| Budget Amount *help |
¥18,070,000 (Direct Cost: ¥13,900,000、Indirect Cost: ¥4,170,000)
Fiscal Year 2019: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Fiscal Year 2018: ¥6,240,000 (Direct Cost: ¥4,800,000、Indirect Cost: ¥1,440,000)
Fiscal Year 2017: ¥9,490,000 (Direct Cost: ¥7,300,000、Indirect Cost: ¥2,190,000)
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| Outline of Final Research Achievements |
In this study, we have developed a suspended graphene-based MEMS (Micro Electro Mechanical Systems) sensor for ultra-sensitive detection of biomolecules and chemical substances. We developed a low pressure dry transfer technique of CVD (Chemical Vapor Deposition) graphene onto a silicon substrate with cavities, enabling receptor modification on the suspended graphene with the sealed cavity by wet treatment. As a result, we demonstrated selective molecular detection for the first time on the suspended graphene, achieving a concentration detection limit of 150 zM and mass detection limit of 2.01 zg/Hz.
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