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Fabrication of filtered arc deposition system with mixed vapor introduction and preparation of highly functional carbon films with high density

Research Project

Project/Area Number 17H03217
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Power engineering/Power conversion/Electric machinery
Research InstitutionToyohashi University of Technology

Principal Investigator

Takikawa Hirofumi  豊橋技術科学大学, 工学(系)研究科(研究院), 教授 (90226952)

Co-Investigator(Kenkyū-buntansha) 清原 修二  舞鶴工業高等専門学校, その他部局等, 准教授 (40299326)
金子 智  地方独立行政法人神奈川県立産業技術総合研究所, 電子技術部, グループリーダー (40426359)
Project Period (FY) 2017-04-01 – 2020-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥18,200,000 (Direct Cost: ¥14,000,000、Indirect Cost: ¥4,200,000)
Fiscal Year 2019: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Fiscal Year 2018: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2017: ¥10,140,000 (Direct Cost: ¥7,800,000、Indirect Cost: ¥2,340,000)
Keywords真空アーク / パルスアーク / 電子ビーム蒸着 / 薄膜コーティング / ダイヤモンドライクカーボン / 機能性薄膜 / 耐熱性 / EB蒸着 / フィルタードアーク蒸着 / ダイヤモンドライクカーボン膜 / 耐熱性向上 / 電子ビーム蒸発 / 高温金型保護膜
Outline of Final Research Achievements

In this study, a filtered arc deposition (FAD) apparatus combined an electron beam (EB) deposition source was designed and developed. Hydrogen-free Si-contained diamond-like carbon (Si-DLC) films with arbitrary Si content were fabricated using the FAD apparatus combined EB deposition source. The fabricated Si-DLC films were expected as a highly heat-resistant film, however the high heat resistance was not obtained because oxygen was mixed in the films. The poor vacuum performance of the apparatus caused the oxygen detection from the films. Thus, the apparatus equipped with a high vacuum environment is expected to contribute to the study of Si-DLC films.

Academic Significance and Societal Importance of the Research Achievements

本研究で開発した装置により,新規DLC膜の開発促進が期待できる。特に,Si-DLCのような高い耐熱性を持つDLC膜の実現は,ガラスレンズのモールド用材料(硝材)の利用範囲を拡大する。高屈折率の硝材が利用できるようになると,レンズの小型化・軽量化が可能となり,映像情報機器端末の高性能化に寄与できる。また,切削回転が高いほど,工具に要求される耐熱温度は高いことから,高回転切削工具用保護膜としても期待される。

Report

(4 results)
  • 2019 Annual Research Report   Final Research Report ( PDF )
  • 2018 Annual Research Report
  • 2017 Annual Research Report
  • Research Products

    (78 results)

All 2019 2018 2017 Other

All Journal Article (8 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 8 results,  Open Access: 5 results) Presentation (68 results) (of which Int'l Joint Research: 23 results,  Invited: 11 results) Book (1 results) Remarks (1 results)

  • [Journal Article] Wear-resistive and electrically conductive nitrogen-containing DLC film consisting of ultra-thin multilayers prepared by using filtered arc deposition2019

    • Author(s)
      T. Harigai, K. Tamekuni, Y. Iijima, S. Degai, T. Tanimoto, Y. Suda, H. Takikawa, S. Kaneko, S. Kunitsugu, H. Habuchi, M. Kamiya, M. Taki, H. Gonda
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 58 Issue: SE Pages: SEED05-SEED05

    • DOI

      10.7567/1347-4065/ab1472

    • NAID

      210000156226

    • Related Report
      2019 Annual Research Report 2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electrical resistivity and mechanical properties of nitrogen-containing diamondlike carbon/tungsten and nitrogen-containing diamondlike carbon/tungsten carbide multilayer films prepared under low substrate temperature2019

    • Author(s)
      Koki Tamekuni, Toru Harigai, Takafumi Toya, Hirofumi Takikawa, Tsuyoshi Tanimoto, Shigeki Takago, Haruyuki Yasui, Satoru Kaneko, Shinsuke Kunitsugu, Masao Kamiya, Makoto Taki, and Hidenobu Gonda
    • Journal Title

