• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Development of environmentally friendly Mg2Si IR sensor

Research Project

Project/Area Number 17H03228
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionIbaraki University

Principal Investigator

Udono Haruhiko  茨城大学, 理工学研究科(工学野), 教授 (10282279)

Co-Investigator(Kenkyū-buntansha) 池畑 隆  茨城大学, 理工学研究科(工学野), 教授 (00159641)
板倉 賢  九州大学, 総合理工学研究院, 准教授 (20203078)
塩見 淳一郎  東京大学, 大学院工学系研究科(工学部), 教授 (40451786)
江坂 文孝  国立研究開発法人日本原子力研究開発機構, 安全研究・防災支援部門 安全研究センター, 研究主幹 (40354865)
Project Period (FY) 2017-04-01 – 2020-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥18,200,000 (Direct Cost: ¥14,000,000、Indirect Cost: ¥4,200,000)
Fiscal Year 2019: ¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
Fiscal Year 2018: ¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2017: ¥9,750,000 (Direct Cost: ¥7,500,000、Indirect Cost: ¥2,250,000)
Keywords赤外線センサ / マグネシウムシリサイド / フォトダイオード / pn接合 / Mg2Si / ライフタイム / 分光感度 / OCVD法 / 熱拡散 / 赤外センサ / 単結晶・基板
Outline of Final Research Achievements

Magnesium Silicide, Mg2Si, is attracting much attentions as a novel environment-friendly semiconductor used in the high-sensitive and fast-response short wavelength infrared (SWIR) detector, because its indirect bandgap energy of 0.61 eV corresponds to the cutoff wavelength about 2 um, and abundance of the constituent elements is suitable to mass consumption. In this paper, we report the bulk single crystal growth of Mg2Si, preparation of high purity Mg2Si substrate and development of pn-junction photodiode using the thermal diffusion process. The good photoresponse of the photodiode below 2.1 um confirms the possibility of Mg2Si as an environment-friendly SWIR photodetector.

Academic Significance and Societal Importance of the Research Achievements

短波長赤外域の高感度赤外線センサはIoTや自動車の自動運転用途などで今後最も需要が高まるセンサの一つである。従来の InGaAsやHgCdTeのセンサは希少元素や毒性の高い元素を含むため、資源・環境面から見て数百万~数億個といった大規模市場には適さない。Mg2Siは資源量が豊富な材料で安価であるため、この新規半導体で短波長赤外域の高感度赤外センサを実証できたことは、身近な利用への道を切り拓いたと考える。

Report

(4 results)
  • 2019 Annual Research Report   Final Research Report ( PDF )
  • 2018 Annual Research Report
  • 2017 Annual Research Report
  • Research Products

    (46 results)

All 2020 2019 2018 2017 Other

All Journal Article (8 results) (of which Peer Reviewed: 6 results) Presentation (35 results) (of which Int'l Joint Research: 14 results,  Invited: 2 results) Remarks (3 results)

  • [Journal Article] An environmentally friendly Mg<sub>2</sub>Si pn-junction photodiode2019

    • Author(s)
      鵜殿 治彦
    • Journal Title

      Oyo Buturi

      Volume: 88 Issue: 12 Pages: 797-801

    • DOI

      10.11470/oubutsu.88.12_797

    • NAID

      130007760255

    • ISSN
      0369-8009, 2188-2290
    • Year and Date
      2019-12-10
    • Related Report
      2019 Annual Research Report
  • [Journal Article] Origins of the nitrogen-related deep donor center and its preceding species in nitrogen-doped silicon determined by deep-level transient spectroscopy2019

    • Author(s)
      M. Nakamura, S. Murakami and H. UDONO
    • Journal Title

      Appl. Phys. Express

      Volume: 12 Pages: 021005-021005

    • NAID

      210000135595

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 赤外センサ用Mg2Sn結晶の融液成長2018

    • Author(s)
      鵜殿治彦
    • Journal Title

      日本結晶成長学会誌

      Volume: 45 Pages: 1-7

    • Related Report
      2018 Annual Research Report
  • [Journal Article] Characterization of iron in silicon by low-temperature photoluminescence and deep-level transient spectroscopy2018

    • Author(s)
      Nakamura Minoru、Murakami Susumu、Udono Haruhiko
    • Journal Title

      Journal of Applied Physics

      Volume: 123 Issue: 10 Pages: 105101-105101

    • DOI

      10.1063/1.5019958

    • Related Report
      2018 Annual Research Report 2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Crystal growth of Mg 2 Si for IR-detector2017

    • Author(s)
      Tokairin Toshio、Ikeda Junya、Udono Haruhiko
    • Journal Title

      Journal of Crystal Growth

      Volume: 468 Pages: 761-765

    • DOI

      10.1016/j.jcrysgro.2016.12.004

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Influence of Humidity, Volume Density, and MgO Impurity on Mg2Si Thermoelectric-Leg2017

    • Author(s)
      Y. MITO, A. OGINO, S. KONNO, and H. Udono
    • Journal Title

      J. Electron. Mater.

      Volume: 46 Issue: 5 Pages: 3103-3108

    • DOI

      10.1007/s11664-016-5182-1

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Observation of pn-junction depth in Mg2Si diodes fabricated by short period thermal annealing2017

    • Author(s)
      Onizawa Yuma、Akiyama Tomohiro、Hori Nobuhiko、Esaka Fumitaka、Udono Haruhiko
    • Journal Title

      JJAP Conf. Proc.

