Development of laser probe system for RF acoustic vibration with absolute amplitude measurement function and its application to ultrasonic miscroscopy

• Project/Area Number: 17H03273
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Measurement engineering
• Research Institution: Chiba University
• Principal Investigator: Hashimoto Ken-ya 千葉大学, 大学院工学研究院, 教授 (90134353)
• Co-Investigator(Kenkyū-buntansha): 大森 達也 千葉大学, 大学院工学研究院, 准教授 (60302527)
• Project Period (FY): 2017-04-01 – 2021-03-31
• Project Status: Completed (Fiscal Year 2020)
• Budget Amount: ¥17,940,000 (Direct Cost: ¥13,800,000、Indirect Cost: ¥4,140,000); Fiscal Year 2020: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000); Fiscal Year 2019: ¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000); Fiscal Year 2018: ¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000); Fiscal Year 2017: ¥7,540,000 (Direct Cost: ¥5,800,000、Indirect Cost: ¥1,740,000)
• Keywords: 弾性表面波 / バルク弾性波 / 光プローブ / サニャック干渉計 / マイケルソン干渉計 / 絶対振幅測定 / 超音波顕微鏡 / 弾性振動 / 絶対振幅計測 / 弾性表面波素子 / バルク弾性波素子 / 弾性振動観測 / 弾性振動可視化装置 / 超音波計測 / レーザプローブ / 弾性波素子

Outline of Final Research Achievements

This project is aimed at installing the Michelson interferometer (MI) to the current laser probe system for radio frequency acoustic wave devices, which employs the Sagnac interferometer (SI). This combination enables to measure absolute vibration amplitude without sacrificing the very-fast and phase-sensitive features of the SI-based laser probe.
The developed system showed excellent linear correlation between MI and SI outputs. This indicates the absolute amplitude can be evaluated by simultaneous measurement of MI and SI for a tiny area and estimation of proportional coefficient from the MI output. Effectiveness of the system was demonstrated by measuring fields in practical SAW devices in the RF range.
In addition, a new detection electronics was developed for expanding dynamic range of the measurement system.

Academic Significance and Societal Importance of the Research Achievements

現在の通信機器には、弾性表面波(SAW)やバルク弾性波(BAW)素子等を利用した高周波(RF)機能素子が多用されている。理論限界に近い性能が得られる現在では、素子の動作と直結した弾性波の伝搬姿態を観測する手段が渇望されている。
本申請者らはRF帯での微小弾性振動を高感度で、しかも２次元的に超高速測定する弾性振動観測装置を開発している。本研究では、この装置に対して振動の振幅絶対値を求める機能を付加し、より一層の高性能・高機能化を目的としている。達成された研究成果は、SAW/BAWデバイス領域に限らず、超音波顕微鏡に代表される超音波イメージング全般への展開が期待される。

Research Products

• [Journal Article] Development of a high-speed, phase-sensitive laser probe system for RF surface acoustic wave/bulk acoustic wave devices with an absolute vibration amplitude measurement function (2021)
  • Author(s): Hikaru Takahashi, Tatsuya Omori, and Ken-ya Hashimoto
  • Journal Title: Japanese Journal of Applied Physics Volume: 60 Issue: SD Pages: SDDC10-SDDC10
  • DOI: 10.35848/1347-4065/abef12
  • Peer Reviewed
• [Journal Article] A detection electronics enabling ultimate suppression of leakage signals in high-speed and phase-sensitive laser probe for radio frequency surface and bulk acoustic wave devices (2021)
  • Author(s): Toru Yaginuma, Tatsuya Omori and Ken-ya Hashimoto
  • Journal Title: Japanese Journal of Applied Physics Volume: 60 Issue: SD Pages: SDDC05-SDDC05
  • DOI: 10.35848/1347-4065/abf092
  • Peer Reviewed
• [Journal Article] Observational and theoretical validation of longitudinal type surface acoustic wave devices (2019)
  • Author(s): T.Kimura, H.Kyoya, H.Okunaga, M.Omura, and K.Hashimoto
  • Journal Title: Japanese Journal of Applied Physics Volume: 7
  • NAID: 210000156750
  • Peer Reviewed
• [Journal Article] Comparative Study of Acoustic Wave Devices Using Thin Piezoelectric Plates in the 3 to 5 GHz Range (2019)
  • Author(s): T.Kimura, M.Omura, Y.Kishimoto, and K.Hashimoto
  • Journal Title: IEEE Trans. Microwave Theory and Techniques Volume: 67 Issue: 3 Pages: 915-921
  • DOI: 10.1109/tmtt.2018.2890661
  • Peer Reviewed
• [Journal Article] Implementation of Frequency Scanning Function in Phase Sensitive Laser Probe System for RF SAW/BAW Devices (2017)
  • Author(s): T.Omori, T.Suzuki and K.Hashimoto
  • Journal Title: Proc. IEEE Ultrason. Symp. Volume: - Pages: 1-4
  • DOI: 10.1109/ultsym.2017.8092793
• [Presentation] 弾性振動測定用Michelson干渉計の安定化に関する一検討 (2021)
  • Author(s): 川井一輝,大森達也,橋本研也
  • Organizer: 圧電材料・デバイスシンポジウム2021
• [Presentation] RF SAW/BAWデバイス用高速・位相感応型レーザプローブに対する絶対振幅測定機能の実装 (2020)
  • Author(s): Hikaru Takahashi, Tatsuya Omori, and Ken-ya Hashimoto
  • Organizer: 超音波エレクトロニクスシンポジウム
• [Presentation] 究極的な漏れ信号抑圧が可能なRF SAW/BAWレーザプローブ用受信回路 (2020)
  • Author(s): Toru Yaginuma, Tatsuya Omori and Ken-ya Hashimoto
  • Organizer: 超音波エレクトロニクスシンポジウム
• [Presentation] 新規弾性振動可視化システムによる絶対振幅測定 (2020)
  • Author(s): 小野直大, 井山明洋, 高橋輝, 高橋輝,大森達也, 橋本研也
  • Organizer: 圧電材料・デバイスシンポジウム2020
• [Presentation] Observational and theoretical validation of longitudinal type surface acoustic wave devices (2018)
  • Author(s): T.Kimura, H.Kyoya, H.Okunaga, M.Omura, and K.Hashimoto
  • Organizer: USE2018
• [Presentation] Comparative Study of Acoustic Wave Devices Using Thin Piezoelectric Plates in the 3 to 5 GHz Range (2018)
  • Author(s): T.Kimura, M.Omura, Y.Kishimoto, and K.Hashimoto
  • Organizer: IEEE International Microwave Conference
  • Int'l Joint Research
• [Presentation] Development of phase-sensitive and fast-scanning laser probe system for RF SAW/BAW devices and its applications (2018)
  • Author(s): T.Omori, and K.Hashimoto
  • Organizer: Seventh Inth Symp. on Acoustic Wave Devices for Future Mobile Comm. Systems
  • Int'l Joint Research / Invited
• [Presentation] Implementation of Frequency Scanning Function in Phase Sensitive Laser Probe System for RF SAW/BAW Devices (2017)
  • Author(s): T.Omori, T.Suzuki and K.Hashimoto
  • Organizer: IEEE Ultrason. Symp.
  • Int'l Joint Research