenon between Si and HDPE was investigated and the lens forming mechanisms were analyzed, as well as the optimal forming conditions were explored.

Academic Significance and Societal Importance of the Research Achievements

本研究で提案したHDPE薄肉層による単結晶Siウエハの内包多層構造を用いた厚さ1mm未満の超薄型フレネルレンズの製作は前例のない試みである．特に数十ミクロンスケールの微細形状転写とSi/HDPEの界面接合を一括して実現できた点は大きな成果であると言える．また，単結晶SiとHDPEとの架橋結合における界面現象の解明は加工学へ重要な知見を与えたものであると考えられる．さらに，本研究成果は暗視カメラ，車載ナイトビジョン装置，夜間防犯カメラ，温度センサー，セキュリティー・体温検査，火災検知など幅広い製品への応用が可能であり，ものづくり産業への波及効果も大きい．

Research Products

• [Journal Article] Measurement and compensation of tool contour using white light interferometry for ultra-precision diamond turning of freeform surfaces (2020)
  • Author(s): k. Nagayama, J. Yan
  • Journal Title: Journal of Automation Technology Volume: 14
  • Peer Reviewed / Open Access
• [Journal Article] Study on Infrared Transmittance of Si-Polymer Hybrid Structure Press Molded Using a Coupling Agent (2019)
  • Author(s): H. Ishide, J. Yan
  • Journal Title: International Journal of Automation Technology Volume: 13 Issue: 6 Pages: 817-824
  • DOI: 10.20965/ijat.2019.p0817
  • NAID: 130007742706
  • ISSN: 1881-7629, 1883-8022
  • Year and Date: 2019-11-05
  • Peer Reviewed / Open Access
• [Journal Article] Manufacturing technologies toward extreme precision (2019)
  • Author(s): Z. Zhang, J Yan, T. Kuriyagawa
  • Journal Title: International Journal of Extreme Manufacturing Volume: 1 Issue: 2 Pages: 022001-022001
  • DOI: 10.1088/2631-7990/ab1ff1
  • Peer Reviewed / Open Access
• [Journal Article] フッ化物ガラスの超精密切削 - 仕上げ面生成と工具損傷の基礎検討 (2018)
  • Author(s): 石塚 潤，長澤圭祐，三神政之，閻 紀旺
  • Journal Title: 砥粒加工学会誌 Volume: 62 Pages: 88-93
  • NAID: 130007429833
  • Peer Reviewed
• [Journal Article] スローツールサーボを用いた硬脆材料の自由曲面切削 (2017)
  • Author(s): 閻 紀旺
  • Journal Title: 機械技術 Volume: 65 Pages: 72-75
  • NAID: 40021320594
• [Journal Article] Fabrication of Hexagonal Microlens Arrays on Single-Crystal Silicon Using the Tool-Servo Driven Segment Turning Method (2017)
  • Author(s): Mukaida Mao, Yan Jiwang
  • Journal Title: Micromachines Volume: 8 Issue: 11 Pages: 323-323
  • DOI: 10.3390/mi8110323
  • Peer Reviewed / Open Access
• [Presentation] 形状誤差予測によるマイクロレンズアレイ加工の高精度化 (2020)
  • Author(s): 佐藤祐亮，閻 紀旺
  • Organizer: 精密工学会第27回学生会員卒業研究発表講演会
• [Presentation] Ultraprecision machining for micro IR optics (2019)
  • Author(s): J. Yan
  • Organizer: The 18th International Manufacturing Conference (IMCC 2019)
  • Int'l Joint Research / Invited
• [Presentation] 白色干渉計を用いたダイヤモンド工具輪郭誤差の計測と補正による 超精密自由曲面切削の実現 (2019)
  • Author(s): 長山晃大，閻 紀旺
  • Organizer: 日本機械学会第 13 回生産加工・工作機械部門講演会
• [Presentation] Towards low-cost mass production of micro IR optics (2019)
  • Author(s): J. Yan
  • Organizer: Workshop on Ultra Precision Manufacturing of Aspheres and Freeforms (UPM 2019)
  • Int'l Joint Research / Invited
• [Presentation] High-precision press molding of hybrid infrared lens substrates by using a new polymer without coupling agent content (2018)
  • Author(s): H. Ishide, J. Yan
  • Organizer: The 17th International Conference on Precision Engineering (ICPE2018)
  • Int'l Joint Research
• [Presentation] 高精度プレス成形による赤外線複合レンズの製作 (2018)
  • Author(s): 石出 響, 閻 紀旺
  • Organizer: 精密工学会第25回学生会員卒業研究発表講演会
• [Presentation] 光学レンズ用PMMAの超精密切削に関する研究 (2018)
  • Author(s): 荒木信乃，閻 紀旺
  • Organizer: 精密工学会第25回学生会員卒業研究発表講演会
• [Presentation] Ultraprecision machining for free-form IR optics (2017)
  • Author(s): Jiwang Yan
  • Organizer: Workshop on Ultra Precision Manufacturing of Aspheres and Freeforms - Imaging and Non-imaging Applications (UPM2017)
  • Int'l Joint Research / Invited
• [Presentation] SiO2を含まない光学ガラスの超精密切削加工 (2017)
  • Author(s): 石塚 潤，長澤圭祐，三神政之，閻 紀旺
  • Organizer: 2017年度砥粒加工学会学術講演会(ABTEC2017)
• [Book] Micro and Nano Fabrication Technology, Chapter 21: Press Molding of Hybrid Fresnel Lenses for Infrared Applications (2018)
  • Author(s): A. R. Abdul Manaf, J. Yan
  • Total Pages: 950
  • Publisher: Springer Nature Singapore Pte Ltd.
  • ISBN: 9789811300974