      Journal of Vacuum Science & Technology B

      Volume: 38 Issue: 1

    • DOI

      10.1116/1.5129700

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Self-supporting tetrahedral amorphous carbon films consisting of multilayered structure prepared using filtered arc deposition2019

    • Author(s)
      T. Harigai, Y. Miyamoto, M. Yamano, T. Tanimoto, Y. Suda, H. Takikawa, T. Kawano, M. Nishiuchi, H. Sakaki, K. Kondo, S. Kaneko, S. Kunitsugu
    • Journal Title

      Thin Solid Films

      Volume: Vol.675 Pages: 123-127

    • DOI

      10.1016/j.tsf.2019.02.022

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Hydrogen-free fluorinated DLC films with high hardness prepared by using T-shape filtered arc deposition system2018

    • Author(s)
      T. Imai, T. Harigai, T. Tanimoto, R. Isono, Y. Iijima, Y. Suda, H. Takikawa, M. Kamiya, M. Taki, Y. Hasegawa, S. Kaneko, S. Kunitsugu, M. Ito
    • Journal Title

      Vacuum

      Volume: In Press Pages: 1-6

    • DOI

      10.1016/j.vacuum.2018.07.009

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Improvement of adhesion of hydrogen-free DLC film by employing an interlayer of tungsten carbide2018

    • Author(s)
      Isono Ryo、Tanimoto Tsuyoshi、Iijima Yushi、Kusumawan Sholihatta Aziz、Harigai Toru、Suda Yoshiyuki、Takikawa Hirofumi、Kamiya Masao、Kaneko Satoru、Kunitsugu Shinsuke、Taki Makoto
    • Journal Title

      AIP Conference Proceedings

      Volume: 1929 Pages: 020019-020019

    • DOI

      10.1063/1.5021932

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Preparation of multi-layer film consisting of hydrogen-free DLC and nitrogen-containing DLC for conductive hard coating2018

    • Author(s)
      Iijima Yushi、Harigai Toru、Isono Ryo、Degai Satoshi、Tanimoto Tsuyoshi、Suda Yoshiyuki、Takikawa Hirofumi、Yasui Haruyuki、Kaneko Satoru、Kunitsugu Shinsuke、Kamiya Masao、Taki Makoto
    • Journal Title

      AIP Conference Proceedings

      Volume: 1929

    • DOI

      10.1063/1.5021937

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Fabrication of nitrogen-containing diamond-like carbon film by filtered arc deposition as conductive hard-coating film2018

    • Author(s)
      Y. Iijima, T.u Harigai, R. Isono, T. Imai, Y. Suda, H. Takikawa, M. Kamiya, M. Taki, Y. Hasegawa, N. Tsuji, S. Kaneko, S. Kunitsugu, H. Habuchi, S. Kiyohara, M. Ito, S. Yick, A. Bendavid, P. Martin
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 57 Issue: 1S Pages: 01AE07-01AE07

    • DOI

      10.7567/jjap.57.01ae07

    • NAID

      210000148556

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Fabrication of Tungsten Carbide Films by Filtered Pulse Arc Deposition with Cemented Tungsten Carbide Cathodes2017

    • Author(s)
      Isono Ryo、Tanimoto Tsuyoshi、Iijima Yushi、Harigai Toru、Suda Yoshiyuki、Takikawa Hirofumi、Kaneko Satoru
    • Journal Title

      Materials Sciences and Applications

      Volume: 08 Issue: 13 Pages: 966-978

    • DOI

      10.4236/msa.2017.813071

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Presentation] Periodic multilayer film consisted of N-DLC and WC layers prepared by using filtered arc deposition and UBMS2019

    • Author(s)
      K. Tamekuni, T. Harigai, T. Tanimoto, H. Takikawa, S. Takago, H. Yasui, S. Kaneko, S. Kunitsugu, M. Kamiya, M. Taki
    • Organizer
      ISSP2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of diamond-like Carbon films using filtered pulse arc deposition with Si-Contained graphite target2019

    • Author(s)
      T. Toya, T. Harigai, Y. Sugie, T. Tanimoto, H. Takikawa, M. Kamiya, S. Kunitsugu, S. Kaneko, M. Taki
    • Organizer
      ISSP2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Application of Diamond-Like carbon film prepared by filtered arc deposition2019

    • Author(s)
      H. Takikawa, T. Harigai, S. Degai, T. Tanimot, H. Gonda, M. Kamiya, M. Taki, S. Kanek, S. Kunitsugu
    • Organizer
      Conference Book of ISAPS '19
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Preparation of Si-Contained DLC by Co-Deposition of Filtered-Pulse-Arc and Electron-Beam Depositions2019

    • Author(s)
      Y.Sugie, T.Harigai, T.Toya, H.Takikawa, M.kamiya
    • Organizer
      DPS2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Recent Topics of Diamond-Like Carbon Films prepared by Filtered Arc Deposition2019

    • Author(s)
      H. Takikawa
    • Organizer
      IUMRS-ICA 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Application of Diamond-Like Carbon Film Prepared by Filtered Arc Deposition2019

    • Author(s)
      H. Takikawa
    • Organizer
      ISAPS 19
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 真空アーク蒸着におけるパーティクルフリーコーティング技術と応用展開2019

    • Author(s)
      H. Takikawa
    • Organizer
      精密工学会第403回講習会
    • Related Report
      2019 Annual Research Report
    • Invited
  • [Presentation] EB 蒸着源を備えたフィルタードパルスアーク蒸着装置によるSi-DLC 膜の形成2019

    • Author(s)
      杉江侑哉,針谷達,戸谷陽文,滝川浩史,神谷雅男
    • Organizer
      令和元年度 電気・電子・情報関係学会東海支部連合大会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 層厚の異なるN-DLC/WC 積層膜の耐摩耗性2019

    • Author(s)
      爲國公貴,針谷達,戸谷陽文,滝川浩史,鷹合滋樹,安井治之,金子智,國次真輔,神谷雅男,瀧真
    • Organizer
      令和元年度 電気・電子・情報関係学会東海支部連合大会
    • Related Report
      2019 Annual Research Report
  • [Presentation] フィルタードアーク蒸着法で作製した水素フリーおよび水素化DLC膜の特性と分類2019

    • Author(s)
      針谷達,今井貴大,戸谷陽文,滝川浩史,金子智,國次真輔,新部正人,神田一浩,神谷雅男,瀧真
    • Organizer
      第33回ダイヤモンドシンポジウム
    • Related Report
      2019 Annual Research Report
  • [Presentation] Recent topics of preparation and application of diamond-Like Carbon Film2019

    • Author(s)
      H. Takikawa, T. Harigai, T. Tanimoto
    • Organizer
      IAPS Meeting 2019
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Fabrication of Tungsten Carbide Films by Unbalanced Magnetron Sputtering2019

    • Author(s)
      K. Tamekuni, T. Harigai, S. Degai, T. Tanimoto, Y. Suda, H. Takikawa, S. Takago, H. Yasui, S. Kaneko, S. Kunitsugu, M. Kamiya, M. Taki
    • Organizer
      ISPlasma2019
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Removal of Various Diamond-Like Carbon Films by Oxygen Plasma Treatment2019

    • Author(s)
      T. Tanimoto, Y. Kondo, K. Tamekuni, T. Harigai, Y. Suda, H. Takikawa, H. Gonda, Y. Hadano, M. Kamiya
    • Organizer
      ISPlasma2019
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 周期的N-DLC/WC積層構造を持つ導電性耐摩耗膜の作製2019

    • Author(s)
      爲國 公貴, 針谷 達, 出貝 敏, 谷本 壮, 須田 善行, 滝川 浩史, 鷹合 滋樹, 安井 治之, 金子 智, 國次 真輔, 神谷 雅男, 瀧 真
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] フィルタードパルスアーク蒸着法を用いたシリコン含有DLC膜の形成2019

    • Author(s)
      杉江 侑哉, 戸谷 陽文, 谷本 壮, 針谷 達, 須田 善行, 滝川 浩史, 神谷 雅男, 國次 真輔, 金子 智, 瀧 真
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] CFRP加工用切削工具へのDLCコーティング2019

    • Author(s)
      針谷 達,出貝 敏,谷本 壮,須田 善行,滝川 浩史,権田 英修,神谷 雅男,瀧 真
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 超音波液滴室温ナノインプリントによるDLCドットアレイの作製2019

    • Author(s)
      伊藤大洋,清原修二,石川一平,針谷達,谷本壮,滝川浩史,倉島優一
    • Organizer
      平成30年度電気学会関西支部高専卒業研究発表会
    • Related Report
      2018 Annual Research Report
  • [Presentation] New methods for direct growth of graphene on insulator ~ paper, pencil, carbon dioxide ~2018

    • Author(s)
      S. Kaneko, S. Yasuhara, T. Endo, R. Sudo, T. Tokumasu, K. Satoh, M. Kurouchi, M. Yasui, T. Rachi, S. Tanaka, C. Kato, A. Matsuda, M. Yoshimoto,H. Takikawa
    • Organizer
      IUMRS-ICEM2018
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Self-supporting ta-C film consisting of laminated layers prepared using T-shape filtered arc deposition2018

    • Author(s)
      T. Harigai, M. Yamano, Y. Kondo, F. Yoda, S. Degai, T. Tanimoto, Y. Suda, H. Takikawa, M. Nishiuchi, H. Sakaki, K. Kondo, S. Kaneko, S. Kunitsugu
    • Organizer
      IUMRS-ICEM2018
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Tungsten Carbide Film Suitable for Adhesion Improvement of Hydrogen-Free DLC Film_nanimoto2018

    • Author(s)
      T. Tanimoto, R. Isono, Y. Sugie, T. Harigai, Y. Suda, H. Takikawa, M. Kamiya, S. Kaneko, S. Kunitsugu, M. Taki
    • Organizer
      IUMRS-ICEM2018
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Preparation of Conductive Hard Film Consisting of Ultra-Thin N-DLC Multilayers2018

    • Author(s)
      T. Harigai, Y. Iijima, K. Tamekuni, T. Toya, S. Degai, T. Tanimoto, Y. Suda, H. Takikawa, S. Takago, H. Yasui, S. Kaneko, S. Kunitsugu, H. Habuchi, M. Kamiya, M. Taki, and H. Gonda
    • Organizer
      2018 International Symposium on Dry Process
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] UV-PDMSモールド液滴室温リバーサルマイクロコンタクトプリントによるDLCドットアレイの作製2018

    • Author(s)
      伊藤大洋,清原修二,福田京平,石川一平,針谷達,谷本壮,滝川浩史,倉島優一
    • Organizer
      日本高専学会第24回年会講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] ナノテクノロジー教育のためのポータブル室温ナノインプリントシステムの開発2018

    • Author(s)
      Nakul Thanatith,清原修二,伊東成留,石川一平,滝川浩史,倉島優一
    • Organizer
      日本高専学会第24回年会講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 2種類の成膜方法で作製したタングステンカーバイド薄膜の比較2018

    • Author(s)
      谷本壮,磯野凌,杉江侑哉,針谷達,須田善行,滝川浩史,神谷雅男,金子智,國次真輔,瀧真
    • Organizer
      第12回核融合エネルギー連合講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] フィルタードアーク蒸着法を用いて作製したDLC膜の加熱テスト2018

    • Author(s)
      杉江侑哉,谷本壮,爲國公貴,針谷達,須田善行,滝川浩史,國次真輔,神谷雅男,瀧真
    • Organizer
      平成30年度電気・電子・情報関係学会東海支部連合大会
    • Related Report
      2018 Annual Research Report
  • [Presentation] T-FADを用いて形成したDLC保護膜による曲げプレス加工時のショックラインの抑制2018

    • Author(s)
      依田文徳,針谷達,出貝敏,爲國公貴,谷本壮,須田善行,滝川浩史,朝倉義博,鷹合滋樹,安井治之,神谷雅男,瀧真
    • Organizer
      平成30年度電気・電子・情報関係学会東海支部連合大会
    • Related Report
      2018 Annual Research Report
  • [Presentation] フィルタードアーク蒸着法で形成したDLC膜のレーザー損傷観察2018

    • Author(s)
      出貝敏,針谷達,爲國公貴,谷本壮,須田善行,滝川浩史,権田英修,神谷雅男,瀧真
    • Organizer
      平成30年度電気・電子・情報関係学会東海支部連合大会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 窒素含有DLC層とW層とから成る周期的積層膜の機械的・電気的特性2018

    • Author(s)
      爲國公貴,針谷 達,出貝 敏,谷本 壮,須田善行,滝川浩史, 鷹合滋樹,安井治之,金子智,國次真輔,神谷雅男,瀧真
    • Organizer
      平成30年度電気・電子・情報関係学会東海支部連合大会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 酸素プラズマによるDLC膜の除膜と母材への影響2018

    • Author(s)
      近藤勇樹,谷本壮,針谷達,爲國公貴,須田善行,滝川浩史,権田英修,羽田野泰弘,神谷雅男
    • Organizer
      平成30年度電気・電子・情報関係学会東海支部連合大会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Ni めっき材のプレス加工に適したDLC 保護膜の探究2018

    • Author(s)
      依田文徳,針谷達,出貝敏,爲國公貴,谷本壮,須田善行,滝川浩史,朝倉義博,鷹合滋樹,安井治之,新部正人,神田一浩,神谷雅男,瀧 真
    • Organizer
      表面技術協会 第138回講演大会
    • Related Report
      2018 Annual Research Report
  • [Presentation] めっき金属材の曲げプレス加工傷抑制のためのDLC保護膜2018

    • Author(s)
      針谷達,依田文徳,出貝敏,爲國公貴,谷本壮,須田善行,滝川浩史,朝倉義博,鷹合滋樹,安井治之,神谷雅男,瀧真
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 加熱処理によるダイヤモンドライクカーボン膜の構造変化2018

    • Author(s)
      杉江侑哉,谷本壮,爲國公貴,針谷達,須田善行,滝川浩史,角口公章,國次真輔,神谷雅男,瀧真
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 紫外,可視,および近赤外レーザー照射に対するDLC膜の損傷観察2018

    • Author(s)
      出貝敏,針谷達,爲國公貴,谷本壮,須田善行,滝川浩史,権田英修,神谷雅男,瀧真
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 導電性ハードコーティングに向けた周期的N-DLC/金属積層膜の作製2018

    • Author(s)
      爲國公貴,針谷達,出貝敏,谷本壮,須田善行,滝川浩史,安井治之,金子智,國次真輔,神谷雅男,瀧真
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] グラファイト状窒化炭素薄膜の電気伝導特性の観測2018

    • Author(s)
      青山宏明、安田和史、羽渕仁恵、飯田民夫、滝川浩史
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 真空雰囲気下でのグラファイト状窒化炭素薄膜の電気伝導2018

    • Author(s)
      安田和史,青山宏明,羽渕仁恵,滝川浩史
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 低電力電源を用いた酸素プラズマによるDLC膜の除膜2018

    • Author(s)
      谷本壮,近藤勇樹,爲國公貴,針谷達,須田善行,滝川浩史,権田英修,羽田野泰弘,神谷雅男
    • Organizer
      第35回プラズマ・核融合学会 年会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Effect of Substrate Bias for Removal of DLC Film by using Oxygen Plasma2018

    • Author(s)
      Y. Kondo, I. Fujita, T. Tanimoto, F. Yoda, S. Degai, T. Harigai, Y. Suda, H. Takikawa, H. Gonda, Y. Hadano, M. Kamiya
    • Organizer
      ISPlasma2018
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Influence of Substrate Bias of DLC Film prepared by Pulse Arc Jet Plasma2018

    • Author(s)
      T. Tanimoto, I. Fujita, Y. Kondo, T. Harigai, Y. Suda, H. Takikawa, H. Gonda, Y. Hadano, M. Kamiya
    • Organizer
      ISPlasma2018
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] DLC膜の分類,特性,加工具保護膜への応用2018

    • Author(s)
      滝川 浩史
    • Organizer
      第64回生産加工研究会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] UV-PDMSモールドを用いた液滴室温リバーサルマイクロ コンタクトプリントによるDしCドットアレイの作製2018

    • Author(s)
      筒井舜平,清原修二,石川一平, 針谷達,谷本壮,滝川浩史,倉島優一
    • Organizer
      平成29年度高専研究発表会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Niめっき部品の曲げプレス加工用金型に適したDLC保護膜の形成2018

    • Author(s)
      依田文徳,針谷達,出貝敏,谷本壮,須田善行,滝川浩史,朝倉義博,安井治之,神谷雅男,瀧真
    • Organizer
      表面技術協会 第137回講演大会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 低周波および直流放電プラズマを用いたDLC 膜の成膜と除膜2018

    • Author(s)
      谷本 壮,藤田 至,近藤 勇樹,針谷 達,須田 善行,滝川 浩史,権田 英修,羽田野 泰弘,神谷 雅男
    • Organizer
      平成30年電気学会全国大会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 紫外,緑,および近赤外レーザーを用いた水素フリーおよび水素含有DLC膜のラマン分光分析2018

    • Author(s)
      出貝敏,針谷達,谷本壮,須田善行,滝川浩史,権田英修,神谷雅男,瀧真
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 二つの電源で発生させたプラズマを用いたDLC膜の除膜2018

    • Author(s)
      近藤勇樹,谷本壮,針谷達,依田文徳,出貝敏,須田善行,滝川浩史,権田英修,羽田野泰弘,神谷雅男
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Analysis of DLC thin films obtained by XPS spectrum separation2017

    • Author(s)
      K. Yamada, A. Takeda, T. Imai, Y. Iijima, T. Harigai, Y. Suda, H. Takikawa
    • Organizer
      ISSP2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Characterization of tungsten carbide films prepared by filtered pulse arc deposition.2017

    • Author(s)
      R. Isono, T. Harigai, T. Tanimoto, Y. Iijima, Y. Suda, H. Takikawa
    • Organizer
      ISSP2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Dependence of self-heating on DLC film properties in filtered arc deposition system2017

    • Author(s)
      T. Harigai, Y. Fujii, S. Degai, T.Imai, Y. Suda, H. Takikawa, H. Tanoue, M. Kamiya, S. Kaneko, Y. Haruyuki, S. Kunitsugu, M. Kawaguchi, K. Miura
    • Organizer
      ISSP2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Hydrogen-free fluorinated DLC films prepared by filtered arc deposition system2017

    • Author(s)
      T. Tanimoto, T. Imai, T. Harigai, R. Isono, Y. Iijima, Y. Suda, H. Takikawa, M. kamiya, M. Taki, Y. Hasegawa, N. Tusji, S. Kaneko, S. Kunitsugu, M. Ito
    • Organizer
      ISAPS 2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Classification of Hydrogen-Free and Hydrogenated DLC Films Prepared by Filtered Arc Deposition2017

    • Author(s)
      T. Harigai, T. Imai, Y. Suda, H. Takikawa, M. Kamiya, S. Kaneko, S. Kunitsugu, N. Niibe, K. Kanda
    • Organizer
      IUMRS-ICAM 2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Preparation of multilayer film consisted of hydrogen-free DLC and nitrogen-containing DLC for conductive hard coating2017

    • Author(s)
      Y. Iijima, T. Harigai, R. Isono, S. Degai, T. Tanimoto, Y. Suda, H. Takikawa, H. Yasui, S. Kaneko, S. Kunitsugu, M. Kamiya, M. Taki
    • Organizer
      The Irago Conference 2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Improvement of Adhesion of Hydrogen-Free DLC Film by Employing Interlayer of Tungsten Carbide2017

    • Author(s)
      R. Isono, T. Tanimoto, Y. Iijima, S. Aziz, T. Harigai, Y. Suda, H. Takikawa, M. Kamiya, S. Kaneko, S. Kunitsugu, M. Taki
    • Organizer
      The Irago Conference 2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] XPS spectral changes of DLC thin films obtained by argon ion sputtering2017

    • Author(s)
      K. Yamada, T. Imai, Y. Iijima, T. Harigai, Y. Suda, H.Takikawa
    • Organizer
      ALC'17
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] DLC膜の分類と フィルタードアークで作る高品位DLC膜2017

    • Author(s)
      滝川 浩史
    • Organizer
      第 50 回ドライコーティング研究会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] ダイヤモンドライクカーボン膜, その作り方と光学特性他諸特性2017

    • Author(s)
      滝川 浩史
    • Organizer
      2017年度第2回光学薄膜研究会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] DLCの特徴,つくり方,応用2017

    • Author(s)
      滝川 浩史
    • Organizer
      第52回熱処理研究会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] DLC膜の特性,作り方,応用例2017

    • Author(s)
      滝川 浩史
    • Organizer
      第11回マイクロナノ加工研究会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] 液滴室温リバーサマルマイクロコンタクトプリントによるDLCドットアレイの作製2017

    • Author(s)
      吉田圭汰,清原修二,石川一平,筒井舜平,針谷達,谷本壮,滝川浩史
    • Organizer
      精密工学会2017年度関西地方定期学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] ダイヤコート工具へのT-FADを用いたDLC均一成膜とその表面観察2017

    • Author(s)
      出貝敏,飯島佑史,針谷達,谷本壮,須田善行,滝川浩史,権田英修,神谷雅男,瀧真
    • Organizer
      平成29年度電気・電子・情報関係学会 東海支部連合大会
    • Related Report
      2017 Annual Research Report
  • [Presentation] パルスアーク蒸着法におけるタングステンカーバイド薄膜の膜厚制御2017

    • Author(s)
      磯野凌, 谷本壮,飯島佑史,針谷達,須田善行,滝川浩史,神谷雅男,金子智,瀧真
    • Organizer
      平成29年度電気・電子・情報関係学会 東海支部連合大会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 水素フリーDLCと窒素含有DLCとの交互積層膜の作製と耐摩擦摩耗性2017

    • Author(s)
      飯島佑史,磯野凌,出貝敏,針谷達,谷本壮,須田善行,滝川浩史,安井治之,金子智,國次真輔,神谷雅男,瀧真
    • Organizer
      平成29年度電気・電子・情報関係学会 東海支部連合大会
    • Related Report
      2017 Annual Research Report
  • [Presentation] パルスアークジェットにおけるプラズマ様相の基板バイアス依存性2017

    • Author(s)
      藤田 至,近藤 勇樹,谷本 壮,針谷 達,須田善行,滝川 浩史,権田 英修,羽田野 泰弘,神谷 雅男
    • Organizer
      平成29年度電気・電子・情報関係学会 東海支部連合大会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 空気プラズマおよび酸素プラズマを用いたDLC膜の除膜2017

    • Author(s)
      近藤 勇樹,藤田 至,谷本 壮,針谷 達,出貝 敏,須田 善行,滝川 浩 史,権田 英修,羽田野 泰弘,神谷 雅男
    • Organizer
      平成29年度電気・電子・情報関係学会 東海支部連合大会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 積層DLC/N-DLC膜の電気抵抗率および摩擦係数2017

    • Author(s)
      飯島佑史, 磯野 凌, 出貝 敏, 針谷達, 谷本壮, 須田善行, 滝川浩史, 安井治之, 金子智, 國次真輔, 神谷雅男, 瀧真
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] タングステンカーバイド中間層を用いた水素フリーDLC膜の密着性改善2017

    • Author(s)
      磯野凌, 谷本壮, 飯島佑史, 針谷達, 須田善行, 滝川浩史, 神谷雅男, 金子智, 瀧真
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] ダイヤコーティング工具への各種DLC膜のオーバーコート2017

    • Author(s)
      出貝敏,飯島佑史,針谷達,谷本壮,須田善行,滝川浩史,権田英修,神谷雅男,瀧真
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] パルスアークジェットを用いて成膜したDLC膜の基板バイアス依存性2017

    • Author(s)
      藤田至,近藤勇樹,谷本壮,針谷達,須田善行,滝川浩史,権田英修,羽田野泰弘,神谷雅男
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 酸素プラズマを用いたDLC膜の除膜におけるバイアス電圧の影響2017

    • Author(s)
      近藤勇樹,藤田至,谷本壮,針谷達,出貝敏,須田善行,滝川浩史,権田英修,羽田野泰弘,神谷雅男
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Book] 最新 実用真空技術総覧 アークイオンプレーティング2019

    • Author(s)
      滝川浩史 他
    • Total Pages
      1096
    • Publisher
      (株)エヌ・ティー・エス
    • ISBN
      9784860435592
    • Related Report
      2018 Annual Research Report
  • [Remarks] プラズマエネルギーシステム研究室

    • URL

      http://www.pes.ee.tut.ac.jp/

    • Related Report
      2018 Annual Research Report

URL: 

Published: 2017-04-28   Modified: 2021-02-19  

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