      Volume: 5 Pages: 011101-011101

    • DOI

      10.7567/jjapcp.5.011101

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of Mg2Si pn-junction Photodiode with Shallow Mesa-structure and Ring Electrode2017

    • Author(s)
      T. Akiyama, N. Hori, S. Tanigawa, D. Tsuya and H. Udono
    • Journal Title

      JJAP Conf. Proc.

      Volume: 5 Pages: 011102-011102

    • DOI

      10.7567/jjapcp.5.011102

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Presentation] 高分解能X線測定によるMg2Siの結晶性評価2020

    • Author(s)
      鱒渕稜平, 布施雄太郎, 原嘉昭, 鵜殿治彦
    • Organizer
      応用物理学会 2020年春季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] OCVD法によるMg2Si-pn接合ダイオードのライフタイム評価2020

    • Author(s)
      鵜殿治彦,岡田理央,高橋史也
    • Organizer
      応用物理学会 2020年春季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Temperature Dependent Spectral Photosensitivity of Mg2Si pn-junction Photodiodes2019

    • Author(s)
      D.Niioka,F.Takahashi,M.Yoshida,D.Tsuya,H.Udono
    • Organizer
      APAC SILICIDE 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Temperature dependence of lifetime measured in Mg2Si pn-junction photodiodes by OCVD method2019

    • Author(s)
      F. Takahashi, D.Niioka, T. Miyauchi, H. Udono
    • Organizer
      APAC SILICIDE 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Comparison of crystalline quality and electrical property of Mg2Si crystals grown using PBN and PG graphite crucible2019

    • Author(s)
      Y.Fuse,R.Masubuchi,T.Ishikawa,K.Gosyuu,and H.Udono
    • Organizer
      APAC SILICIDE 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Comparison of absorption coefficient of high purity n-type Mg2Si crystal and spectral photosensitivity of Mg2Si pn junction photodiode2019

    • Author(s)
      T. Miyauchi, D. Niioka, F. Takahashi, Y. Onizawa, H. Udono
    • Organizer
      APAC SILICIDE 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] First principle band calculations of Mg2Si thin films2019

    • Author(s)
      M. Takizawa, T. Komine, H. Udono, T. Aono
    • Organizer
      APAC SILICIDE 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Local structures of Sb and Ag in Mg2Si crystals studied by EXAFS analysis2019

    • Author(s)
      M. Kitaura, T. Ina, M. Ishizaki, T. Tanimoto, Y. Fuse, R. Masubuchi, H. Udono ,A. Ohnishi, K. Hara
    • Organizer
      APAC SILICIDE 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Observaition of crystal defects in Mg2Si single crystals by wet-etching technique using dilutied Fluonitric acid2019

    • Author(s)
      R.Masubuchi,Y.Fuse,and H.Udono
    • Organizer
      APAC SILICIDE 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Observation of Magnesium-Induced Crystallization (Mg-MIC) of a-Si Thin Film2019

    • Author(s)
      T. Ikehata, R. Sasajima, M. Saijo, N. Sato, H. Udono
    • Organizer
      APAC SILICIDE 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Effect of Band Alignment on the Photosensitivity of Mg2Si-SWIR Detector2019

    • Author(s)
      D.Niioka,F.Takahashi, M.Yoshida,D.Tsuya,H.Udono
    • Organizer
      2019 MRS Fall Meeting
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Influence of Boron Contamination in Mg2Si Substrate on the Device Performance of Mg2Si SWIR Sensor2019

    • Author(s)
      Y.Fuse,R.Masubuchi, F.Takahashi, H.Udono
    • Organizer
      2019 MRS Fall Meeting
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Spectral photosensitivity and lifetime of Mg2Si photodiodes for SWIR sensor application2019

    • Author(s)
      F. Takahashi, Y. Fuse, T. Miyauchi, H. Udono
    • Organizer
      2019 MRS Fall Meeting
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Mg2Siフォトダイオードのライフタイムと拡散長の温度依存性2019

    • Author(s)
      高橋 史也, 新岡 大介, 宮内 壮流,鵜殿治彦
    • Organizer
      応用物理学会 2019年秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Mg2Si バルク単結晶を用いた吸収係数評価と PD の外部量子効率2019

