• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Laser-induced forward transfer of 2-dimensinal structures for high-density nanodevices

Research Project

Project/Area Number 17H03423
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Material processing/Microstructural control engineering
Research InstitutionTohoku University

Principal Investigator

Nakamura Takahiro  東北大学, 多元物質科学研究所, 准教授 (50400429)

Project Period (FY) 2017-04-01 – 2020-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥17,420,000 (Direct Cost: ¥13,400,000、Indirect Cost: ¥4,020,000)
Fiscal Year 2019: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2018: ¥10,790,000 (Direct Cost: ¥8,300,000、Indirect Cost: ¥2,490,000)
Fiscal Year 2017: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Keywordsレーザー誘起前方転写法 / 二次元構造体 / フェムト秒レーザー / 光吸収層 / 光硬化性樹脂 / 光ナノインプリントリソグラフィ / 超短パルスレーザー / マイクロナノ構造 / 薄膜プロセス / めっき / 配線 / パルスレーザー / レーザープロセス / 金属 / ナノ材料 / マイクロ・ナノデバイス / 材料加工・処理 / レーザープロセッシング / ナノ・マイクロ構造
Outline of Final Research Achievements

In this study, we studied direct formation of two-dimensional metal micro- and nanostructures by laser-induced forward transfer (LIFT) using single pulse of a femtosecond laser. Single pulse of a femtosecond laser with a flat-top intensity distribution was exposed to two-dimensional metal structures prepared by laser lithography or nanoimprint lithography on a transparent substrate. According to the research, four following results were obtained; 1. A LAL contributed to reduction of the energy threshold for ablation reaction by single pulse of a femtosecond laser. 2. Two-dimensional metal structures were formed on an acceptor substrate by LIFT. 3. Ablated metals were fused and coalesced then deposited on an acceptor substrate by LIFT. 4. Metal films formed on a UV-imprinted patterns were selectively removed by single pulse of a femtosecond laser.

Academic Significance and Societal Importance of the Research Achievements

本研究では,二次元ナノ構造の作製手法として世界的な広がりを見せているナノインプリントリソグラフィ (NIL) と,任意形状を有する構造体を所定の位置へ配置できる可能性を有するレーザー誘起前方転写法という二つの手法を組み合わせた画期的な直接造形手法である.特にNILによる微細構造作製は既にデバイス応用に展開しつつあることから,本研究を通じて得られる結果は,三次元ナノデバイス作製まで発展する可能性も高く,実用への応用も大いに期待される.

Report

(4 results)
  • 2019 Annual Research Report   Final Research Report ( PDF )
  • 2018 Annual Research Report
  • 2017 Annual Research Report
  • Research Products

    (34 results)

All 2020 2019 2018 2017

All Journal Article (7 results) (of which Peer Reviewed: 7 results,  Open Access: 7 results) Presentation (27 results) (of which Int'l Joint Research: 7 results,  Invited: 5 results)

  • [Journal Article] Sequential infiltration synthesis- and solvent annealing-induced morphological changes in positive-tone e-beam resist patterns evaluated by atomic force microscopy2019

    • Author(s)
      Y. Ozaki, S. Ito, T. Nakamura, M. Nakagawa
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 58 Issue: SD Pages: SDDJ04-SDDJ04

    • DOI

      10.7567/1347-4065/ab0496

    • NAID

      210000155914

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Pulsed Laser Drilling of Engineering Plastic Films to Fabricate Through-Hole Membranes for Print-and-Imprint Method2018

    • Author(s)
      T. Nakamura, K. Seki, K. Nagase, M. Nakagawa
    • Journal Title

      Transactions of the Materials Research Society of Japan

      Volume: 43 Issue: 5 Pages: 289-292

    • DOI

      10.14723/tmrsj.43.289

    • NAID

      130007491265

    • ISSN
      1382-3469, 2188-1650
    • Year and Date
      2018-10-01
    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Development of UV-curable liquid for in-liquid fluorescence alignment in ultraviolet nanoimprint lithography2018

    • Author(s)
      K. Ochiai, E. Kikuchi, Y. Ishito, M. Kumagai, T. Nakamura, M. Nakagawa
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 57 Issue: 6S1 Pages: 06HG02-06HG02

    • DOI

      10.7567/jjap.57.06hg02

    • NAID

      210000149170

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Elemental depth profiles and plasma etching rates of positive-tone electron beam resists after sequential infiltration synthesis of alumina2018

    • Author(s)
      Y. Ozaki, S. Ito, N. Hiroshiba, T. Nakamura, M. Nakagawa
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 57 Issue: 6S1 Pages: 06HG01-06HG01

    • DOI

      10.7567/jjap.57.06hg01

    • NAID

      210000149169

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Visualization of organic/inorganic hybridization of UV-cured films with trimethylaluminum by scanning transmission electron microscopy and energy dispersive x-ray spectroscopy2018

    • Author(s)
      M. Nakagawa, T. Uehara, Y. Ozaki, T. Nakamura, S. Ito
    • Journal Title

      Journal of Vacuum Science & Technology B

      Volume: 36 Issue: 6

    • DOI

      10.1116/1.5047822

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Development of UV-Curable Resins Suitable for Reverse-Tone Lithography for Au Metamaterials Using a Print-and-Imprint Method2018

    • Author(s)
      T. Uehara, S. Sato, S. Ito, H. Yano, T. Nakamura, M. Nakagawa
    • Journal Title

      Bulletin of the Chemical Society of Japan

      Volume: 91 Issue: 2 Pages: 178-186

    • DOI

      10.1246/bcsj.20170280

    • NAID

      130006350304

    • ISSN
      0009-2673, 1348-0634
    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Gold microelectrodes fabricated by a print-and-imprint method using laser-drilled polyimide through-hole masks2017

    • Author(s)
      Takahiro Nakamura, Kento Seki, Kazuro Nagase, Masaru Nakagawa
    • Journal Title

      Journal of Vacuum Science & Technology B

      Volume: 35 Issue: 6

    • DOI

      10.1116/1.4991629

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Presentation] 金属堆積光インプリント樹脂パターンのシングルパルスレーザー現像2020

    • Author(s)
      井澤 優佑, 中村 貴宏, 伊東駿也,中川 勝
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] レーザー誘起前方転写法による二次元Crマイクロ構造の形成2019

    • Author(s)
      井澤 優佑, 中村 貴宏, 中川 勝
    • Organizer
      第47回東北地区高分子若手研究会夏季ゼミナール
    • Related Report
      2019 Annual Research Report
  • [Presentation] Elemental depth profiles of sequential infiltration synthesis-treated resist thin films analyzed by time-of-flight secondary ion mass spectrometry2019

    • Author(s)
      Shunya Ito, Yuki Ozaki, Takahiro Nakamura, Masaru Nakagawa
    • Organizer
      32nd International Microprocesses and Nanotechnology Conference (MNC2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Control of Sub-50 nm Thickness of UV-Cured Thin Films by Print-and-Imprint Method2019

    • Author(s)
      Masaru Nakagawa, Kento Ochiai, Akiko Onuma, Kazue Suto, Takahiro Nakamura, Shunya Ito
    • Organizer
      The 18th International Conference on Nanoimprint and Nanoprint Technologies (NNT2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Laser-Induced Forward Transfer of 1-dimentional Cr Structures by Shaped Femtosecond Laser Pulses2019

    • Author(s)
      Yusuke Isawa, Takahiro Nakamura, Masaru Nakagawa
    • Organizer
      ohoku University's Chemistry Summer School
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Laser-Induced Forward Transfer from Cr Thin Films Depending on Applied Laser Pulses2019

    • Author(s)
      Yusuke Isawa, Takahiro Nakamura, Masaru Nakagawa
    • Organizer
      the 10th International Symposium on Integrated Molecules and Materials Engineering (IMSE)
    • Related Report
      2019 Annual Research Report
  • [Presentation] トリメチルアルミニウムを用いた3種類の化学気相反応法による光硬化レジストの有機-無機ハイブリッド化の膜厚方向の化学組成解析2018

    • Author(s)
      伊東駿也,上原卓也,尾﨑優貴,中村貴宏,中川勝
    • Organizer
      第67回高分子討論会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Print-and-imprint 法におけるレーザー加工孔版印刷での低粘度化2018

    • Author(s)
      中村貴宏,遠藤功望,中川勝
    • Organizer
      第67回高分子討論会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Morphological changes in positive-tone EB resist patterns induced by sequential infiltration synthesis and solvent annealing2018

    • Author(s)
      Yuki Ozaki, Shunya Ito, Takahiro Nakamura, Masaru Nakagawa
    • Organizer
      31st International Microprocesses and Nanotechnology Conference
    • Related Report
      2018 Annual Research Report
  • [Presentation] 6.Surface modification of polyimide laser-drilled screen-printing masks for low-viscosity liquids in print-and-imprint method2018

    • Author(s)
      Takahiro Nakamura, Narumi Endo, and Masaru Nakagawa
    • Organizer
      31st International Microprocesses and Nanotechnology Conference
    • Related Report
      2018 Annual Research Report
  • [Presentation] レーザープロセッシングの新展開-研究予算獲得と異分野領域融合2017

    • Author(s)
      中村貴宏
    • Organizer
      日本セラミックス協会マテリアル・ファブリケーション・デザイン研究会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] 異分野領域融合によるレーザープロセッシングの新展開2017

    • Author(s)
      中村貴宏
    • Organizer
      第2回技術調査専門委員会研究会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] 光ナノインプリントにおける in-liquid 状態での蛍光アライメント2017

    • Author(s)
      中村貴宏, 中川勝
    • Organizer
      次世代リソグラフィ(NGL)ワークショップ2017
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] マクロ技術とナノ技術を融合したprint and imprint法2017

    • Author(s)
      中村貴宏, 中川勝
    • Organizer
      日本セラミックス協会 第30回秋季シンポジウム
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] Print and Imprint法によるマイクロ電極作製に向けた残膜厚均一化の検討2017

    • Author(s)
      関健斗, 中村貴宏, 佐藤慎弥, 熊谷真莉, 永瀬和郎, 中川勝
    • Organizer
      第64回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Print and Imprint法に向けたピコ秒パルスレーザーによる異なるエンジニアリングプラスチックフィルムへの貫通孔の形成加工2017

    • Author(s)
      関健斗, 中村貴宏, 永瀬和郎, 中川勝
    • Organizer
      第64回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] インプリントアライメントに向けた蛍光モアレの観察2017

    • Author(s)
      菊地英里, 石戸洋太, 松原信也, 中村貴宏, 阿部誠之, 中川勝
    • Organizer
      第64回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 円環ビームを用いたレーザー誘起前方転写法によるsub-100 nm構造の直接描画2017

    • Author(s)
      中村貴宏, 大町弘毅, 佐藤俊一
    • Organizer
      日本金属学会2017年春期(第160回)講演大会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 共同研究によるレーザープロセッシングの新展開2017

    • Author(s)
      中村貴宏
    • Organizer
      高分子・ハイブリッド材料研究センター(PHyM)講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] ナノインプリントアライメントにおける蛍光モアレの理論と実測2017

    • Author(s)
      菊地英里, 石戸洋太, 松原信也, 中村貴宏, 阿部誠之, 中川勝
    • Organizer
      高分子・ハイブリッド材料研究センター 2017 PHyMシンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] 光ナノインプリントでの液中蛍光アライメントに向けた蛍光色素の選定2017

    • Author(s)
      落合研斗, 熊谷真莉, 菊地英里, 中村貴宏, 中川勝
    • Organizer
      第66回高分子討論会
    • Related Report
      2017 Annual Research Report
  • [Presentation] スクリーン印刷用孔版の作製のためのエンジニアリングプラスチックフィルムへのパルスレーザー穴あけ加工2017

    • Author(s)
      中村貴宏, 関健斗, 永瀬和郎, 中川勝
    • Organizer
      第27回日本MRS年次大会
    • Related Report
      2017 Annual Research Report
  • [Presentation] レーザー加工孔版印刷におけるポリイミドの表面修飾の効果2017

    • Author(s)
      遠藤功望, 中村貴宏, 中川勝
    • Organizer
      017 年度高分子・ハイブリッド材料研究センター(PHyM)若手フォーラム
    • Related Report
      2017 Annual Research Report
  • [Presentation] Print and Imprint method for Nanoimprint lithography with high-viscosity photo-curable resins2017

    • Author(s)
      Takahiro Nakamura, Masaru Nakagawa
    • Organizer
      2017 International Conference on Electronics Packaging (ICEP2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Fabrication of Polyimide Screen Masks with Through Holes by Laser Drilling for Print and Imprint Method2017

    • Author(s)
      Takahiro Nakamura, Kento Seki, Shinya Sato, Mari Kumagai, Masaru Nakagawa, Kazuro Nagase
    • Organizer
      The 61st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Print and Imprint Method for Fabricating Gold Microelectrodes2017

    • Author(s)
      Takahiro Nakamura, Masaru Nakagawa
    • Organizer
      21st International Symposium on Advanced Display Materials & Devices (ADMD 2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Print and imprint methods using laser-drilled polyimide through-hole masks for fabrication of gold microelectrodes2017

    • Author(s)
      Takahiro Nakamura, Kento Seki, Shinya Sato, Mari Kumagai, Masaru Nakagawa
    • Organizer
      The 16th International Conference on Nanoimprint and Nanoprint Technology (NNT 2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research

URL: 

Published: 2017-04-28   Modified: 2021-02-19  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi