A graphene resonator by low-pressure dry transfer technique for highly sensitive chemical sensor
| Project/Area Number |
17H03251
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Electron device/Electronic equipment
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| Research Institution | Toyohashi University of Technology |
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Principal Investigator |
TAKAHASHI Kazuhiro 豊橋技術科学大学, 工学(系)研究科(研究院), 准教授 (90549346)
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| Project Period (FY) |
2017-04-01 – 2020-03-31
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| Project Status |
Completed (Fiscal Year 2019)
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| Budget Amount *help |
¥18,070,000 (Direct Cost: ¥13,900,000、Indirect Cost: ¥4,170,000)
Fiscal Year 2019: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Fiscal Year 2018: ¥6,240,000 (Direct Cost: ¥4,800,000、Indirect Cost: ¥1,440,000)
Fiscal Year 2017: ¥9,490,000 (Direct Cost: ¥7,300,000、Indirect Cost: ¥2,190,000)
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| Keywords | グラフェン / 転写技術 / MEMS共振器 / 化学センサ / MEMS |
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| Outline of Final Research Achievements |
In this study, we have developed a suspended graphene-based MEMS (Micro Electro Mechanical Systems) sensor for ultra-sensitive detection of biomolecules and chemical substances. We developed a low pressure dry transfer technique of CVD (Chemical Vapor Deposition) graphene onto a silicon substrate with cavities, enabling receptor modification on the suspended graphene with the sealed cavity by wet treatment. As a result, we demonstrated selective molecular detection for the first time on the suspended graphene, achieving a concentration detection limit of 150 zM and mass detection limit of 2.01 zg/Hz.
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| Academic Significance and Societal Importance of the Research Achievements |
提案するMEMS型のセンサは、従来の標識法を用いた分子検出技術とは異なり、分子サイズの大きいバイオマーカーを複数種類並列処理を行うことができ、濃度検出下限も従来技術を1桁上回る特性が得られた。また、吸着分子量を定量するための質量測定を行い、質量検出下限は従来比200倍を達成した。さらに、小型で携帯可能なセンサシステムを目指し、半導体チップ上での検出に向けて、CMOS検出回路との一体化の見通しが得られた。
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Report
(4 results)
Research Products
(19 results)