    • Author(s)
      宮内壮流,高橋史也,新岡大介,鵜殿治彦
    • Organizer
      応用物理学会 2019年秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 溶融成長したMg2Si結晶中のAg濃度と正孔濃度の評価2019

    • Author(s)
      郷州 桂伍、鵜殿 治彦
    • Organizer
      応用物理学会 2019年秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Mg2Siフォトダイオードの分光感度の接合深さ依存性2019

    • Author(s)
      鵜殿治彦,鬼沢雄馬,中野達也
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] ウエットエッチングによるMg2Si結晶欠陥の観察2019

    • Author(s)
      鱒渕稜平,布施雄太郎,鵜殿治彦
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] C-V法によるn型Mg2Si結晶のキャリア濃度測定2019

    • Author(s)
      宮内壮流,新岡大介,高橋史也,鵜殿治彦,渡辺英一郎,津谷大樹
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] その場熱処理によるMg2Si結晶のキャリア濃度の低減2019

    • Author(s)
      郷州桂伍,石川巧真,布施雄太郎,鱒渕稜平,矢口楓子,鵜殿治彦
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] n型Mg2Siの移動度解析2018

    • Author(s)
      矢口楓子,財部健一,鵜殿治彦
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] OCVD法によるMg2Siフォトダイオードのキャリアライフタイム評価2018

    • Author(s)
      高橋史也,新岡大介,鵜殿治彦
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Au/Niリング状電極Mg2Si pn接合ダイオードの作製2018

    • Author(s)
      新岡大介,高橋史也,吉田美沙,津谷大樹,鵜殿治彦
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 垂直ブリッジマン法で成長したMg2Si結晶の小傾角粒界の観察(Ⅱ)2018

    • Author(s)
      布施雄太郎,鱒渕稜平,石川巧真,郷州桂伍,矢口楓子,鵜殿治彦
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Mg2Si結晶への熱処理による電気特性への影響 (II)2018

    • Author(s)
      石川巧真,中野浩平,原嘉昭,鵜殿治彦
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 熱処理したMg2Siのキャリア濃度と赤外吸収の関係(II)2018

    • Author(s)
      矢口 楓子, 中野 浩平, 石川 巧真, 鵜殿 治彦
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] メサ型Mg2Siフォトダイオードの熱拡散温度と電気特性2018

    • Author(s)
      高橋 史也, 中野 達也, 鵜殿 治彦
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Vertical Bridgman Growth of High Purity Mg2Si and Fabrication of IR Detector2017

    • Author(s)
      Haruhiko Udono
    • Organizer
      The 12th Pacific Rim Conference on Ceramic and Glass Technology
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] シリサイドバルク結晶成長の基礎と最近のトピックス2017

    • Author(s)
      鵜殿治彦
    • Organizer
      第17回シリサイド系半導体・夏の学校
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] Electrical characterization of annealed Mg2Si bulk single crystals2017

    • Author(s)
      Kohei Nakano, Fuko Yaguchi, and Haruhiko Udono
    • Organizer
      29th International Conference on Defects in Semiconductors
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] IR absorption depending on electron density of n-type Mg2Si crystals2017

    • Author(s)
      Fuko Yaguchi, Kohei Nakano, and Haruhiko Udono
    • Organizer
      29th International Conference on Defects in Semiconductors
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] メッシュ型電極を持つMg2Si pn接合フォトダイオードの作製2017

    • Author(s)
      鬼沢 雄馬、中野 達也、吉田 美沙、津谷 大樹、鵜殿 治彦
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 熱処理したMg2Si結晶のキャリア濃度と赤外吸収の関係2017

    • Author(s)
      矢口 楓子、中野 浩平、鵜殿 治彦
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] リング状電極をもつMg2Si pn接合フォトダイオードの分光感度特性2017

    • Author(s)
      鬼沢 雄馬、秋山 智洋、中野 達也、津谷 大樹、鵜殿 治彦
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] マグネシウム誘起結晶化による多結晶シリコン薄膜の低温合成2017

    • Author(s)
      南亮輔,笹島良太,鵜殿治彦,佐藤直幸,池畑隆
    • Organizer
      平成29年度 電気学会東京支部茨城支所研究発表会
    • Related Report
      2017 Annual Research Report
  • [Remarks] 半導体研究室web

    • URL

      http://www.ee.ibaraki.ac.jp/hanken/HankenLab/index.html

    • Related Report
      2019 Annual Research Report
  • [Remarks] 半導体研究室web

    • URL

      http://www.ee.ibaraki.ac.jp/hanken/

    • Related Report
      2018 Annual Research Report
  • [Remarks] 茨城大学半導体研究室ホームページ

    • URL

      http://www.ee.ibaraki.ac.jp/hanken/HankenLab/index.html

    • Related Report
      2017 Annual Research Report

URL: 

Published: 2017-04-28   Modified: 2022-01-27  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi